Patent application number | Description | Published |
20090041333 | SCANNING ELECTRON MICROSCOPE - An object of the present invention is to provide a scanning electron microscope for reducing a process concerning inspection positioning or an input operation, thereby functioning with high precision at high speed. To accomplish the above object, the present invention provides a scanning electron microscope having a function for identifying a desired position on the basis of a pattern registered beforehand, which includes a means for setting information concerning the pattern kind, the interval between a plurality of parts constituting the pattern, and the size of parts constituting the pattern and a means for forming a pattern image composed of a plurality of parts on the basis of the information obtained by the concerned means. | 02-12-2009 |
20100138801 | System and Method for Detecting a Defect - A system and a method for detecting a defect, capable of extracting a defect occurring depending on finishing accuracy required for circuit operation are provided. The system includes a timing analyzer for extracting a critical path in which a high accuracy is required for a signal transmission operation as compared with other portions based on circuit design data, a critical path extractor for comparing the circuit design data with layout design data on a pattern and for extracting graphical data including the critical path extracted by the timing analyzer, an inspection recipe creator for deciding a portion to be inspected, based on coordinate information on the graphical data including the critical path extracted by the critical path extractor, and an SEM defect review apparatus for acquiring an image of the decided portion to be inspected on a wafer according to an inspection recipe created by the inspection recipe creator. | 06-03-2010 |
20130320207 | MASS SPECTROMETER - Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer. | 12-05-2013 |
20150187554 | MASS SPECTROMETER - Provided is a mass spectrometer capable of easy exchange of a measurement sample and suppressing a carryover. The mass spectrometer includes a mass spectrometry section, an ion source the internal pressure of which is reduced by a differential pumping from the mass spectrometry section and the ion source ionizes the sample gas, a sample container in which the sample gas is generated by vaporizing the measurement sample, a thin pipe that introduces the sample gas generated in the sample container into the ion source, an elastic tube of openable and closable that connects the sample container and the thin pipe, a pair of weirs that closes or opens the elastic tube so as to sandwich the elastic tube, and a cartridge that integrates the sample container, the thin pipe, and the elastic tube, and is detachable in a lump from a main body of the mass spectrometer. | 07-02-2015 |
Patent application number | Description | Published |
20080201051 | Vehicle driving force control device - A driving force control device includes an individual-wheel friction-circle limit-value calculating portion that calculates friction-circle limit-values of individual wheels, an individual-wheel requested-resultant-tire-force calculating portion that calculates requested resultant tire forces of the individual wheels, an individual-wheel resultant-tire-force calculating portion that calculates resultant tire forces of the individual wheels, an individual-wheel requested-excessive-tire-force calculating portion that calculates requested excessive tire forces of the individual wheels, an individual-wheel excessive-tire-force calculating portion that calculates excessive tire forces of the individual wheels, an excessive-tire-force calculating portion that calculates an excessive tire force, an over-torque calculating portion that calculates an over-torque, and a control-amount calculating portion that calculates a control amount that is output to an engine control unit. | 08-21-2008 |
20080208427 | Vehicle braking-force control device - A braking-force control device has a brake control function for performing brake control on a front outside wheel when a vehicle is detected to be in an oversteer condition during a turning operation and for performing brake control on a rear inside wheel when the vehicle is detected to be in an understeer condition during a turning operation. For preventing the oversteer condition, a command for reducing the engine torque is output. On the other hand, for preventing the understeer condition, the engine torque is limited in accordance with a permissible engine torque value that is calculated on the basis of a road-surface friction coefficient, and ground loads and lateral tire forces of individual wheels. If it is detected that engine braking is in operation, the engine torque is adjusted to substantially zero. | 08-28-2008 |
20080221770 | Vehicle control device - A main controller calculates permissible driving forces of individual wheels from a road-surface friction coefficient, ground loads of the individual wheels, and lateral forces of the individual wheels. The main controller then calculates a permissible engine torque on the basis of the calculated permissible driving forces so as to limit engine output. In addition, based on the calculated permissible driving forces, the main controller calculates a transfer-clutch torque for front-rear driving-force distribution control, a rear-wheel torque shift amount for left-right driving-force distribution control, and a steering-angle correction amount for steering-angle control. | 09-11-2008 |