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Lee, Suwon-City
Bun Yeoul Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090209712 | TRANSITION METAL COMPLEXES, CATALYST COMPOSITIONS CONTAINING THE SAME, AND OLEFIN POLYMERIZATION USING THE CATALYST COMPOSITIONS - Provided are a novel transition metal complex where a monocyclopentadienyl ligand to which an amido or alcoxy group is introduced is coordinated, a method of synthesizing the same, and olefin polymerization using the transition metal complex. Compared to a conventional transition metal complex having a silicon bridge and an oxido ligand, the transition metal complex has a phenylene bridge, so that a monomer easily approaches the transition metal complex in terms of structure and a pentagon ring structure of the transition metal complex is stably maintained. The catalyst composition including the transition metal complex is used to synthesize a polyolefin copolymer having a very low density less than 0.910 g/cc. | 08-20-2009 |
| 20110152529 | TRANSITION METAL COMPLEX, CATALYST COMPOSITION INCLUDING THE SAME AND OLEFIN POLYMER USING CATALYST COMPOSITION - Provided are a novel transition metal complex where a monocyclopentadienyl ligand to which an amido group is introduced is coordinated, a catalyst composition including the same, and an olefin polymer using the catalyst composition. The transition metal complex has a pentagon ring structure having an amido group connected by a phenylene bridge in which a stable bond is formed in the vicinity of a metal site, and thus, a sterically hindered monomer can easily approach the transition metal complex. By using a catalyst composition including the transition metal complex, a linear low density polyolefin copolymer having a high molecular weight and a very low density polyolefin copolymer having a density of 0.910 g/cc or less can be produced in a polymerization of monomers having large steric hindrance. Further, the reactivity for the olefin monomer having large steric hindrance is excellent. | 06-23-2011 |
| 20110160413 | TRANSITION METAL COMPLEX, CATALYST COMPOSITION INCLUDING THE SAME AND OLEFIN POLYMER USING CATALYST COMPOSITION - Provided are a novel transition metal complex where a monocyclopentadienyl ligand to which an amido group is introduced is coordinated, a catalyst composition including the same, and an olefin polymer using the catalyst composition. The transition metal complex has a pentagon ring structure having an amido group connected by a phenylene bridge in which a stable bond is formed in the vicinity of a metal site, and thus, a sterically hindered monomer can easily approach the transition metal complex. By using a catalyst composition including the transition metal complex, a linear low density polyolefin copolymer having a high molecular weight and a very low density polyolefin copolymer having a density of 0.910 g/cc or less can be produced in a polymerization of monomers having large steric hindrance. Further, the reactivity for the olefin monomer having large steric hindrance is excellent. | 06-30-2011 |
Byoungil Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20080271762 | ETCHING GAS CONTROL SYSTEM - An etching gas control system is provided. The system includes a gas injector, a gas supply pipe, a Flow Ratio Controller (FRC), and a gas supply unit. The gas injector is installed in a chamber and supplies gas inside the chamber. The gas injector includes a top injector installed at a top of the chamber and a side injector installed at a side of the chamber. The gas supply pipe connects and supplies gas to the gas injector. The FRC connects to the gas supply pipe and controls supply of gas. The gas supply unit supplies gas to the FRC. | 11-06-2008 |
| 20110049111 | COLOR SYSTEM FOR ETCHING GAS - A control system for etching gas is provided. The control system includes a mass flow control unit, a flow rate control unit, and a tuning gas control unit. The mass flow control unit controls a mass flow of an etching gas input to a chamber. The flow rate control unit distributes the etching gas to an upper gas injector and a side gas injector connected with the mass flow control unit and installed in the chamber. The tuning gas control unit distributes and supplies a supplementary gas and tuning gas controlling an ion density and distribution of plasma within the chamber, to the mass flow control unit and the flow rate control unit. | 03-03-2011 |
