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Lai, Taoyuan County
Chao-Sung Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20090017604 | METHOD FOR FABRICATING A SEMICONDUCTOR DEVICE - A method for fabricating a semiconductor device is provided. The method for fabricating the semiconductor device comprises providing a substrate. Under an atmosphere containing a fluoride nitride compound, a plasma treatment process is performed to simultaneously fluorinate and nitrify a surface of the substrate. Thereafter, a dielectric layer is formed on the substrate. | 01-15-2009 |
| 20090146101 | ETCHANT FOR METAL ALLOY HAVING HAFNIUM AND MOLYBDENUM - An etchant for etching a metal alloy having hafnium and molybdenum includes 20 to 80 percent by weight of nitric acid, 1 to 49 percent by weight of hydrofluoric acid, 1 to 96 percent by weight of sulfuric acid, and 1 to 30 percent by weight of water, based on the total weight of the etchant. | 06-11-2009 |
| 20110226736 | METHOD OF PATTERNING METAL ALLOY MATERIAL LAYER HAVING HAFNIUM AND MOLYBDENUM - A method of patterning a metal alloy material layer having hafnium and molybdenum. The method includes forming a patterned mask layer on a metal alloy material layer having hafnium and molybdenum on a substrate. The patterned mask layer is used as a mask and an etching process is performed using an etchant on the metal alloy material layer having hafnium and molybdenum so as to form a metal alloy layer having hafnium and molybdenum. The etchant includes at least nitric acid, hydrofluoric acid and sulfuric acid. The patterned mask layer is removed. | 09-22-2011 |
| 20110298015 | SENSING DEVICE - A sensing device includes: a semiconductor layer of a field effect semiconductor having upper and lower surfaces; a conductive layer formed on the lower surface of the semiconductor layer; and a sensor layer of an insulator formed on the upper surface of the semiconductor layer. The insulator is made from lanthanide-titanium oxide. | 12-08-2011 |
Chien Fong Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110036997 | ULTRAVIOLET EQUIPMENT - The present invention relates to an UV equipment, which enables LED unit to generate UV radiation onto a gel, which is cured after a period of time and then applied to fabrication of pseudo-nail; if the gel is applied to fabrication of pseudo-nail, it's possible to attach it closely to the real nail; if the gel is applied to tooth mould or pseudo-tooth, a protective layer will be formed from gel curing and covered onto the surface of the tooth mould or pseudo-tooth. | 02-17-2011 |
Chin-Chuan Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20080224139 | THIN FILM TRANSISTOR - A thin film transistor including a substrate, a gate, a gate insulator layer, a semiconductor layer, an ohmic contact layer, a source and a drain is provided. The gate is disposed on the substrate while the gate insulator layer is disposed on the substrate and covers the gate. The semiconductor layer is disposed on the gate insulator layer above the gate. The semiconductor layer includes an undoped amorphous silicon layer and a first undoped microcrystalline silicon (μc-Si) layer, wherein the first undoped μc-Si layer is disposed on the undoped amorphous silicon layer. The ohmic contact layer is disposed on part of the semiconductor layer and the source and the drain are disposed on the ohmic contact layer. Therefore, the thin film transistor has better quality control and electrical characteristics. | 09-18-2008 |
| 20080233739 | METHOD FOR FABRICATING CONDUCTIVE LAYER - A method for fabricating a conductive layer is provided. First, a substrate is provided and a patterned adhesion layer is formed on the substrate. Next, a chemical plating process is performed to form a first metal layer on the patterned adhesion layer by placing the substrate in an electroplating solution and the electroplating solution is shocked. Thereafter, a second metal layer is formed on the first metal layer by performing a plating process. | 09-25-2008 |
| 20090057679 | THIN FILM TRANSISTOR AND MANUFACTURING METHOD THEREOF - A manufacturing method of a TFT is provided. A polysilicon island, a gate insulating layer and a gate are sequentially formed on a substrate. LDD regions are formed in the polysilicon island below two sides of the gate, while the polysilicon island below the gate is a channel region. A metal oxidation process is performed to form a gate oxidation layer on the gate. A source and a drain are formed in the polysilicon island below two sides of the gate oxidation layer. A dielectric layer is formed on the gate insulating layer. Portions of the dielectric layer and the gate insulating layer are removed to expose a portion of the source and drain, and a patterned dielectric layer and a patterned gate insulating layer are formed. A source and a drain conductive layers electrically respectively connected to the source and the drain are formed on the patterned dielectric layer. | 03-05-2009 |
