Patent application number | Description | Published |
20090274981 | METHOD OF DETECTING REPEATING DEFECTS IN LITHOGRAPHY MASKS ON THE BASIS OF TEST SUBSTRATES EXPOSED UNDER VARYING CONDITIONS - Mask defects, such as crystal growth defects and the like, may be efficiently detected and estimated at an early stage of their development by generating test images of the mask under consideration and inspecting the images on the basis of wafer inspection techniques in order to identify repeatedly occurring defects. In some illustrative embodiments, the exposure process for generating the mask images may be performed on the basis of different exposure parameters, such as exposure doses, in order to enhance the probability of detecting defects and also estimating the effect thereof depending on the varying exposure parameters. Consequently, increased reliability may be achieved compared to conventional direct mask inspection techniques. | 11-05-2009 |
20100330757 | ENHANCED CAP LAYER INTEGRITY IN A HIGH-K METAL GATE STACK BY USING A HARD MASK FOR OFFSET SPACER PATTERNING - When forming transistor elements on the basis of sophisticated high-k metal gate structures, the efficiency of a replacement gate approach may be enhanced by more efficiently adjusting the gate height of transistors of different conductivity type when the dielectric cap layers of transistors may have experienced a different process history and may thus require a subsequent adaptation of the final cap layer thickness in one type of the transistors. For this purpose, a hard mask material may be used during a process sequence for forming offset spacer elements in one gate electrode structure while covering another gate electrode structure. | 12-30-2010 |
20100330808 | CAP LAYER REMOVAL IN A HIGH-K METAL GATE STACK BY USING AN ETCH PROCESS - In a replacement gate approach, the dielectric cap layers of the gate electrode structures are removed in a separate removal process, such as a plasma assisted etch process, in order to provide superior process conditions during the subsequent planarization of the interlayer dielectric material for exposing the sacrificial gate material. Due to the superior process conditions, the selective removal of the sacrificial gate material may be accomplished with enhanced uniformity, thereby also contributing to superior stability of transistor characteristics. | 12-30-2010 |
20120156865 | Enhanced Patterning Uniformity of Gate Electrodes of a Semiconductor Device by Late Gate Doping - When forming sophisticated semiconductor-based gate electrode structures of transistors, the pre-doping of one type of gate electrode structure may be accomplished after the actual patterning of the electrode material by using an appropriate mask or fill material for covering the active regions and using a lithography mask. In this manner, a high degree of flexibility is provided with respect to selecting an appropriate patterning regime, while at the same time a uniform and superior cross-sectional shape for any type of gate electrode structure is obtained. | 06-21-2012 |
20120319205 | HIGH-K METAL GATE ELECTRODE STRUCTURES FORMED BY REDUCING A GATE FILL ASPECT RATIO IN REPLACEMENT GATE TECHNOLOGY - When forming sophisticated high-k metal gate electrode structures on the basis of a replacement gate approach, the fill conditions upon filling in the highly conductive electrode metal, such as aluminum, may be enhanced by removing an upper portion of the final work function metal, for instance a titanium nitride material in P-channel transistors. In some illustrative embodiments, the selective removal of the metal-containing electrode material in an upper portion of the gate opening may be accomplished without unduly increasing overall process complexity. | 12-20-2012 |
20130189833 | Method of Forming Self-Aligned Contacts for a Semiconductor Device - Disclosed herein is a method of forming self-aligned contacts for a semiconductor device. In one example, the method includes forming a plurality of spaced-apart sacrificial gate electrodes above a semiconducting substrate, wherein each of the gate electrodes has a gate cap layer positioned on the gate electrode, and performing at least one etching process to define a self-aligned contact opening between the plurality of spaced-apart sacrificial gate electrodes. The method further includes removing the gate cap layers to thereby expose an upper surface of each of the sacrificial gate electrodes, depositing at least one layer of conductive material in said self-aligned contact opening and removing portions of the at least one layer of conductive material that are positioned outside of the self-aligned contact opening to thereby define at least a portion of a self-aligned contact positioned in the self-aligned contact opening. | 07-25-2013 |
20140030637 | RETICLES FOR USE IN FORMING IMPLANT MASKING LAYERS AND METHODS OF FORMING IMPLANT MASKING LAYERS - In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the arrangement is offset from the center of the body, and at least one open feature defined on or through the body of the reticle. In another example, a method is disclosed that includes forming a layer of photoresist above a plurality of functional die and a plurality of incomplete die, exposing the photoresist material positioned above at least one of the functional die and/or at least one of the incomplete die, performing an incomplete die exposure processes via an open feature of the reticle to expose substantially all of the photoresist material positioned above the plurality of incomplete die, and developing the photoresist to remove the portions of the photoresist material positioned above the incomplete die. | 01-30-2014 |
20140329173 | RETICLES FOR USE IN FORMING IMPLANT MASKING LAYERS AND METHODS OF FORMING IMPLANT MASKING LAYERS - In one example, a reticle disclosed herein includes a body having a center, an arrangement of a plurality of exposure patterns, wherein a center of the arrangement is offset from the center of the body, and at least one open feature defined on or through the body of the reticle. In another example, a method is disclosed that includes forming a layer of photoresist above a plurality of functional die and a plurality of incomplete die, exposing the photoresist material positioned above at least one of the functional die and/or at least one of the incomplete die, performing an incomplete die exposure processes via an open feature of the reticle to expose substantially all of the photoresist material positioned above the plurality of incomplete die, and developing the photoresist to remove the portions of the photoresist material positioned above the incomplete die. | 11-06-2014 |
