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Minami, Tokyo
Akatsuki Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110305196 | COMMUNICATION SYSTEM, FEMTO-CELL BASE STATION, AUTHENTICATION DEVICE, COMMUNICATION METHOD, AND MEMORY MEDIUM - A communication system that includes at least UE and an HLR that are used in an IMS network further includes: a Femto-cell base station that makes up a predetermined communication area, and a control unit for controlling at least communication between the UE and the HLR. The Femto-cell base station and the control unit are present between the UE and the HLR. The Femto-cell base station includes a transmission unit for transmitting messages received from the UE to the control unit and for transmitting messages received from the control unit to the UE. The control unit converts messages received from the Femto-cell base station to messages that can be recognized by the HLR, and converts messages received from the HLR to messages that can be recognized by the UE. | 12-15-2011 |
Akihiro Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120113090 | MATRIX DISPLAY DEVICE AND METHOD OF DRIVING THE SAME - In a plurality of source drivers, a unit start pulse inputted/outputted to/from the source drivers is cascaded between an ante-stage source driver and a post-stage source driver, a horizontal start pulse outputted from a timing controller is inputted to a first-stage source driver, and the duty ratio of a vertical clock is controlled by one of the plurality of cascaded unit start pulses. In a matrix display device, it is thereby possible to provide a timing controller having a simple circuit configuration which needs no counter circuit for generating a vertical clock to be outputted to a gate driver. | 05-10-2012 |
Akiyuki Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090045454 | Semiconductor non-volatile memory cell, method of producing the same, semiconductor non-volatile memory having the semiconductor non-volatile memory cell, and method of producing the same - A semiconductor non-volatile memory cell includes an Si (silicon) layer containing substrate including an activation region having a ridge portion; an element separation region embedded in both sides of the activation region; a gate electrode with a gate insulation film inbetween formed over the ridge portion for covering a part of both side surfaces of the ridge portion and an upper surface of the element separation region; a channel forming region formed in a surface layer region of the ridge portion; an extension region formed on both sides of the channel forming region in the longitudinal direction; and an electric charge accumulation layer capable of accumulating electric charges and a sidewall formed on the extension region and one or both of side surfaces of the gate electrode facing with each other in the longitudinal direction. | 02-19-2009 |
Fumihiro Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110102121 | SHEET TRANSFORMER FOR DC/DC CONVERTER - A sheet transformer includes a first core having central and lateral legs penetrating a coil on a circuit board, a plate-shaped second core positioned on an end of the first core, the cores being assembled into an integral piece and an air gap being formed between the central leg and the second core, and a fixing member for fixing the cores with respect to the coil. The fixing member has holder portions having claw portions for holding the lateral legs of the first core from a side of the second core respectively, a first spring portion extending from a side of the second core toward the circuit board, for bringing inner plane portions of the legs of the first core into contact with the coil, and a second spring portion for pressing positions of the second core which are opposite to the lateral legs. | 05-05-2011 |
| 20110280035 | LIGHTING DEVICE FOR A HEADLAMP LIGHT SOURCE - A lighting device for a headlamp light source includes an connector to be connected to cables for supplying power to the light source, and attached to the bottom of a headlamp case that houses a light source, wherein the output connector is formed such that when the lighting device is attached to the headlamp case, the bottom of a connection opening to which cables of the output connector are connected is disposed at a higher position than a bottom face inside the headlamp case. | 11-17-2011 |
Hideki Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090026934 | ADHESIVE ENCAPSULATING COMPOSITION FILM AND ORGANIC ELECTROLUMINESCENCE DEVICE - An adhesive encapsulating composition and an encapsulating film, which are useful as an encapsulant for an organic electroluminescence device or other electronic devices is provided. The adhesive encapsulating composition includes a hydrogenated cyclic olefin-based polymer and a polyisobutylene resin having a weight average molecular weight of 500,000 or more. Some embodiments of the adhesive encapsulatingā¢composition include a hydrogenated cyclic olefin-based polymer, a polyisobutylene resin having a weight average molecular weight of 500,000 or more, a photocurable resin, and a photopolymerization initiator. | 01-29-2009 |
