| Patent application number | Description | Published |
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| 20080302963 | SHEET BEAM-TYPE TESTING APPARATUS - An electron beam apparatus such as a sheet beam based testing apparatus has an electron-optical system for irradiating an object under testing with a primary electron beam from an electron beam source, and projecting an image of a secondary electron beam emitted by the irradiation of the primary electron beam, and a detector for detecting the secondary electron beam image projected by the electron-optical system; specifically, the electron beam apparatus comprises beam generating means | 12-11-2008 |
| 20080308729 | Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former - A substrate inspection apparatus | 12-18-2008 |
| 20090032708 | Inspection system by charged particle beam and method of manufacturing devices using the system - An inspection apparatus by an electron beam comprises: an electron-optical device | 02-05-2009 |
| 20090039262 | ELECTRON BEAM APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE USING THE APPARATUS - The present invention provides an electron beam apparatus for irradiating a sample with primary electron beams to detect secondary electron beams generated from a surface of the sample by the irradiation for evaluating the sample surface. In the electron beam apparatus, an electron gun has a cathode for emitting primary electron beams. The cathode includes a plurality of emitters for emitting primary electron beams, arranged apart from one another on a circle centered at an optical axis of a primary electro-optical system. The plurality of emitters are arranged such that when the plurality of emitters are projected onto a straight line parallel with a direction in which the primary electron beams are scanned, resulting points on the straight line are spaced at equal intervals. | 02-12-2009 |
| 20090050822 | Electron beam apparatus and method of manufacturing semiconductor device using the apparatus - The present invention provides an electron beam apparatus for evaluating a sample surface, which has a primary electro-optical system for irradiating a sample with a primary electron beam, a detecting system, and a secondary electro-optical system for directing secondary electron beams emitted from the sample surface by the irradiation of the primary electron beam to the detecting system. | 02-26-2009 |
| 20110104830 | APPARATUS FOR INSPECTION WITH ELECTRON BEAM, METHOD FOR OPERATING SAME, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE USING FORMER - A substrate inspection apparatus | 05-05-2011 |
| Patent application number | Description | Published |
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| 20080198991 | Telephone and method of transmitting caller token - The user token input unit accepts an input of a user token from a user. The user verifier reads a user reference from the user reference storage and verifies the user token on the basis of the user reference. When the verification of the user token is successful, the caller token embedder reads a caller token from a caller token storage and embeds the caller token in an audio signal. The caller token extractor extracts a caller token from a received audio signal. The caller verifier reads a caller reference from the caller reference storage and verifies the caller token on the basis of the caller reference. Verification output unit outputs the result of the verification. | 08-21-2008 |
| 20090002490 | ACOUSTIC RECOGNITION APPARATUS, ACOUSTIC RECOGNITION METHOD, AND ACOUSTIC RECOGNITION PROGRAM - An acoustic recognition apparatus determines whether or not a pre-stored target acoustic signal of a target sound subject to detection is contained in an entered input acoustic signal. The acoustic recognition apparatus includes an acoustic signal analysis part, a target sound storage part, a characteristic frequency extraction part, a calculation part, and a determination part. | 01-01-2009 |
| 20110078542 | TURBO DECODING DEVICE AND COMMUNICATION DEVICE - A turbo decoding device includes a memory unit that stores data in an interleaving process performed in a process of decoding a coded signal encoded with a turbo code and an access unit that accesses the memory unit to read and write the data. The memory unit includes memory circuits and is formed as one memory space by coupling the memory circuits. Furthermore, the memory circuit functions as a first bank configuration by which a first capacity is assigned to each bank or a second bank configuration by which a second capacity is assigned to each bank in accordance with a combination of the memory circuits. Moreover, the access unit selects by which of the first bank configuration and the second bank configuration the memory unit functions in accordance with a communication method of a coded signal and accesses the memory unit in accordance with the selected bank configuration. | 03-31-2011 |
