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| 20090232738 | Methods for modulating de novo hepatic lipogenesis by modulating XBP-1 activity - The invention provides methods and compositions for modulating the expression, processing, post-translational modification, stability and/or activity of XBP-1 protein, or a protein in a signal transduction pathway involving XBP-1 to treat dyslipidemias and steatosis disorders. The present invention also pertains to methods for identifying compounds that modulate the expression, processing, post-translational modification, and/or activity of XBP-1 protein or a molecule in a signal transduction pathway involving XBP-1. | 09-17-2009 |
| 20110052669 | METHODS FOR MODULATING DE NOVO HEPATIC LIPOGENESIS BY MODULATING XBP-1 ACTIVITY - The invention provides methods and compositions for modulating the expression, processing, post-translational modification, stability and/or activity of XBP-1 protein, or a protein in a signal transduction pathway involving XBP-I to treat dyslipidemias and steatosis disorders. The present invention also pertains to methods for identifying compounds that modulate the expression, processing, post-translational modification, and/or activity of XBP-I protein or a molecule in a signal transduction pathway involving XBP-1. | 03-03-2011 |
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| 20080229415 | SYSTEMS AND METHODS FOR PROCESSING DATA FLOWS - A flow processing facility, which uses a set of artificial neurons for pattern recognition, such as a self-organizing map, in order to provide security and protection to a computer or computer system supports unified threat management based at least in part on patterns relevant to a variety of types of threats that relate to computer systems, including computer networks. Flow processing for switching, security, and other network applications, including a facility that processes a data flow to address patterns relevant to a variety of conditions are directed at internal network security, virtualization, and web connection security. A flow processing facility for inspecting payloads of network traffic packets detects security threats and intrusions across accessible layers of the IP-stack by applying content matching and behavioral anomaly detection techniques based on regular expression matching and self-organizing maps. Exposing threats and intrusions within packet payload at or near real-time rates enhances network security from both external and internal sources while ensuring security policy is rigorously applied to data and system resources. Intrusion Detection and Protection (IDP) is provided by a flow processing facility that processes a data flow to address patterns relevant to a variety of types of network and data integrity threats that relate to computer systems, including computer networks. | 09-18-2008 |
| 20080262990 | SYSTEMS AND METHODS FOR PROCESSING DATA FLOWS - A flow processing facility, which uses a set of artificial neurons for pattern recognition, such as a self-organizing map, in order to provide security and protection to a computer or computer system supports unified threat management based at least in part on patterns relevant to a variety of types of threats that relate to computer systems, including computer networks. Flow processing for switching, security, and other network applications, including a facility that processes a data flow to address patterns relevant to a variety of conditions are directed at internal network security, virtualization, and web connection security. A flow processing facility for inspecting payloads of network traffic packets detects security threats and intrusions across accessible layers of the IP-stack by applying content matching and behavioral anomaly detection techniques based on regular expression matching and self-organizing maps. Exposing threats and intrusions within packet payload at or near real-time rates enhances network security from both external and internal sources while ensuring security policy is rigorously applied to data and system resources. Intrusion Detection and Protection (IDP) is provided by a flow processing facility that processes a data flow to address patterns relevant to a variety of types of network and data integrity threats that relate to computer systems, including computer networks. | 10-23-2008 |
