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Kwan-Woo Do

Kwan-Woo Do, Icheon-Si KR

Patent application numberDescriptionPublished
20090261454CAPACITOR IN SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A capacitor includes a bottom electrode, a dielectric layer and a top electrode over a substrate. A Ru10-22-2009
20090263967Method of forming noble metal layer using ozone reaction gas - A noble metal layer is formed using ozone (O10-22-2009
20100012989SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - A semiconductor device, and a method of fabricating the semiconductor device, which is able to prevent a leaning phenomenon from occurring between the adjacent storage nodes. The method includes forming a plurality of multi-layered pillar type storage nodes each of which is buried in a plurality of mold layers, wherein the uppermost layers of the multi-layered pillar type storage nodes are fixed by a support layer, etching a portion of the support layer to form an opening, and supplying an etch solution through the opening to remove the multiple mold layers. A process of depositing and etching the mold layer by performing the process 2 or more times to form the multi-layered pillar type storage node. Thus, the desired capacitance is sufficiently secured and the leaning phenomenon is avoided between adjacent storage nodes.01-21-2010
20100046138ELECTRODE IN SEMICONDUCTOR DEVICE, CAPACITOR AND METHOD OF FABRICATING THE SAME - A semiconductor device and a method of fabricating the same include an electrode having a nickel layer with impurities. The electrode having a nickel layer with impurities can be a gate electrode or a capacitor electrode. The electrode having a nickel layer with impurities may include a combination of a pure nickel layer and a nickel layer with impurities.02-25-2010

Kwan-Woo Do, Gyeonggi-Do KR

Patent application numberDescriptionPublished
20090273882CAPACITOR AND METHOD FOR FABRICATING THE SAME - A capacitor includes a first electrode, a dielectric layer, and a second electrode. The capacitor also includes a buffer layer formed over at least one of an interface between the first electrode and the dielectric layer and an interface between the dielectric layer and the second electrode, wherein the buffer layer includes a compound of a metal element from electrode materials of one of the first and second electrodes and a metal element from materials included in the dielectric layer.11-05-2009
20110128667SEMICONDUCTOR DEVICE INCLUDING CARBON-CONTAINING ELECTRODE AND METHOD FOR FABRICATING THE SAME - In a semiconductor device including a carbon-containing electrode and a method for fabricating the same, an electrode has a high work function due to a carbon-containing TiN layer contained therein. It is possible to provide a dielectric layer having a high permittivity and thus to reduce the leakage current by forming an electrode having a high work function. Also, sufficient capacitance of a capacitor can be secured by employing an electrode having a high work function and a dielectric layer having a high permittivity.06-02-2011
20110128668ELECTRODE OF SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING CAPACITOR - An electrode of a semiconductor device includes a TiCN layer and a TiN layer. A method for fabricating an electrode of a semiconductor device includes preparing a substrate, forming a TiCN layer, and forming a TiN layer.06-02-2011

Kwan-Woo Do, Ichon-Shi KR

Patent application numberDescriptionPublished
20090002917CAPACITOR IN SEMICONDUCTOR DEVICE AND METHOD FOR FABRICATING THE SAME - A capacitor includes a lower electrode, a dielectric layer over the lower electrode, and an upper electrode having a stack structure including a ruthenium-containing layer and a tungsten-containing layer over the dielectric layer.01-01-2009
20090004808METHOD FOR FABRICATING SEMICONDUCTOR DEVICE - A method for fabricating a capacitor includes forming a sacrificial layer having a plurality of trenches on an upper portion of a substrate, forming storage nodes in the trenches, exposing upper portions of the storage nodes by removing a portion of the sacrificial layer, forming supporters to support the exposed upper portions of the storage nodes, removing the sacrificial layer under the supporters, and removing the supporters.01-01-2009
20090008743CAPACITOR WITH PILLAR TYPE STORAGE NODE AND METHOD FOR FABRICATING THE SAME - A capacitor includes a pillar-type storage node, a supporter filling an inner empty crevice of the storage node, a dielectric layer over the storage node, and a plate node over the dielectric layer.01-08-2009
20090061587METHOD FOR FABRICATING CAPACITOR IN SEMICONDUCTOR DEVICE - A method for fabricating a capacitor includes providing a substrate having a capacitor region is employed, forming a first Ru03-05-2009