Patent application number | Description | Published |
20120235058 | METHOD FOR EXTENDING LIFETIME OF AN ION SOURCE - This invention relates in part to a method for preventing or reducing the formation and/or accumulation of deposits in an ion source component of an ion implanter used in semiconductor and microelectronic manufacturing. The ion source component includes an ionization chamber and one or more components contained within the ionization chamber. The method involves introducing into the ionization chamber a dopant gas, wherein the dopant gas has a composition sufficient to prevent or reduce the formation of fluorine ions/radicals during ionization. The dopant gas is then ionized under conditions sufficient to prevent or reduce the formation and/or accumulation of deposits on the interior of the ionization chamber and/or on the one or more components contained within the ionization chamber. The deposits adversely impact the normal operation of the ion implanter causing frequent down time and reducing tool utilization. | 09-20-2012 |
20130341568 | COMPOSITIONS FOR EXTENDING ION SOURCE LIFE AND IMPROVING ION SOURCE PERFORMANCE DURING CARBON IMPLANTATION - A novel method and system for extending ion source life and improving ion source performance during carbon implantation are provided. Particularly, the carbon ion implant process involves utilizing a dopant gas mixture comprising carbon monoxide and one or more fluorine-containing gas with carbon represented by the formula CxFy wherein x≧1 and y≧1. At least one fluorine containing gases with carbon is contained in the mixture at about 3-12 volume percent (vol %) based on the volume of the dopant gas mixture. Fluoride ions, radicals or combinations thereof are released from the ionized dopant gas mixture and reacts with deposits derived substantially from carbon along at least one of the surfaces of the repeller electrodes, extraction electrodes and the chamber to reduce the overall amount of deposits. In this manner, a single dopant gas mixture provides carbon ions and removes problematic deposits typically encountered during carbon implantation. | 12-26-2013 |
20130341761 | METHODS FOR EXTENDING ION SOURCE LIFE AND IMPROVING ION SOURCE PERFORMANCE DURING CARBON IMPLANTATION - A novel method and system for extending ion source life and improving ion source performance during carbon implantation are provided. Particularly, the carbon ion implant process involves utilizing a dopant gas mixture comprising carbon monoxide and one or more fluorine-containing gas with carbon. At least one fluorine containing gases with carbon is contained in the mixture at about 3-12 volume percent (vol %) based on the volume of the dopant gas mixture. Fluoride ions, radicals or combinations thereof are released from the ionized dopant gas mixture and reacts with deposits derived substantially from carbon along at least one of the surfaces of the repeller electrodes, extraction electrodes and the chamber to reduce the overall amount of deposits. In this manner, a single dopant gas mixture is capable of providing carbon ions and removing and eliminating a wide range of problematic deposits typically encountered during carbon implantation. | 12-26-2013 |
20140165706 | PRESSURE INDICATING DEVICE - A pressure indicating device for detecting and isolating leakage of toxic and/or pyrophoric gasses from within various packages is disclosed. The device can affix to a user port of a cylinder package. The device has a flexible disc-like structure which is fine tuned to outwardly flex in response to a build-up of pressure of the gas exerted against the disc-like structure. The flexed disc contacts a movable pin and pushes the push outwards from within the device. The outward movement of the pin pierces a paper seal extending over the device, thereby indicating a leak from within the valving of the package. The device withstands the pressure exerted against it, thereby also isolating the leak of the pressurized gas. | 06-19-2014 |
20140179090 | STORAGE AND SUB-ATMOSPHERIC DELIVERY OF DOPANT COMPOSITIONS FOR CARBON ION IMPLANTATION - A supply source for delivery of a CO-containing dopant gas composition is provided. The composition includes a controlled amount of a diluent gas mixture such as xenon and hydrogen, which are each provided at controlled volumetric ratios to ensure optimal carbon ion implantation performance. The composition can be packaged as a dopant gas kit consisting of a CO-containing supply source and a diluent mixture supply source. Alternatively, the composition can be pre-mixed and introduced from a single source that can be actuated in response to a sub-atmospheric condition achieved along the discharge flow path to allow a controlled flow of the dopant mixture from the interior volume of the device into an ion source apparatus. | 06-26-2014 |
20140357069 | ALUMINUM DOPANT COMPOSITIONS, DELIVERY PACKAGE AND METHOD OF USE - A novel method and system for using aluminum dopant compositions is provided. A composition of the aluminum dopant compositions is selected with sufficient vapor pressure and minimal carbon content, thereby enabling ease of delivery to an ion implant process and substantial reduction of carbon deposition during Al ion implantation. The source material is preferably stored and delivered from a sub-atmospheric storage and delivery device to enhance safety and reliability during the Al ion implantation process. | 12-04-2014 |
Patent application number | Description | Published |
20110045847 | Digital content distribution system for delivering location specific content to an ad hoc group of mobile subscribers - A digital content distribution system and method are disclosed for delivering location specific content to an ad hoc group of mobile subscribers and method of delivering subscriber-requested, location-based content directly to a mobile communication device, such as a cell phone or personal digital assistant (PDA) or other mobile communication device. The system consists of a downloadable application that runs on the subscribers mobile communication devices and communicates with the server-based content composer system. The content composer system manages outgoing content based upon the geographic location reported by the mobile communication device application and the demographic and preference data stored in a subscriber database. Using available messaging technology, such as Short Message Service (SMS) and Multimedia Messaging Service (MMS) messaging, relevant sponsored content, mobile emergency alerts, and the ability to facilitate 2-way text or voice based services utilizing Global Positioning System (GPS) mapping is provided to an ad hoc group of subscribers in designated geographic locations. In order to optimize the utility for deaf and hard of hearing subscribers, the mobile communication device may be placed in a low power sleep or hibernate mode instead of a no power mode when the device is turned off. In a hibernate mode, in response to emergency content, the mobile communication device will wake up to an alert even when it is hibernating. Moreover, the alerts take over the portable device no matter what other tasks are being executed. In accordance with another important aspect of the invention, in response to emergency content, the system will cause the mobile communication device to vibrate even if the mobile communication device has been configured with the vibrate feature turned off. | 02-24-2011 |
20120295570 | Digital content distribution system for delivering location specific content to an ad hoc group of mobile subscribers computer appendix - A digital content distribution system and method are disclosed for delivering location specific content to an ad hoc group of mobile subscribers. The system consists of a downloadable application that runs on the subscriber's mobile communication device and communicates with a server-based content composer system. The content composer system manages outgoing content based upon the geographic location reported by a mobile communication device application and the demographic and preference data stored in a subscriber database. Emergency alerts are sent only to subscribers in a area covered by the alert. The emergency alerts are executed on the mobile communication device even though the mobile communication device is in a low power sleep or hibernate mode. Moreover, the emergency alerts take over the mobile communications device no matter what other tasks are being executed when the emergency alert is received. | 11-22-2012 |