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| 20090283252 | GAS HEATER - A method and apparatus for heating or cooling a fluid. An inlet conduit coupled to a plurality of distribution nozzles in fluid communication with a channel at the periphery of the apparatus. An insert and a sleeve cooperatively define a thin gap, in fluid communication with the channel, through which the fluid flows. Thermal inserts near the thin gap generate heat flux into or out of the fluid, which exits through an outlet conduit. | 11-19-2009 |
| 20100048032 | PROCESS GAS DELIVERY FOR SEMICONDUCTOR PROCESS CHAMBER - Methods and apparatus for a gas delivery assembly are provided herein. In some embodiments, the gas delivery assembly includes a gas inlet funnel having a first volume and one or more gas conduits; each gas conduit having an inlet and an outlet for facilitating the flow of a gas therethrough and into the first volume, wherein each gas conduit has a second volume less than the first volume, and wherein each gas conduit has a cross-section that increases from a first cross-section proximate the inlet to a second cross-section proximate the outlet, wherein the second cross-section is non-circular. In some embodiments, each conduit has a longitudinal axis that intersects a central axis of the gas inlet funnel. | 02-25-2010 |
| 20100218784 | COPPER DEPOSITION CHAMBER HAVING INTEGRATED BEVEL CLEAN WITH EDGE BEVEL REMOVAL DETECTION - Embodiments of the invention generally provide apparatus and method for detecting and controlling edge bevel removal of a semiconductor substrate. One embodiment of the present invention provides an apparatus for inspecting a rotating substrate. The apparatus comprises a substrate support configured to support the rotating substrate on a back side and rotate the substrate about a central axis, and a sensor positioned above the substrate support, the sensor being configured to inspect a front side of the rotating substrate while moving simultaneously radially across the substrate. | 09-02-2010 |
| 20100279516 | APPARATUS AND METHOD OF ALIGNING AND POSITIONING A COLD SUBSTRATE ON A HOT SURFACE - Embodiments of the invention contemplate a method, apparatus and system that are used to support and position a substrate on a surface that is at a different temperature than the initial, or incoming, substrate temperature. Embodiments of the invention may also include a method of controlling the transfer of heat between a substrate and substrate support positioned in a processing chamber. The apparatus and methods described herein generally may also provide an inexpensive and simple way of accurately positioning a substrate on a substrate support that is positioned in a semiconductor processing chamber. Substrate processing chambers that can benefit from the various embodiments described herein include, but are not limited to RTP, CVD, PVD, ALD, plasma etching, and/or laser annealing chambers. | 11-04-2010 |
| 20100294199 | CVD APPARATUS FOR IMPROVED FILM THICKNESS NON-UNIFORMITY AND PARTICLE PERFORMANCE - Embodiments of the invention provide improved apparatus for depositing layers on substrates, such as by chemical vapor deposition (CVD). The inventive apparatus disclosed herein may advantageously facilitate one or more of depositing films having reduced film thickness non-uniformity within a given process chamber, improved particle performance (e.g., reduced particles on films formed in the process chamber), chamber-to-chamber performance matching amongst a plurality of process chambers, and improved process chamber serviceability. | 11-25-2010 |
| 20110223334 | ATOMIC LAYER DEPOSITION CHAMBER WITH MULTI INJECT - Embodiments of the invention relate to apparatus and methods for depositing materials on substrates during atomic layer deposition processes. In one embodiment, a chamber lid assembly comprises a channel having an upper portion and a lower portion, wherein the channel extends along a central axis, a housing having an inner region and at least partially defining two or more annular channels, an insert disposed in the inner region and defining the upper portion, the upper portion fluidly coupled with the two or more annular channels, and a tapered bottom surface extending from the bottom portion of the channel to a peripheral portion of the chamber lid assembly. | 09-15-2011 |
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| 20110059442 | Multiplex detection of nucleic acids - Methods of detecting nucleic acids, including methods of detecting two or more nucleic acids in multiplex branched-chain DNA assays, are provided. Nucleic acids captured on a solid support are detected, for example, through cooperative hybridization events that result in specific association of a label with the nucleic acids. Compositions, kits, and systems related to the methods are also described. | 03-10-2011 |
| 20110059866 | Multiplex detection of nucleic acids - Methods of detecting nucleic acids, including methods of detecting two or more nucleic acids in multiplex branched-chain DNA assays, are provided. Nucleic acids captured on a solid support are detected, for example, through cooperative hybridization events that result in specific association of a label with the nucleic acids. Compositions, kits, and systems related to the methods are also described. | 03-10-2011 |
