Patent application number | Description | Published |
20110102753 | Apparatus and Method of Measuring a Property of a Substrate - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 05-05-2011 |
20120013881 | Method and Apparatus for Determining an Overlay Error - A method of determining an overlay error. Measuring an overlay target having process-induced asymmetry. Constructing a model of the target. Modifying the model, e.g., by moving one of the structures to compensate for the asymmetry. Calculating an asymmetry-induced overlay error using the modified model. Determining an overlay error in a production target by subtracting the asymmetry-induced overlay error from a measured overlay error. In one example, the model is modified by varying asymmetry p | 01-19-2012 |
20120033193 | Inspection Apparatus and Method, Lithographic Apparatus and Lithographic Processing Cell - An inspection apparatus measures a property of a substrate including a periodic structure. An illumination system provides a beam of radiation with an illumination profile including a plurality of illuminated portions. A radiation projector projects the beam of radiation onto the substrate. A detector detects radiation scattered from the periodic structure and separately detects first order diffracted radiation and at least one higher order of diffracted radiation of each of the illuminated portions. A processor determines the property of the substrate from the detected radiation. The plurality of illuminated portions are arranged such that first order diffracted radiation arising from one or more of the illuminated portions are not overlapped by zeroth order or first order diffracted radiation arising from any other of the illuminated portions. Furthermore, the plurality of illuminated portions are arranged such that first order diffracted radiation arising from the one or more of the illuminated portions are overlapped by at least one of the higher orders of diffracted radiation arising from any other of the illuminated portions. | 02-09-2012 |
20130135600 | Inspection Method and Apparatus, and Corresponding Lithographic Apparatus - An inspection method, and corresponding apparatus, enables classification of pupil images according to a process variable. The method comprises acquiring diffraction pupil images of a plurality of structures formed on a substrate during a lithographic process. A process variable of the lithographic process varies between formation of the structures, the variation of the process variable resulting in a variation in the diffraction pupil images. The method further comprises determining at least one discriminant function for the diffraction pupil images, the discriminant function being able to classify the pupil images in terms of the process variable. | 05-30-2013 |
20140327908 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 11-06-2014 |
20140333922 | Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method - The present invention makes the use of measurement of a diffraction spectrum in or near an image plane in order to determine a property of an exposed substrate. In particular, the positive and negative first diffraction orders are separated or diverged, detected and their intensity measured to determine overlay (or other properties) of exposed layers on the substrate. | 11-13-2014 |
Patent application number | Description | Published |
20110122591 | HYBRID FABRIC MATERIALS, AND STRUCTURAL COMPONENTS INCORPORATING SAME - Composite structural components are disclosed that include electrically conducting fibres providing signal power paths to electrical components disposed on or adjacent the material. The signal paths may therefore be embedded in the structural component. Also disclosed is a flexible or drapable fabric containing electrically conducting fibres for similar purposes, and materials for making up said structure and fabrics and methods for the production thereof. | 05-26-2011 |
20120308887 | RECHARGEABLE BATTERIES - A rechargeable battery is disclosed having electrode and separator structures which are made up of fibre-reinforced composite material, thereby allowing the battery itself to serve as an integral structural component. The utilisation or efficiency of the rechargeable battery is considerably enhanced by rendering at least part of the matrix material of the electrodes and the separator porous, thereby to facilitate improved access to active sites on the electrodes, with the porosity in the separator allowing improved ion transport, both of which enhance cell operation. The porous structure also provides improved electrolyte containment and retention in the event of damage. | 12-06-2012 |
20150044572 | ELECTRICAL ENERGY STORAGE STRUCTURES - According to the invention there is provided a structural metallic rechargeable battery and a method of producing same. The battery uses one of an acid, alkaline or Li-ion chemistry and the battery has an anode structure, a cathode structure, each of which comprise a conductive foam which contains the active electrochemical reagents, and a structural separator which separates the conductive foams of anode from the cathode respectively. The anode structure and the cathode structure are each formed from a metal sheet or foil. | 02-12-2015 |