| 20080262991 | SYSTEMS AND METHODS FOR PROCESSING DATA FLOWS - A flow processing facility, which uses a set of artificial neurons for pattern recognition, such as a self-organizing map, in order to provide security and protection to a computer or computer system supports unified threat management based at least in part on patterns relevant to a variety of types of threats that relate to computer systems, including computer networks. Flow processing for switching, security, and other network applications, including a facility that processes a data flow to address patterns relevant to a variety of conditions are directed at internal network security, virtualization, and web connection security. A flow processing facility for inspecting payloads of network traffic packets detects security threats and intrusions across accessible layers of the IP-stack by applying content matching and behavioral anomaly detection techniques based on regular expression matching and self-organizing maps. Exposing threats and intrusions within packet payload at or near real-time rates enhances network security from both external and internal sources while ensuring security policy is rigorously applied to data and system resources. Intrusion Detection and Protection (IDP) is provided by a flow processing facility that processes a data flow to address patterns relevant to a variety of types of network and data integrity threats that relate to computer systems, including computer networks. | 10-23-2008 |
| 20120017262 | SYSTEMS AND METHODS FOR PROCESSING DATA FLOWS - A flow processing facility, which uses a set of artificial neurons for pattern recognition, such as a self-organizing map, in order to provide security and protection to a computer or computer system supports unified threat management based at least in part on patterns relevant to a variety of types of threats that relate to computer systems, including computer networks. Flow processing for switching, security, and other network applications, including a facility that processes a data flow to address patterns relevant to a variety of conditions are directed at internal network security, virtualization, and web connection security. A flow processing facility for inspecting payloads of network traffic packets detects security threats and intrusions across accessible layers of the IP-stack by applying content matching and behavioral anomaly detection techniques based on regular expression matching and self-organizing maps. Exposing threats and intrusions within packet payload at or near real-time rates enhances network security from both external and internal sources while ensuring security policy is rigorously applied to data and system resources. Intrusion Detection and Protection (IDP) is provided by a flow processing facility that processes a data flow to address patterns relevant to a variety of types of network and data integrity threats that relate to computer systems, including computer networks. | 01-19-2012 |
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| 20110152235 | Aminopyrimidine Kinase Inhibitors - Disclosed are compounds, pharmaceutical compositions containing those compounds, and uses of the compounds and compositions as modulators of casein kinase 1 (e.g., CK1γ), casein kinase 2 (CK2), Pim 1, Pim2, Pim3, the TGFβ pathway, the Wnt pathway, the JAK/STAT pathway, and/or the mTOR pathway. Uses are also disclosed for the treatment or prevention of a range of therapeutic indications due at least in part to aberrant physiological activity of casein kinase 1 (e.g., CK1γ), casein kinase 2 (CK2), Pim 1, Pim2, Pim3, the TGFβ pathway, the Wnt pathway, the JAK/STAT pathway, and/or the mTOR pathway. | 06-23-2011 |
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| 20100298331 | TRIAZINONE AND DIAZINONE DERIVATIVES USEFUL AS HSP90 INHIBITORS - The present invention relates to compounds according to formulae (IA) to (ID) and compositions that inhibit the activity of Hsp90. The invention further relates to methods of inhibiting the activity of Hsp90 in a subject in need thereof and methods for preventing or treating hyperproliferative disorders, such as cancer, in a subject in need thereof comprising administering to the subject a compound of the invention, or a composition comprising such a compound. | 11-25-2010 |
| 20110009397 | TRIAZONE COMPOUNDS THAT MODULATE HSP90 ACTIVITY - The present invention relates to substituted triazole compounds and compositions comprising substituted triazole compounds. The invention further relates to methods of inhibiting the activity of Hsp90 in a subject in need thereof and methods for preventing or treating hyperproliferative disorders, such as cancer, in a subject in need thereof comprising administering to the subject a substituted triazole compound of the invention, or a composition comprising such a compound. | 01-13-2011 |
| 20110105749 | TRIAZOLE COMPOUNDS THAT MODULATE HSP90 ACTIVITY - The present invention relates to substituted triazole compounds and compositions comprising substituted triazole compounds. The invention further relates to methods of inhibiting the activity of Hsp90 in a subject in need thereof and methods for preventing or treating hyperproliferative disorders, such as cancer, in a subject in need thereof comprising administering to the subject a substituted triazole compound of the invention, or a composition comprising such a compound. | 05-05-2011 |