| 20090085032 | PIXEL STRUCTURE AND FABRICATING METHOD THEREOF - A method of fabricating a pixel structure is provided. First, a semiconductor material layer and a first conductive layer are sequentially formed on a substrate. Next, a first patterned photoresist layer with a fillister is formed on the first conductive layer by a first mask. A semiconductor layer, a drain, and a source are formed by the first patterned photoresist layer. After removing the first patterned photoresist layer, a dielectric material layer covering the source, the drain, and the semiconductor layer is formed. A second conductive layer is formed on the dielectric material layer. Then, a second patterned photoresist layer with a salient is formed on the second conductive layer by a second mask. A gate and a dielectric layer are formed by the second patterned photoresist layer. After removing the second patterned photoresist layer, a pixel electrode electrically connected to the drain is formed above the substrate. | 04-02-2009 |
Ching-Tsung Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100199115 | PORTABLE ELECTRONIC DEVICE AND POWER CONTROL METHOD THEREOF - A power control method for a portable electronic device. The portable electronic device comprises a power supply unit and a volatile memory for storing data when the power supply unit supplies power thereto. First, the portable electronic device is set to enter a deep sleep mode. Then, data accessed from the volatile memory is transferred to a non-volatile memory. Finally, except for maintaining sufficient power to restore the device, the power supply unit is turned off. | 08-05-2010 |
Chung-Chi Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20120003947 | Radio-frequency Processing Device and Method and Related Wireless Communication Device - A radio-frequency (RF) processing device, for a wireless communication device, is disclosed. The RF processing device comprises an antenna, an RF-signal processing module, a controller, for generating a control signal according to a band switching signal, and a matching adjustment module for adjusting an impedance between the antenna and the RF-signal processing module according to the control signal. | 01-05-2012 |
Chun-Wen Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110026388 | METHOD FOR CALIBRATION FOCUSING ERROR SIGNAL OF LIGHTSCRIBE DISC - A method for calibrating a focusing error signal of a lightscribe disc includes the following steps. An optical pickup head is moved to a focusing reference surface by utilizing radial voltages to some predetermined measuring positions to find and record the best gain value used to calibrate the asymmetry of the focusing error signal. The best gain fitting curve is formed by curve-fitting, based on the recorded radial voltages and the best gain values. The best gain value is obtained by an interpolation or extrapolation method, and used to calibrate the asymmetry of the focusing error signal of a lightscribe disc. | 02-03-2011 |
| 20110051578 | METHOD FOR TESTING OPTICAL DISK DRIVE - The invention provides a method for testing an optical disk drive. The method comprises: resetting a successful number of a test and setting an upper limit for the successful number of the test; proceeding with a virtual writing by a laser beam with predetermined power; checking whether the output power is different from the predetermined power; if the output power is different from the predetermined power, determine the test fails, and if the output power is not different from the predetermined power, plus one to the successful number, wherein the optical disk drive passes the test when the number of successful test reaches the upper limit. The invention can reduce the time of testing the optical disk drive. | 03-03-2011 |
| 20110051579 | METHOD FOR CALIBRATING SIGNAL OFFSETS ON LIGHTSCRIBE DISC - A method for calibrating signal offsets on a lightscribe disc is provided. Spoke signals of an inner ring are utilized as a counter in order to read information pattern signals of an outer ring in a predetermined marked area. Measure the signal offsets of the information pattern signals. Check whether the number of the spoke signals of the inner ring exceeds a predetermined value. When the number of the spoke signals does not exceed the predetermined value, continue to measure the signal offsets; and when the number of the spoke signals reaches the predetermined value, calculate an average signal offset. The signal offsets of the information pattern signals of the outer ring can be calibrated by utilizing the average signal offset during a radial calibration or a decoding calibration. | 03-03-2011 |
