Patent application number | Description | Published |
20090039550 | IMPRINT METHOD AND IMPRINT APPARATUS - An imprint method, includes the steps of: preparing a substrate; placing an uncured resin material on the substrate; preparing a mold having a first end and a second end; placing the mold to oppose the substrate at a position not sandwiching the resin material, wherein a first gap between the first end and the substrate and a second gap between the second end and the substrate are different from each other; imparting a relative movement between the substrate and the mold so that the resin material approaches the first end of the mold and enters through the first gap and fills at least a part of a space between the mold and the substrate; and changing at least one of the first and second gaps in the state that the resin material is present between the mold and the substrate. | 02-12-2009 |
20090101037 | GAP MEASURING METHOD, IMPRINT METHOD, AND IMPRINT APPARATUS - A gap measuring method for measuring a gap between two members by irradiating the two members with light is constituted by preparing a first member and a second member which are disposed opposite to each other; irradiating the first member and the second member with light from one member side to obtain spectral data about intensity of reflected light or transmitted light from the other member side; and determining a gap between the first member and the second member by comparing the obtained spectral data with a database in which a gap length and an intensity spectrum are correlated with each other. | 04-23-2009 |
20090152239 | PROCESS FOR PRODUCING A CHIP USING A MOLD - A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate | 06-18-2009 |
20090152753 | MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING A CHIP - A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate | 06-18-2009 |
20090283938 | IMPRINT APPARATUS, IMPRINT METHOD, AND MOLD FOR IMPRINT - An imprint apparatus for imprinting a mold pattern onto a substrate or a member on the substrate includes a light source for irradiating a surface of the mold disposed opposite to the substrate and a surface of the substrate with light; an optical system for guiding the light from the light source to the surface of the mold and the surface of the substrate and guiding reflected lights from these surfaces to a spectroscope; a spectroscope for dispersing the reflected lights guided by the optical system into a spectrum; and an analyzer for analyzing a distance between the surface of the mold and the surface of the substrate. The analyzer calculates the distance between the surface of the mold and the surface of the substrate by measuring a distance between the surface of the mold and a surface formed at a position away from the surface of the mold. | 11-19-2009 |
20100007894 | Multilayer Structure Measuring Method and Multilayer Structure Measuring Apparatus - A tomographic image measuring method according to the present invention includes a first step of calculating information corresponding to an optical distance of each layer thickness from a wave-number spectrum, a second step of separating and extracting information of each layer from the information corresponding to the optical distance of each layer thickness, a third step of reconverting information of each layer into a wave-number spectrum, respectively, a fourth step of obtaining a interference wave number from the result of the-third step, a fifth step of calculating an order of interference from the interference wave number and the optical distance of each layer; and a sixth step of calculating the optical distance of each layer by making use of the fact that the order of interference is an integer. Thus, when discrete Fourier transform is used, the measuring precision of layers is improved. | 01-14-2010 |
20100027019 | Optical Coherence Tomographic Imaging Method and Optical Coherence Tomographic Imaging Apparatus - An optical tomographic diagnostic apparatus is characterized by executing a first step (S | 02-04-2010 |
20100173032 | IMPRINT METHOD AND IMPRINT APPARATUS - An imprint apparatus in which a mold having a processing surface on which a predetermined imprint is formed is provided and an uncured resin material placed on a substrate is filled and cured in a space between the mold and the substrate and is subjected to imprint of the predetermined imprint formed on the processing surface of the mold. The imprint apparatus includes an attitude control mechanism for controlling attitudes of the mold and the substrate so that a first gap between a first end of the mold and the substrate and a second gap between a second end of the mold and the substrate are different from each other, and a measuring mechanism for measuring attitudes and positions of the mold and the substrate. Also provided is a mechanism for imparting a relative movement between the substrate and the mold so that the resin material approaches the first end of the mold and enters through the first gap and fills at least a part of the space between the mold and the substrate. | 07-08-2010 |
20100226553 | OPTICAL COHERENCE TOMOGRAPHY METHOD AND OPTICAL COHERENCE TOMOGRAPHY APPARATUS - An optical coherence tomography method according to the present invention comprises the steps of dividing an object to be measured into a plurality of measurement regions adjacent to one another in a direction of irradiation of a measurement light, and acquiring a measurement image for every measurement region based on a wavelength spectrum of a coherent light; correcting, for every measurement region, a contrast of the measurement image of the measurement region; and acquiring, for every measurement region, a tomographic image from the corrected measurement image. | 09-09-2010 |