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| 20100125000 | GOLF CLUB HEAD OR OTHER BALL STRIKING DEVICE HAVING MULTI-PIECE CONSTRUCTION - A ball striking device has a head that includes a metal face configured for striking a ball, a rearwardly extending metal band, a top piece, and a bottom piece. The metal band has a first end extending from one side of the face, a second end extending from the opposite side of the face, and a rear portion extending between the first and second ends and defining at least a portion of the rear periphery of the head. The top piece and the bottom piece are non-metallic or substantially non-metallic. The top piece is connected to the top side of the metal band and forms at least a portion of a top side of the head, and the bottom piece is connected to the bottom side of the metal band and forms at least a portion of a bottom side of the head. The top piece and the bottom piece are separated by the metal band. | 05-20-2010 |
| 20100248852 | Golf Club Head and Head Cover Combination Providing Enhanced Functionality - A golf club head has structure for assisting a golfer, and a head cover has structure for supporting the golfer-assisting structure. In one aspect, the golfer-assisting structure provides a visual indicator, such as an alignment marker, a ball impact indicator, a temperature indicator, or the like. In another aspect, the golfer-assisting structure includes sensor(s) and/or other electronic components for measuring swing characteristics, course conditions, global position, or the like. The supporting structure may provide a source of energy, such as a power source, a light source, or a heat source. In some aspects, the supporting structure may include a processor for receiving data from the golfer-assisting structure, and may transmit data to a display on the head cover and/or to an external source. | 09-30-2010 |
| 20100261538 | Golf Club Having Hydrophobic And Hydrophilic Portions - A golf club or component thereof has a surface, wherein at least one area of the surface has a level of hydrophilicity which is less than the level of hydrophilicity in at least one surrounding portion, causing moisture to be preferentially attracted to the surrounding portion. In one aspect, the surface is a striking face and the surrounding portion is one or more grooves formed in the striking face. In another aspect, the surface is a grip and the surrounding portion is one or more channels formed in the grip. In some examples, hydrophobic or superhydrophobic surfaces on golf club components repel water and, in some instances, also offer self-cleaning functionality. | 10-14-2010 |
| 20110263350 | Golf Club Head or Other Ball Striking Device Having Multi-Piece Construction and Method for Manufacturing - A ball striking device has a head that includes a metal face configured for striking a ball, a rearwardly extending metal band, a top piece, and a bottom piece. The metal band has a first end extending from one side of the face, a second end extending from the opposite side of the face, and a rear portion extending between the first and second ends and defining at least a portion of the rear periphery of the head. The top piece and the bottom piece are non-metallic or substantially non-metallic. The top piece is connected to the top side of the metal band and forms at least a portion of a top side of the head, and the bottom piece is connected to the bottom side of the metal band and forms at least a portion of a bottom side of the head. The top piece and the bottom piece are separated by the metal band. | 10-27-2011 |
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| 20080278358 | REFERENCE CIRCUITS FOR SAMPLED-DATA CIRCUITS - A switched capacitor circuit includes a first level-crossing detector to generate a level-crossing detection signal when an input signal crosses a first predetermined level. A first waveform generator generates a first predetermined waveform and a second waveform generator generates a second predetermined waveform. A second level-crossing detector generates a second level-crossing detection signal when said second predetermined waveform crosses a voltage reference level a second time. A second switch is coupled to the second level-crossing detector, and a third switch is coupled to the first level-crossing detector. The second switch turns OFF when the second level-crossing detection signal indicates the second predetermined waveform crossed the voltage reference level a second time. The third switch turns OFF when the first level-crossing detection signal indicates the input signal crossed the first predetermined level. | 11-13-2008 |
