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| 20080198453 | Optical polarizer with nanotube array - According to one exemplary embodiment, an optical polarizer positioned before a light source for use in semiconductor wafer lithography includes an array of aligned nanotubes. The array of aligned nanotubes cause light emitted from the light source and incident on the array of aligned nanotubes to be converted into polarized light for use in the semiconductor wafer lithography. The amount of polarization can be controlled by a voltage source coupled to the array of aligned nanotubes. Chromogenic material of a light filtering layer can vary the wavelength of the polarized light transmitted through the array of aligned nanotubes. | 08-21-2008 |
| 20080239269 | Laser beam formatting module and method for fabricating semiconductor dies using same - According to one exemplary embodiment, a laser beam formatting module for use in a lithographic system to fabricate a semiconductor wafer comprises an aperture plate having, for example, a circular aperture and capable of being situated between a laser source and a target, and a lens assembly, in a light path between the aperture plate and the target. The laser beam formatting module can produce a substantially uniform laser beam intensity across a target during fabrication of a semiconductor wafer in a laser-produced plasma (LPP) lithographic process using, for example, extreme ultraviolet light (EUV). In one embodiment, a laser beam formatting module improves energy conversion efficiency, reduces out-of-band radiation emission, avoids heating of reflective optics, and eliminates the need for an out-of-band radiation filter. | 10-02-2008 |
| 20080259458 | EUV diffractive optical element for semiconductor wafer lithography and method for making same - According to one exemplary embodiment, an EUV (extreme ultraviolet) optical element in a light path between an EUV light source and a semiconductor wafer includes a reflective film having a number of bilayers. The reflective film includes a pattern, where the pattern causes a change in incident EUV light from the EUV light source, thereby controlling illumination at a pupil plane of an EUV projection optic to form a printed field on the semiconductor wafer. The EUV optical element can be utilized in an EUV lithographic process to fabricate a semiconductor die. | 10-23-2008 |
| 20090011524 | Method for determining suitability of a resist in semiconductor wafer fabrication - In one disclosed embodiment, the present method for determining resist suitability for semiconductor wafer fabrication comprises forming a layer of resist over a semiconductor wafer, exposing the layer of resist to patterned radiation, and determining resist suitability by using a scatterometry process prior to developing a lithographic pattern on the layer of resist. In one embodiment, the semiconductor wafer is heated in a post exposure bake process after scatterometry is performed. In one embodiment, the patterned radiation is provided by an extreme ultraviolet (EUV) light source in a lithographic process. In other embodiments, patterned radiation is provided by an electron beam, or ion beam, for example. In one embodiment, the present method determines out-gassing of a layer of resist during exposure to patterned radiation. | 01-08-2009 |
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| 20080211330 | CONTROLLER FOR AC GENERATOR - A control system that can accommodate the wide variations in the output of a generator, such as a permanent magnet alternator, while providing an output with relatively uniform phase ripple. The control system includes a zero crossing detector and variable ramp generator for generating control signals to a switching rectifier to generate a regulated DC signal. | 09-04-2008 |
| 20090200884 | COMPACT HIGH POWER ALTERNATOR - An apparatus for converting between mechanical and electrical energy, particularly suited for use as a compact high power alternator for automotive use and “remove and replace” retrofitting of existing vehicles. Various aspects of the invention provide a means of significantly increasing the output of permanent magnet alternators while addressing the issues of radial loading applied to a permanent magnet alternator rotor. Another aspect of the invention allows for the production of power in two discrete voltages. An aspect of this invention allows for a marked increase in output capability without increasing axial length through the use of magnetic fringing. One aspect of the invention offers an effective means of mounting a skewed stack that eliminates or reduces cogging that is present in a permanent magnet machine without negatively impacting airflow. Another aspect of the invention reduces cogging by radially offsetting opposing magnets of a dual rotor permanent magnet machine. | 08-13-2009 |
| 20110025143 | CONTROLLER FOR AC GENERATOR - A control system that can accommodate the wide variations in the output of a generator, such as a permanent magnet alternator, while providing an output with relatively uniform phase ripple. The control system includes a zero crossing detector and variable ramp generator for generating control signals to a switching rectifier to generate a regulated DC signal. | 02-03-2011 |
| 20110025152 | COMPACT HIGH POWER ALTERNATOR - An apparatus for converting between mechanical and electrical energy, particularly suited for use as a compact high power alternator for automotive use and “remove and replace” retrofitting of existing vehicles. The apparatus comprises a rotor with permanent magnets, a stator with a winding, and a cooling system. Mechanisms to prevent the rotor magnets from clashing with the stator by minimizing rotor displacement, and absorbing unacceptable rotor displacement are disclosed. The cooling system directs coolant flow into thermal contact with at least one of the winding and magnets, and includes at least one passageway through the stator core. Various open and closed cooling systems are described. Cooling is facilitated by, for example, loosely wrapping the winding end turns, use of an asynchronous airflow source, and/or directing coolant through conduits extending through the stator into thermal contact with the windings. | 02-03-2011 |
