| Patent application number | Description | Published |
| 20100019313 | SEMICONDUCTOR CIRCUIT INCLUDING A LONG CHANNEL DEVICE AND A SHORT CHANNEL DEVICE - A semiconductor circuit is provided that includes a short channel device, and a long channel device that is electrically isolated from the short channel device. The long channel device comprises a plurality of first gate electrodes, a first source region adjacent one of the plurality of first gate electrodes, a first drain region adjacent another of the plurality of first gate electrodes, and a plurality of common source/drain regions positioned between adjacent ones of the plurality of first gate electrodes. The first gate electrodes each overlie portions of a layer of high-dielectric constant (k) gate insulator material. Each of the first gate electrodes are electrically coupled to at least one of the other first gate electrodes. | 01-28-2010 |
| 20100038686 | SOI SUBSTRATES AND DEVICES ON SOI SUBSTRATES HAVING A SILICON NITRIDE DIFFUSION INHIBITION LAYER AND METHODS FOR FABRICATING - Semiconductor-on-insulator substrates and methods for fabricating semiconductor-on-insulator substrates are provided. One exemplary method comprises providing a first silicon-comprising substrate, providing a second silicon-comprising substrate, forming a first silicon nitride layer overlying the second silicon-comprising substrate, and coupling the first silicon-comprising substrate to the second silicon-comprising substrate such that the first silicon nitride layer is interposed between the two substrates. | 02-18-2010 |
| 20100184265 | METHODS FOR FABRICATING SEMICONDUCTOR DEVICES MINIMIZING UNDER-OXIDE REGROWTH - Methods for producing a semiconductor device are provided. In one embodiment, a method includes the steps of: (i) fabricating a partially-completed semiconductor device including a substrate, a source/drain region in the substrate, a gate stack overlaying the substrate, and a sidewall spacer adjacent the gate stack; (ii) utilizing an anisotropic etch to remove an upper portion of the sidewall spacer while leaving intact a lower portion of the sidewall spacer overlaying the substrate; (iii) implanting ions in the source/drain region; and (iv) annealing the semiconductor device to activate the implanted ions. The step of annealing is performed with the lower portion of the sidewall spacer intact to deter the ingress of oxygen into the substrate and minimize under-oxide regrowth proximate the gate stack. | 07-22-2010 |
| 20110227094 | STRAINED SILICON CARBIDE CHANNEL FOR ELECTRON MOBILITY OF NMOS - A semiconductor is formed on a (110) silicon (Si) substrate, with improved electron mobility. Embodiments include semiconductor devices having a silicon carbide (SiC) portion in the nFET channel region. An embodiment includes forming an nFET channel region and a pFET channel region in a Si substrate, such as a (110) Si substrate, and forming a silicon carbide (SiC) portion on the nFET channel region. The SiC portion may be formed by ion implantation of C followed by a recrystallization anneal or by epitaxial growth of SiC in a recess formed in the substrate. The use of SiC in the nFET channel region improves electron mobility without introducing topographical differences between NMOS and PMOS transistors. | 09-22-2011 |
| Patent application number | Description | Published |
| 20090039426 | EXTREMELY-THIN SILICON-ON-INSULATOR TRANSISTOR WITH RAISED SOURCE/DRAIN - An extremely-thin silicon-on-insulator transistor is provided that includes a buried oxide layer above a substrate, a silicon layer above the buried oxide layer, a gate stack on the silicon layer, a nitride liner on the silicon layer and adjacent to the gate stack, an oxide liner on and adjacent to the nitride liner, and raised source/drain regions. The gate stack includes a high-k oxide layer on the silicon layer and a metal gate on the high-k oxide layer. Each of the raised source/drain regions has a first part comprising a portion of the silicon layer, a second part adjacent to parts of the oxide liner and the nitride liner, and a third part above the second part. Also provided is a method for fabricating an extremely-thin silicon-on-insulator transistor. | 02-12-2009 |
| 20090045458 | MOS TRANSISTORS FOR THIN SOI INTEGRATION AND METHODS FOR FABRICATING THE SAME - MOS transistors for thin SOI integration and methods for fabricating such MOS transistors are provided. One exemplary method includes the steps of providing a silicon layer overlying a buried insulating layer and epitaxially growing a silicon-comprising material layer overlying the silicon layer. A trench is etched within the silicon-comprising material layer and exposing the silicon layer. An MOS transistor gate stack is formed within the trench. The MOS transistor gate stack comprises a gate insulator and a gate electrode. Ions of a conductivity-determining type are implanted within the silicon-comprising material layer using the gate stack as an implantation mask. | 02-19-2009 |
| 20090311836 | EXTREMELY-THIN SILICON-ON-INSULATOR TRANSISTOR WITH RAISED SOURCE/DRAIN - An extremely-thin silicon-on-insulator transistor is provided that includes a buried oxide layer above a substrate, a silicon layer above the buried oxide layer, a gate stack on the silicon layer, a nitride liner on the silicon layer and adjacent to the gate stack, an oxide liner on and adjacent to the nitride liner, and raised source/drain regions. The gate stack includes a high-k oxide layer on the silicon layer and a metal gate on the high-k oxide layer. Each of the raised source/drain regions has a first part comprising a portion of the silicon layer, a second part adjacent to parts of the oxide liner and the nitride liner, and a third part above the second part. Also provided is a method for fabricating an extremely-thin silicon-on-insulator transistor. | 12-17-2009 |