| 20090267650 | PASSIVE OFFSET AND OVERSHOOT CANCELLATION FOR SAMPLED-DATA CIRCUITS - A zero-crossing detector with effective offset cancellation includes a set of series connected capacitors and an amplifier having an input terminal. An offset capacitor is operatively connected between the amplifier and the set of series connected capacitors. A switch is operatively connected to the input terminal, and an offset sampling capacitor is operatively connected to the switch. The switch connects the offset sampling capacitor to the input terminal of the amplifier during a charge transfer phase. | 10-29-2009 |
| 20090309635 | CONSTANT SLOPE RAMP CIRCUITS FOR SAMPLED-DATA CIRCUITS - A circuit includes a level-crossing detector to generate a level-crossing detection signal when an input signal crosses a predetermined voltage level. A first stage set of capacitors is operatively coupled to the level-crossing detector. A ramp circuit is operatively coupled to the set of series-connected capacitors. A second stage set of capacitors is operatively coupled to the first stage set of capacitors and the ramp circuit. The ramp circuit includes a feedback capacitor and a preset switch to provide a linear ramp output. | 12-17-2009 |
| 20110032003 | OFFSET CANCELLATION FOR SAMPLED-DATA CITCUITS - A comparator based circuit with effective offset cancellation includes first and second amplifiers and an offset capacitor operatively connected to the first and second amplifiers. An offset voltage source generates an offset voltage. A first switch connects the offset voltage source to ground during a first time period. The first amplifier generates an output voltage in response to the first switch connecting the offset voltage source to ground during the first time period. A second switch connects the offset capacitor to ground during a second time period. The first switch disconnects the offset voltage source from ground during a third time period, and the second switch disconnects the offset capacitor from ground during the third time period. | 02-10-2011 |
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| 20110269739 | KINASE INHIBITORS - The present invention provides a new group of protein kinase inhibitors, pyrido[4,3,-d]pyrimidin-5-one derivatives, and pharmaceutically acceptable salts thereof that are useful for intreating cell proliferative disease and disorder such as cancer, autoimmune diseases, infection, cardiovascular disease and neurodegenerative disease and disorder. The present invention provides methods for synthesizing and administering the protein kinase inhibitor compounds. The present invention also provides pharmaceutical formulations comprising at least one of the protein kinase inhibitor compounds together with a pharmaceutically acceptable carrier, diluent or excipient therefor. The invention also provides useful intermediates generated during the syntheses of the pyrido[4,3,-d]pyrimidin-5-one derivatives. | 11-03-2011 |
| 20110281841 | Kinase Inhibitors - The present invention provides a new group of protein kinase inhibitors, pyrropyrimidine and pyrazolopyrimidine derivatives, and pharmaceutically acceptable salts and prodrugs thereof that are useful for treating cell proliferative disease and disorder such as cancer, autoimmune diseases, infection, cardiovascular disease and neurodegenerative disease and disorder. The present invention provides methods for synthesizing and administering the protein kinase inhibitor compounds. The present invention also provides pharmaceutical formulations comprising at least one of the protein kinase inhibitor compounds together with a pharmaceutically acceptable carrier, diluent or excipient therefor. The invention also provides useful intermediates generated during the syntheses of the pyrropyrimidine and pyrazolopyrimidine derivatives. | 11-17-2011 |
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| 20090240462 | System and Method for Capturing an Event in MEMS Inertial Sensors - A method of capturing an event in a MEMS accelerometer stores acceleration data in memory, detects a trigger event based on the acceleration data, and modifies a configuration of the memory so that a specified amount of the acceleration data is saved. A MEMS event capturing system includes an inertial sensor having sensor circuitry and event capturing circuitry implemented with the sensor circuitry. The event capturing circuitry includes memory capable of storing acceleration data received from the inertial sensor and a detection module operatively coupled with the memory that detects a trigger event. The event capturing circuitry also includes a management module operatively coupled with the memory and the detection module that modifies the memory's storage configuration when the trigger event is detected. | 09-24-2009 |