| 20120038234 | COMPACT HIGH POWER ALTERNATOR - An apparatus for converting between mechanical and electrical energy, particularly suited for use as a compact high power alternator for automotive use and “remove and replace” retrofitting of existing vehicles. Various aspects of the invention provide a means of significantly increasing the output of permanent magnet alternators while addressing the issues of radial loading applied to a permanent magnet alternator rotor. Another aspect of the invention allows for the production of power in two discrete voltages. An aspect of this invention allows for a marked increase in output capability without increasing axial length through the use of magnetic fringing. One aspect of the invention offers an effective means of mounting a skewed stack that eliminates or reduces cogging that is present in a permanent magnet machine without negatively impacting airflow. Another aspect of the invention reduces cogging by radially offsetting opposing magnets of a dual rotor permanent magnet machine. | 02-16-2012 |
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| 20100110603 | WAFER GROUNDING METHOD FOR ELECTROSTATIC CLAMPS - An electrostatic chuck and method for clamping and de-clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. An arc pin operably coupled to the clamping plate and a power source provides an arc for penetrating an insulating layer of the workpiece. The arc pin is selectively connected to an electrical ground, wherein upon removal of the insulative layer of the workpiece, the arc pin provides an electrical ground connection to the workpiece. | 05-06-2010 |
| 20100110604 | ELECTROSTATIC CHUCK GROUND PUNCH - An electrostatic chuck and method for clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. A punch is operably coupled to the clamping plate and an electrical ground, wherein the punch comprises a trigger mechanism and a punch tip. The punch tip translates between extended and retracted positions, wherein a point of the punch tip is proud of the clamping surface when the punch tip is in the extended position. The punch tip is configured to translate toward the clamping surface upon clamping the workpiece to the clamping plate. Upon reaching the retracted position, the trigger mechanism imparts an impact force to the punch tip, forcing the punch tip into the workpiece and providing an electrical ground connection to the workpiece. | 05-06-2010 |
| 20100142113 | DE-CLAMPING WAFERS FROM AN ELECTROSTATIC CHUCK - One embodiment of the present invention relates to a method for declamping a semiconductor wafer that is electrically adhered to a surface of an electrostatic chuck by a clamping voltage. In this method, the clamping voltage is deactivated. For a time following the deactivation, a first region of the wafer is lifted an first distance from the surface of the electrostatic chuck while a second region of the wafer remains adhered to the surface of the electrostatic chuck. A predetermined condition is monitored during the time. The second region is lifted from the surface of the electrostatic chuck when the predetermined condition is met. | 06-10-2010 |
| 20100142114 | ELECTROSTATIC CHUCK WITH COMPLIANT COAT - The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®. | 06-10-2010 |
| 20100171044 | Vapor Compression Refridgeration Chuck for Ion Implanters - Aspects of the present invention relate to ion implantation systems that make use of a vapor compression cooling system. In one embodiment, a thermal controller in the vapor compression system sends refrigeration fluid though a compressor and a condenser according to an ideal vapor compression cycle to help limit or prevent undesired heating of a workpiece during implantation, or to actively cool the workpiece. | 07-08-2010 |
| 20100187447 | NON-CONDENSING THERMOS CHUCK - The present invention is directed to an apparatus and method of forming a thermos layer surrounding a chuck for holding a wafer during ion implantation. The thermos layer is located below a clamping surface, and comprises a vacuum gap and an outer casing encapsulating the vacuum gap. The thermos layer provides a barrier blocking condensation to the outside of the chuck within a process chamber by substantially preventing heat transfer between the chuck when it is cooled and the warmer environment within the process chamber. | 07-29-2010 |
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| 20090096629 | REUSABLE, HERMETIC, MEDICAL GRADE RFID TAG - An RFID tag includes a circuit board assembly having a circuit board, an RFID circuit, an antenna, and a metallic ground plane. The circuit board has a first side and a second side. The circuit board carries the antenna on the first side and the ground plane on the second side. The RFID circuit is coupled with each of the antenna and the ground plane. A backplane is coupled with the ground plane, on a side of the ground plane opposite the circuit board. An overmolded housing surrounds and hermetically seals the circuit board assembly. The housing is comprised of a material which is both autoclavable and has a low dielectric constant of between approximately 1 to 5. | 04-16-2009 |
| 20100090004 | SYSTEM AND METHOD FOR INVENTORY MANAGEMENT OF MEDICAL ASSETS - A system for identification, tracking and management of medical assets, includes a plurality of RFID tagged medical assets, and a completely networked supply chain. The supply chain includes at least one end user location; at least one distributor location; an offsite data management system; a plurality of RFID readers; and at least one data network. Each RFID reader is interspersed at a respective location throughout the networked supply chain and configured to electronically read data from the plurality of RFID tagged medical assets. The one or more data networks interconnect each end user location, each distributor location, and the offsite data management system. The one or more data networks provide real time information from at least one of the plurality of RFID readers to the offsite data management system concerning a current attribute associated with at least one of the RFID tagged medical assets. | 04-15-2010 |
| 20110169608 | METHOD OF OPERATING AN RFID READER IN AN RFID SYSTEM - A method of operating a Radio Frequency Identification (RFID) reader used in an RFID system for use with a device includes the steps of: providing that the RFID system includes the RFID reader and an RFID tag, the RFID tag being attached to the device; controlling dynamically the RFID reader; monitoring constantly a plurality of outputs of the RFID reader; and determining, dependent on the steps of controlling and monitoring, whether the RFID reader senses the RFID tag in an actual location of the RFID tag. | 07-14-2011 |