20100226554 | OPTICAL COHERENCE TOMOGRAPHY METHOD AND OPTICAL COHERENCE TOMOGRAPHY APPARATUS - An optical coherence tomography method according to the present invention comprising the steps of dividing an object to be measured into a plurality of measurement regions adjacent to one another in a direction of irradiation of a measurement light, and acquiring a measurement image for every measurement region based on a wavelength spectrum of a coherent light and acquiring a tomographic image for every measurement region by removing a mirror image of a tomographic image of an adjacent region being adjacent to the measurement region of the measurement image from the measurement image. | 09-09-2010 |
20100270705 | IMPRINT METHOD AND IMPRINT APPARATUS - An imprint method for imprinting an imprint pattern provided to a mold onto a pattern forming layer formed on a substrate is constituted by a first step of effecting alignment between the substrate and the mold with feedback control; a second step of bringing the mold and the pattern forming layer into contact with each other; a third step of curing the pattern forming layer; and a fourth step of increasing a gap between the substrate and the mold. The imprint method further includes a step of stopping the feedback control between the first step and the second step and/or between the second step and the third step. | 10-28-2010 |
20100314799 | PATTERN FORMING METHOD AND PATTERN FORMING APPARATUS IN WHICH A SUBSTRATE AND A MOLD ARE ALIGNED IN AN IN-PLANE DIRECTION - A pattern forming method for forming an imprinted pattern on a coating material disposed on a substrate with a pattern provided to a mold. The method includes preparing a mold provided with a first surface including a pattern area, a second surface located opposite from the first surface, and an alignment mark provided at a position at which the alignment mark is away from the first surface, contacting the pattern area of the mold with the coating material disposed on the substrate, obtaining information about positions of the mold and the substrate by using the alignment mark and a mark provided to the substrate in a state in which the coating material is disposed on the substrate at a portion where the alignment mark and the substrate are opposite to each other, and effecting alignment of the substrate with the mold in an in-plane direction of the pattern area, on the basis of the information in a state in which the pattern area and the coating material contact each other. | 12-16-2010 |
20110058175 | IMAGING APPARATUS AND IMAGING METHOD USING OPTICAL COHERENCE TOMOGRAPHY - Provided is an imaging apparatus using Fourier-domain optical coherence tomography, the imaging apparatus removing noises caused by the autocorrelation component of returning light to obtain a high-resolution tomographic image. A first switching unit | 03-10-2011 |
20110096333 | OPTICAL TOMOGRAPHIC IMAGE GENERATION METHOD AND OPTICAL TOMOGRAPHIC IMAGE GENERATION APPARATUS - Provided is a method for easily improving image quality in an optical tomographic imaging apparatus. An optical tomographic image generation method of generating a tomographic image of an object includes: acquiring a signal; performing Fourier transform; and obtaining the tomographic image. The optical tomographic image generation method further includes one of the steps of combining a plurality of the signals acquired within a predetermined time and combining a plurality of the signals acquired within a predetermined time after performed the Fourier transform thereon. | 04-28-2011 |
20110098560 | OPTICAL TOMOGRAPHIC IMAGE GENERATING APPARATUS AND OPTICAL TOMOGRAPHIC IMAGE GENERATING METHOD - The present invention relates to an optical tomographic image generating method including: obtaining signals for a plurality of frames; obtaining respective complex number data by performing Fourier transformation of the signals for the plurality of frames; synthesizing the plurality of frames using the respective complex number data; generating a tomographic image based on the synthesized data. This configuration enables easy enhancement of the image quality in an optical coherence tomographic imaging apparatus. | 04-28-2011 |
20110198783 | PROCESS FOR PRODUCING A DEVICE USING A MOLD - In order to provide a mold and an imprint apparatus which permit adjustment of a depth of an imprint pattern after the imprint pattern is formed, the mold is constituted by a mold substrate including a first material and a surface layer, constituting a projection of the mold and including a second material, for forming a pattern on the photocurable resin material. The first material is more etchable than the second material. The first material and the second material have optical transmittances capable of curing the photocurable resin material with respect to at least a part of wavelength range of ultraviolet light. | 08-18-2011 |
20110272840 | Light Transmissive Mold and Apparatus For Imprinting a Pattern Onto a Material Applied on a Semiconductor Workpiece and Related Methods - A light transmissive mold used for imprinting a pattern onto a material applied on a semiconductor workpiece. The mold includes a first surface having an area of a pattern to be imprinted onto the material, a second surface located opposite from the first surface, and a third surface disposed between the first surface and the second surface, at a position inwardly away from the first surface. The third surface is arranged opposite to an area of the workpiece subjected to dicing. An alignment structure, provided for alignment between the mold and the workpiece, is formed in the third surface. | 11-10-2011 |