| 20110056514 | WORKPIECE DE-CHUCKING DEVICE OF PLASMA REACTOR FOR DRY-CLEANING INSIDE OF REACTION CHAMBER AND ELECTROSTATIC CHUCK DURING WORKPIECE DE-CHUCKING, AND WORKPIECE DE-CHUCKING METHOD USING THE SAME - A workpiece de-chucking device of a plasma reactor for dry-cleaning the inside of a reaction chamber and an ElectroStatic chuck (ESC) during workpiece de-chucking and a workpiece de-chucking method using the same are provided. The workpiece de-chucking device includes a lifting unit, an ICP source power unit, and a controller. The lifting unit lifts a workpiece mounted on a top surface of an ESC. The ICP source power unit forms a magnetic field in an inductive coil arranged outside a dielectric window. The controller outputs a source power control signal, a lift control signal, and a de-chucking control signal. | 03-10-2011 |
Byung Chul Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090277414 | Balancing Assembly of an Engine - A balancing assembly of an engine may include a crankshaft in which crank pins each connected to a connecting rod, are disposed at both ends thereof and that is equipped with a counterweight opposite to and corresponding to each crank pin, a balance shaft that is disposed at a distance from the crankshaft and that rotates by the crankshaft, and a balance weight that is eccentrically formed with a balance shaft and that absorbs vibration. | 11-12-2009 |
| 20090301428 | CRANKSHAFT SET OF TWO-CYLINDER ENGINE EQUIPPED WITH FLYWHEEL - A crankshaft set of a two-cylinder engine that is equipped with a flywheel may include a crankshaft that is mounted on an engine block, a first crank pin that is formed at one end of the crankshaft and is connected to a first piston through a connecting rod, a second crank pin that is formed at the other end of the crankshaft and is connected to a second crank pin through a connecting rod, and a flywheel that is disposed between the first and second crank pins and is integrally formed with the crankshaft. Accordingly, the twist and vibration characteristics are improved because the flywheel is disposed between the adjacent crank pins. | 12-10-2009 |
Dongseok Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110042009 | PLASMA ETCHING DEVICE - A plasma etching device is provided. The device includes a chamber, a cathode assembly, and an integral cathode liner. The chamber provides a plasma reaction space. The cathode assembly is positioned at an inner and central part of the chamber and supports a substrate. The integral cathode liner has a plurality of first vents and second vents formed at two levels and spaced apart respectively such that the uniformity of a gas flow and exhaust flow within the chamber is maintained, and is outer inserted to the cathode assembly and coupled at its lower end part to an inner surface of the chamber. | 02-24-2011 |
| 20110154843 | APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL - An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer. | 06-30-2011 |
Heeyong Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100138130 | Tire Driving Optimization System and Control Method Thereof - The tire driving optimization system may include a first tire that is disposed at one side of a vehicle to transmit driving torque from an engine to a road surface, a second tire that is disposed at the other side of the vehicle to transmit driving torque from the engine to a road surface, an accelerator pedal that is operated by a driver so as to control a fuel injection amount that is injected into the engine, and a control portion configured to determine a first consumption energy value that is consumed through the first tire and a second consumption energy value that is consumed through the second tire, and to adjust engine output based on the first consumption energy value and the second consumption energy value if the vehicle is unstable. | 06-03-2010 |
Hoo Gwang Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100133774 | Suspension System of Coupled Torsion Beam Axle - A suspension system of a coupled torsion beam axle type may include a torsion beam that is disposed in the width direction of a vehicle body, left/right trailing arms that are mounted on respective ends of the torsion beam to be extended in the rearward direction of the vehicle body, and a spindle block that is mounted on one end of each of the respective trailing arms and in which a spindle is integrally formed in the front end surface thereof for a wheel to be mounted. | 06-03-2010 |
| 20110121533 | CONTROL ARM OF MULTILINK SUSPENSION SYSTEM FOR VEHICLE - A control arm may be formed by assembling front and rear members respectively having upper and lower flanges so as to have a tubular cross-section, and a bending portion may be formed by bending the lower flange of the front member downwardly such that a drain hole is formed by the bending portion protruded downwardly when the front and rear members are assembled. | 05-26-2011 |
