Patent application number | Description | Published |
20080296529 | Piezoelectric thin film, piezoelectric material, and fabrication method of piezoelectric thin film and piezoelectric material, and piezoelectric resonator, actuator element, and physical sensor using piezoelectric thin film - A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has. | 12-04-2008 |
20090036779 | ULTRASOUND DIAGNOSTIC APPARATUS - Pressure distribution on a surface of an ultrasonic probe can be measured directly. Piezoelectric sensors, in which a piezoelectric thin film is formed on a film-like substrate, are arranged in the form of an array on the surface of an ultrasonic probe, and a sensor output signal processing unit outputs pressure measured for each piezoelectric sensor S | 02-05-2009 |
20120107557 | MANUFACTURING METHOD OF PIEZOELECTRIC-BODY FILM, AND PIEZOELECTRIC-BODY FILM MANUFACTURED BY THE MANUFACTURING METHOD - A method for manufacturing a piezoelectric thin film including an aluminum nitride thin film containing scandium on a substrate, the method includes: sputtering step for sputtering aluminum and scandium under an atmosphere containing at least a nitrogen gas. In the sputtering step in the method according to the present invention, a scandium content rate falls within the range from 0.5% by atom to 50% by atom when a temperature of the substrate falls within the range from 5° C. to 450° C. during the sputtering step. | 05-03-2012 |
20140326932 | PHOTOCHROMIC SUBSTANCE AND METHOD FOR PRODUCING SAME - Provided is a photochromic substance that has lower toxicity, exhibits good sensitivity in a visible light region, changes color deeply, has slow speed of color fading, has chemical and thermal stability, and has good durability. The photochromic substance has a composition represented by the formula: | 11-06-2014 |