20110278259 | PROCESS FOR PRODUCING A CHIP USING A MOLD - A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate | 11-17-2011 |
20110284499 | IMPRINT METHOD USING A MOLD AND PROCESS FOR PRODUCING STRUCTURE USING AN IMPRINT APPARATUS - In order to alleviate or suppress curing of a photocurable resin material in an area in which the curing of the photocurable resin material is not intended, exposure of the photocurable resin material to light is suppressed through a non-pattern portion at which a light-blocking member is provided by means of a mold having an imprint pattern portion and the non-pattern portion or is suppressed by disposing a light-blocking member so as not to irradiate the photocurable resin material with light not via the mold. | 11-24-2011 |
20110299035 | OPTICAL COHERENCE TOMOGRAPHY APPARATUS, OPTICAL COHERENCE TOMOGRAPHY METHOD, OPHTHALMIC APPARATUS, METHOD OF CONTROLLING OPHTHALMIC APPARATUS, AND STORAGE MEDIUM - An optical coherence tomography apparatus which acquires a tomogram of a target object based on a light intensity detected for each wavelength by combining return light of measurement light from the target object with reference light corresponding to the measurement light, the apparatus comprising: a normalization unit adapted to normalize the light intensity detected for the each wavelength based on a transfer function corresponding to the wavelength resolution; and an image formation unit adapted to form a tomogram of the target object from the light intensities normalized by the normalization unit. | 12-08-2011 |
20120044499 | IMAGE ACQUISITION APPARATUS, IMAGE ACQUISITION SYSTEM, AND METHOD OF CONTROLLING THE SAME - An OCT apparatus that photographs with a plurality of measuring beams concurrently has a mechanism for adjusting the optical path length of a reference beam for each measuring beam. Accordingly, when tomographic images photographed in this manner are displayed side by side, because the depth of photographing varies from one tomographic image to another, it is difficult for an operator to comprehend the positional relation between the photographed images. In displaying tomographic images acquired with a plurality of measuring beams, the display position of each tomographic image is adjusted based on the changed optical path length of a reference beam of the measuring beam used for the image. The tomographic images are thus aligned in height and are presented in a manner that is easy for the operator to comprehend the positional relation between the photographed images. | 02-23-2012 |
20120092617 | EYEGROUND IMAGING APPARATUS AND CONTROL METHOD THEREFOR - A tomographic-image pickup unit is controlled so as to capture a tomographic image in response to a signal input from a signal input unit. Then, a display unit is controlled so as to display the captured. tomographic image. An eyeground-image pickup unit is controlled so as to capture a two-dimensional image in response to a signal input from the signal input unit while the tomographic image. is displayed on the display unit. Therewith, the user can more easily perform imaging, and the time load on the subject is reduced. | 04-19-2012 |
20120092677 | IMAGE PICKUP APPARATUS AND IMAGE PICKUP METHOD USING OPTICAL COHERENCE TOMOGRAPHY - The present invention relates to an apparatus having a simple configuration capable of correctly detecting malfunction of an OCT apparatus by detecting the states of a light source and a sensor. | 04-19-2012 |
20120133950 | TOMOGRAPHIC IMAGING METHOD AND TOMOGRAPHIC IMAGING APPARATUS - Provided is a tomographic imaging method, which acquires tomographic images of an object to be inspected, based on combined beams respectively acquired by combining reference beams and return beams acquired by irradiating the object to be inspected with a plurality of measuring beams. The tomographic imaging method includes a first step of acquiring the respective combined beams by reflecting information regarding the plurality of measuring beams which is stored in advance and irradiating the object to be inspected with the plurality of measuring beams, and a second step of generating the tomographic images based on the respective combined beams. | 05-31-2012 |
20120188510 | OPTICAL COHERENCE TOMOGRAPHIC IMAGING METHOD AND OPTICAL COHERENCE TOMOGRAPHIC IMAGING APPARATUS - In an OCT apparatus used in ophthalmology, if a working distance between an eye to be inspected and an objective lens varies, a shape of an obtained tomographic image is changed. This means that the OCT apparatus cannot be used for examining a variation of eyeball shapes. Provided is an optical coherence tomographic imaging method, including: acquiring a first distance between the eye to be inspected and the objective lens, corresponding to first tomographic image of the eye to be inspected; and correcting the first tomographic image to be second tomographic image corresponding to a second distance between the eye to be inspected and the objective lens, which is different from the first distance. | 07-26-2012 |
