Patent application number | Description | Published |
20080199817 | RESIST PATTERN FORMING METHOD - A resist pattern forming method includes preparing a photomask for generating near-field light having an intensity distribution. The photomask has a light-transmissible base member, and a light-blocking film. The film has a micro-aperture adapted to expose an object to near-field light seeping out from the micro-aperture. The photomask has a periodic structure and a shift of a phase. The shift exists between recesses or projections adjacent to the micro-aperture. A difference in the intensity distribution of the near-field light in the area of the aperture is reduced. The photomask is arranged close to a photoresist film on a substrate. Light from a light source irradiates the photoresist film by way of the photomask to form a latent image based on the micro-aperture, and the photoresist film is developed to form a resist pattern on the substrate based on the latent image. | 08-21-2008 |
20080246970 | SENSOR DEVICE AND TESTING METHOD UTILIZING LOCALIZED PLASMON RESONANCE - A sensor device is formed from a metal film having a plurality of openings, a sensor material positioned within each of the openings, a light source that emits light having a first wavelength, and a light detector that detects light emitted from the light source and transmitted through or reflected from the openings. The plurality of openings are arranged periodically in a first direction in the metal film, and both a size of each of the plurality of openings and an interval thereof in the first direction are equal to or less than the wavelength of the light. | 10-09-2008 |
20090021742 | SENSOR APPARATUS - A plasmon sensor apparatus using a metallic fine periodic structure designed to reduce the dependences of the resonance wavelength and sensitivity on the incident angle. The plasmon sensor apparatus has a sensing element including a metallic member having periodic slit openings and metallic portions, and a substrate on which the metallic member is held, a light source which emits light so that the light is incident on the sensing element, and a photodetector which detects light obtained from the light source. If the period of the slit openings is Λ; the width of the metallic portions is d; and the thickness of the metallic member is h, the aspect ratio h/(Λ−d) of the slit openings is 3 or higher and the opening width (Λ−d) is equal to or smaller than the wavelength of light applied from the light source to the sensing element. | 01-22-2009 |
20090207398 | Near Field Exposure That Reduces Scatter of a Surface Plasmon Polariton Wave Going Around a Light Blocking Member - An exposure mask in which exposure of an exposure object is carried out on the basis of near field light leaking from a plurality of openings provided in a light blocking member in a mutually adjoining relation, in which the spacing between adjacent openings is not greater than the wavelength of light used for the exposure, and an end portion of the opening at the exposure object side has a structure effective to reduce scatter of a surface plasmon polariton wave going around to the exposure object side of the light blocking member. | 08-20-2009 |
20090208850 | Near-Field Exposure Mask, Method of Producing that Mask, Near-Field Exposure Apparatus Having that Mask, and Resist Pattern Forming Method - Disclosed is a near-field exposure mask having a light blocking layer formed on a substrate, the light blocking layer having an opening with an opening width narrower than a wavelength of an exposure light source, wherein exposure of an object to be exposed is carried out by use of near-field light to be produced at the opening while the exposure mask and the object to be exposed are placed in contact with each other, an important feature residing in that the light blocking layer is provided by a film that contains silicon in a range from 50% to 100% in terms of mole fraction. | 08-20-2009 |
20090243610 | ATOMIC MAGNETOMETER AND MAGNETIC FORCE MEASURING METHOD - An atomic magnetometer includes a cell containing an atomic group, a pump light source, a probe light source, a mirror, and a detector. The cell is disposed between the pump light source and the mirror and between the probe light source and the detector. A pump beam emitted from the pump light source is circularly polarized light. The pump beam passes through the cell and is reflected by the mirror and then passes through the cell again. The probe beam emitted from the probe light source is linearly polarized light. An optical path of the probe beam is parallel to a plane of incidence of the pump beam and is also parallel to a surface of the mirror. The optical path of the probe beam crosses an optical path of the pump beam in the cell. The probe beam which has passed through the cell enters the detector. | 10-01-2009 |
20090310133 | METHOD FOR DESIGNING LIGHT TRANSMISSION DEVICE, OPTICAL ELEMENT AND SENSOR - The present invention provides a method for designing a light transmission device, which adjusts a wavelength region of a spectrum of transmitted light without expanding a width of a transmission spectrum and without lowering the transmittance. The method for designing a light transmission device having a metal thin film, and a rectangular aperture which is formed in a plane of the metal thin film, has a long side and a short side and makes light pass therethrough, wherein the short side has a dimension smaller than a wavelength of incident light, and the long side is determined to have such a dimension that a peak wavelength at which the transmittance of light passing through the rectangular aperture is maximal can be a predetermined value. | 12-17-2009 |
20090311631 | NEAR-FIELD EXPOSURE APPARATUS AND NEAR-FIELD EXPOSURE METHOD - A near-field exposure apparatus includes a near-field exposure mask, a mechanism to place a substrate to be exposed, opposed to the near-field exposure mask, a mechanism to perform relative alignment of the near-field exposure mask and the substrate to be exposed, a mechanism to closely contact the near-field exposure mask and the substrate to be exposed, with each other, a mechanism to project exposure light to the near-field exposure mask, and a soft X-ray irradiating device to remove static electricity charged in at least one of the near-field exposure mask and the substrate to be exposed. The soft X-ray irradiating device is disposed at a side of the near-field exposure mask remote from the substrate to be exposed. | 12-17-2009 |