| 20120018682 | Composite Thermoelectric Material and Method for Producing the Same - The present disclosure provides a thermoelectric material which can be formed into a flexible and thin type material. The thermoelectric material is a composite that includes a binder resin, thermoelectric material particles dispersed in the binder resin, and fine metal particles supported on a surface of the thermoelectric material particles. | 01-26-2012 |
Hidekl Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110186956 | ELECTRICALLY CONDUCTIVE POLYMER COMPOSITE AND THERMOELECTRIC DEVICE USING ELECTRICALLY CONDUCTIVE POLYMER MATERIAL - An electrically conductive composite material that includes an electrically conductive polymer, and at least one metal nanoparticle coated with a protective agent, wherein said protective agent includes a compound having a first part that has at least part of the molecular backbone of said electrically conductive polymer and a second part that interacts with said at least one metal nanoparticle. | 08-04-2011 |
Isamu Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110000827 | AIR SIEVING METHOD AND APPARATUS - An air sieving apparatus capable of sieving particles in a particle size range below 50 Ī¼m includes a cylindrical screening case defining an internal space and provided with a screen dividing the internal space into an upper space and a lower space. Powdered material is fed through a powdered material feed opening onto a bottom plate disposed to cover the lower open end of the screening case with gaps formed therebetween. Air in the screening case is sucked upward by a suction blower. The fed powdered material is dispersed by currents of air sucked through the gaps and the dispersed powdered material is sucked upward. Fine particles that have passed through the screen | 01-06-2011 |
Junichi Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20080277925 | Screw Joint for Steel Pipe and Process for Manufacturing Thereof - A threaded joint for a steel pipe comprises a pin and a box with a contact surface having a threaded part and a unthreaded metal contact part, wherein a solid lubricating film containing one or more kinds of lubricating powders selected from graphite, mica, calcium carbonate and kaolin, a copper powder, and a binder is formed on at least one contact surface of the pin and the box. | 11-13-2008 |
Kazuhiro Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090126172 | Production Method For Electric Double Layer Capacitor - A method for manufacturing an electric double layer capacitor comprising polarizable electrodes formed from a carbon material having graphite-like microcrystalline carbon, wherein said carbon material is stored for a predetermined period of time while holding said carbon material in contact with an electrolytic solution, and thereafter, at a temperature higher than room temperature, said capacitor is charged at least once with an end-of-charge voltage higher than an expected operating voltage of said capacitor, while applying to said electrodes, at the start of said charging, a pressure that is necessary to keep said carbon material from expanding in a thickness direction thereof during said charging. | 05-21-2009 |
Kazuyasu Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20080258800 | Voltage converter and semiconductor integrated circuit - There is a need for preventing a MOS transistor from being destroyed due to an inrush current from an input terminal when a boost operation starts from a boost disabling state. During the boost operation, a third MOS transistor (M | 10-23-2008 |
Keisuke Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120110646 | ACCESS AUTHORIZING APPARATUS - An access authorizing apparatus includes a receiving unit, a first transmitting/receiving unit, a token issuer and a transmitting unit. A receiving unit receives first approval information indicating that access to the resource in the device has been approved by an access approver, from the first application via the network. A first transmitting/receiving unit transmits an access approval request including the first approval information to the access approving apparatus, and receives access enable/disable information indicating whether the access to the resource by the first application is permitted, from the access approving apparatus. A token issuer, when the access enable/disable information indicates that the access to the resource is permitted, issues token information that gives authority to access the resource to the first application. A transmitting unit transmits the token information issued by the token issuer, to the first application. | 05-03-2012 |
Kenichi Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120125432 | TRANSPARENT CONDUCTIVE SUBSTRATE FOR SOLAR CELL, AND SOLAR CELL - To provide a transparent conductive substrate for a solar cell, which has a haze factor at the same level of conventional transparent conductive substrates for a solar cell, and a small amount of absorbed light at a wavelength region of about 400 nm by a tin oxide layer. | 05-24-2012 |