20120189184 | TOMOGRAPHIC IMAGING APPARATUS AND PHOTOGRAPHING METHOD - Provided is a tomographic imaging apparatus including: a light source; an optical splitter unit for splitting light from the light source into reference light and measuring light; a reference optical system including an adjustment unit for adjusting an optical path length of the reference light; a spectral unit for spectrally splitting combined light of the reference light and the return light obtained by irradiating an object to be inspected with the measuring light so as to acquire an interfering signal; a detection unit for detecting an optical path length when a tomographic image of the object is photographed; a storage unit for recording data about a refractive index of a refracting element of the object; and a calculation unit for calculating image data from the interfering signal acquired by the spectral unit based on an actual size using data about the optical path length and the refractive index. | 07-26-2012 |
20120229763 | OPTICAL TOMOGRAPHIC IMAGE PHOTOGRAPHING APPARATUS AND CONTROL METHOD THEREFOR - An optical tomographic image photographing apparatus having a tracking function, capable of appropriately controlling a scan in acquiring a tomographic image. The optical tomographic image photographing apparatus according to the invention includes a fundus image photographing section which photographs fundus images of an eye to be inspected and a tomographic image photographing section which photographs tomographic images of the eye to be inspected. A control method of the optical tomographic image photographing apparatus includes the steps of: calculating coordinate values matching a plurality of previously-acquired characteristic areas in the fundus image; calculating a spatial variation between the plurality of coordinate values; and controlling the scan of a measuring light by the tomographic image photographing section for acquiring the tomographic images on the basis of a result of the calculation. | 09-13-2012 |
20120229764 | OPHTHALMOLOGIC APPARATUS AND CONTROL METHOD OF THE SAME - There is provided an ophthalmologic apparatus having a tracking function that can select a fundus image that is less affected by eye motion to reduce burdens on an operator/a patient in fundus imaging, wherein the ophthalmologic apparatus picks up a first fundus image ( | 09-13-2012 |
20120257165 | OPTICAL COHERENCE TOMOGRAPHIC IMAGING METHOD AND OPTICAL COHERENCE TOMOGRAPHIC IMAGING APPARATUS - An optical tomographic diagnostic apparatus is characterized by executing a first step (S | 10-11-2012 |
20130003076 | TOMOGRAPHIC IMAGING APPRATUS AND TOMOGRAPHIC IMAGING METHOD - A tomographic imaging apparatus includes an irradiation unit configured to irradiate with a plurality of measurement light beams, a sensor configured to convert into an electric signal a plurality of combined light beams via an optical imaging system by making return light beams from an inspection target, which are generated due to the plurality of measurement light beams, interfere with reference light beams, an output unit configured to output light beams of a single wavelength based on a wavelength width of the plurality of measurement light beams, and a generation unit configured to generate a tomographic image from an electric signal acquired by the sensor via the imaging optical system, based on a position of the light beam of the single wavelength on the sensor. | 01-03-2013 |
20130003077 | TOMOGRAPHIC IMAGING APPARATUS AND CONTROL APPARATUS FOR TOMOGRAPHIC IMAGING APPARATUS - A tomographic imaging apparatus configured to acquire a tomographic image or a cross-sectional image of an object to be examined from signals of a plurality of interfering beams obtained by emitting a plurality of measuring beams to the object to be examined and causing return beams of the measuring beams to interfere with reference beams includes a sensor configured to detect the plurality of interfering beams to acquire signals of the plurality of interfering beams, an acquisition unit configured to acquire an optical characteristic in the tomographic imaging apparatus corresponding to each of the plurality of interfering beams, and a generation unit configured to generate a tomographic image or a cross-sectional image of the object to be examined based on the signals of the plurality of interfering beams and the optical characteristic. | 01-03-2013 |
20130196016 | IMPRINT APPARATUS IN WHICH ALIGNMENT CONTROL OF A MOLD AND A SUBSTRATE IS EFFECTED - An imprint apparatus performs alignment control of a mold and a substrate. A pattern formed on the mold is transferred onto a pattern forming layer on the substrate. A mold holding portion holds the mold, a substrate holding portion holds the substrate, and a control portion effects control so that the mold and the substrate are brought near to each other during the alignment control. The mold and the pattern forming layer are brought into contact with each other and then the pattern forming layer is cured. The control portion changes a driving profile for the alignment control after the alignment control is started and at least one of before and after the mold contacts the pattern forming layer. The driving profile used to move at least one of the mold holding portion and the substrate holding portion to a target position, and includes at least one of acceleration, speed, driving voltage, and driving current. | 08-01-2013 |
20140120199 | MOLD, IMPRINT METHOD, AND PROCESS FOR PRODUCING CHIP - A mold capable of a highly accurate alignment with a member to be processed in such a state that a photocurable resin material is disposed between the mold and the member to be processed, and is constituted by a substrate | 05-01-2014 |
20140247426 | IMAGING APPARATUS AND IMAGING METHOD USING OPTICAL COHERENCE TOMOGRAPHY - Provided is an imaging apparatus using Fourier-domain optical coherence tomography, the imaging apparatus removing noises caused by the autocorrelation component of returning light to obtain a high-resolution tomographic image. A first switching unit | 09-04-2014 |