| Patent application number | Description | Published |
|---|
| 20080203381 | Forming arsenide-based complementary logic on a single substrate - In one embodiment, the present invention includes a method for forming a logic device, including forming an n-type semiconductor device over a silicon (Si) substrate that includes an indium gallium arsenide (InGaAs)-based stack including a first buffer layer, a second buffer layer formed over the first buffer layer, a first device layer formed over the second buffer layer. Further, the method may include forming a p-type semiconductor device over the Si substrate from the InGaAs-based stack and forming an isolation between the n-type semiconductor device and the p-type semiconductor device. Other embodiments are described and claimed. | 08-28-2008 |
| 20080210927 | Buffer architecture formed on a semiconductor wafer - In one embodiment, the present invention includes an apparatus for forming a transistor that includes a silicon (Si) substrate, a dislocation filtering buffer formed over the Si substrate having a first buffer layer including gallium arsenide (GaAs) nucleation and buffer layers and a second buffer layer including a graded indium aluminium arsenide (InAlAs) buffer layer, a lower barrier layer formed on the second buffer layer formed of InAlAs, and a strained quantum well (QW) layer formed on the lower barrier layer of indium gallium arsenide (InGaAs). Other embodiments are described and claimed. | 09-04-2008 |
| 20090001350 | High hole mobility semiconductor device - One embodiment of the invention includes a high hole mobility p-channel GaAs | 01-01-2009 |
| 20090057648 | High Hole Mobility P-Channel Ge Transistor Structure on Si Substrate - The present disclosure provides an apparatus and method for implementing a high hole mobility p-channel Germanium (“Ge”) transistor structure on a Silicon (“Si”) substrate. One exemplary apparatus may include a buffer layer including a GaAs nucleation layer, a first GaAs buffer layer, and a second GaAs buffer layer. The exemplary apparatus may further include a bottom barrier on the second GaAs buffer layer and having a band gap greater than 1.1 eV, a Ge active channel layer on the bottom barrier and having a valence band offset relative to the bottom barrier that is greater than 0.3 eV, and an AlAs top barrier on the Ge active channel layer wherein the AlAs top barrier has a band gap greater than 1.1 eV. Of course, many alternatives, variations and modifications are possible without departing from this embodiment. | 03-05-2009 |
| 20090140301 | REDUCING CONTACT RESISTANCE IN P-TYPE FIELD EFFECT TRANSISTORS - Reducing contact resistance in p-type field effect transistors is generally described. In one example, an apparatus includes a first semiconductor substrate, a first noble metal film including palladium (Pd) coupled with the first semiconductor substrate, a second noble metal film including platinum (Pt) coupled with the first noble metal film, and a third metal film including an electrically conductive metal coupled with the second noble metal film, wherein the first, second, and third metal films form one or more contacts having reduced specific contact resistance between the first semiconductor substrate and the one or more contacts. | 06-04-2009 |
| 20090206324 | DISLOCATION REMOVAL FROM A GROUP III-V FILM GROWN ON A SEMICONDUCTOR SUBSTRATE - Dislocation removal from a group III-V film grown on a semiconductor substrate is generally described. In one example, an apparatus includes a semiconductor substrate, a buffer film including a group III-V semiconductor material epitaxially coupled to the semiconductor substrate wherein the buffer film includes material melted by laser pulse irradiation and recrystallized to substantially remove dislocations or defects from the buffer film, and a first semiconductor film epitaxially grown on the buffer film wherein a lattice mismatch exists between the semiconductor substrate and the first semiconductor film. | 08-20-2009 |
| 20090218596 | Buffer layers for device isolation of devices grown on silicon - Various embodiments provide a buffer layer that is grown over a silicon substrate that provides desirable device isolation for devices formed relative to III-V material device layers, such as InSb-based devices, as well as bulk thin film grown on a silicon substrate. In addition, the buffer layer can mitigate parallel conduction issues between transistor devices and the silicon substrate. In addition, the buffer layer addresses and mitigates lattice mismatches between the film relative to which the transistor is formed and the silicon substrate. | 09-03-2009 |
| 20090242872 | DOUBLE QUANTUM WELL STRUCTURES FOR TRANSISTORS - Double quantum well structures for transistors are generally described. In one example, an apparatus includes a semiconductor substrate, one or more buffer layers coupled to the semiconductor substrate, a first barrier layer coupled to the one or more buffer layers, a first quantum well channel coupled with the first barrier layer wherein the first quantum well channel includes a group III-V semiconductor material or a group II-VI semiconductor material, or combinations thereof, a second barrier layer coupled to the first quantum well channel, and a second quantum well channel coupled to the barrier layer wherein the second quantum well channel includes a group III-V semiconductor material or a group II-VI semiconductor material, or combinations thereof. | 10-01-2009 |