Hyunwoo Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100017920 | SCANNING PROBE MICROSCOPE WITH TILTED SAMPLE STAGE - A scanning probe microscope has a tilting stage on which a sample is mounted. The sample is scanned back and forth with the stage being tilted clockwise during a forward scan and counterclockwise during a reverse scan. A first surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the forward scan. A second surface contour of the sample is determined from the response of the probe and the tilt angle of the stage during the reverse scan. A final surface contour of the sample is obtained by combining the first and second surface contours. | 01-21-2010 |
Jae Sang Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100132672 | Variable Compression Ratio Apparatus for Vehicle Engine - A variable compression ratio apparatus for a vehicle engine that is mounted at the engine receiving combustion force of an air-fuel mixture from a piston and rotating a crankshaft mounted between upper and lower cylinder blocks, and that changes compression ratio of the air-fuel mixture by changing a mounting height of the crankshaft according to a driving condition of the engine, may include a bearing having a hollow space eccentric to a center thereof and rotatably mounted between the upper and lower cylinder blocks, the crankshaft being rotatably inserted in the hollow space; and an operating unit provided at the lower cylinder block and controlling a rotational displacement of the bearing. | 06-03-2010 |
Jaesuk Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100188777 | METHOD AND APPARATUS FOR A DISK DAMPER INCLUDING AN ENCLOSING FLOW CHAMBER WALL FOR A HARD DISK DRIVE - A hard disk drive with a disk base including a disk wall with a first intake, a second intake off of the first intake, an outlet and an air filter configured to receive a first airflow from the first intake and suction from a second airflow from the second intake creating negative pressure at a trapping surface of the air filter away from the outlet. At least one disk rotates to create a rotating disk surface generating airflow configured to enter the first intake to create the first airflow. A disk damper includes an enclosing wall neighboring the air filter to create a flow chamber providing a third airflow through the outlet formed of the first air flow crossing the trapping surface and the second air flow. A disk cover mounts on the disk base to encapsulate the air chamber. The disk base and disk damper are disclosed. | 07-29-2010 |
Ji-Hwa Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090122228 | DIRECT-LIT LIQUID CRYSTAL DISPLAYS WITH LAMINATED DIFFUSER PLATES - In a directly-illuminated liquid crystal display (LCD), for example an LCD monitor or an LCD-TV, a number of light management films, including a diffuser layer, lie between the light source and the LCD panel to provide bright, uniform illumination. The diffuser layer is attached to a substrate which is separate from the light source and the LCD panel, or may be attached to either the LCD panel or, when using a two dimensional light source, to the light source. The other light management layers may also be attached to the separate substrate or to the LCD panel or two-dimensional light source. High levels of illumination uniformity at the LCD may be achieved with a uniform (non-patterned) diffuser, even with relatively low levels of diffusion, when the diffuser is used with a brightness enhancing layer. | 05-14-2009 |
| 20100188754 | LIQUID CRYSTAL DISPLAYS WITH LAMINATED DIFFUSER PLATES - In a liquid crystal display (LCD), for example an LCD monitor or an LCD-TV, a number of light management films, including a diffuser layer, lie between the light source and the LCD panel to provide bright, uniform illumination. In some embodiments, the diffuser layer is attached to the lower side of the LCD panel. Some, or all, of the light management layers may be attached together as a laminated stack of films. In some embodiments, the diffuser layer is formed with a recessed region on one side and another optical film positioned within the recessed region. | 07-29-2010 |
Jong-Hak Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090130439 | EARTHEN-WALLPAPER - Provided is an earthen wallpaper which can promote ventilation, filter purification, control of temperature or humidity, emission of far infrared rays, etc., through its micropores, which color can be changed according to contained components with anti-bacteria, deodorization, increase of radiated energy, etc., and which can make work of wallpapering easy. The one earthen wallpaper comprises a first material in 60-95 wt % selected from the group of natural mineral powders of 200-1000 mesh consisting of ocher, ocher ceramic, talcum, jade, purple jade, white earth, zeolite, elvan stone, and a mixture of two or more thereof, and 5-40 wt % of a second material ( | 05-21-2009 |