| 20090240463 | Activity Detection in MEMS Accelerometers - A method of detecting activity in a MEMS accelerometer captures an acceleration bias, measures acceleration at a predetermined time, calculates a change in acceleration using the measured acceleration and the acceleration bias, and compares the change in acceleration to a threshold to detect activity. A method of detecting inactivity uses a similar technique along with a timer. The method of detecting inactivity in a MEMS accelerometer captures an acceleration bias, measures acceleration at a predetermined time, calculates a change in acceleration using the measured acceleration and the acceleration bias, and compares the change in acceleration to a threshold to detect inactivity. The method further determines if the change in acceleration is less than the threshold and, if so, determines if a predetermined period of time has elapsed to detect inactivity. | 09-24-2009 |
| 20090293615 | Management System for MEMS Inertial Sensors - A MEMS system includes an inertial sensor having sensor circuitry and management circuitry implemented with the sensor circuitry. The management circuitry includes a detection module that detects a condition of the system and a management module that coordinates the functionality of the inertial sensor and the detection module based on the detected condition. | 12-03-2009 |
| 20110087454 | Tap Detection - Methodology and circuitry for determining if a device, such as a cellular phone or personal digital assistant has been tapped is disclosed. The device includes an accelerometer and in response to an acceleration, the accelerometer outputs an acceleration signal. The accelerometer may continuously output an acceleration signal even if no acceleration occurs. A tap detection device receives the temporally sampled acceleration signal and takes the first derivative of the temporally sampled acceleration signal producing one or more derivative values. The tap detection system compares each derivative value to a threshold value and if the derivative value exceeds the threshold a tap is detected. By taking the derivative of the acceleration signal, the noise floor for the acceleration signal is reduced leading to more accurate results with less false positives and less positive negatives. | 04-14-2011 |
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| 20080221077 | Ansamycin formulations and methods of use thereof - Provided herein, inter alia, are solid forms of geldanamycin analogs, pharmaceutical compositions comprising a geldanamycin analog and a crystallization inhibitor, methods of making and using such compositions. Additionally, provided are methods for the treatment of cancer, a neoplastic disease state and/or a hyperproliferative disorder, and methods of inhibiting Heat Shock Protein 90 (“Hsp90”). | 09-11-2008 |
| 20090062528 | Ansamycin formulations and methods of use thereof - Provided herein, inter alia, are solid forms of geldanamycin analogs, pharmaceutical compositions comprising a geldanamycin analog and a crystallization inhibitor, methods of making and using such compositions. Additionally, provided are methods for the treatment of cancer, a neoplastic disease state and/or a hyperproliferative disorder, and methods of inhibiting Heat Shock Protein 90 (“Hsp90”). | 03-05-2009 |
| 20090069281 | Ansamycin formulations and methods of use thereof - Provided herein, inter alia, are solid forms of geldanamycin analogs, pharmaceutical compositions comprising a geldanamycin analog and a crystallization inhibitor, methods of making and using such compositions. Additionally, provided are methods for the treatment of cancer, a neoplastic disease state and/or a hyperproliferative disorder, and methods of inhibiting Heat Shock Protein 90 (“Hsp90”). | 03-12-2009 |
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| 20090293276 | ROTOR ASSEMBLY SYSTEM AND METHOD - A method and system are disclosed for use in assembling a plurality of rotatable elements in the assembly of a turbine engine. The system and method include an initialization unit, a measurement unit, and a processing unit. The initialization unit receives and stores initialization data in a computer datastore. The initialization data includes a first set of initialization data that is representative of characteristics of a first rotatable element, and a second set of initialization data that is representative of characteristics of a second rotatable element. The measurement unit receives measured data including a first set of measured data characteristic of measured features of the first rotatable element, and a second set of measured data characteristic of measured features of the second rotatable element. The processor unit determines an optimal order and rotational arrangement of the first and second rotatable elements with respect to one another responsive to the first and second sets of initialization data and the first and second sets of measured data. | 12-03-2009 |
