Patent application number | Description | Published |
20090213188 | METHOD OF MANUFACTURING AN ACTUATOR APPARATUS, A METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS - A method of manufacturing an actuator apparatus includes forming, on the base plate, a test pattern that is electrically discontinuous with the electrodes of the piezoelectric element and has the same layer as the lower electrode, the test pattern having the lower electrode with the upper electrode and the piezoelectric material layer removed by etching, and measuring electric resistance of the lower electrode of the test pattern to acquire the etch amount of the lower electrode when the piezoelectric element is formed. | 08-27-2009 |
20090244208 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO | 10-01-2009 |
20090244209 | Liquid Ejecting Head, Liquid Ejecting Apparatus, and Actuator - A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO | 10-01-2009 |
20090244210 | Liquid Ejecting Head, Liquid Ejecting Apparatus, and Actuator - A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO | 10-01-2009 |
20090244212 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements including a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode to cover end faces of the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO | 10-01-2009 |
20090244213 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejecting head includes a flow passage forming substrate that includes a plurality of pressure generating chambers juxtaposed to each other and each in communication with a nozzle for ejecting droplets, and piezoelectric elements disposed on the flow passage forming substrate with a diaphragm interposed therebetween. The piezoelectric elements include a lower electrode, a piezoelectric layer, and an upper electrode. The piezoelectric layer tapers downward at its ends. The lower electrode has a width smaller than the width of each of the pressure generating chambers. The piezoelectric layer has a larger width than the lower electrode. The diaphragm has a top layer formed of a titanium oxide (TiO | 10-01-2009 |
20100079558 | PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS - A piezoelectric element includes in a laminated state a piezoelectric layer, a first electrode formed on a first surface of the piezoelectric layer, and a second electrode formed on a second surface of the piezoelectric layer which is opposite to the first surface. The piezoelectric layer has a film thickness of 5 μm or less, and has a flat portion formed as a second surface in parallel with the first surface, and a lateral portion inclined downwardly from the flat portion towards the first surface. The second electrode has a central portion formed in parallel with the flat portion, and a slope portion inclined downwardly from the central portion towards the flat portion. The inclination angle of the slope portion to the flat portion is gentle as compared with the inclination angle of the lateral portion to the first surface. | 04-01-2010 |
20100201757 | PIEZOELECTRIC ELEMENT, ACTUATOR DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS - A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer | 08-12-2010 |
20100231658 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejecting head includes a flow channel forming substrate in which pressure generating chambers in communication with nozzles are formed; a piezoelectric element made up of a first electrode formed over the flow channel forming substrate, a piezoelectric layer formed over the first electrode and a second electrode formed over the piezoelectric layer; and a coating film provided by coating the piezoelectric element, wherein a hollow section formed by removing the coating film and a part of the second electrode is provided at an area opposite to the piezoelectric element, and an inclination angle θ1 of an end face of the coating film defining the hollow section with respect to the flow channel forming substrate and an inclination angle θ2 of an end face of the second electrode defining the hollow section satisfy a relationship of θ2<θ1. | 09-16-2010 |
20110219592 | METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR - In sputter etching to improve the adhesion between upper electrodes and lead electrodes, the sputter etching of surfaces of the upper electrodes under an Ar gas flow at a flow rate of 60 sccm or more can reduce the residence time of Ar ions on the surfaces of the upper electrodes because of the Ar gas flow. This can prevent the charging of the upper electrodes due to the buildup of ionized Ar gas on the surfaces, reduce the influence of charging on piezoelectric elements, and provide a method for manufacturing a piezoelectric actuator that includes the piezoelectric elements each including a piezoelectric layer having small variations in hysteresis characteristics and deformation characteristics. | 09-15-2011 |
20110221832 | LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS - A piezoelectric element includes a first electrode which is an individual electrode, a piezoelectric layer, and a second electrode which is a common electrode. The piezoelectric element is provided with a piezoelectric active section and a piezoelectric nonactive section so as to face the pressure generating chambers. The piezoelectric nonactive section extends to the outside of the pressure generating chambers. On the piezoelectric layer of the piezoelectric nonactive section, a stress controlling layer is provided which has the same direction of internal stress as internal stress of the second electrode and is electrically insulated from the second electrode. | 09-15-2011 |
20120056944 | PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ELEMENT - A first lead electrode containing nickel and chromium contacts a second upper electrode containing titanium. Here, since a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of titanium is smaller than a difference between the normal electrode potential of nickel and chromium and the normal electrode potential of iridium, electric corrosion can be made difficult to occur as compared with the case where the first lead electrode containing nickel and chromium contacts a first upper electrode containing iridium. Therefore, a piezoelectric element can be obtained in which an increase in resistance due to the narrowing of the contact area between an upper electrode and a lead electrode for upper electrode or the separation of the lead electrode for upper electrode can be suppressed and which can be driven by a given voltage. | 03-08-2012 |
20130083133 | PIEZOELECTRIC ELEMENT, ACTUATOR DEVICE, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS - A piezoelectric element includes a lower electrode film disposed on a substrate, a piezoelectric layer | 04-04-2013 |