Patent application number | Description | Published |
20100003406 | APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION - Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel. | 01-07-2010 |
20120000422 | APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION - Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel. | 01-05-2012 |
20120237693 | IN-SITU CLEAN PROCESS FOR METAL DEPOSITION CHAMBERS - Embodiments of the invention include methods for in-situ chamber dry clean for metal deposition chambers. In one embodiment, a method for in-situ chamber dry clean after a metal deposition process includes placing a substrate in a processing chamber, performing a metal deposition process on the substrate in the processing chamber, removing the substrate from the support pedestal, and performing an in-situ cleaning process by supplying a cleaning gas containing H | 09-20-2012 |
20120258280 | EXTENDED LIFE TEXTURED CHAMBER COMPONENTS AND METHOD FOR FABRICATING SAME - A processing chamber component and method for fabricating the same are provided. The processing chamber component is fabricated in the manner described herein and includes the creation of at least a macro texture on a surface of the chamber component. The macro texture is defined by a plurality of engineered features arranged in a predefined orientation on the surface of the chamber component. In some embodiments, the engineered features prevent formation of a line of sight surface defined between the features to enhance retention of films deposited on the chamber component. | 10-11-2012 |
20130008984 | APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION - Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel. | 01-10-2013 |
20140087091 | APPARATUSES AND METHODS FOR ATOMIC LAYER DEPOSITION - Embodiments of the invention provide apparatuses and methods for atomic layer deposition (ALD), such as plasma-enhanced ALD (PE-ALD). In some embodiments, a PE-ALD chamber is provided which includes a chamber lid assembly coupled with a chamber body having a substrate support therein. In one embodiment, the chamber lid assembly has an inlet manifold assembly containing an annular channel encompassing a centralized channel, wherein the centralized channel extends through the inlet manifold assembly, and the inlet manifold assembly further contains injection holes extending from the annular channel, through a sidewall of the centralized channel, and to the centralized channel. The chamber lid assembly further contains a showerhead assembly disposed below the inlet manifold assembly, a water box disposed between the inlet manifold assembly and the showerhead assembly, and a remote plasma system (RPS) disposed above and coupled with the inlet manifold assembly, and in fluid communication with the centralized channel. | 03-27-2014 |
20140120700 | PLASMA TREATMENT OF FILM FOR IMPURITY REMOVAL - Methods for plasma treatment of films to remove impurities are disclosed herein. Methods for removing impurities can include positioning a substrate with a barrier layer in a processing chamber, the barrier layer comprising a barrier metal and one or more impurities, maintaining the substrate at a bias, creating a plasma comprising a treatment gas, the treatment gas comprising an inert gas, delivering the treatment gas to the substrate to reduce the ratio of one or more impurities in the barrier layer, and reacting a deposition gas comprising a metal halide and hydrogen-containing gas to deposit a bulk metal layer on the barrier layer. The methods can further include the use of diborane to create selective nucleation in features over surface regions of the substrate. | 05-01-2014 |
Patent application number | Description | Published |
20080272140 | Cassette for dispensing flexible tubing therefrom - In a cassette for dispensing flexible tubing a cassette body includes a central tubular portion defining an aperture extending therethrough. An outer wall surrounds the central tubular portion and a cassette bottom extends between and connects the outer wall and the central tubular portion. The outer wall, the cassette bottom and the central tubular portion cooperate to define an interior area that surrounds the central tubular portion. A length of flexible tubing is positioned in the interior area. The cassette bottom includes first registration features and a cover is coupled to the body and at least partially overlies the interior area, the cover defining second registration features matingly engageable with the first registration features so that cassettes can be stacked one-on-top-of-the-other with the cooperation of the first and second registration features preventing successively stacked cassettes from shifting relative to one another. | 11-06-2008 |
20080296398 | Systems and methods for spraying water and mixtures of water and other materials - A mixing spray device adapted to mix an added material with source water supplied from a hose. The mixing spray device comprises a main body and a container that may be detachably attached to the main body. The mixing spray device may be configured to operate in an off configuration in which nothing is dispensed, a water configuration in which only water is dispense, and a mixture configuration in which both water and the added material are dispensed. The mixing spray device may also comprise an attachment assembly that is rotatably connected to a handle portion. The container is detachably attached to the attachment assembly and thus may rotate relative to the handle portion. The container may be provided with a container member, an interface member, and a restriction member. The container may be attached to the main body using a flange on the container and a latch structure on the main body. | 12-04-2008 |
20090126320 | Waste disposal devices and methods - Waste disposal devices and methods are provided. The device includes a housing, a lid, a bucket frame, a pair of members, and a foot pedal. The foot pedal is operatively associated with the lid and the pair of members so that the lid is in the closed position and the pair of members is in the non-use position when the foot pedal is in the upper position. Further, the foot pedal is operatively associated with the lid and the pair of members so that the lid is in the open position and the pair of members is in the use position when the foot pedal is in the lower position. | 05-21-2009 |
20090127260 | Waste disposal devices and methods - Waste disposal devices and methods are provided. The device includes a housing, a lid, a bucket frame, a pair of members, and a foot pedal. The foot pedal is operatively associated with the lid and the pair of members so that the lid is in the closed position and the pair of members is in the non-use position when the foot pedal is in the upper position. Further, the foot pedal is operatively associated with the lid and the pair of members so that the lid is in the open position and the pair of members is in the use position when the foot pedal is in the lower position. | 05-21-2009 |
20150076153 | Waste Disposal Services and Methods - Waste disposal devices and methods are provided. The device includes a housing, a lid, a bucket frame, a pair of members, and a foot pedal. The foot pedal is operatively associated with the lid and the pair of members so that the lid is in the closed position and the pair of members is in the non-use position when the foot pedal is in the upper position. Further, the foot pedal is operatively associated with the lid and the pair of members so that the lid is in the open position and the pair of members is in the use position when the foot pedal is in the lower position. | 03-19-2015 |
Patent application number | Description | Published |
20120124479 | Method And System For Tagging Content - Systems and methods for tagging digital content are provided. In some embodiments, a method comprises receiving and storing personal data of a first user of an internet-based social network. The personal data of the first user can include one or more digital images or other digital content that the first user is willing to share with other users of the social network. Accordingly, a request from a second user of the internet-based social network can be received to view some of the digital content of the first user. A viewer image can be used to tag the digital content of the first user allowing the owner of the digital content to quick determine the viewers. The viewer image can be a personal profile picture, an image, an icon, an avatar (two-dimensional or three-dimensional), or other on-screen representation that includes a visual indicator of the second user. | 05-17-2012 |
20120124508 | Method And System For A Personal Network - Systems and methods for asynchronous communications within an information sharing platform are provided. Traditional social network models use bi-directional friendship or unidirectional following. In contrast to these models, embodiments of the present invention provide for a unidirectional sharing friendship model. The unidirectional friendship model allows people to share information through a path of communications with a set of recipients selected by the sharer. | 05-17-2012 |
20130339449 | Method and System for Tagging Content - Systems and methods for tagging digital content are provided. In some embodiments, a method comprises receiving and storing personal data of a first user of an internet-based social network. The personal data of the first user can include one or more digital images or other digital content that the first user is willing to share with other users of the social network. Accordingly, a request from a second user of the internet-based social network can be received to view some of the digital content of the first user. A viewer image can be used to tag the digital content of the first user allowing the owner of the digital content to quick determine the viewers. The viewer image can be a personal profile picture, an image, an icon, an avatar (two-dimensional or three-dimensional), or other on-screen representation that includes a visual indicator of the second user. | 12-19-2013 |