| 20090320309 | SYSTEM FOR OPTIMAL ALIGNMENT OF A BEARING SEAL ON A SHAFT OF A GAS TURBINE - A method for substantially aligning a bearing seal on a shaft of a turbine engine. The method including measuring characteristics of the subject shaft, measuring characteristics of a plurality of bearing seal components and determining and outputting alignment information of the plurality of bearing seal components with the shaft based on the measured characteristics. The alignment information can be outputted for either substantially perpendicular alignment for an axial seal or substantially parallel alignment for a radial seal. | 12-31-2009 |
| 20100198553 | ABSOLUTE DIAMETER MEASUREMENT ARM - A measurement apparatus calibrated to measure an absolute diameter of a part in a shop floor environment. The measurement apparatus includes a calibration that includes compensation factors for thermal expansion, shifting of measurement parts (arm, support tower, and related laser), and variances of these parts. The resulting measurements report an absolute diameter of a part to a higher degree of accuracy than previously possible. Also, the calculated compensation factor eliminate the need for an isolated, climate-controlled measurement room. | 08-05-2010 |
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| 20090061221 | COMPOSITE TACK FILM FOR ASPHALTIC PAVING, METHOD OF PAVING, AND PROCESS FOR MAKING A COMPOSITE TACK FILM FOR ASPHALTIC PAVING - A tack film material comprises a carrier substrate comprising a polymer film having first and second major surfaces. A surface layer on the first and second major surfaces comprises a resinous non-asphaltic material or a material including about 50% or more resinous non-asphaltic component and about 50% or less of asphaltic component. The surface layer is capable of forming a bond with an adjacent layer of asphaltic paving material, when the surface layer is heated to a temperature of about 120° C. or more under a pressure that is applied to the tack film material by an overlying layer of the asphaltic paving material having a thickness of about 3.8 cm (1.5 inch) or more laid. The surface layer is not tacky at a temperature of about 20° C. and a pressure of about one atmosphere. | 03-05-2009 |
| 20090097917 | REINFORCEMENT FOR ASPHALTIC PAVING, METHOD OF PAVING, AND PROCESS FOR MAKING A GRID WITH THE COATING FOR ASPHALTIC PAVING - A composite material comprises: an open grid comprising at least two sets of strands. Each set of strands has openings between adjacent strands. The sets are oriented at a substantial angle to one another. A tack film is laminated to the open grid. The tack film has first and second major surfaces, such that a material of the tack film at its first and second major surfaces is a material including about 50% or more of resinous non-asphaltic component and about 50% or less of asphaltic component. | 04-16-2009 |
| 20090098330 | COMPOSITE GRID WITH TACK FILM FOR ASPHALTIC PAVING, METHOD OF PAVING, AND PROCESS FOR MAKING A COMPOSITE GRID WITH TACK FILM FOR ASPHALTIC PAVING - A composite material comprises: an open grid comprising at least two sets of strands. Each set of strands has openings between adjacent strands. The sets are oriented at a substantial angle to one another. A tack film is laminated to the open grid. The tack film has first and second major surfaces, such that a material of the tack film at its first and second major surfaces includes about 50% or more of resinous non-asphaltic component and about 50% or less of asphaltic component. | 04-16-2009 |
| 20120003889 | REINFORCEMENT FOR ASPHALTIC PAVING, METHOD OF PAVING, AND PROCESS FOR MAKING A GRID WITH THE COATING FOR ASPHALTIC PAVING - A composite material comprises: an open grid comprising at least two sets of strands. Each set of strands has openings between adjacent strands. The sets are oriented at a substantial angle to one another. A tack film is laminated to the open grid. The tack film has first and second major surfaces, such that a material of the tack film at its first and second major surfaces is a material including about 50% or more of resinous non-asphaltic component and about 50% or less of asphaltic component. | 01-05-2012 |
