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Makiko Nakamura

Makiko Nakamura, Chino JP

Patent application numberDescriptionPublished
20100046052ACTUATOR, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS - An actuator includes: a frame; first members at each end of the frame along a first axis making the frame rotatable thereabout; second members supporting each end of a movable plate against the frame along a second axis making the movable plate rotatable thereabout; first magnets with poles interposing the first axis; a second magnet with poles interposing the first axis; a coil generating a magnetic force acting on the first and second magnets; and a voltage source applying a voltage to the coil. The first and second magnets have an angle of 30-60 degrees to the first axis, and identical magnetic pole directions. The voltage source includes first and second voltage generators generating first and second voltages of first and second frequencies, and a voltage superimposer. The movable plate is rotated about the first and second axes at the first and second frequencies by the superimposed voltages.02-25-2010
20100238533OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS - An optical device includes: an axis member including a plate-shaped attachment portion and an elastic support portion that swingably supports the attachment portion around a predetermined axis; a rigid member attached to one side of the attachment portion; and a light reflecting member attached to the other side of the attachment portion and having an area larger than that of the attachment portion.09-23-2010
20100245961OPTICAL DEVICE, OPTICAL SCANNER, AND IMAGE FORMING APPARATUS - An optical device includes: a movable plate disposed in an area over which externally incident light is spread, the movable plate having a light reflecting surface that reflects the light; and an axis member that swingably supports the movable plate around a predetermined axis, wherein each portion in the light spread area but other than the movable plate is formed of a surface having a normal vector along which the light is reflected and directed outside a predetermined area.09-30-2010
20110032589LIGHT DEFLECTOR, METHOD OF MANUFACTURING LIGHT DEFLECTOR, AND IMAGE DISPLAY DEVICE - A light deflector includes: a movable plate; an elastic support section having a first end coupled to the movable plate and adapted to support the movable plate rotatably around a predetermined axis; a support member coupled to a second end of the elastic support section; and a light absorbing section having a light absorbing property, wherein the elastic support section has an upper surface, a lower surface, and at least one side surfaces, each of the side surfaces being formed of one or more tilted surfaces existing outside either one of the upper surface and the lower surface, and the light absorbing section is disposed on the upper surface and the at least one side surfaces of the elastic support section.02-10-2011
20110102870LIGHT DEFLECTING ELEMENT, LIGHT DEFLECTOR, AND IMAGE FORMING DEVICE - A light deflecting element includes: a movable plate provided with a light reflecting section having light reflectivity; a support section; a coupling section adapted to couple the movable plate rotatably to the support section; and a magnet disposed on an opposite surface of the movable plate to the light reflecting section, wherein the coupling section has a shape having a width gradually increasing in a direction from a side of the light reflecting section toward a side of the magnet in a cross-sectional view perpendicular to a rotational axis of the movable plate.05-05-2011
20110116055IMAGE FORMING APPARATUS - An image forming apparatus includes: a first projector that scans light on a first display section to thereby display an image; a second projector that scans the light on a second display section, which is set in a position different from a position of the first display section, to thereby display an image; and a switching section that switches plural states including a first state in which the first projector displays the image on the first display section and a second state in which the second projector displays an image on the second display section.05-19-2011

Makiko Nakamura, Suwa JP

Patent application numberDescriptionPublished
20090231653OPTICAL DEFLECTOR AND METHOD OF MANUFACTURING THE SAME - An optical deflector has: a movable plate having a reflecting surface and a side surface; and a support portion that supports the movable plate in such a manner that the movable plate is able to rotate around a predetermined axis, in which the side surface of the movable plate is recessed toward the axis.09-17-2009

Makiko Nakamura, Tokyo JP

Patent application numberDescriptionPublished
20080224319Micro electro-mechanical system and method of manufacturing the same - A micro electro-mechanical system, which can be stably formed so as to prevent sticking of a movable part and which has a narrow gap, and a method of manufacturing the same are provided. The micro electro-mechanical system includes at least one fixed electrode formed above a principal surface of a semiconductor substrate and at least one movable electrode formed on the principal surface. The at least one movable electrode includes the movable part separated from the principal surface and the at least one fixed electrode. The movable part is movable with respect to the principal surface and the at least one fixed electrode. The method of manufacturing the micro electromechanical system includes a sacrifical film formation step for forming a sacrifical film above the principal surface, an electrode layer formation step for forming an electrode layer above the principal surface so as to cover over the sacrifical film, an etching step for partially etching the electrode layer via a pattern so as to form the at least one electrode and the at least one fixed electrode, a sacrifical film removal step for removing the sacrifical film, and a conducting film formation step for forming a conducting film on surfaces of the at least one electrode and the at least one fixed electrode.09-18-2008
20090075415Method for manufacturing semiconductor device - The present invention provides a method for manufacturing a semiconductor device which has an integrated circuit provided on a semiconductor substrate and a movable part which is movable relative to the substrate. This manufacturing method includes: a step of covering the movable part with a sacrificial film; a step of covering the sacrificial film with a first sealing layer which is formed of a material having a tensile stress; a step of forming a through-hole in the first sealing layer; a step of removing the sacrificial film through the through-hole to form a void around the movable part; and a step of film-forming a second sealing layer on the first sealing layer to close the through-hole.03-19-2009

Patent applications by Makiko Nakamura, Tokyo JP

Makiko Nakamura, Suwa-Shi JP

Patent application numberDescriptionPublished
20080252942ACTUATOR, OPTICAL SCANNER AND IMAGE FORMING APPARATUS - An actuator includes a mass section; a support section; a coupling section for coupling the mass section rotatably to the support section so as to support the mass section with cantilever structure; and a pair of driving sources including a piezoelectric element for rotating the mass section, wherein the pair of driving sources are provided separately from each other with respect to a central axis of rotation of the mass section, each of the driving sources is provided slidably with respect to the coupling section or the support section, and the actuator is structured such that it causes the pair of piezoelectric elements to expand and contract in phases opposite to each other, so as to rotate at least a part of the coupling section while torsionally deforming the mass section.10-16-2008