| 20090242873 | SEMICONDUCTOR HETEROSTRUCTURES TO REDUCE SHORT CHANNEL EFFECTS - Semiconductor heterostructures to reduce short channel effects are generally described. In one example, an apparatus includes a semiconductor substrate, one or more buffer layers coupled to the semiconductor substrate, a first barrier layer coupled to the one or more buffer layers, a back gate layer coupled to the first barrier layer wherein the back gate layer includes a group III-V semiconductor material, a group II-VI semiconductor material, or combinations thereof, the back gate layer having a first bandgap, a second barrier layer coupled to the back gate layer wherein the second barrier layer includes a group III-V semiconductor material, a group II-VI semiconductor material, or combinations thereof, the second barrier layer having a second bandgap that is relatively larger than the first bandgap, and a quantum well channel coupled to the second barrier layer, the quantum well channel having a third bandgap that is relatively smaller than the second bandgap. | 10-01-2009 |
| 20090272965 | Selective High-K dielectric film deposition for semiconductor device - Embodiments of the present invention describe a method of fabricating a III-V quantum well transistor with low current leakage and high on-to-off current ratio. A hydrophobic mask having an opening is formed on a semiconductor film. The opening exposes a portion on the semiconductor film where a dielectric layer is desired to be formed. A hydrophilic surface is formed on the exposed portion of the semiconductor film. A dielectric layer is then formed on the hydrophilic surface by using an atomic layer deposition process. A metal layer is deposited on the dielectric layer. | 11-05-2009 |
| 20090298266 | DOPANT CONFINEMENT IN THE DELTA DOPED LAYER USING A DOPANT SEGREGRATION BARRIER IN QUANTUM WELL STRUCTURES - A device grade III-V quantum well structure and method of manufacture is described. Embodiments of the present invention enable III-V InSb quantum well device layers with defect densities below 1×10 | 12-03-2009 |
| 20090302350 | Tensile Strained NMOS Transistor Using Group III-N Source/Drain Regions - Enhancement mode transistors are described where a Group III-N compound is used in the source and drain regions to place tensile strain on the channel. The source and drain regions may be raised or embedded, and fabricated in conjunction with recessed or raised compression regions for p channel transistors. | 12-10-2009 |
| 20090315018 | Methods of forming buffer layer architecture on silicon and structures formed thereby - Methods and associated structures of forming a microelectronic device are described. Those methods may include forming a GaSb nucleation layer on a substrate, forming a Ga(Al)AsSb buffer layer on the GaSb nucleation layer, forming an In | 12-24-2009 |
| 20090321717 | COMPOSITIONALLY-GRADED QUANTUM-WELL CHANNELS FOR SEMICONDUCTOR DEVICES - A compositionally-graded quantum well channel for a semiconductor device is described. A semiconductor device includes a semiconductor hetero-structure disposed above a substrate and having a compositionally-graded quantum-well channel region. A gate electrode is disposed in the semiconductor hetero-structure, above the compositionally-graded quantum-well channel region. A pair of source and drain regions is disposed on either side of the gate electrode. | 12-31-2009 |
| 20100078684 | SELECTIVE HIGH-K DIELECTRIC FILM DEPOSITION FOR SEMICONDUCTOR DEVICE - Embodiments of the present invention describe a method of fabricating a III-V quantum well transistor with low current leakage and high on-to-off current ratio. A hydrophobic mask having an opening is formed on a semiconductor film. The opening exposes a portion on the semiconductor film where a dielectric layer is desired to be formed. A hydrophilic surface is formed on the exposed portion of the semiconductor film. A dielectric layer is then formed on the hydrophilic surface by using an atomic layer deposition process. A metal layer is deposited on the dielectric layer. | 04-01-2010 |
| 20100148153 | Group III-V devices with delta-doped layer under channel region - A group III-V material device has a delta-doped region below a channel region. This may improve the performance of the device by reducing the distance between the gate and the channel region. | 06-17-2010 |
| 20100155701 | Self-aligned replacement metal gate process for QWFET devices - A self-aligned replacement metal gate QWFET device comprises a III-V quantum well layer formed on a substrate, a III-V barrier layer formed on the quantum well layer, a III-V etch stop layer formed on the III-V barrier layer, a III-V source extension region formed on the III-V etch stop layer and having a first sidewall, a source region formed on the III-V source extension region and having a second sidewall, a III-V drain extension region formed on the III-V etch stop layer and having a third sidewall, a drain region formed on the III-V drain extension region and having a fourth sidewall, a conformal high-k gate dielectric layer formed on the first, second, third, and fourth sidewalls and on a top surface of the etch stop layer, and a metal layer formed on the high-k gate dielectric layer. | 06-24-2010 |
