Minoru Yamazaki
Minoru Yamazaki, Hitachinaka-Shi JP
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20120298863 | Method for Detecting Information of an Electronic Potential on a Sample and Charged Particle Beam Apparatus - An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application. | 11-29-2012 |
20130284921 | Method for Detecting Information of an Electric Potential on a Sample and Charged Particle Beam Apparatus - An object of the present invention is to provide a method and apparatus for measuring a potential on a surface of a sample using a charged particle beam while restraining a change in the potential on the sample induced by the charged particle beam application, or detecting a compensation value for a change in a condition for the apparatus caused by the sample being electrically charged. In order to achieve the above object, the present invention provides a method and apparatus for applying a voltage to a sample so that a charged particle beam does not reach the sample (hereinafter, this may be referred to as “mirror state”) in a state in which the charged particle beam is applied toward the sample, and detecting information relating to a potential on the sample using signals obtained by that voltage application. | 10-31-2013 |
Minoru Yamazaki, Ushiku JP
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20130009057 | Electron Beam Irradiation Method and Scanning Electron Microscope - The present invention has for its object to provide a charged particle beam irradiation method and a charged particle beam apparatus which can suppress unevenness of electrification even when a plurality of different kinds of materials are contained in a pre-dosing area or degrees of density of patterns inside the pre-dosing area differs with positions. | 01-10-2013 |
20140014836 | CHARGED PARTICLE BEAM APPARATUS - The charged particle beam apparatus having an opening formation member formed with an opening for passage of a charged particle beam emitted from a charged particle source, and either a detector adapted to detect charged particles having passed through the passage opening or a detector adapted to detect charged particles resulting from bombardment on another member of the charged particles having passed through the opening, comprises an aligner for aligning charged particles discharged from the sample and a control unit for controlling the aligner, wherein the control unit controls the aligner to cause it to shift trajectories of the charged particles discharged from the sample so that length measurement may be executed on the basis of detection signals before and after the alignment by the aligner. | 01-16-2014 |
Minoru Yamazaki, Tokyo JP
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20150014531 | SCANNING ELECTRON MICROSCOPE - It is an object of the present invention to provide a scanning electron microscope for discriminating an angle of an electron ejected from a sample without providing an opening for restricting the angle at outside of an axis. In order to achieve the object described above, there is proposed a scanning electron microscope which includes a deflector to deflect an irradiating position of an electron beam, and a control unit to control the deflector, and further includes a detector to detecting an electron provided by irradiating a sample with the electron beam, an opening configuring member arranged between the detector and the deflector and having an opening for passing the electron beam, and a secondary signal deflector to deflect an electron ejected from the sample, in which the secondary signal deflector is controlled to deflect the electron ejected from the sample toward an opening of passing the electron beam in accordance with a deflection control of the deflector. | 01-15-2015 |
Minoru Yamazaki, Nagano-Ken JP
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20150014878 | HOT RUNNER NOZZLE AND MOLD FOR FORMING MULTI-LAYER MOLDED ARTICLE USING THE SAME - At a filling termination stage when performing multi-layer molding by means of a hot runner nozzle, an intermediate layer in a multi-layer molded article is prevented from being formed in a shape causing the intermediate layer to enter into a sprue in a portion of a mold cavity in a mold corresponding to the sprue. The multi-layer molded article with no intermediate layer being exposed in a sprue cut portion can be therefore obtained. In this manner, a diameter of a discharge port opening and closing mechanism part for opening and closing the resin discharge ports in the shut pin is made different from a diameter of a nozzle gate opening and closing mechanism part configured of the projection for pushing out the molten resin in the nozzle gate. | 01-15-2015 |
Minoru Yamazaki, Sanyo Onoda-Shi JP
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20150024273 | LITHIUM COMPOSITE OXIDE PARTICLES FOR NON-AQUEOUS ELECTROLYTE SECONDARY BATTERIES AND PROCESS FOR PRODUCING THE SAME, AND NON-AQUEOUS ELECTROLYTE SECONDARY BATTERY - The present invention relates to lithium composite oxide particles which can be produced by mixing nickel-cobalt-manganese-based compound particles, a zirconium raw material and a lithium raw material with each other and then calcining the resulting mixture, and comprise a Zr compound that is allowed to be present on a surface thereof, in which the Zr compound is represented by the chemical formula: | 01-22-2015 |
Minoru Yamazaki, Hanishina-Gun JP
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20150079321 | HOT RUNNER NOZZLE, METAL MOLD EQUIPPED WITH HOT RUNNER NOZZLE, AND MOLDING METHOD AND MOLDED PRODUCT PROVIDED BY METAL MOLD - When a plurality of striped molded products are molded at a time, the molded products having a striped pattern and an outstanding design property are obtained by preventing part of molten resins from being unevenly distributed in an inappropriate manner when being fed into a cavity of a metal mold. A hot runner nozzle is provided with a first resin flow path and a plurality of second resin flow paths. The first flow path has a funnel section which continues with a nozzle gate at a centripetal position and which allows a first molten resin to be gathered at the centripetal position of the funnel section so as to feed the resin into the nozzle gate. The second resin flow paths have a plurality of corresponding discharge ports facing and communicating with the funnel section of the first resin flow path, each of the discharge ports being disposed around the centripetal position, so that the second molten resin different from the first molten resin is fed into the funnel section. | 03-19-2015 |