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| 20100110603 | WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS - An electrostatic chuck and method for clamping and de-clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. An arc pin operably coupled to the clamping plate and a power source provides an arc for penetrating an insulating layer of the workpiece. The arc pin is selectively connected to an electrical ground, wherein upon removal of the insulative layer of the workpiece, the arc pin provides an electrical ground connection to the workpiece. | 05-06-2010 |
| 20100110604 | ELECTROSTATIC CHUCK GROUND PUNCH - An electrostatic chuck and method for clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. A punch is operably coupled to the clamping plate and an electrical ground, wherein the punch comprises a trigger mechanism and a punch tip. The punch tip translates between extended and retracted positions, wherein a point of the punch tip is proud of the clamping surface when the punch tip is in the extended position. The punch tip is configured to translate toward the clamping surface upon clamping the workpiece to the clamping plate. Upon reaching the retracted position, the trigger mechanism imparts an impact force to the punch tip, forcing the punch tip into the workpiece and providing an electrical ground connection to the workpiece. | 05-06-2010 |
| 20100142113 | DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK - One embodiment of the present invention relates to a method for declamping a semiconductor wafer that is electrically adhered to a surface of an electrostatic chuck by a clamping voltage. In this method, the clamping voltage is deactivated. For a time following the deactivation, a first region of the wafer is lifted an first distance from the surface of the electrostatic chuck while a second region of the wafer remains adhered to the surface of the electrostatic chuck. A predetermined condition is monitored during the time. The second region is lifted from the surface of the electrostatic chuck when the predetermined condition is met. | 06-10-2010 |
| 20100142114 | ELECTROSTATIC CHUCK WITH COMPLIANT COAT - The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®. | 06-10-2010 |
| 20100171044 | Vapor Compression Refridgeration Chuck for Ion Implanters - Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece. | 07-08-2010 |
| 20100187447 | NON-CONDENSING THERMOS CHUCK - The present invention is directed to an apparatus and method of forming a thermos layer surrounding a chuck for holding a wafer during ion implantation. The thermos layer is located below a clamping surface, and comprises a vacuum gap and an outer casing encapsulating the vacuum gap. The thermos layer provides a barrier blocking condensation to the outside of the chuck within a process chamber by substantially preventing heat transfer between the chuck when it is cooled and the warmer environment within the process chamber. | 07-29-2010 |
| 20110291022 | Post Implant Wafer Heating Using Light - An ion implantation system, method, and apparatus for abating condensation in a cold ion implant is provided. An ion implantation apparatus is configured to provide ions to a workpiece positioned in a process chamber. A sub-ambient temperature chuck supports the workpiece during an exposure of the workpiece to the plurality of ions. The sub-ambient temperature chuck is further configured to cool the workpiece to a processing temperature, wherein the process temperature is below a dew point of an external environment. A load lock chamber isolates a process environment of the process chamber from the external environment. A light source provides a predetermined wavelength of electromagnetic radiation to the workpiece concurrent with the workpiece residing within the load lock chamber, wherein the predetermined wavelength or range of wavelengths is associated with a maximum radiant energy absorption range of the workpiece, wherein the light source is configured to selectively heat the workpiece. | 12-01-2011 |
| 20110291023 | HEATED ROTARY SEAL AND BEARING FOR CHILLED ION IMPLANTATION SYSTEM - A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis. | 12-01-2011 |
| 20110291030 | ACTIVE DEW POINT SENSING AND LOAD LOCK VENTING TO PREVENT CONDENSATION ON WORKPIECES - A system, apparatus, and method is provided for preventing condensation on a workpiece in an end station of an ion implantation system. A workpiece is cooled in a first environment, and is transferred to a load lock chamber that is in selective fluid communication with the end station and a second environment, respectively. A workpiece temperature monitoring device is configured to measure a temperature of the workpiece in the load lock chamber. An external monitoring device measures a temperature and relative humidity in the second environment, and a controller is configured to determine a temperature of the workpiece at which condensation will not form on the workpiece when the workpiece is transferred from the load lock chamber to the second environment. | 12-01-2011 |
