Patent application number | Description | Published |
20130078060 | TRANSFER ROBOT AND SUBSTRATE PROCESSING APPARATUS - A transfer robot includes an arm unit having a hand capable of holding one of transferred objects, a base unit mounted to an installation frame and horizontally rotatably supporting the arm unit, an attachment member for attaching the base unit to the installation frame, and an elevation mechanism arranged within the base unit and provided with an elevation member linked to the arm unit. The elevation mechanism is configured to move the arm unit up and down within an arm-unit up/down movement range defined above the base unit by moving the elevation member up and down along a vertical shaft. The base unit is fixed to the installation frame in a state that a portion of the base unit extending by a specified height from a bottom wall of the base unit to the attachment member is embedded in the base receiving recess of the installation frame. | 03-28-2013 |
20130195586 | TRANSMISSION MECHANISM, SUBSTRATE POSITIONING DEVICE AND ROBOT - A transmission mechanism includes: a drive pulley which is provided on a drive shaft and has external teeth with a predetermined pitch width; a driven pulley which is provided on a driven shaft and has external teeth with the pitch width; and a belt having internal teeth with the pitch width which engage with the external teeth of the drive pulley and the driven pulley. Further, the belt includes sub-belts having a periodic variation characteristic in which the pitch width varies periodically, and the sub-belts are arranged in a state where phases of the periodic variation characteristic thereof are shifted from each other. | 08-01-2013 |
20130195598 | TRANSFER ROBOT - A transfer robot according to an embodiment includes an arm and a body. The arm is provided, at a terminal end thereof, with a robot hand transferring a thin plate-like workpiece, and operates in horizontal directions. The body includes a lifting and lowering mechanism that lifts and lowers the arm. In the transfer robot, at least a part of the body is disposed outside a side wall of a transfer room that is connected to an opening and closing device opening and closing a storage container for the thin plate-like workpiece and to a processing room processing the thin plate-like workpiece. | 08-01-2013 |
20130195599 | ROBOT - A robot includes an arm unit having a base end portion rotatably installed through a joint part. The arm unit includes a housing and a specified member arranged within the housing. At least a portion of the housing is made of a transparent material. | 08-01-2013 |
20130195600 | ROBOT - A robot includes an arm having a base end portion rotatably installed through a joint part and a tip end portion in which an output shaft is installed; and a drive mechanism arranged within the arm and configured to drive the output shaft at a reduced speed. The drive mechanism includes a motor having a motor shaft, a driving pulley attached to the motor shaft, a driven pulley attached to the output shaft, at least one intermediate pulley provided between the driving pulley and the driven pulley, and a plurality of belts for operatively interconnecting the driving pulley and the driven pulley through the intermediate pulley. | 08-01-2013 |
20150015014 | SUCTION STRUCTURE, ROBOT HAND AND ROBOT - A suction structure includes a fixing base, a pad fixed to the fixing base and a seal member arranged between the pad and the fixing base. The pad includes a contact portion arranged to make contact with a target object to be sucked, a space surrounded by the contact portion, a suction hole through which the space communicates with a vacuum source via the seal member, and one or more support portions fixing the pad to the fixing base. Each of the support portions is arranged on an axis of tilting movement, and being provided with a twist portion for supporting the contact portion such that the contact portion makes the tilting movement about the axis. | 01-15-2015 |
20150246447 | SUCTION PAD, ROBOT HAND AND ROBOT - A suction pad includes a pad portion for holding a target object by suction and having a first and a second connection end portion; and a first and a second fixing portion provided at positions spaced apart from the pad portion so as to be opposite to each other across the pad portion to fix the pad portion. The suction pad further includes a first support portion having an extension length larger than a spaced-apart distance between the pad portion and the first fixing portion and connecting the first connection end portion to the first fixing portion; and a second support portion having an extension length larger than a spaced-apart distance between the pad portion and the second fixing portion and connecting the second connection end portion to the second fixing portion. | 09-03-2015 |