| 20120034703 | Devices, Systems and Methods for Processing of Magnetic Particles - Devices, systems and methods for separation of magnetic particles with either hand held devices or automated instruments. Specifically, the production of magnetic fields for the separation of the particles within containers such as microtiter plates with a magnetic field that is substantially consistent for each well. Certain embodiments produce a magnetic field that is substantially uniform across each well bottom, while other embodiments produce a magnetic field that is stronger toward the outer region of each well. | 02-09-2012 |
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| 20090177310 | METHOD OF CONTROLLING PROCESS PARAMETERS FOR SEMICONDUCTOR MANUFACTURING APPARATUS - Methods and systems for adaptively controlling process parameters in semiconductor manufacturing equipment. An embodiment provides for gain scheduling of PID controllers across recipe steps. One embodiment provides a method for controlling a chuck temperature during a semiconductor manufacturing process, the method employing a first set of proportional-integral-derivative (PID) values in a PID controller to control the chuck temperature at a first setpoint in a first step of a process recipe and employing a second set of PID values in the PID controller to control the chuck temperature at a second setpoint, different than the first setpoint, in a second step of the process recipe. The methods and systems provide reduced controller response times where process parameter setpoint between steps of a process recipe span a wide range. | 07-09-2009 |
| 20110031216 | SYNCHRONIZED RADIO FREQUENCY PULSING FOR PLASMA ETCHING - Methods for processing a substrate are provided herein. In some embodiments, a method of etching a dielectric layer includes generating a plasma by pulsing a first RF source signal having a first duty cycle; applying a second RF bias signal having a second duty cycle to the plasma; applying a third RF bias signal having a third duty cycle to the plasma, wherein the first, second, and third signals are synchronized; adjusting a phase variance between the first RF source signal and at least one of the second or third RF bias signals to control at least one of plasma ion density non-uniformity in the plasma or charge build-up on the dielectric layer; and etching the dielectric layer with the plasma. | 02-10-2011 |
| 20110186545 | FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS - Methods and systems for controlling temperatures in plasma processing chamber with reduced controller response times and increased stability. Temperature control is based at least in part on a feedforward control signal derived from a plasma power input into the processing chamber. A feedforward control signal compensating disturbances in the temperature attributable to the plasma power may be combined with a feedback control signal counteracting error between a measured and desired temperature. | 08-04-2011 |
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| 20100076476 | SYSTEMS AND METHODS FOR CABLE-BASED TISSUE REMOVAL - Systems and methods for treating disc herniation include surgical and endoscopic access and removal of disc tissue. The tissue removal devices that may be used include flexible elongate members, such as a cable, that may be inserted into a vertebral disc and rotated to pulverize the disc material and facilitate its removal. | 03-25-2010 |
| 20110054507 | DEVICES AND METHODS FOR ARCHED ROOF CUTTERS - Disclosed herein are tissue-removal devices and methods for treating spinal diseases using such devices. The tissue-removal devices may comprise a cable and/or extendable elements with a retracted and a deployed configuration. The cable and/or extendable elements may be distally supported and restrained by a support element such that the support element may be pushed transversely away when the extendable element is distally extended into its deployed configuration. An annular cutting element may be provided about the distal end of the extendable element or the support element. Various configurations of the extendable and support elements are described herein, as well as methods of using tissue-removal devices with extendable and support elements coupled by an annular cutting element for treating spinal diseases. | 03-03-2011 |
| 20110098711 | DEVICES AND METHODS FOR ARCHED ROOF CUTTERS - Disclosed herein are tissue-removal devices and methods for treating spinal diseases using such devices. The tissue-removal devices may comprise a cable and/or extendable elements with a retracted and a deployed configuration. The cable and/or extendable elements may be distally supported and restrained by a support element such that the support element may be pushed transversely away when the extendable element is distally extended into its deployed configuration. An annular cutting element may be provided about the distal end of the extendable element or the support element. Various configurations of the extendable and support elements are described herein, as well as methods of using tissue-removal devices with extendable and support elements coupled by an annular cutting element for treating spinal diseases. | 04-28-2011 |
| 20110190803 | BLADE DEBRIDER - Systems and methods for treating disc herniation or degeneration, disc degeneration, and vertebral body fracture include surgical and endoscopic access and removal of disc tissue. The tissue removal devices that may be used include rotatable blade devices having flow control surfaces that may be inserted into a vertebral disc and rotated to pulverize the disc material and facilitate its removal. | 08-04-2011 |