| 20110222385 | APPARATUS AND METHOD FOR TESTING SPOKE SENSOR - An apparatus and a method for testing spoke sensor are disclosed. A drive unit is started to rotate a test disc to a predetermined rotation speed. A module test unit is electrically connected to a spoke sensor under test of a spindle motor module. The module test unit is started to drive the spoke sensor to detect the spoke signals of the test disc and record the number of detected spoke signals. Within a test time, a comparison unit is used for comparing the number of spoke signals with a threshold, and only when the detected number is larger than a threshold will the spoke sensor be assembled to the product. Thus, the product quality is assured. | 09-15-2011 |
| 20110228655 | COMPENSATION METHOD IN RADIAL DIRECTION ON LABEL SIDE OF OPTICAL DISC - The disclosure discloses a compensation method in a radial direction on a label side of an optical disc. An optical disc is inserted into an optical disk drive. The data side of the optical disc is divided into at least one compensation area. An optical pick-up head (OPU) is moved from inner to outer rings by simulating a writing process. The OPU is moved to some pre-determined points and radial-directional compensation is performed to obtain radial-directional voltage gains at the pre-determined points. The voltage gains are recorded. The label side of an optical disc is inserted into the optical disk drive. The simulated track number is calculated on the basis of the required moving distance for the OPU to write pattern on the label side. The OPU is moved to write the label side by a radial-directional lens driving voltage compensated with a gain obtained from a compensation formula. | 09-22-2011 |
John Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100013429 | BATTERY MANAGEMENT SYSTEMS AND METHODS - Battery management systems and methods are provided. The system includes an electronic device and a fuel cell module. The electronic device includes a processing module, a first power adapter, a first communication interface, and a rechargeable battery. The fuel cell module includes a second power adapter connected with the first power adapter, a second communication interface connected with the first communication interface, at least one fuel cell, and a control unit. The control unit receives a first status of the rechargeable battery from the electronic device via the processing module, the first communication interface and the second communication interface, and determines whether to charge the rechargeable battery using the fuel cell via the second power adapter and the first power adapter according to the first status. | 01-21-2010 |
Juin-Yih Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20080305053 | Fluoride-releasing strips for tooth - The present invention discloses fluoride-releasing strips for tooth, wherein the fluoride-releasing strips comprises a fluoride-containing solution for releasing fluorine ion and a support substrate. A formula of fluoride-containing solution comprises a fluoride solution, at least one buffer, at least one moisturizer and a tackiness agent. The support substrate is waterproof material and a fluoride-containing solution is applied on the support substrate. | 12-11-2008 |
| 20090257964 | Fluoride-releasing strips for caries prevention - The present invention discloses fluoride-releasing strips for caries prevention, wherein the fluoride-releasing strips comprises a colloidal fluoride-containing solution for releasing fluorine ion and a support substrate. A colloidal fluoride-containing solution comprises a fluoride solution, at least one buffer, at least one moisturizer and a carboxymethyl cellulose (CMC). The concentration of fluoride ions in said colloidal fluoride-containing solution ranges from 2500 ppm to ppm. The support substrate is waterproof material and the colloidal fluoride-containing solution is applied on the support substrate. | 10-15-2009 |
| 20100224030 | INDIUM RECOVERY BY SUPPORTED LIQUID MEMBRANE WITH STRIP DISPERSION - The present invention provides a process for the removal and recovery of indium from waste waters and process streams. The process of the present invention utilizes a combination of a supported liquid membrane (SLM) and a strip dispersion to improve extraction of indium while increasing membrane stability and decreasing processing costs. This novel process selectively removes indium from the feed stream, provides the increased flexibility of aqueous strip/organic volume ratio, and produces a concentrated strip solution of indium. | 09-09-2010 |