Koji Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20080231753 | Noise reducer for video signals - A noise reducer for a signal determines a direction of correlation for each picture element (pixel) by calculating sums of absolute differences between a block centered on the pixel and neighboring blocks centered on surrounding pixels and choosing the direction of the neighboring block with the least sum of absolute differences. The pixel is then filtered one-dimensionally by averaging it with neighboring pixels located in the direction of correlation. This noise reduction method is simple, reliable, and avoids needless loss of detail. | 09-25-2008 |
| 20100310166 | IMAGE PROCESSING APPARATUS AND METHOD AND IMAGE DISPLAY APPARATUS - A first intermediate image generating means ( | 12-09-2010 |
| 20110050700 | IMAGE PROCESSING APPARATUS AND METHOD AND IMAGE DISPLAY APPARATUS - A first intermediate image generating means ( | 03-03-2011 |
| 20110050701 | IMAGE PROCESSING APPARATUS AND METHOD AND IMAGE DISPLAY APPARATUS - An intermediate image generating means ( | 03-03-2011 |
| 20110211766 | IMAGE PROCESSING APPARATUS AND METHOD AND IMAGE DISPLAY APPARATUS - There are provided a first intermediate image generating means ( | 09-01-2011 |
| 20110298973 | IMAGE PROCESSING DEVICE AND METHOD, AND IMAGE DISPLAY DEVICE AND METHOD - To interpolate a frame between the current frame and a first delayed frame preceding the current frame, an image processing device generates test interpolation data for the first delayed frame from data in point-symmetric positions in the current frame and in a second delayed frame preceding the first delayed frame. Motion vectors pointing from the first delayed frame to the current frame are found by evaluating different test interpolation data against the actual data of the first delayed frame. These motion vectors are converted to pairs of motion vectors pointing from the first delayed frame and the current frame to the interpolated frame, and these pairs of motion vectors are used to generate accurate data for the interpolated frame from the data of the first delayed frame and the current frame. | 12-08-2011 |
| 20120008689 | FRAME INTERPOLATION DEVICE AND METHOD - To interpolate a frame between two frames of a video signal, sets of reference images are generated, each set having a different resolution level. Motion between the two frames is estimated at each resolution level by using these sets of reference images. For each pixel processed at each resolution level, multiple motion vector candidates are obtained. Information indicating the multiple motion vector candidates is used to select motion search ranges at the next higher resolution level. To determine the motion search range for a pixel, selected motion vector candidates pertaining both to the pixel itself and to its neighboring pixels are used. An interpolated frame of high image quality is thereby obtainable without increased computation and with reduced risk of major image defects due to erroneous motion estimation. | 01-12-2012 |
Masaaki Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120061959 | OUTPUT CONTROL METHOD AND OUTPUT CONTROL UNIT FOR WIND POWER PLANT - A control method for a wind turbine generator and storage battery unit connected to a power grid in parallel, includes calculating total active power and total reactive power, and switching between: a first mode in which the generator outputs turbine required active power and reactive power that can be outputted by the generator and the battery unit outputs battery required active power and battery required reactive power which correspond to a difference between the total active power and the turbine required active power and a difference between the total reactive power and the turbine required reactive power respectively; and a second mode in which the battery required active power is maintained and the battery required reactive power is reduced while the turbine reactive power is increased by an amount of the reduction of the battery required reactive power wherein apparent power exceeds a set battery unit apparent power. | 03-15-2012 |
Setsushi Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110191360 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND PROGRAM - There is provided an information processing apparatus including: an acquisition unit successively specifying fields to be processed out of a plurality of fields included in program information in electronic program guide information and acquiring a character string included in each specified field; an analysis unit analyzing the acquired character string and outputting an analysis result for dividing the character string into a plurality of units; a sequence generating unit generating, for each field, a sequence corresponding to character string lengths of the units based on the outputted analysis result; a variance value calculating unit calculating, for each field, a variance value showing a degree of variance of magnitudes of values of items in the sequence; and a specifying unit specifying, for each program, a cast member field, in which cast member names are listed, out of the plurality of fields based on the calculated variance values. | 08-04-2011 |