Jung-Hee Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100149447 | LIQUID CRYSTAL DISPLAY AND THIN FILM TRANSISTOR ARRAY PANEL THEREFOR - A thin film transistor array panel is provided, which includes: an insulating substrate; a gate line formed on the substrate and including a gate electrode; a gate insulating layer formed on the gate line; a semiconductor layer formed on the gate insulating layer opposite the gate electrode; a data line formed on the gate insulating layer and including a first source electrode located on the semiconductor layer; first and second drain electrodes formed on the semiconductor layer, separated from each other and overlapping the gate electrode; a passivation layer formed on the data line and the first and second drain electrodes; and first and second pixel electrodes electrically connected to the first and second electrodes, respectively, wherein an overlapping area between the gate electrode and the first drain electrode is different from an overlapping area between the gate electrode and the second drain electrode. | 06-17-2010 |
Junghyeob Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110320483 | MEDIA FILE MANAGEMENT SYSTEM AND METHOD FOR HOME MEDIA CENTER - The present invention provides a media file management system and method for a home media center, which enable media files such as images or photos, music and movies included in a variety of information appliances to be conveniently edited on a screen of a display apparatus connected to a home media center. A search window in which media files to be searched are displayed or an edit window in which a media file to be edited is displayed are created. Then, if a user selects a file edit command for a media file displayed in the search window, the selected file edit command is executed and results of the execution of the file edit command are displayed in the edit window. | 12-29-2011 |
Kwangmin Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110049111 | COLOR SYSTEM FOR ETCHING GAS - A control system for etching gas is provided. The control system includes a mass flow control unit, a flow rate control unit, and a tuning gas control unit. The mass flow control unit controls a mass flow of an etching gas input to a chamber. The flow rate control unit distributes the etching gas to an upper gas injector and a side gas injector connected with the mass flow control unit and installed in the chamber. The tuning gas control unit distributes and supplies a supplementary gas and tuning gas controlling an ion density and distribution of plasma within the chamber, to the mass flow control unit and the flow rate control unit. | 03-03-2011 |
| 20110154843 | APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL - An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer. | 06-30-2011 |
| 20110155694 | PLASMA REACTOR AND ETCHING METHOD USING THE SAME - A plasma reactor and an etching method using the same are provided. The method includes a first changing step of changing the number or arrangement structure of inductive coils connecting to an RF source power supply unit, a step of applying RF source power and generating high density plasma, a first etching step of etching a first etch-target layer of a workpiece, a first stopping step of stopping applying the RF source power, a second changing step of changing the number or arrangement structure of the inductive coils, a step of applying RF source power to corresponding inductive coils and generating low density plasma, a second etching step of etching a second etch-target layer of the workpiece, and a second stopping step of stopping applying the RF source power. | 06-30-2011 |
Kyo-Yeol Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090325334 | GaN BASED GROUP III-V NITRIDE SEMICONDUCTOR LIGHT-EMITTING DIODE AND METHOD FOR FABRICATING THE SAME - A GaN based III-V nitride semiconductor light-emitting device and a method for fabricating the same are provided. In the GaN based III-V nitride semiconductor light-emitting device including first and second electrodes arranged facing opposite directions or the same direction with a high-resistant substrate therebetween and material layers for light emission or lasing, the second electrode directly contacts a region of the outmost material layer exposed through an etched region of the high-resistant substrate. A thermal conductive layer may be formed on the bottom of the high-resistant substrate to cover the exposed region of the outmost material layer. | 12-31-2009 |
