20090221446 | Polymer Replicated Interdigitated Electrode Array for (Bio) Sensing Applications - Interdigitated electrode arrays are very promising devices for multi-parameter (bio)sensing, for example the label-free detection of nucleic acid hybridisation for diagnostic applications. The current disclosure provides an innovative method for the affordable manufacturing of polymer-based arrays of interdigitated electrodes with μm-dimensions. The method is based on a combination of an appropriate three-dimensional structure and a single and directional deposition of conductive material. The three-dimensional structure can be realized in a polymer material using a moulding step, for which the moulds are manufactured by electroplating as a reverse copy of a silicon master structure. In order to ensure sufficient electrical isolation and individual, but convenient, accessibility of the sensors in the array, the interdigitated electrode regions need to be complemented with specific features on the three-dimensional structure. Combined with the use of e.g. shadow masks in the deposition step, these features allow for the site-specific deposition of the conductive material. The technology described has the additional advantage to integrate highly miniaturized and arrayed electronics elements into polymer micro-fluidics technology, which leads to the affordable manufacturing of (bio)sensor arrays. | 09-03-2009 |
20110201098 | Polymer Replicated Interdigitated Electrode Array for Bio(Sensing) Applications - A sensor is disclosed. In one embodiment, the sensor includes an insulating substrate comprising a first zone, a second zone, and an intermediate zone, where the intermediate zone comprises a portion of the second zone that overlaps the first zone. The sensor further comprises a first electrode in the first zone that comprises a first plurality of fingers of a conductive material, a second electrode in the second zone that comprises a second plurality of fingers of the conductive material that are interdigitated with the first plurality of fingers, a plurality of three-dimensional isolation structures, and a plurality of shadow zones, wherein each shadow zone is adjacent to at least one isolation structure and is substantially free of conductive material. The plurality of isolation structures may comprises hills and/or channels. | 08-18-2011 |