| 20110196669 | INFORMATION PROCESSING APPARATUS, INFORMATION PROCESSING METHOD, AND PROGRAM - There is provided an information processing apparatus including: an acquiring unit acquiring a title of content; an analyzing unit dividing the title into tokens; a calculating unit calculating, for each token, an evaluation value based on a token length and weighted according to the token's position in the title; a mapping unit mapping, for each token, a token point shown by an ordinal number showing the token's position in the title and the evaluation value, onto a coordinate plane; a deciding unit deciding, based on the mapped token points, coordinates of a criterion point used as a criterion for extracting a series identifier and an extraction criterion based on the criterion point; an extracting unit extracting token points that confoitu to the extraction criterion out of the token points; and a generating unit generating the series identifier from the character strings included in tokens associated with the extracted token points. | 08-11-2011 |
Shinichiro Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20120056501 | ROTOR SHAFT AND AC GENERATOR FOR VEHICLE - A rotor shaft is supported in a rotatable manner at both ends by bearings respectively disposed to a housing forming a part of a stator and provided with a positioning portion of the bearing in at least one shaft end. The positioning portion is formed of an annular step-like rise portion that abuts on a circular arc surface provided to an inner ring corner of the bearing. A rotor shaft capable of holding the bearing in a stable manner over a long period is thus obtained without increasing the number of components and the numbers of working processes and assembly man-hours for the shaft. It thus becomes possible to solve problems, such as an increase in cost due to a large amount of working margin and increases of the direct material cost and in weight due to a larger finishing diameter of the shaft. | 03-08-2012 |
Shunsuke Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090037156 | Design Support System - The design support system regarding the present invention comprises a node data storage means that stores node data to generate functional models which present a group of function nodes which are functions divided from performance function of apparatus which is an objective to be designed and a group of part nodes which realize the functions in mutual relations, a functional model generating means that generates the functional models in reference to the node data storage means, a node designation receiving means that receives the designation of a node among the functional models, a node selection means that selects a node which has a mutual relation with nodes to which the designation are given, a display unit that displays the node selected by the node selection means. | 02-05-2009 |
Takahiko Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110310643 | POWER CONVERSION DEVICE - According to one embodiment, an electronic device includes a positive electrode, a negative electrode, a first terminal, a second terminal, a first plurality of switching elements and anti-parallel diodes coupled between the positive electrode and the first terminal and the second terminal, a second plurality of switching elements and anti-parallel diodes coupled between the negative electrode and the first terminal and the second terminal and a PiN diode coupled between the positive electrode and the negative electrode with reverse polarity. | 12-22-2011 |
Tatsuo Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100189906 | PROCESS FOR THE FORMATION OF MULTILAYER COATING FILM AND PROCESS FOR THE PRODUCTION OF COATED MEMBERS - A three-coat one-bake type coating process for forming a multilayer coating film which attains high efficiency and brings about an excellent finished appearance. A three-coat one-bake type coating process includes applying an intermediate coating material, applying a finish base coating material, applying a clear topcoating material, and drying, wherein a two-package type coating material containing an isocyanate compound as the crosslinking agent is used as the intermediate coating material, whereby the surface fluidity of the intermediate coating is improved to make the coating surface smooth and the mixing of the intermediate coating with an upper layer and/or the volume shrinkage of the intermediate coating due to the component eliminated by curing are inhibited to give coated members having an excellent finished appearance. | 07-29-2010 |
Teruo Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100086392 | SEMICONDUCTOR CONTAINER OPENING/CLOSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD - A method is provided of manufacturing semiconductor devices formed on a semiconductor wafer, including placing the wafer in a semiconductor container and conveying the container to a semiconductor manufacturing apparatus. An opening of the container is opposed to an opening of the apparatus such that an opener of the apparatus holds a lid of the opening the container. A key of the opener is inserted to a latch groove of the lid, and the key is rotated to contact a latch of the lid. The openings are connected such that a velocity differential pressure ratio obtained by dividing the maximum velocity when the opener holding the lid horizontally moves away from the opening of the container, by the differential pressure between the inside pressure and the outside pressure of the apparatus, is set to be 0.06 ((m/s)/Pa) or less, and then the wafer is processed. | 04-08-2010 |