Jung-Chang Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110001829 | MULTIFUNCTIONAL X-RAY READER - A multifunctional X-ray reader includes an enclosure assembled from a front and a rear enclosure to define a receiving chamber for receiving at least one circuit board therein; a liquid crystal display (LCD) screen provided on the front enclosure and electrically connected to the circuit board; at least one push-button group arranged on the enclosure and electrically connected to the circuit board; an X-ray film tray outward extendably received in the enclosure for holding an X-ray film thereon; and an image capture unit located in the enclosure to face toward the X-ray film tray and electrically connect to the circuit board. The image capture unit captures an image data from the X-ray film, and the captured image data is displayed on the LCD display screen and simultaneously stored in a memory card held in a memory card holder provided on the enclosure and electrically connected to the circuit board. | 01-06-2011 |
Jung-Chi Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20090231284 | Portable Electronic Device and Program Image Selecting Method - The invention provides a portable electronic device comprising a display unit and an input module. The display unit is for displaying frames. The input module is coupled to the display unit and includes a control unit and a hotkey. The hotkey is for controlling the display unit to display or close a sub-window in the frames, therein the sub-window includes a selecting section and at least one program image. When the display unit displays the sub-window in the frame, the control unit could be operated by a user to control a first program image of the program images to overlap the selecting section. | 09-17-2009 |
| 20090289894 | ELECTRONIC APPARATUS AND THREE-DIMENSIONAL INPUT DEVICE THEREOF - An electronic apparatus and a three-dimensional input device thereof are disclosed. The electronic apparatus includes a display and the three-dimensional input device. The three-dimensional input device includes an infrared ray emitting/receiving unit, a cursor control unit and a radio frequency receiving unit. The infrared ray emitting/receiving unit is electrically connected to the display and includes an infrared ray emitter and an infrared ray receiver. The cursor control unit includes a reflective material and a radio frequency emitter. The radio frequency emitter is electrically connected to the display. | 11-26-2009 |
| 20110286662 | SYSTEM FOR BUILDING A PERSONALIZED-CHARACTER DATABASE AND METHOD THEREOF - Input personal handwriting of a character stored in a system character database into an input device. Divide the personal handwriting of the character into a group of personalized roots. Store the group of personalized roots in a personalized-root database. Form a plurality of personalized characters according to a plurality of personalized roots stored in the personalized-root database. Store the plurality of personalized characters in a personalized-character database. | 11-24-2011 |
Jyun-Yi Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110159401 | DIRECT METHANOL FUEL CELL STRUCTURE - The invention provides a direct methanol fuel cell. The direct methanol fuel cell includes a membrane having a first surface and an opposite second surface. The membrane is sandwiched between a pair of electrodes. Two terminals of the membrane and a portion of the first and second surfaces adjacent to the two terminals are exposed from a pair of the electrodes. A pair of gas diffusion layers is respectively disposed on the pair of electrodes. A plurality of first border material layers having a plurality of holes is respectively physically embedded on the exposed first and second surfaces. A plurality of adhesion materials is respectively mounted on the border material layers, passing through the holes to contact the first and second surfaces of the membrane. | 06-30-2011 |
| 20110318670 | FUEL CELL MEA (MEMBRANE ELECTRODE ASSEMBLY) WITH A BORDER PACKAGING STRUCTURE - A fuel cell MEA with a border packaging structure. A catalyst coated membrane includes an anode catalyst layer, a cathode catalyst layer, and a proton exchange membrane disposed therebetween. An anode border packaging member is connected between the anode catalyst layer and an anode gas diffusion layer. A cathode border packaging member is connected between the cathode catalyst layer and a cathode gas diffusion layer and adheres to the anode border packaging member at outer edges of the catalyst coated membrane. The anode border packaging member and the cathode border packaging member respectively include two adhesive layers and a substrate layer formed therebetween. The anode border packaging member and the cathode border packaging member are respectively connected between the anode catalyst layer and the anode gas diffusion layer and between the cathode catalyst layer and the cathode gas diffusion layer by the adhesive layers. | 12-29-2011 |