Phil Gi Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110133414 | GASKET UNIT - A gasket unit, in which a first hole and a second hole are formed corresponding to a first cylinder and a second cylinder adjacent to each other, may include a bore bridge portion formed between the first hole and the second hole. The bore bridge portion may be made up of a single plate and may include a wave portion that is convex downwards or upwards, and at least a stopper protruding on an upper surface or a lower surface of both distal ends of the wave portion. | 06-09-2011 |
Sang-Kil Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100035809 | STABLE LIQUID COMPOSITIONS FOR TREATING STOMATITIS COMPRISING EPIDERMAL GROWTH FACTOR - Provided is a liquid composition for treating stomatitis, the liquid composition including: an epidermal growth factor; an adhesive polymer; and at least one stabilizer selected from the group consisting of ethylenediaminetetraacetic acid (EDTA) and salts thereof, histidine, lysine and inorganic acid salts thereof, arginin and inorganic acid salts thereof, and dextran. The liquid composition includes a stabilizer selected from EDTA (or salts thereof) and a certain amino acid (or inorganic acid salts thereof) and thus, physicochemical and biological stability of the epidermal growth factor can be substantially increased. Thus, the liquid composition can be stored and distributed for a long period of time. The stabilized composition includes an adhesive polymer, and thus, when ejected in a spray form in the mouth of a user, the liquid composition can be quickly attached to an inflammation site and exhibits effectiveness for a long period of time. | 02-11-2010 |
Seung Gweon Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100104325 | DEVELOPING DEVICE OF IMAGE FORMING APPARATUS - A developing device includes a feed tool to feed a developer to a developing tool, a developer receiving chamber in which the developer to be fed to the feed tool is received, and a first delivery unit and a second delivery unit arranged one higher than another in a state in which the developing device is mounted in the image forming apparatus. The developer received in the developer receiving chamber is delivered to the second delivery unit by the first delivery unit and thereafter, is delivered to the feed tool by the second delivery unit. | 04-29-2010 |
Soo-Geun Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100003814 | Interconnections Having Double Capping Layer and Method for Forming the Same - Provided are an interconnection of a semiconductor device which includes a capping layer and a method for forming the interconnection. The interconnection of the semiconductor device is a copper damascene interconnection where the capping layer is formed as a dual layer of a silicon nitride layer and silicon carbide layer on a copper layer processed by chemical mechanical polishing (CMP). Therefore, it is possible to maintain a high etching selectivity and a low dielectric constant of the silicon carbide layer while providing superior leakage suppression. | 01-07-2010 |
Soung Jin Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090241526 | Exhaust Manifold Being Integrally Formed with Cylinder Head - An engine includes exhaust manifold integrally formed with a cylinder head. The engine may include an exhaust manifold having at least one single exhaust outlet for exhausting exhaust gas that is exhausted from at least two cylinders that are not adjacent with each other, wherein periods during which exhaust valves are open are not overlapped with each other between the at least two cylinders. | 10-01-2009 |
Sun-Yul Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100168278 | One-Solution Type Thermosetting Composition for Protective Film of Color Filter, and Color Filter Using Same - The present invention relates to one-solution type thermosetting resin composition for a protective film of a color filter, and a color filter including the same. The one-solution type thermosetting resin composition includes a copolymer (A) including (meth)acrylate with an epoxy cyclic structure at the side chain, (meth)acrylate with a hydroxyl terminal, acid anhydride, and maleimide with a substituent; an epoxy resin (B); a base-generating agent (C); and an organic solvent (D). When a protective film of a color filter is prepared by using the one-solution type thermosetting resin composition according to the present invention, it has excellent storage stability as well as excellent flatness, close-contacting property, transmission properties, heat resistance, and chemical resistance. | 07-01-2010 |