Patent application number | Description | Published |
20110127744 | DAMPING BUSHING FOR TORSION-BEAM REAR AXLE OF A MOTOR VEHICLE - A damping bushing is provided for an axle bearing of a trailing arm of a torsion-beam rear axle for a motor vehicle, in particular for an automobile, which includes, but is not limited to a bushing outer sleeve, a bushing inner sleeve, and a damping body. The interposed damping body is disposed coaxially to the bushing outer sleeve and to the bushing inner sleeve between these two elements. The bushing inner sleeve forms a radially outwardly extending spherical surface and the damping bushing has at least one further element that abuts extensively against the spherical surface formed by the bushing inner sleeve. Furthermore, a torsion-beam axle is provided that is fitted with these bushings. | 06-02-2011 |
20120091759 | REAR FLOOR STRUCTURE FOR A MOTOR VEHICLE - A rear floor structure for a motor vehicle includes, but is not limited to two longitudinal girders extending between rear wheel houses. A downwardly open pocket for receiving a shock absorber is formed in each of the longitudinal girders. | 04-19-2012 |
20120217715 | SUSPENSION OF A VEHICLE AXLE AND VEHICLE - A suspension is provided for a vehicle axle, with a twist-beam axle having two trailing arms interconnected via a cross brace, of which each trailing arm comprises a mounting device for the rotatable fastening of the twist-beam axle to a vehicle body, which includes, but is not limited to a bushing and a connecting element, which is formed on the trailing arm and in which the bushing is received such that the twist-beam axle can be pivoted about the longitudinal axis of the bushing. The bushing is fastened to a holder, which can be connected to the vehicle body, and the bushing with its longitudinal axis is arranged in a horizontal vehicle plane. | 08-30-2012 |
20150360614 | PROCESS FOR REPRESENTING VEHICLE SURROUNDINGS INFORMATION OF A MOTOR VEHICLE - The invention relates to a process for representing vehicle surroundings information of a motor vehicle, wherein the process comprises the following steps:
| 12-17-2015 |
Patent application number | Description | Published |
20100001227 | Refrigerant - This invention relates to a refrigerant that is azeotropic or near-azeotropic and comprises a binary blend of R1270 and R161, R170 and R717, or R744 and R41. In a first embodiment, the binary blend has a molar composition of 50 to 80 percent R1270, the remainder being R161. In a second embodiment, the binary blend has a molar composition of 30 to 60 percent R717, the remainder being R170. In a third embodiment the binary blend has a molar composition of 20 to 60 percent R744, the remainder being R161. | 01-07-2010 |
20110079026 | Refrigerant - A refrigerant that is azeotropic or near-azeotropic comprises a binary blend of R744 and R41. In one embodiment the binary blend has a molar composition of 20 to 60 percent R744, the remainder being R41. | 04-07-2011 |
20120017610 | Refrigerant - A refrigerant that is azeotropic or near-azeotropic comprises a binary blend of R744 and R41. In one embodiment the binary blend has a molar composition of 20 to 60 percent R744, the remainder being R41. | 01-26-2012 |
Patent application number | Description | Published |
20090040503 | SYSTEM AND METHOD FOR ANALYZING ROLLING STOCK WHEELS - An exemplary system and method for analyzing rolling stock wheels helps allow a wheel to be analyzed at speed, reducing any need for manual inspections or other related delays. An exemplary system may include one or more strobe lights and one or more high-speed cameras to capture images of the rolling stock wheel(s) at speed. The images may include one or more markers to assist in analyzing various parameters of the rolling stock wheel. The exemplary system may include one or more backface illumination plates to assist in illuminating the rolling stock wheel(s) and/or the one or more marker(s). | 02-12-2009 |
20110024576 | SYSTEM AND METHOD FOR MONITORING CONDITION OF RAIL CAR WHEELS, BRAKES AND BEARINGS - A system and method for detecting failing rail car wheels, brakes, bearings, and/or other components of a rail car may include at least one thermal sensor and at least one image capture device. The thermal sensor(s) and image capture devices(s) are usable to help determine whether there is a failure or potential failure of a component of a wheel set by detecting, measuring and/or comparing a temperature of various portions of the wheel set. If the temperature is higher than expected, it may indicate, for example, a stuck brake, a failing bearing, and/or some other failure of the wheel set. If the temperature is lower than expected, it could indicate that a brake of the wheel set is unexpectedly diengaged and/or some other failure of the wheel set. | 02-03-2011 |
20120194665 | CAMERA ASSEMBLY FOR THE EXTRACTION OF IMAGE DEPTH DISCONTINUITY AND METHOD OF USE - A machine vision system is provided. The machine vision system includes a camera. A first flash unit is in communication with the camera and adapted to emit light or a first range of wavelengths in synchronization with operation of the camera. A second flash unit is in communication with the camera and adapted to emit light of a second range of wavelengths in synchronization with operation of the camera. The light of the first range of wavelengths does not overlap the wavelength of the light of the second range of wavelengths. | 08-02-2012 |
20130175406 | SYSTEM AND METHOD FOR MONITORING CONDITION OF RAIL CAR WHEELS, BRAKES AND BEARINGS - A system and method for detecting failing rail car wheels, brakes, bearings, and/or other components of a rail car may include at least one thermal sensor and at least one image capture device. The thermal sensor(s) and image capture devices(s) are usable to help determine whether there is a failure or potential failure of a component of a wheel set by detecting, measuring and/or comparing a temperature of various portions of the wheel set. If the temperature is higher than expected, it may indicate, for example, a stuck brake, a failing bearing, and/or some other failure of the wheel set. If the temperature is lower than expected, it could indicate that a brake of the wheel set is unexpectedly disengaged and/or some other failure of the wheel set. | 07-11-2013 |