Tohru Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110187105 | MAINTENANCE OPERATION METHOD FOR WIND TURBINE GENERATOR AND WIND TURBINE GENERATOR - The present invention provides a maintenance operation method for a wind turbine generator and a wind turbine generator, which can effectively utilize a phase advance capacitor equipped in the wind turbine generator and contribute to the phase factor improvement of the system side. A maintenance operation method for a wind turbine generator including an induction generator | 08-04-2011 |
| 20110198854 | HANDY TERMINAL FOR WIND TURBINE GENERATOR AND WIND TURBINE GENERATOR - The present invention provides a handy terminal for a wind turbine generator and a wind turbine generator being able to improve the safety and the work efficiency in a maintenance work such as greasing work with rotating a rotational shaft. | 08-18-2011 |
| 20110204631 | HANDY TERMINAL FOR WIND TURBINE GENERATOR - A handy terminal for a wind turbine generator which the maintenance of the wind turbine generator, especially the maintenance work inside the nacelle, can be simplified while considering the safety of the maintenance operator. The handy terminal comprises a tower provided to stand on land or off-shore, a nacelle supported on the tower to be controlled to rotate in the yaw direction and a plurality of rotatable blades attached to the nacelle to be controlled to move their pitch, whereby the handy terminal is connectable to connecting ends respectively provided on the lower portion of the tower and the nacelle so as to perform various control of the wind turbine generator, the handy terminal further comprising: an operation button for generating operation signals for various control devices that are incorporated into a control circuit in the wind turbine generator; a display portion for displaying the operating state of the operation button; and a control portion for performing display control of the operation button, wherein the control portion of the operation button makes a mode selecting button to appear that selectively enables a maintenance mode or an operating mode of the wind turbine generator, and makes an operation button to appear that separately controls at least one of: a blade pitch control, a yaw brake control and an accessory motor provided on an oil circuit to control the blade pitch control and the yaw brake control that are incorporated in the wind turbine generator, correspondingly to a corresponding maintenance operation screen displayed on the display portion when the maintenance mode is selected from the selecting button. | 08-25-2011 |
| 20110215576 | WIND TURBINE GENERATOR AND METHOD OF CONTROLING THE SAME - The present invention provides a wind turbine generator and a method of controlling the same which can prevent the decline in power generation efficiency even when the generator is located where the wind is not always strong. The wind turbine generator mainly includes an anemometer, an anemoscope, a nacelle swiveling mechanism which turns a nacelle, and a control unit which controls the nacelle swiveling mechanism. The control unit controls the nacelle swiveling mechanism so as to swivel the nacelle based on the wind direction obtained from the measurement result of the anemoscope when the wind speed obtained from the measurement result of the anemometer is greater than a first threshold V | 09-08-2011 |
| 20110298213 | HANDY TERMINAL FOR WIND TURBINE GENERATOR, WIND TURBINE GENERATOR AND WIND POWER SITE - A handy terminal for a wind turbine generator that can prevent management of control logics of control devices for controlling operation of the wind turbine generator from becoming cumbersome. The handy terminal for the wind turbine generator comprises, a connecting portion that connects to a connecting end provided on the wind turbine generator, an operating ends group that generate operation signals to selectively enable control logics included in a control circuit that is incorporated in the wind turbine generator, and a display portion that displays the operating state of the operating ends, wherein the operation signals generated by the operating ends group are operation signals that selectively enables the operating or maintenance control logics of the control circuit of the corresponding wind turbine generator connected via the connecting portion, that are common to the other wind turbine generators in the same site. | 12-08-2011 |
| 20110304140 | WIND TURBINE GENERATOR AND SOUNDNESS DIAGNOSIS METHOD THEREOF - An accumulator is provided in an oil circuit of the pressure supply device and has a gas chamber for storing the pressure generated by the oil pump. A gas pressure judgment unit judges a soundness on the gas pressure of the gas chamber of the accumulator. A pitch movement judgment unit judges whether the pitch movement is performed soundly by the oil pressure accumulated in the accumulator if the gas pressure judgment unit judges that the gas pressure is sound. A start judgment unit judges a start condition to start the gas pressure judgment unit every predetermined period or when a start switch is operated. | 12-15-2011 |