Tae Seong Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110130938 | FUEL INJECTING CONTROL METHOD DURING COASTING OF VEHICLE - A fuel injecting control method during coasting of a vehicle, may include operating coasting mode when a coasting mode operation condition is satisfied, maintaining the coasting mode for a predetermined interval, injecting fuel according to engine speed, cutting fuel injecting when detected vehicle speed is equal to or more than a predetermined fuel cutting vehicle speed and less than a predetermined vehicle over speed, operating an assist brake when the detected vehicle speed is equal to or more than the predetermined vehicle over speed, and releasing the coasting mode when a releasing condition of the coasting mode is satisfied. | 06-02-2011 |
Wang Shik Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20090304851 | Step-Down Suckling Method for Minimizing Weaning Stress in Newborn Calf - A step-down sucking method is provided for minimizing the weaning stress of newborn calves. The method features feeding newborn calves with a sufficient amount of milk corresponding to 15-25% of body weight for 3˜5 weeks following birth, and then with a stepwise decreased amount of milk corresponding finally to 8-15% of body weight for 3-7 days, with the differential amount replaced with water and then with gradually decreased amounts of milk from 8-15% to zero % of the body weight and with solid feedstuffs for a period from 5 weeks to 6-8 weeks after birth. In the method, suckling with a large amount of milk (amounting to 15-25% of body weight) is conducted for 25-35 days after birth, followed by suckling with a decreased amount of milk (amounting to 8-15% of body weight) for 10-20 days, thereby inducing the calves to maximally take solid feedstuff with minimal weaning stress. The method exhibits data quite different from the report that there is no difference in the body weight of calves raised for 180 or 200 days after birth between a conventional suckling method, in which milk is fed at an amount of 10% of body weight, and a free-access method. When fed according to the step-down suckling method, calves were observed to increase in the intake of dry feedstuff by 31% or greater until 50 days after birth and by 16% or greater until 120 days after birth, as compared to when fed according to a conventional method. In addition, the weight gain of the calves fed according to the method of the present invention was found to increase by 75% until 50 days after birth and by 54% until 120 days after birth, compared to that of calves fed according to a conventional method. | 12-10-2009 |
Weonmook Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110049111 | COLOR SYSTEM FOR ETCHING GAS - A control system for etching gas is provided. The control system includes a mass flow control unit, a flow rate control unit, and a tuning gas control unit. The mass flow control unit controls a mass flow of an etching gas input to a chamber. The flow rate control unit distributes the etching gas to an upper gas injector and a side gas injector connected with the mass flow control unit and installed in the chamber. The tuning gas control unit distributes and supplies a supplementary gas and tuning gas controlling an ion density and distribution of plasma within the chamber, to the mass flow control unit and the flow rate control unit. | 03-03-2011 |
| 20110079356 | SIDE GAS INJECTOR FOR PLASMA REACTION CHAMBER - A side gas injector for a plasma reaction chamber is provided. The side gas injector includes a circular distribution plate and a cover plate. The circular distribution plate includes an injection hole for injecting a reaction gas and a distribution channel part for distributing the reaction gas such that the reaction gas introduced from the injection hole can be radially simultaneously jetted in a plurality of positions along an inner circumference surface of the distribution plate. The cover plate is coupled to a top of the distribution plate and seals a top of the distribution channel part. | 04-07-2011 |
| 20110154843 | APPARATUS FOR CONTROLLING TEMPERATURE OF ELECTROSTATIC CHUCK COMPRISING TWO-STAGE REFRIGERANT FLUID CHANNEL - An apparatus for controlling the temperature of an electrostatic chuck is provided. The apparatus includes an electrostatic chuck including, as a fluid channel part for circulating a refrigerant, a first fluid channel formed in an outer circumference region of the internal and a second fluid channel formed in the whole internal region, and one or more chillers for supplying refrigerant controlled to different temperatures through the first fluid channel or the second fluid channel. The first and second fluid channels are formed in two up/down stages within the electrostatic chuck, thereby being independently capable of the temperatures of a center part and edge part of a wafer. | 06-30-2011 |
