Patent application number | Description | Published |
20080237467 | BOLOMETER-TYPE THZ-WAVE DETECTOR - In a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state floated from a circuit substrate, a reflective film reflecting a THz wave is formed on the circuit substrate, an absorbing film absorbing the THz wave is formed on the temperature detecting portion, and an optical resonance structure is formed by the reflective film and temperature detecting portion. A gap between the reflective film and temperature detecting portion measures approximately ¼ infrared wavelength (e.g., 1.5 to 2.5 μm). Sheet resistance of the temperature detecting portion is set in a range in which an absorptance of the THz wave becomes a predetermined value or above on the basis of the THz wave (approximately 10-100 Ω/sq.). The absorptance of the THz wave is drastically improved while using the structure and manufacturing technique of a bolometer-type infrared detector. | 10-02-2008 |
20080237469 | BOLOMETER-TYPE THz-WAVE DETECTOR - In a bolometer-type THz-wave detector in a micro-bridge structure in which a temperature detecting portion (diaphragm) including a bolometer thin film is supported by a supporting portion in a state suspended from a circuit substrate, a member (dielectric cover) made of a dielectric material for efficiently collecting a THz wave is added to an upper part of the temperature detecting portion, and when a refractive index of the dielectric cover is n, thickness is t, and a wavelength of the THz wave is λ, a setting is made so as to have nt>λ, and a gap between the dielectric cover and the temperature detecting portion is set at integral multiples of λ/2. By this arrangement, an absorption of the THz wave can be improved using a structure and manufacturing method of a bolometer-type infrared detector, and a high-performance bolometer-type THz-wave detector can be manufactured with a high yield. | 10-02-2008 |
20100006757 | DUAL-WAVELENGTH THERMAL INFRARED SENSOR - A dual-wavelength thermal infrared sensor includes a first and a second type pixels that detect infrared in different wavelength ranges. The pixels of both types include a diaphragm supported by beams, an eave formed to spread outward from the diaphragm, and reflection film on the substrate. The diaphragm includes a thermoelectric conversion material thin film, an electrode, and protective films. The protective films and eaves are made of a material having larger absorption coefficient for infrared in the first wavelength range and a smaller absorption coefficient for infrared in second wavelength range. First-type pixels further have metal thin films formed on the top of the diaphragm and eaves. First-type pixels have sensitivity to infrared in a first wavelength range and in a second wavelength range defined by optical interference occurring between the metal thin films and the reflection film. Second-type pixels have sensitivity to first wavelength range infrared. | 01-14-2010 |
20100018289 | GAS MEASURING APPARATUS AND GAS MEASURING METHOD - A gas measuring apparatus includes: an infrared detecting section that receives an infrared ray from a measurement area and outputs infrared spectrum data relating to the infrared ray; a variation detecting section that detects, by using the infrared spectrum data, a variation in intensity of the infrared ray, which is caused in the infrared ray that radiates from the measurement area and which is caused by a measuring object gas in the measurement area; a converting section that converts the infrared spectrum data to radiance temperature spectrum data which represent wavelengths in an infrared region and radiance temperatures at each wavelength; a background temperature detecting section that detects, as background temperature of the measuring object gas, a maximum radiance temperature from among radiance temperatures represented by the radiance temperature spectrum data; a gas temperature detecting section that detects the temperature of the measuring object gas by using a radiance temperature in a wavelength band included in the water vapor absorption band in the infrared region from among the radiance temperatures represented by the radiance temperature spectrum data; and a computing section that computes surface density of the measuring object gas on the basis of the variation in intensity of the infrared ray, the background temperature of the measuring object gas, and the temperature of the measuring object gas. | 01-28-2010 |
20110108729 | THz WAVE DETECTOR - A THz wave detector including a thermal isolation structure in which a supporting unit containing electrode wirings connected to a readout circuit formed in an substrate supports a temperature detecting unit connected to the electrode wirings so that one face of said temperature detecting unit and said substrate are opposed to each other with a predetermined gap, wherein a reflective film reflecting THz waves is formed on the substrate so as to face the temperature detecting unit, an absorbing film absorbing the THz waves is formed on the temperature detecting unit, the reflective film and the temperature detecting unit form an optical resonant structure, the distance between the reflective film and the temperature detecting unit is set to 8 to 14 μm, and the sheet resistance of the absorbing film is set to 100 to 200 Ω/square. | 05-12-2011 |
20110303847 | BOLOMETER TYPE TERAHERTZ WAVE DETECTOR - A bolometer type Terahertz wave detector comprises: a temperature detecting portion having a thin bolometer film formed on a substrate, a reflective film that reflects Terahertz waves formed on the substrate at a position facing the temperature detecting portion, and an absorption film formed on the top surface of part of an eave-like member that extends to the inside from the perimeter edge section of the temperature detecting portion and that absorbs Terahertz waves. The reflective film and the absorption film form an optical resonant structure. A thermal isolation structure is formed by a support portion that supports the temperature detecting portion such that it is separated from the substrate by a gap. The eave-like member is supported by the support portion so that it is separated from the substrate by a gap. | 12-15-2011 |
20130076912 | REFLECTIVE IMAGING DEVICE AND IMAGE ACQUISITION METHOD - In order to generate a two-dimensional image of a sample in a short time using THz waves, provided is a reflective imaging device including a sample holder, a THz wave light source, a THz wave camera, a rotation mechanism for rotating the holder and the camera, and a processing unit. A sample unit includes an incidence member, a sample, and a reflection member. The sample includes a first region of only a membrane and a second region including a biopolymer. The camera detects, with regard to respective incident angles, a THz wave in which interference occurs between a component reflected at an interface between the incidence member and the sample and a component reflected at an interface between the sample and the reflection member, of each portion of the sample unit, and outputs a signal. The processing unit specifies an incident angle at which a signal of a first THz wave that interferes in the first region is relatively small and a signal of a second THz that interferes in the second region is relatively large, and generates a two-dimensional image of the sample based on the signal from the camera with regard to the specified incident angle. | 03-28-2013 |
20130265415 | TERAHERTZ IMAGING DEVICE, AND METHOD OF ELIMINATING INTERFERENCE PATTERNS FROM TERAHERTZ IMAGE - A sample is irradiated with terahertz light from a light source, so that an image (G1) is generated by capturing an image of a region (R1) including a point (S) of the sample, and an image (G2) is generated by capturing an image of a region (R2) including the point (S) and separated from the region (R1) by a distance (L). A single image (V) is generated by applying a predetermined binary operation to the images (G1) and (G2). | 10-10-2013 |
20140232931 | IMAGING SYSTEM AND IMAGING METHOD - Provided is an imaging system, including: a light source; an imaging device; a first optical system for irradiating an imaging object with light from the light source; a second optical system for causing one of light reflected from the imaging object and light transmitted through the imaging object to enter the imaging device; a control device for controlling the light source to irradiate the light with a predetermined period; and a processing device for acquiring time-series image data over a plurality of frames by controlling the light source to irradiate the light with the predetermined period, and allocating a maximum pixel intensity among the time-series pixel data of each pixel as pixel data of the each pixel to thereby obtain first image data when the light source irradiates the light. | 08-21-2014 |