Patent application number | Description | Published |
20080263502 | MASK PATTERN DATA GENERATING METHOD, INFORMATION PROCESSING APPARATUS, PHOTOMASK FABRICATION SYSTEM, AND IMAGE SENSING APPARATUS - A method for generating mask pattern data of a photomask used to form microlenses divides a pattern formation surface of a mask pattern to be used for the photomask into a plurality of grid cells, acquires data which represents transmitted light distribution of the mask pattern to be used for the photomask, determines whether to place a shield on each of the plurality of grid cells by binarizing the plurality of grid cells in order of increasing or decreasing distance from a center of the pattern formation surface using an error diffusion method to acquire the transmitted light distribution, and generates mask pattern data which represents an arrangement of the shields based on results from the determining step. | 10-23-2008 |
20100066876 | PHOTOELECTRIC CONVERSION DEVICE AND IMAGING SYSTEM - A photoelectric conversion device comprises a semiconductor substrate; a multilayer wiring structure; a first color filter layer including a plurality of first color filters which are arranged above a first photoelectric conversion units to allow light of a first color to enter the first photoelectric conversion units, each first color filter being connected to an adjacent first color filter; and a second color filter layer including a plurality of second color filters which are arranged above a second photoelectric conversion units to allow light of a second color to enter the second photoelectric conversion units, wherein the multilayer wiring structure including an uppermost wiring layer which defines the aperture regions corresponding to the respective photoelectric conversion units, and an insulation film arranged to cover the uppermost wiring layer, and wherein the first color filter layer and the second color filter layer are arranged to cover the insulation film. | 03-18-2010 |
20110165503 | METHOD OF GENERATING PHOTOMASK DATA, METHOD OF FABRICATING PHOTOMASK, MEMORY MEDIUM STORING PROGRAM FOR GENERATING PHOTOMASK DATA, METHOD OF MANUFACTURING SOLID-STATE IMAGE SENSOR HAVING MICROLENS ARRAY AND METHOD OF MANUFACTURING MICROLENS ARRAY - A method of generating photomask data for fabricating a microlens array, the photomask having a microlens pattern including light-shielding portions and non-light-shielding portions, in each rectangular region including a surrounding region having four sides of the rectangular region as outer edges and a primary region having boundaries that are inner edges of the surrounding region, the surrounding region being configured by four strip regions each including one of the four sides as its part, and a width between the outer edge and the inner edge being not more than 1/2 of a wavelength of exposure light, includes determining a layout of light-shielding portions and non-light-shielding portions in the surrounding region so that a density of light-shielding portions is set to fall within a range from 0% to 15%. | 07-07-2011 |
20110170197 | Method of Fabricating a Photomask Used to Form a Lens - A method of fabricating a photomask used to form a lens. The method includes the steps of generating mask pattern data for each of a plurality of grid cells constituting a mask pattern for the lens, and fabricating the photomask based on the mask pattern data. The step of generating the mask pattern data includes acquiring data which represents a transmitted light distribution required for the photomask to fabricate the lens, in which the transmitted light distribution includes a quantity of transmitted light in each of the plurality of grid cells, and determining whether to place a shield on each of the plurality of grid cells by binarizing the quantity of transmitted light in each of the plurality of grid cells in order of increasing or decreasing distance from a center of the mask pattern using an error diffusion method. | 07-14-2011 |
20120043634 | METHOD OF MANUFACTURING MICROLENS ARRAY, METHOD OF MANUFACTURING SOLID-STATE IMAGE SENSOR, AND SOLID-STATE IMAGE SENSOR - A method of manufacturing a microlens array includes forming a resist film on a structure including a plurality of light-receiving portions, exposing the resist film using a photomask in which a plurality of lens patterns for forming a plurality of microlenses are arranged, forming a resist pattern by developing the exposed resist film, and forming the plurality of microlens by annealing the resist pattern, wherein the plurality of lens patterns include lens patterns having exposure light transmittance distributions different from each other. | 02-23-2012 |
20120200728 | PHOTOELECTRIC CONVERSION APPARATUS AND IMAGE SENSING SYSTEM - A photoelectric conversion apparatus at least includes an insulating film, a plurality of high-refractive-index members provided so as to correspond respectively to individual photoelectric conversion portions, being surrounded by the insulating film and having a refractive index higher than the refractive index of the insulating film, and a high-refractive-index film provided on the insulating film so as to connect the plurality of high-refractive-index members to one another and having a refractive index higher than the refractive index of the insulating film, and lens portions lying next to each other from among a plurality of lens portions border each other. | 08-09-2012 |
