Naoyuki Satoh
Naoyuki Satoh, Nirasaki City JP
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20100314356 | METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS - In a method of reusing a consumable part for use in a plasma processing apparatus, a silicon carbide (SiC) lump is formed by depositing SiC by chemical vapor deposition (CVD), and a consumable part for the plasma processing apparatus is manufactured by processing the SiC lump, the consumable part having a predetermined shape. A first plasma process is performed on a substrate by using the manufactured consumable part. A surface of the consumable part that has been eroded by the plasma process is subjected to a clean process for a specific period of time. SiC is deposited on the cleaned surface of the eroded consumable part by CVD. A consumable part having the predetermined shape is remanufactured by processing the eroded consumable part having the surface on which the SiC is deposited. A second plasma process is performed on a substrate by using the remanufactured consumable part. | 12-16-2010 |
20110006037 | SURFACE PROCESSING METHOD - In a surface processing method for processing a surface of a member made of silicon carbide (SiC) and having a fragmental layer on a surface thereof, the surface of the member having the fragmental layer is modified into a dense layer to reduce the number of particles generated from the surface of the member when the member is applied to a plasma processing apparatus. Here, the SiC of the surface of the member is recrystallized by heating the fragmental layer. | 01-13-2011 |
20120073753 | ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS - An electrode plate for a plasma etching is formed as a disc shape having a predetermined thickness, a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface are provided on different circumferences of a plurality of concentric circles, the electrode plate is divided in a radial direction of the electrode plate into two or more regions, types of gas holes provided in the two or more regions are different from each other by region. | 03-29-2012 |
20120258258 | METHOD OF REUSING A CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS - A method of reusing a consumable part for use in a plasma processing apparatus includes cleaning a surface of the consumable part made of SiC that has been eroded by a first plasma process performed for a specific period of time. The method further includes depositing SiC on the cleaned surface of the eroded consumable part by CVD. The method also includes remanufacturing a consumable part having a predetermined shape by machining the eroded consumable part on which the SiC is deposited for performing a second plasma process on a substrate by using the remanufactured consumable part. | 10-11-2012 |
20130040055 | SURFACE PROCESSING METHOD - In a surface processing method for processing a surface of a member made of silicon carbide (SiC) and having a fragmental layer on a surface thereof, the surface of the member having the fragmental layer is modified into a dense layer to reduce the number of particles generated from the surface of the member when the member is applied to a plasma processing apparatus. Here, the SiC of the surface of the member is recrystallized by heating the fragmental layer. | 02-14-2013 |
Naoyuki Satoh, Yokohama City JP
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20090052787 | IMAGE SEARCH APPARATUS, IMAGE SEARCH METHOD, AND STORAGE MEDIUM STORING A PROGRAM FOR CAUSING A SEARCH APPARATUS TO EXECUTE A SEARCH METHOD - In an image search apparatus, a data manager responds to an instruction for a first search condition issued via a user interface to manage data of a target model acquired from a database and generates an image to be displayed on a user interface. A determination processor responds to an instruction for a second search condition issued by positioning a pointer on the whole model image to compare a closed area defined by the specified position with boundary information of each part image, retrieves candidate part images, and prioritizes the candidate part images in order of increasing area calculated based on the boundary information. A parts selection processor displays the retrieved candidate part images on the user interface according to the order of increasing area in response to an instruction for a third search condition for choosing a target part image from among the candidate part images. | 02-26-2009 |
20090189899 | IMAGE PROCESSING APPARATUS, IMAGE PROCESSING METHOD, AND STORAGE MEDIUM STORING A PROGRAM FOR CAUSING AN IMAGE PROCESSING APPARATUS TO EXECUTE AN IMAGE PROCESSING METHOD - In an image processing apparatus, when an output image generator generates an output image in which an individual image of each part of a product model is arranged around a parts assembly image of the entire product model with a specific part highlighted, a boundary information calculator calculates boundary information for each part highlighted. An individual image arrangement calculator obtains a center position of the highlighted part on the parts assembly image based on the boundary information, obtains a straight line dividing the parts assembly image to equally distribute the parts into respective areas, and calculates a position of arrangement of the individual image of each part corresponding to the highlighted part distributed in each of the areas. The output image generated by the output image generator includes a leading line extending from the individual image of each part to the corresponding part on the parts assembly image. | 07-30-2009 |
