Patent application number | Description | Published |
20110051312 | MEMS DEVICES - A MEMS device comprises first and second opposing electrodes ( | 03-03-2011 |
20110147861 | MEMS SWITCH AND FABRICATION METHOD - A MEMS switch ( | 06-23-2011 |
20110180931 | ROBUST HIGH ASPECT RATIO SEMICONDUCTOR DEVICE - The invention relates to an semi-conductor device comprising a first surface and neighboring first and second electric elements arranged on the first surface, in which each of the first and second elements extends from the first surface in a first direction, the first element having a cross section substantially perpendicular to the first direction and a sidewall surface extending at least partially in the first direction, wherein the sidewall surface comprises a first section and a second section adjoining the first section along a line extending substantially parallel to the first direction, wherein the first and second sections are placed at an angle with respect to each other for providing an inner corner wherein the sidewall surface at the inner corner is, at least partially, arranged at a constant distance R from a facing part of the second element for providing a mechanical reinforcement structure at the inner corner. | 07-28-2011 |
20110187347 | ELECTROMECHANICAL TRANSDUCER AND A METHOD OF PROVIDING AN ELECTROMECHANICAL TRANSDUCER - The invention relates to an electromechanical transducer ( | 08-04-2011 |
20120033832 | MICROPHONE AND ACCELEROMETER - The invention relates to a method for manufacturing a micromachined microphone and an accelerometer from a wafer | 02-09-2012 |
20120043188 | MEMS DEVICES - A MEMS device comprises first and second opposing electrode arrangements ( | 02-23-2012 |
20120305374 | MEMS SWITCH - A MEMS switch in which at least first, second and third signal lines are provided over the substrate, which each terminate at a connection region. A lower actuation electrode arrangement is over the substrate. A movable contact electrode is suspended over the connection regions for making or breaking electrical contact between at least two of the three connection regions and an upper actuation electrode provided over the lower actuation electrode. | 12-06-2012 |
20130233086 | MEMS CAPACITIVE PRESSURE SENSOR - A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure. | 09-12-2013 |
20140159826 | MEMS OSCILLATORS - The invention provides MEMS oscillator designs in which the thermal actuation and piezoresistive detection signals are separated. | 06-12-2014 |