Kuo-Sheng Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100026673 | METHOD AND CONTROL BOARD FOR ELIMINATING POWER-OFF RESIDUAL IMAGES IN DISPLAY AND DISPLAY USING THE SAME - A method and a control board for eliminating power-off residual images in a display and a display using the same are provided. The method includes the following steps of providing a first voltage to compensate a second voltage which is used for sequentially turning on all scan lines within a display panel when the display is in power-off, and then forming a third voltage to turn on all scan lines within the display panel according to the compensated second voltage. | 02-04-2010 |
Lai-Chen Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20090172562 | USER INTERFACE DYNAMIC LAYOUT SYSTEM, METHOD FOR ARRANGING USER INTERFACE LAYOUT AND TOUCH CONTROL DISPLAY SYSTEM USING THE SAME - A method for arranging a user interface layout is provided. The method is adapted for a touch control display displaying a plurality of icons. Each icon corresponds to a sensing range thereof on the touch control display. The method includes: statistically calculating a utilization frequency of each icon generated by touching the icon on the touch control display; and adjusting the sensing ranges of the icons according to the corresponding utilization frequencies thereof. | 07-02-2009 |
Ming-Te Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110032194 | METHOD FOR DETECTING TRACKS OF TOUCH INPUTS ON TOUCH-SENSITIVE PANEL AND RELATED COMPUTER PROGRAM PRODUCT AND ELECTRONIC APPARATUS USING THE SAME - A method for detecting tracks of touch inputs on touch-sensitive panel, which is applied for an electronic apparatus having a touch-sensitive panel, comprises: during a first period, detecting M touch positions of M touch inputs on the touch-sensitive panel; during a second period, detecting N touch positions of N touch inputs on the touch-sensitive panel, where M and N are positive integers and M is less than or equal to N; selecting a specific touch input from the M touch inputs, where the specific touch input corresponds to a specific touch position of the M touch positions; and determining a track of the specific touch input on the touch-sensitive panel according to N distances that are between the specific touch position and the N touch positions respectively. | 02-10-2011 |
| 20110043461 | SYSTEMS AND METHODS FOR APPLICATION MANAGEMENT - Methods and systems for application management are provided. First, a first picture of an application is displayed on a lower display layer in a touch-sensitive display unit. At least one contact on the touch-sensitive display unit is detected. In response to the at least one contact, a second picture is displayed on an upper display layer in the touch-sensitive display unit, wherein the upper display layer is visually above the lower display layer. | 02-24-2011 |
Min-Ta Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20120120330 | STEREOSCOPIC DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF - A stereoscopic display device includes a reactive mesogen layer disposed inside the stereoscopic display, such that a backlight source has a first polarization state and a second polarization state after passing the reactive mesogen layer. The manufacturing method includes the following steps. First, a liquid crystal layer and a reactive mesogen layer are formed between a first substrate and a second substrate, wherein the first substrate includes at least one first eye image region and a second eye image region. Then, render the liquid crystal layer corresponding to the first eye image region and the second eye image region a first state and a second state, respectively. A first exposure step is performed on the reactive mesogen layer for emitting a first exposure light source passing the liquid crystal layer to induce photopolymerization reactions in the reactive mesogen layer. Subsequently, a backlight source is provided. | 05-17-2012 |
Ray-Chien Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100170561 | SOLAR CELL MODULE AND SURFACE LAYER THEREOF - A surface layer of a solar cell module is provided for being added onto a surface of the solar cell module. The surface layer is a liquid having a predetermined height and a refractive index from 1 to 1.55 for increasing light transmission and/or a thermal resistivity of the surface layer is less than that of the glass to improve heat dissipation of the solar cell module. The surface layer of the solar cell further includes a storage buffer apparatus to keep the predetermined height of the surface layer with/without texture from wave generators for the improvement in light transmission and heat dissipation. | 07-08-2010 |