| 20100163847 | QUANTUM WELL MOSFET CHANNELS HAVING UNI-AXIAL STRAIN CAUSED BY METAL SOURCE/DRAINS, AND CONFORMAL REGROWTH SOURCE/DRAINS - Embodiments described include straining transistor quantum well (QW) channel regions with metal source/drains, and conformal regrowth source/drains to impart a uni-axial strain in a MOS channel region. Removed portions of a channel layer may be filled with a junction material having a lattice spacing different than that of the channel material to causes a uni-axial strain in the channel, in addition to a bi-axial strain caused in the channel layer by a top barrier layer and a bottom buffer layer of the quantum well. | 07-01-2010 |
| 20100163849 | DOUBLE PASS FORMATION OF A DEEP QUANTUM WELL IN ENHANCEMENT MODE III-V DEVICES - A quantum well is formed for a deep well III-V semiconductor device using double pass patterning. In one example, the well is formed by forming a first photolithography pattern over terminals on a material stack, etching a well between the terminals using the first photolithography patterning, removing the first photolithography pattern, forming a second photolithography pattern over the terminals and at least a portion of the well, deepening the well between the terminals by etching using the second photolithography pattern, removing the second photolithography pattern, and finishing the terminals and the well to form a device on the material stack. | 07-01-2010 |
| 20100163926 | MODULATION-DOPED MULTI-GATE DEVICES - Modulation-doped multi-gate devices are generally described. In one example, an apparatus includes a semiconductor substrate having a surface, one or more buffer films coupled to the surface of the semiconductor substrate, a first barrier film coupled to the one or more buffer films, a multi-gate fin coupled to the first barrier film, the multi-gate fin comprising a source region, a drain region, and a channel region of a multi-gate device wherein the channel region is disposed between the source region and the drain region, a spacer film coupled to the multi-gate fin, and a doped film coupled to the spacer film. | 07-01-2010 |
| 20100193771 | QUANTUM WELL MOSFET CHANNELS HAVING UNI-AXIAL STRAIN CAUSED BY METAL SOURCE/DRAINS, AND CONFORMAL REGROWTH SOURCE/DRAINS - Embodiments described include straining transistor quantum well (QW) channel regions with metal source/drains, and conformal regrowth source/drains to impart a uni-axial strain in a MOS channel region. Removed portions of a channel layer may be filled with a junction material having a lattice spacing different than that of the channel material to causes a uni-axial strain in the channel, in addition to a bi-axial strain caused in the channel layer by a top barrier layer and a bottom buffer layer of the quantum well. | 08-05-2010 |
| 20100327261 | HIGH HOLE MOBILITY P-CHANNEL GE TRANSISTOR STRUCTURE ON SI SUBSTRATE - The present disclosure provides an apparatus and method for implementing a high hole mobility p-channel Germanium (“Ge”) transistor structure on a Silicon (“Si”) substrate. One exemplary apparatus may include a buffer layer including a GaAs nucleation layer, a first GaAs buffer layer, and a second GaAs buffer layer. The exemplary apparatus may further include a bottom barrier on the second GaAs buffer layer and having a band gap greater than 1.1 eV, a Ge active channel layer on the bottom barrier and having a valence band offset relative to the bottom barrier that is greater than 0.3 eV, and an AlAs top barrier on the Ge active channel layer wherein the AlAs top barrier has a band gap greater than 1.1 eV. Of course, many alternatives, variations and modifications are possible without departing from this embodiment. | 12-30-2010 |
| 20110045659 | SEMICONDUCTOR BUFFER ARCHITECTURE FOR III-V DEVICES ON SILICON SUBSTRATES - A composite buffer architecture for forming a III-V device layer on a silicon substrate and the method of manufacture is described. Embodiments of the present invention enable III-V InSb device layers with defect densities below 1×10 | 02-24-2011 |
| 20110121266 | QUANTUM WELL MOSFET CHANNELS HAVING UNI-AXIAL STRAIN CAUSED BY METAL SOURCE/DRAINS, AND CONFORMAL REGROWTH SOURCE/DRAINS - Embodiments described include straining transistor quantum well (QW) channel regions with metal source/drains, and conformal regrowth source/drains to impart a uni-axial strain in a MOS channel region. Removed portions of a channel layer may be filled with a junction material having a lattice spacing different than that of the channel material to causes a uni-axial strain in the channel, in addition to a bi-axial strain caused in the channel layer by a top barrier layer and a bottom buffer layer of the quantum well. | 05-26-2011 |
| 20110147713 | TECHNIQUES FOR FORMING CONTACTS TO QUANTUM WELL TRANSISTORS - Techniques are disclosed for providing a low resistance self-aligned contacts to devices formed in a semiconductor heterostructure. The techniques can be used, for example, for forming contacts to the gate, source and drain regions of a quantum well transistor fabricated in III-V and SiGe/Ge material systems. Unlike conventional contact process flows which result in a relatively large space between the source/drain contacts to gate, the resulting source and drain contacts provided by the techniques described herein are self-aligned, in that each contact is aligned to the gate electrode and isolated therefrom via spacer material. | 06-23-2011 |