Tomoyuki Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090114304 | FLEXIBLE PIPE - The formation of a resin layer, a metal layer and an insulating resin layer on an outer surface of a corrugated metal pipe for flowing a fluid provides a flexible pipe, whose corrugated metal pipe does not suffer from having apertures even with spark discharge by induced lightning. | 05-07-2009 |
| 20120068454 | PIPE JOINT - A pipe joint comprising a pressing nut into which a flexible pipe is inserted, a joint body into which the pressing nut is partially inserted, a resilient means unlocked when pushed by a tip end of the flexible pipe, a sealing member, a retainer engaging the flexible pipe, and an engaging mechanism keeping the pressing nut at a predetermined position in the joint body; the engaging mechanism comprising a stop ring, an annular groove formed on an outer surface of the pressing nut for receiving the stop ring, pluralities of engaging grooves formed on an inner surface of the joint body for receiving the stop ring and communicating with each other; the stop ring engaging both of the annular groove and the first engaging groove before the connection of the flexible pipe is completed; and when the flexible pipe is pulled after completing the connection, the stop ring moving from the first engaging groove to the second engaging groove to draw the pressing nut from the joint body, so that the normal connection of the flexible pipe can be confirmed. | 03-22-2012 |
Toshihiko Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100087064 | METHOD AND APPARATUS FOR MANUFACTURING SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE - The present inventors have found that a wafer process of VLSI (Very Large Scale Integration) has the following problem, that is, generation of foreign matters due to moisture from a wafer as a result of degassing when a barrier metal film or a first-level metal interconnect layer is formed by sputtering as a preliminary step for the formation of a tungsten plug in a pre-metal step. To overcome the problem, the present invention provides a manufacturing method of a semiconductor integrated circuit device including, in a plasma process, in-situ monitoring of moisture in a processing chamber by receiving an electromagnetic wave generated from plasma. | 04-08-2010 |
Tsuyoshi Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110025885 | IMAGING APPARATUS, IMAGE RECORDING METHOD, AND RECORDING MEDIUM - An imaging apparatus, including, an imaging section to image a subject continuously, an image processing section to perform predetermined image processing to a plurality of pieces of image data imaged by the imaging section continuously, a designating section to designate a piece of image data as main image data among the plurality of pieces of image data, and a recording section to record the plurality of pieces of image data subjected to the image processing, and the main image data, as one file. | 02-03-2011 |
Yoshihiro Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20100144062 | FABRICATING METHOD OF NONVOLATILE SEMICONDUCTOR STORAGE APPARATUS - A first electrode film, a ferroelectric film, and a second electrode film are accumulated above a semiconductor in this order, a hard mask is accumulated above the second electrode, scrub cleaning is performed on the surface of the hard mask with an surfactant, the hard mask on which the scrub cleaning is performed has been patterned according to a planar shape of a ferroelectric capacitor, and etching is performed by using as a hard mask the hard mask that has been patterned. | 06-10-2010 |
Yoshio Minami, Tokyo JP
| Patent application number | Description | Published |
|---|---|---|
| 20090050473 | Conducting belt for use with anode holder and anode holder - A conducting belt is used with an anode holder for supplying an electric current to an anode for plating a surface of a substrate such as a semiconductor wafer. The anode and the substrate are vertically disposed so as to face each other in a plating tank of a plating apparatus. The conducting belt includes a belt capable of contacting an outer circumferential edge of the anode and holding the anode. | 02-26-2009 |
| 20090301395 | PLATING APPARATUS AND PLATING METHOD - A plating apparatus has an ashing unit ( | 12-10-2009 |
| 20120100709 | PLATING APPARATUS AND PLATING METHOD - A plating apparatus allows a substrate holder to be serviced easily while ensuring easy access to the substrate holder and while a substrate is being processed in the plating apparatus. The plating apparatus includes a plating section for plating a substrate, a substrate holder for holding the substrate, a substrate holder transporter for holding and transporting the substrate holder, a stocker for storing the substrate holder, and a stocker setting section for storing the stocker therein. The stocker includes a moving mechanism for moving the stocker into and out of the stocker setting section. | 04-26-2012 |