| 20110155694 | PLASMA REACTOR AND ETCHING METHOD USING THE SAME - A plasma reactor and an etching method using the same are provided. The method includes a first changing step of changing the number or arrangement structure of inductive coils connecting to an RF source power supply unit, a step of applying RF source power and generating high density plasma, a first etching step of etching a first etch-target layer of a workpiece, a first stopping step of stopping applying the RF source power, a second changing step of changing the number or arrangement structure of the inductive coils, a step of applying RF source power to corresponding inductive coils and generating low density plasma, a second etching step of etching a second etch-target layer of the workpiece, and a second stopping step of stopping applying the RF source power. | 06-30-2011 |
| 20110203735 | GAS INJECTION SYSTEM FOR ETCHING PROFILE CONTROL - A gas injection system provided in a plasma etching equipment is provided. The system includes a top gas injector for supplying a reaction gas at a top of a chamber, and a side gas injector for supplying a tuning gas from a side surface of the chamber or a backside gas injector upward jetting a tuning gas from a lower side of a wafer. The side gas injector or backside gas injector forms a plurality of jets in a radial shape and simultaneously installs the jets adjacently to an edge part of a wafer such that a tuning gas is jetted adjacently to the edge part of the wafer, thereby being capable of easily controlling a an etch rate or CD uniformity or profile of the edge part. | 08-25-2011 |
Weon Mook Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20080271762 | ETCHING GAS CONTROL SYSTEM - An etching gas control system is provided. The system includes a gas injector, a gas supply pipe, a Flow Ratio Controller (FRC), and a gas supply unit. The gas injector is installed in a chamber and supplies gas inside the chamber. The gas injector includes a top injector installed at a top of the chamber and a side injector installed at a side of the chamber. The gas supply pipe connects and supplies gas to the gas injector. The FRC connects to the gas supply pipe and controls supply of gas. The gas supply unit supplies gas to the FRC. | 11-06-2008 |
Won Jae Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100019466 | Spindle bracket of torsion beam axle suspension - A spindle bracket of a torsion beam axle suspension system is defined on an end portion of a trailing arm to be connected to a hub assembly on which a wheel and a tire are mounted. The spindle bracket may include a first inner bracket that is welded to an inner side and an outer side of an end portion of a upper member of the trailing arm, a second inner bracket that is welded to an inner side and an outer side of an end portion of a lower member of the trailing arm, and an outer bracket that is attached to the first and second inner brackets to be engaged with the hub assembly in company with the first and second inner brackets. | 01-28-2010 |
Young-Bin Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20110070146 | METHOD OF MANUFACTURING GRAPHENE, GRAPHENE MANUFACTURED BY THE METHOD, CONDUCTIVE FILM COMPRISING THE GRAPHENE, TRANSPARENT ELECTRODE COMPRISING THE GRAPHENE, AND RADIATING OR HEATING DEVICE COMPRISING THE GRAPHENE - Provided are a method of manufacturing graphene, graphene manufactured by the method, a conductive thin film including the graphene, a transparent electrode comprising the graphene, and a radiating or heating device comprising the graphene. The method includes: preparing a graphene member including a base member, a hydrophilic oxide layer formed on the base member, a hydrophobic metal catalyst layer formed on the oxide layer, and graphene grown on the metal catalyst layer; applying water to the graphene member; separating the metal catalyst layer from the oxide layer; and removing the metal catalyst layer using an etching process. | 03-24-2011 |
Youngpo Lee, Suwon-City KR
| Patent application number | Description | Published |
|---|---|---|
| 20100014560 | Methods of synchronizing with first multipath component in ultra wideband receiver and ultra wideband receivers using the same - A synchronization method in a Ultra Wideband (UWB) receiver includes receiving a signal through a multipath channel, and synchronizing with a first multipath component of the received signal by computing a correlation value between the received signal and a template signal of the receiver in a predetermined search range. Since multipath components received at the receiver after the first multipath component of the received signal have lower power than that of the first multipath component, the synchronization with the first multipath component of the received signal may improve the performance in processes after the synchronization process. | 01-21-2010 |