| 20120016400 | SYSTEMS AND METHODS FOR CABLE-BASED TISSUE REMOVAL - Systems and methods for treating disc herniation include surgical and endoscopic access and removal of disc tissue. The tissue removal devices that may be used include flexible elongate members, such as a cable, that may be inserted into a vertebral disc and rotated to pulverize the disc material and facilitate its removal. | 01-19-2012 |
| 20120022564 | DEVICES AND METHODS FOR ARCHED ROOF CUTTERS - Disclosed herein are tissue-removal devices and methods for treating spinal diseases using such devices. The tissue-removal devices may comprise a cable and/or extendable elements with a retracted and a deployed configuration. The cable and/or extendable elements may be distally supported and restrained by a support element such that the support element may be pushed transversely away when the extendable element is distally extended into its deployed configuration. An annular cutting element may be provided about the distal end of the extendable element or the support element. Various configurations of the extendable and support elements are described herein, as well as methods of using tissue-removal devices with extendable and support elements coupled by an annular cutting element for treating spinal diseases. | 01-26-2012 |
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| 20100039137 | DOWNLOAD SEQUENCING TECHNIQUES FOR CIRCUIT CONFIGURATION DATA - Methods, systems, and devices are described for the implementation of a novel architecture to support download sequencing techniques for circuit configuration data. Sets of configuration data from nonvolatile memory may be sequentially transferred to volatile memory to support reconfigurable circuit elements, for example, for use in a clock generator. Different programmable circuit elements may use configuration data, but have different ramp-up times before stable operation. With early download sequence positioning of configuration data, and corresponding immediacy in initiation of operation, certain clock elements are able to commence initiation of operation while remaining clock elements are provided with configuration data from a latter portion of the download sequence. | 02-18-2010 |
| 20110089971 | DOWNLOAD SEQUENCING TECHNIQUES FOR CIRCUIT CONFIGURATION DATA - Methods, systems, and devices are described for the implementation of a novel architecture to support download sequencing techniques for circuit configuration data. Sets of configuration data from nonvolatile memory may be sequentially transferred to volatile memory to support reconfigurable circuit elements, for example, for use in a clock generator. Different programmable circuit elements may use configuration data, but have different ramp-up times before stable operation. With early download sequence positioning of configuration data, and corresponding immediacy in initiation of operation, certain clock elements are able to commence initiation of operation while remaining clock elements are provided with configuration data from a latter portion of the download sequence. | 04-21-2011 |
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| 20080217593 | TAIL SECTION FOR CARPET STRETCHING TOOL - A tail section for a carpet stretching tool. The carpet stretching tool is the type having a carpet engaging head, an elongate body, a tail section and a lever mechanism allowing extension of the elongate body. The tail section includes a first leg and a second leg, each leg having a wall running face. The legs may be selectively positioned between at least two positions. In one positions the wall running faces form a substantially flat surface allowing use of the tool down a wall section. In a second position the wall running faces on the first and second leg of the tool may be positioned at an angle to allow the tool to be used on corner locations within a room or on a post. | 09-11-2008 |
| 20080217594 | TAIL SECTION FOR CARPET STRETCHING TOOL - A tail section for a carpet stretching tool. The carpet stretching tool is the type having a carpet engaging head, an elongate body, a tail section and a lever mechanism allowing extension of the elongate body. The tail section includes a first leg and a second leg, each leg having a wall running face. The legs may be selectively positioned between at least two positions. In one positions the wall running faces form a substantially flat surface allowing use of the tool down a wall section. In a second position the wall running faces on the first and second leg of the tool may be positioned at an angle to allow the tool to be used on corner locations within a room or on a post. | 09-11-2008 |
| 20080264225 | UNDERCUT SAW - An undercut saw including a housing, a motor within said housing, a drive shaft rotated by said motor, and a blade mount mechanically linked to said shaft such that a circular saw blade mounted on said mount is rotated when the motor rotates the drive shaft. A fixed blade guard circumscribes a portion of the blade and allows selectable height adjustment of the blade. A stabilization bar on the fixed blade guard may be extended to make the device more stable. On the underside of the fixed blade guard a dust channel allows dust to be swept by the rotating blade into a dust port. The dust channel allows positioning of the dust port away from the leading edges of the fixed blade guard. | 10-30-2008 |