Sheng-Ping Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110044368 | OPTICAL DEVICE - An optical device is disclosed. The optical device includes a first packaging unit and a second packaging unit. The first packaging unit includes a first lead frame and a sensor electrically coupled to the first lead frame. The second packaging unit includes an emitting die and a second lead frame. The emitting die has an optical axis and is operable to emit a light. The second lead frame has a first portion disposed within the second packaging unit and a second portion extending into the first packaging unit so that an angle of about 5-85 degrees is formed between the optical axis of the emitting die and the sensing plane of the sensor. | 02-24-2011 |
Tung-Sheng Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110291291 | Silicon Chip Having Penetrative Connection Holes - Two circuit layout areas on two surfaces of a chip are connected. Holes in the chip are coordinated with a conductive paste to connect the two surfaces. Thus, fabrication is made easy and cost is reduced. | 12-01-2011 |
Wei-Chi Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100054365 | Multilevel Cluster-based MIMO Detection Method and MIMO Detector Thereof - A MIMO detection method for a receiver in a MIMO system using N-QAM for modulation, the MIMO detection method including generating a plurality of symbol vector sets and a plurality of search radiuses, selecting a candidate symbol vector set corresponding to a highest level of a multilevel structure of N-QAM constellation, generating a search space corresponding to a lower level of the multilevel structure of N-QAM constellation according to the selected candidate symbol vector set, confirming which level the search space corresponds to, and generating a detection signal according to the search space when the level of the search space is the lowest level of the multilevel structure of the N-QAM constellation. | 03-04-2010 |
Wen-Hung Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100134124 | MISALIGNMENT DETECTION DEVICES - A misalignment detection device comprising a substrate, at least one integrated circuit (IC), and at least one detection unit is disclosed. The substrate comprises a first positioning pad and a second positioning pad adjacent to the first positioning pad. The integrated circuit is disposed on the substrate and comprises a first positioning bump and a second positioning bump adjacent to the first positioning bump. The first and second positioning bumps substantially correspond to the first and second positioning pads, respectively. The at least one detection unit is electrically coupled to the substrate, wherein the detection unit outputs a fault signal in response to a positioning shift occurring between the first and second positioning pads and the first and second positioning bumps. | 06-03-2010 |
Yao-Hsiang Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20100107834 | SEPARATION APPARATUS AND SEPARATION METHOD - A separation apparatus for separating two planar devices bonded together by an adhesive layer is provided. The separation apparatus includes a base, a sliding module, a cutting member, and a positioning stage. The sliding module is mounted on the base. The cutting member is connected to the sliding module and is moveable in a two-dimensional plane with respect to the base by the sliding module for cutting the adhesive layer. The positioning stage is mounted on the base for positioning the planar devices and the adhesive layer therebetween on the base. | 05-06-2010 |
Yi-Chiang Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20110050554 | DISPLAY DEVICE AND BACKLIGHT CONTROL METHOD THEREOF - A display device includes a panel, a receiving interface, a timing control module, a backlight module and a backlight driving unit. The receiving interface receives a first data signal and a first backlight control signal with a first timing. The timing control module converts the first data signal into a second data signal and then outputs the second data signal to the panel. Furthermore, based on the second data signal, the timing control module converts the first backlight control signal into a second backlight control signal with a second timing different from the first timing and then outputs the second backlight control signal. After receiving the second backlight control signal from the timing control module, the backlight driving unit is controlled by the second backlight control signal to output an output voltage signal to the backlight module. | 03-03-2011 |
Yun-Sen Lai, Taoyuan County TW
| Patent application number | Description | Published |
|---|---|---|
| 20090254208 | METHOD AND SYSTEM FOR DETECTING TOOL ERRORS TO STOP A PROCESS RECIPE FOR A SINGLE CHAMBER - A method for detecting tool errors to stop a process recipe for a single chamber is disclosed. When a recipe error for one of chamber of a process tool is detected, only the chamber with the recipe error is terminated and other chambers are allowed to proceed with their recipe processes for preventing excursions. | 10-08-2009 |