20100045996 | SENSING APPARATUS - A sensing apparatus comprises a sensing element having a metal member of a periodic structure formed on a substrate, a light source for projecting a light beam to the sensing element, and a photosensor for sensing the light beam from the sensing element, wherein the sensing element has an optical waveguide layer between the substrate and the metal member, and the light beam illuminated from the light source and propagating in the optical waveguide layer and the light of a Rayleigh mode formed by the metal member are phase-matched. | 02-25-2010 |
20100270264 | NEAR FIELD EXPOSURE MASK, METHOD OF FORMING RESIST PATTERN USING THE MASK, AND METHOD OF PRODUCING DEVICE - Provided are a near field exposure mask which can suppress heat generation of a mask during exposure and can also suppress variation in size of a resist pattern for each shot, and a resist pattern forming method using the same. The near field exposure mask includes a transparent mask matrix l | 10-28-2010 |
20100309480 | OPTICAL TOMOGRAPHY - An optical tomography imaging a tomogram by using a coherent light by a backscattering light of a measured object and a reflected light of a reference mirror, which has supercontinuum light sources, an optical system having group velocity dispersion connected to the supercontinuum light source, an optical detection element detecting a coherent light by a backscattering light of the measured object and a reflected light of the reference mirror, a timing detection element detecting a timing of each wavelength component in an output light from the optical system having the group velocity dispersion, and a unit sampling a signal from the optical detector by using a timing signal from the timing detection element with a signal from the supercontinuum light source as a trigger, and detecting an optical tomogram signal imaging a tomogram, thereby acquiring an optical tomogram at a higher speed than a conventional SS-OCT. | 12-09-2010 |
20110155916 | LASER APPARATUS, DRIVING METHOD OF THE SAME AND OPTICAL TOMOGRAPHIC IMAGING APPARATUS - The present invention provides a laser apparatus capable of improving a scan speed and achieving a scan rate equal to or more than 1 MHz, and an optical tomographic imaging apparatus using the laser apparatus as a light source. The laser apparatus includes a ring resonator, the ring resonator having a structure in which a first modulator, a normal dispersion region, a second modulator and an anomalous dispersion region are arranged in this order, and in this arrangement, a gain medium is included, and being configured so that modulation with respect to the second modulator can be caused to be phase modulation by periodically superimposing phase modulation on modulation with respect to the first modulator. | 06-30-2011 |
20130082700 | NUCLEAR MAGNETIC RESONANCE IMAGING APPARATUS AND NUCLEAR MAGNETIC RESONANCE IMAGING METHOD - The present invention has an object to provide a nuclear magnetic resonance imaging apparatus or the like that avoids a region with zero sensitivity of an optical magnetometer and allows imaging by strong magnetic resonance when a common magnetic field is used as a bias field of an optical magnetometer and as a magnetostatic field to be applied to a sample. When a direction of a magnetostatic field application unit applying a magnetostatic field to a sample is a z direction, alkali metal cell of a scalar magnetometer is arranged so as not to overlap a region to be imaged in a z direction, and so as not to intersect the region to be imaged in an in-plane direction perpendicular to the z direction. | 04-04-2013 |
20130082701 | NUCLEAR MAGNETIC RESONANCE IMAGING APPARATUS AND NUCLEAR MAGNETIC RESONANCE IMAGING METHOD - The present invention has an object to provide a nuclear magnetic resonance imaging apparatus or the like that avoids a region with zero sensitivity of an optical magnetometer and allows imaging by strong magnetic resonance when a common magnetic field is used as a bias field of an optical magnetometer and as a magnetostatic field to be applied to a sample. When a direction of a magnetostatic field application unit applying a magnetostatic field to a sample is a z direction, alkali metal cells of a plurality of scalar magnetometers are arranged so as not to overlap a region to be imaged in a z direction, and so as not to intersect the region to be imaged in an in-plane direction perpendicular to the z direction. | 04-04-2013 |
20130127458 | MAGNETIC GRADIOMETER AND MAGNETIC SENSING METHOD - A gradiometer in which a probe beam for reading sequentially passes through two magnetic field measurement regions to obtain signals according to magnetic flux densities of the respective regions is formed using an optically pumped magnetometer. In particular, in a gradiometer using a high sensitivity optically pumped magnetometer, a geometric arrangement enabling obtainment of a large signal from a dipole moment as a signal source is defined. | 05-23-2013 |
20130207649 | OPTICALLY PUMPED MAGNETOMETER AND MAGNETIC SENSING METHOD - An optically pumped magnetometer and a magnetic sensing method acquire information as to strengths of magnetic fields in two different directions. A pump light having a circularly polarized component, first probe light having a liner polarized component and second probe light having a linearly polarized component are emitted to a cell containing a group of alkali metal atoms so as to form a crossing region A magnetic field applying unit applies a static magnetic field in a direction of the pump light incident on the crossing region during the emission of the pump light, the first probe light and the second probe light. And, information as to strengths of magnetic fields in two different directions perpendicular to the direction of the static magnetic field in the cell from the rotation angles of a polarization planes of the first and second probe lights during passage through the cell is calculated. | 08-15-2013 |
20130278253 | OPTICALLY PUMPED MAGNETOMETER - There is provided an optically pumped magnetometer, in which a pump light having a first wavelength to spin-polarize a first alkali-metal atom group is made to enter a cell containing the first alkali-metal atom group and a second alkali-metal atom group interacting via spin exchange with the first alkali-metal atom group, a probe light having a second wavelength different from the first wavelength to measure spin polarization of the second alkali-metal atom group is made to enter the cell to form the same optical axis as the pump light, a wavelength discrimination unit is provided to discriminate between the pump light and the probe light that passed through the cell depending on a different in wavelength, and the rotation angle of a polarization plane of the probe light that passed through the cell is measured so that the degree of flexibility of the device layout can be increased. | 10-24-2013 |