Naoyuki Satoh, Nirasaki-Shi JP
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20090156019 | Substrate processing apparatus and method - A substrate processing apparatus is used for radiating UV rays onto a target film formed on a target surface of a substrate to perform a curing process of the target film. The apparatus includes a hot plate configured to heat the substrate to a predetermined temperature, a plurality of support pins disposed on the hot plate to support the substrate, and a UV radiating device configured to radiate UV rays onto the target surface of the substrate supported on the support pins. The support pins are preset to provide a predetermined thermal conductivity to conduct heat of the substrate to the hot plate. The hot plate is preset to have a predetermined thermal capacity sufficient to absorb heat conducted through the support pins. | 06-18-2009 |
Naoyuki Satoh, Kanagawa JP
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20090122059 | PART IDENTIFICATION IMAGE GENERATION DEVICE, PART IDENTIFICATION IMAGE GENERATION METHOD, PART IDENTIFICATION IMAGE DISPLAY DEVICE, PART IDENTIFICATION IMAGE DISPLAY METHOD, AND RECORDING MEDIUM - A disclosed part identification image generation device includes a model management unit that manages a 3D model; a model region calculation unit that projects the shape of the 3D model and computes model region information; a part region calculation unit that projects the shape of a part of the 3D model and computes part region information; an image data processing unit that clips an image of the 3D model from a projection image of the 3D model to generate an entire model image, clips an image of the part from the projection image of the 3D model to generate a part highlight image, and computes part positional information; a part resolution ratio calculation unit that calculates part resolution ratio; and an image data management unit that manages the entire model image, the part highlight image, the part positional information, and the part resolution ratio as part catalog image data. | 05-14-2009 |
Naoyuki Satoh, Yokohama-Shi JP
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20090060393 | IMAGE SEARCHING DEVICE, IMAGE SEARCHING METHOD, IMAGE SEARCHING PROGRAM, AND RECORDING MEDIUM RECORDING THE IMAGE SEARCHING PROGRAM - An image searching device including a database, a user interface, a search unit, and an output unit. The search unit includes a data management unit configured to manage data on a model to be searched and acquired from the database and create an image to be displayed on a screen of the user interface; a determination unit configured to determine and extract parts each having a boundary included in a closed region as candidate parts; a part selection unit configured to display single images of the candidate parts on the screen of the user interface to enable selection of a target part; and an image switching unit configured to create data on a part emphasis frame and switch the screen displayed on the user interface from the single images of the candidate parts to a full image in which the target part is highlighted with the part emphasis frame. | 03-05-2009 |
Naoyuki Satoh, Yamanashi JP
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20090022946 | Membrane Structure and Method for Manufacturing the Same - The present invention provides a membrane structure having favorable pressure resistance and a manufacturing method of the same. After forming an opening (21 | 01-22-2009 |
20130284375 | CONSUMABLE PART FOR USE IN A PLASMA PROCESSING APPARATUS - A method of reusing a consumable part for use in a plasma processing apparatus includes cleaning a surface of the consumable part made of SiC that has been eroded by a first plasma process performed for a specific period of time. The method further includes depositing SiC on the cleaned surface of the eroded consumable part by CVD. The method also includes remanufacturing a consumable part having a predetermined shape by machining the eroded consumable part on which the SiC is deposited for performing a second plasma process on a substrate by using the remanufactured consumable part. | 10-31-2013 |
Naoyuki Satoh, Miyagi JP
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20140202631 | METHOD OF AFFIXING HEAT TRANSFER SHEET - A heat transfer sheet affixing method where a focus ring is pressed by a pressing part to a heat transfer sheet placed on a heat transfer sheet mounting part of a plasma processing apparatus to affix the heat transfer sheet to the focus ring. The method includes reducing a pressure to place the heat transfer sheet in a reduced-pressure atmosphere, heating the heat transfer sheet, and pressing the focus ring by the pressing part to the heat transfer sheet. The reducing, the heating, and the pressing are performed concurrently at least for a predetermined period of time. | 07-24-2014 |
20150053348 | PLASMA PROCESSING APPARATUS - A plasma processing apparatus includes a mounting stage on which a substrate is mounted, a focus ring arranged around a periphery of the mounting stage, a plurality of magnetic members arranged at a surface of the focus ring and a surface of the mounting stage facing opposite each other, and a temperature adjustment unit configured to adjust a temperature of the focus ring by introducing a heat transfer gas between the surface of the focus ring and the surface of the mounting stage facing opposite each other. | 02-26-2015 |