20150162114 | STRUCTURAL INTEGRATED WIRING LOOM - According to the invention there is provided a Structural integrated wiring loom comprising at least one conductor comprising at least one first conductive fibre ply, wherein said at least one first conductive fibre ply comprises at least two electrical connectors, a separator structure comprising at least one first non-conductive fibre ply, and at least one second non-conductive fibre ply, said separator structure encapsulating said at least one conductor, a screen structure which encapsulates said separator structure, said screen structure comprising at least one second conductive fibre ply and at least one third conductive fibre ply, wherein said device is encapsulated a binder matrix. The device may be used to replace structural panels on a vehicle vessel or craft, to transfer electrical power or RF signals, data transmission around a composite structure. | 06-11-2015 |
20150187517 | STRUCTURAL COMPOSITE BATTERY WITH FLUIDIC PORT FOR ELECTROLYTE - According to the invention there is provided a fluidic port ( | 07-02-2015 |
20150191238 | INTEGRATED HEAT EXCHANGER - The invention relates to an integrated heat exchanger in a composite fibre reinforced polymer material, more preferably to a structural integrated heat exchanger which may be used for replacement panels. The integrated heat exchangers may comprise a solid or fluidic heat exchanger material which is able to transfer heat around the structure. The heat exchanger may be selected to transfer excess heat away from the device or transfer heat into the device. The device comprising at least one fibre ply, wherein said ply is substantially encapsulated in a binder matrix to form a fibre reinforced polymer composite, wherein said device comprises at least one elongate void which comprises at least one heat exchanging medium. | 07-09-2015 |
Patent application number | Description | Published |
20110305825 | ELECTROLESS METAL DEPOSITION FOR MICRON SCALE STRUCTURES - A method for electroless metal deposition on a surface in a finely dimensioned space (e.g. the bore of a hollow fibre) includes introducing into the space an electroless plating solution that has a nil or relatively low plating rate at normal room temperature, and thereafter heating the structure to an elevated temperature for a period sufficient to cause metal to plate on the wall surface. The introducing and heating may be repeated as necessary or desired to build up a specified thickness. | 12-15-2011 |
20120208095 | GASEOUS PRODUCT GENERATOR - According to the invention there is provided a gaseous product generator including:
| 08-16-2012 |
20120314337 | ELECTROSTATIC CAPACITOR DEVICE - An electrostatic capacitor device is disclosed including first and second spaced apart electrode structures separated by a dielectric structure in which the first and second electrode structures are each formed from a composite material which includes electrically conductive fibres in a binder matrix. | 12-13-2012 |
20130059173 | COMPONENT INCLUDING A RECHARGEABLE BATTERY - A component is disclosed which includes a rechargeable battery, and a method is also disclosed of producing such a component. The component can use lithium ion chemistry and the battery can have an anode structure, a cathode structure, and a separator structure which separates the anode from the cathode and contains an electrolyte. The anode structure and the cathode structure can each be formed from a composite material which includes electrically conductive fibres and electrochemically active material in a binder matrix, and the battery can be formed to be structurally inseparable from the rest of the component. | 03-07-2013 |
20130209839 | COMPONENT INCLUDING A RECHARGEABLE BATTERY - A component including a rechargeable battery and a method of producing such a component are disclosed. The component uses one of an acid and an alkaline chemistry and the battery has an anode structure, a cathode structure, and a separator structure which separates the anode from the cathode and contains an electrolyte. The anode structure and the cathode structure are each formed from a composite material which includes electrically conductive fibres and electrochemically active material in a binder matrix and the battery is formed to be structurally inseparable from the rest of the component. | 08-15-2013 |
20140083477 | THERMOELECTRIC DEVICE - The disclosed relates to a thermoelectric device for generating electrical currents exploiting the Seebeck effect, more specifically a structural thermoelectric device which can replace a structural component of a body. The structural thermoelectric device can include a first conductor layer, a second conductor layer and located therebetween a polymer thermocouple layer having a reinforcement formed from a structural support, wherein the internal surface of the support includes at least one layer of at least one conducting polymer. The reinforcement can be is porous material with a plurality of voids, wherein the internal surfaces of the voids are coated with a conducting polymer, which is capable of providing the Peltier effect. | 03-27-2014 |