20130335590 | SOLID-STATE IMAGE SENSOR, METHOD OF MANUFACTURING THE SAME, AND CAMERA - A method of manufacturing a solid-state image sensor includes preparing a structure including a photoelectric converter formed in an image sensing region and a pad electrode formed in a pad region, forming a first organic film including a first organic portion arranged in the image sensing region of the structure in the image sensing region and the pad region, forming a color filter layer on the first organic portion, forming a second organic film in the image sensing region and the pad region, forming an inorganic film in the image sensing region and the pad region, and etching the inorganic film, the second organic film, and the first organic film so as to form an opening which communicates with the pad electrode. | 12-19-2013 |
20140191349 | SOLID-STATE IMAGING APPARATUS AND METHOD OF MANUFACTURING THE SAME - The present invention provides a solid-state imaging apparatus which has hollow portions provided around each of color filters and achieves the prevention of the peeling of each of the color filters. The solid-state imaging apparatus having a plurality of light receiving portions provided on a semiconductor substrate includes: a plurality of color filters arranged correspondingly to each of the plurality of light receiving portions; and hollow portions formed around each of the plurality of color filters, wherein each of the color filters has one peripheral part contacting with adjacent one or more of the color filters. | 07-10-2014 |
20140199801 | MANUFACTURING METHOD OF SOLID-STATE IMAGING APPARATUS - A color filter | 07-17-2014 |
20140199802 | MANUFACTURING METHOD OF SOLID-STATE IMAGING APPARATUS - To realize simplification of a process of forming hollow portions in a solid-state imaging apparatus, a plurality of light receiving portions is formed on a semiconductor substrate, and color filter layers as hollow portion forming layers are formed above the semiconductor substrate (FIG. | 07-17-2014 |
20140199803 | SOLID STATE IMAGE PICKUP APPARATUS AND METHOD FOR MANUFACTURING THE SAME - When forming a hollow portion between each color filter, in order to realize the formation of the hollow portions with a narrower width, a plurality of light receiving portions are formed on the upper surface of a semiconductor substrate, a plurality of color filters corresponding to each of the light receiving portions are formed above the semiconductor substrate, a photoresist is formed on each color filter, side walls are formed on the side surfaces of the photoresist, and a hollow portion is formed between each color filter by performing etching using at least the side walls as a mask. | 07-17-2014 |
20140349439 | ELECTRONIC DEVICE, METHOD OF MANUFACTURING THE SAME, AND CAMERA - A method of manufacturing an electronic device includes forming a structure including a member, and a first film arranged on at least a surface of the member, the member including an insulating film, a passivation film arranged on the insulating film and having an upper surface, and a trench positioned from the passivation film to the insulating film; forming a second film to cover the first film; and patterning the second film by a photolithography process using a photomask. In the forming the second film, an alignment mark including a concave portion corresponding to the trench is formed in a region above the trench in the second film. In the patterning the second film, the photomask is aligned with the structure by using the alignment mark. | 11-27-2014 |
20150056741 | METHOD OF MANUFACTURING SEMICONDUCTOR APPARATUS - A method of manufacturing a semiconductor apparatus comprising forming an electrode on a structure provided on a substrate, the structure including a wiring pattern and an interlayer insulation film, forming a first film covering the electrode and the structure, forming an opening in a portion of the first film inside an outer edge of a convex portion formed by steps between upper faces of the electrode and the structure so as to expose a first portion as a portion of the upper face of the electrode, forming a second film covering the first film and the first portion, forming a protective film covering the first portion, the convex portion, and a periphery of the convex portion by patterning the second film, and forming a third film on the first film and the protective film by spin coating. | 02-26-2015 |
20150076644 | METHOD FOR MANUFACTURING SOLID-STATE IMAGE SENSOR - A method for manufacturing a solid-state image sensor, comprising preparing a substrate including a pixel region where a plurality of pixels are provided and a peripheral region, forming a structure including a wiring layer and an interlayer insulation film on the pixel region and the peripheral region, forming a first wiring pattern only on the structure located in the peripheral region, forming a protective film covering the first wiring pattern and the structure, forming a second wiring pattern on a convex portion of the protective film formed by steps between an upper surface of the first wiring pattern and the structure so that an end of the second wiring pattern is located away from the pixel region than an end of the first wiring pattern in a state that the protective film covers the first wiring pattern, and forming an optical system. | 03-19-2015 |