Nakarai
Hiroaki Nakarai, Tochigi JP
Patent application number | Description | Published |
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20110309270 | LASER DEVICE, EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE, AND METHOD FOR MAINTAINING THE DEVICES - Provided is a laser device which is installed within a predetermined space and on a predetermined floor area, the laser device may includes: a master oscillator; at least one amplifier unit that amplifies a laser beam outputted from the master oscillator; at least one power source unit that supplies excitation energy to the at least one amplifier unit; and a movement mechanism which enables at least one among the at least one amplifier unit and the at least one power source unit to be moved in a direction parallel with a floor surface. | 12-22-2011 |
Hiroaki Nakarai, Hiratsuka-Shi JP
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20130099140 | LASER APPARATUS, EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM, AND METHOD FOR GENERATING LASER BEAM - A laser apparatus may include a seed laser device configured to output a pulse laser beam, a pulse energy adjusting unit configured to vary pulse energy of the pulse laser beam, at least one amplifier for amplifying the pulse laser beam, at least one power source for varying an excitation intensity in the at least one amplifier, and a controller configured to control the pulse energy adjusting unit on a pulse-to-pulse basis for the pulse laser beam passing therethrough and to control the at least one power source for a group of multiple pulses of the pulse laser beam. | 04-25-2013 |
20130105713 | EXTREME ULTRAVIOLET LIGHT GENERATION APPARATUS | 05-02-2013 |
Hiroaki Nakarai, Oyama JP
Patent application number | Description | Published |
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20140098830 | EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM - An extreme ultraviolet light generation system may include an optical device configured to cause an optical path of a pulse laser beam to approximately match one of a first optical path in which the pulse laser beam is focused at a plasma generation region and a second optical path in which the pulse laser beam passes outside the plasma generation region, and a control unit configured to output a control signal to the optical device so that the optical device sets the optical path of the pulse laser beam to the second optical path from when a predetermined time starts to when the number of pulses contained in a timing signal reaches a predetermined value and sets the optical path of the pulse laser beam to the first optical path from when the number of pulses reaches the predetermined value to when the predetermined time ends. | 04-10-2014 |
Hiroaki Nakarai, Oyama-Shi JP
Patent application number | Description | Published |
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20150249312 | LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS - There is provided a laser chamber housing a pair of discharge electrodes and a gas circulation fun, the laser chamber including: a magnetic bearing configured to support a shaft of the gas circulation fan, with the shaft being in non-contact with the magnetic bearing; and a touchdown bearing configured to operate as a bearing when the magnetic bearing is uncontrollable, the touchdown bearing being provided with solid lubricant configured of one or more of an Au plating layer, a Ni-containing plating layer, and a Cu plating layer. | 09-03-2015 |