Patent application number | Description | Published |
20090218643 | Semiconductor Pressure Sensor - An object of the present invention is to solve problems in that aluminum electrodes, aluminum wires, and I/O terminals are corroded by corrosive gasses when a pressure of a pressure medium containing corrosive matters such as exhaust gas is measured with a semiconductor sensor; and improve not only the corrosion resistance of the sensor chip but also the corrosion resistance of the portion particularly functioning as the pressure receiver. | 09-03-2009 |
20130312517 | Combined Sensor - An object of the invention is to provide a combined sensor capable of suppressing the influence of electrostatic force generated by a potential difference and preventing a reduction in the S/N ratio or a variation in the sensitivity of a sensor. | 11-28-2013 |
20130345901 | Inertial Sensor - An object of the invention is to provide an inertial sensor with small delay and high accuracy. An inertial sensor | 12-26-2013 |
20140007685 | Inertial Sensor - A movable part rotates about a rotation axis, which passes through a support, when an inertial force in a detecting direction is applied to an inertial sensor. The movable part includes a first region and a second region displaced in a direction opposite to a direction of the first region when the inertial force is applied. A second substrate includes first and second detection electrodes opposed to the first and second regions, respectively. The first detection electrode and the second detection electrode are provided symmetrically with respect to the rotation axis. A cavity is provided symmetrically with respect to the rotation axis. In a direction perpendicular to the detecting direction and a direction in which the rotation axis extends, a length from the rotation axis to an end of the first region and a length from the rotation axis to an end of the second region are different. | 01-09-2014 |
20140130596 | ANGULAR VELOCITY DETECTION DEVICE - The purpose of the present invention is to achieve accurate angular velocity detection even when an angular velocity detection sensor is set in an environment in which oscillation and electromagnetic noise have significant influence. Provided is an angular velocity detection device which has an oscillating body displaceable in first and second directions that are perpendicular to each other, and which detects, as an angular velocity, a displacement of the oscillating body in the second direction while the oscillating body is being oscillated in the first direction, wherein in accordance with a frequency change in a drive signal for oscillating the oscillating body in the first direction, the frequency of a servo signal for detecting the angular velocity from the quantity of displacement in the second direction is changed (see | 05-15-2014 |
20140260612 | Composite Sensor and Method for Manufacturing The Same - The disclosure provides a composite sensor with high reliability and a method for manufacturing the same. A moving body of an acceleration sensor and an oscillator of an angular velocity sensor are provided on the same sensor wafer, while being partitioned by a wall, and a cap wafer is formed to have a gap that corresponds to each of the sensors. A through hole and a bump are formed in a sensor sealing portion, the acceleration sensor is sealed in an air atmosphere in a first sealing process, and in a second sealing process, the angular velocity sensor is sealed by bringing the sensors and the cap into contact with each other and joining the sensors and the cap in a vacuum atmosphere. Thereafter, a composite sensor wafer is cut, a circuit board and a wiring board are mounted thereon, and a composite sensor is formed. | 09-18-2014 |
20140336976 | Physical Quantity Detection Apparatus - Provided is a sensor signal output apparatus that outputs a sensor signal at times of the sensor being in steady operation and outputs the operational status of the sensor instead of the sensor signal when the sensor is at fault or in non-steady operation in order to thereby to have a receiver machine obtain a correct sensor signal. The sensor signal output apparatus includes a sensor detecting a physical quantity, a diagnosis part diagnosing the operating state of the sensor, and a communication part transmitting the result of detection by the sensor and the result of diagnosis by the diagnosis part. When the sensor is determined to be normally operating, the communication part selectively outputs the result of detection by the sensor. When the sensor is not determined to be normally operating, the communication part selectively outputs a signal indicative of the operating state of the sensor. | 11-13-2014 |
20150301075 | Inertial Sensor - A technique of preventing the function stop caused by false operation and false output of an inertial sensor by canceling a signal caused by applying of an acceleration other than a measurement signal before input to an LSI circuit is provided. An electrostatic-capacitance MEMS acceleration sensor | 10-22-2015 |