| 20110292562 | MATCHED COEFFICIENT OF THERMAL EXPANSION FOR AN ELECTROSTATIC CHUCK - An apparatus and method are provided for selecting materials for forming an electrostatic clamp. The electrostatic clamp has a backing plate having a first coefficient of thermal expansion, wherein the backing plate provides structural support and rigidity to the electrostatic clamp. The electrostatic clamp further has a clamping plate having a clamping surface associated with contact with a workpiece, wherein the clamping plate has a second coefficient of thermal expansion associated therewith. The clamping plate is bonded, attached or grown to the backing plate, wherein minimal deflection of the clamping plate is evident across a predetermined temperature range. The first coefficient of thermal expansion and second coefficient of thermal expansion, for example, are substantially similar, and vary by no greater than a factor of three. | 12-01-2011 |
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| 20110260047 | SILABORANE IMPLANTATION PROCESSES - Methods for implanting an silaborane molecule or a selected ionized lower mass byproduct into a workpiece generally includes vaporizing and ionizing silaborane molecule in an ion source to create a plasma and produce silaborane molecules and its ionized lower mass byproducts. The ionized silaborane molecules and lower mass byproducts within the plasma are then extracted to form an ion beam. The ion beam is mass analyzed with a mass analyzer magnet to permit selected ionized silaborane molecules or selected ionized lower mass byproducts to pass therethrough and implant into a workpiece. | 10-27-2011 |
| 20110297845 | EFFECTIVE ALGORITHM FOR WARMING A TWIST AXIS FOR COLD ION IMPLANTATIONS - A method for warming a rotational interface in an ion implantation environment provides a scan arm configured to rotate about a first axis and an end effector coupled to the scan arm via a motor to selectively secure a workpiece. The end effector is configured to rotate about a second axis having a bearing and a seal associated with the second axis and motor. The motor is activated, and the rotation of motor is reversed after a predetermined time or when the motor faults due to a rotation the end effector about the second axis. A determination is made as to whether the rotation of the end effector about the second axis is acceptable, and the scan arm is reciprocated about the first axis when the rotation of the end effector is unacceptable, wherein inertia of the end effector causes a rotation of the end effector about the second axis. | 12-08-2011 |
| 20110299217 | HEATED ELECTROSTATIC CHUCK INCLUDING MECHANICAL CLAMP CAPABILITY AT HIGH TEMPERATURE - An electrostatic clamp is provided, having a clamping plate, wherein a clamping surface of the clamping plate is configured to contact the workpiece. A voltage applied to one or more electrodes selectively electrostatically attracts the workpiece to the clamping surface. One or more auxiliary clamping members are further provided wherein the one or more auxiliary clamping members are configured to selectively secure at least a portion of the workpiece to the clamping surface. A temperature monitoring device configured to determine a temperature of the workpiece is provided, and a controller is configured to selectively clamp the workpiece to the clamping surface via a control of the voltage to the one or more electrodes and the one or more auxiliary clamping members, based, at least in part, on the temperature of the workpiece. | 12-08-2011 |
| 20110299218 | HEATED ANNULUS CHUCK - A clamping device and method is provided for securing first and second workpieces having different sizes to a clamping device and providing thermal conditioning thereto. An electrostatic clamping plate having a diameter associated with the first workpiece surrounds a central portion of the clamp. A non-electrostatic central portion provides a heater within the annulus, wherein the central portion has a diameter associated with the second workpiece. A workpiece carrier is provided, wherein the workpiece carrier is configured to hold the second workpiece above the heater, and wherein a diameter of the workpiece carrier is associated with the electrostatic clamping plate annulus. The annulus selectively electrostatically clamps the workpiece carrier or a circumferential portion of the first workpiece to its clamping surface, therein selectively maintaining a position of the first or second workpiece with respect to the annulus or non-electrostatic central portion. | 12-08-2011 |
