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| 20120295125 | WELDED STRUCTURE AND WELDING METHOD - Disclosed are a welded structure and a welding method which make it possible to improve welding strength and welding quality. A welded structure in which a first member and a second member are joined by means of welding, wherein the first member comprises a second-member joining part which is joined to the second member, and the second member comprises a first-member joining part which is joined to the first member. If the direction in which the first member and the second member are arranged is the first direction, and the direction intersecting the first direction is the second direction, welded parts are provided at least at both ends in the second direction of the joining surface where the first member and the second member are joined. The first member is such that the second-member joining part and a linking part which connects to the second-member joining part are arranged in succession from the joining surface in the first direction, and the dimensions of the second-member joining part are greater than the dimensions of the linking part in a third direction perpendicular to the first direction. | 11-22-2012 |
| 20130022488 | AUSTENITIC HEAT-RESISTANT CAST STEEL - An iron (Fe)-based austenitic heat-resistant cast steel includes, based on a total of 100 mass % (indicated below simply as “%”): 0.4 to 0.8% of carbon (C), 3.0% or less of silicon (Si), 0.5 to 2.0% of manganese (Mn), 0.05% or less of phosphorus (P), 0.03 to 0.2% of sulfur (S), 18 to 23% of chromium (Cr), 3.0 to 8.0% of nickel (Ni) and 0.05 to 0.4% of nitrogen (N). A ratio of chromium (Cr) to carbon (C) is in a range of 22.5≦Cr/C≦57.5. The cast steel includes one or two or more of vanadium (V), molybdenum (Mo), tungsten (W) and niobium (Nb) in a total amount of less than 0.2%. | 01-24-2013 |
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| 20090244710 | HARD-COATED ANTIGLARE FILM, AND POLARIZING PLATE AND IMAGE DISPLAY INCLUDING THE SAME - A hard-coated antiglare film, comprising a transparent plastic film substrate and a hard-coating antiglare layer containing fine particles on at least one surface of the transparent plastic film substrate, wherein an arithmetic average surface roughness Ra (μm) that is defined in JIS B 0601 (1994 version) is in the range of 0.05 to 0.15 μm in an uneven shape of a surface of the hard-coating antiglare layer, and the hard-coated antiglare film includes at least 80 convexities that exceed a roughness mean line of a surface roughness profile in a 4-mm long portion at an arbitrary location of the surface of the hard-coating antiglare layer. | 10-01-2009 |
| 20110080644 | HARD-COATED ANTIGLARE FILM, POLARIZING PLATE AND IMAGE DISPLAY INCLUDING THE SAME, METHOD FOR PRODUCING THE SAME, AND METHOD FOR EVALUATING THE SAME - A hard-coated antiglare film that has an extremely low haze value, superior anti-fluorescent lamp glare properties, and anti-face glare properties, and can improve the depth of black in black display by preventing white blur from occurring, a polarizing plate, and the like. The hard-coated antiglare film includes: a transparent plastic film substrate; and a hard-coating antiglare layer containing fine particles, which is on at least one surface of the transparent plastic film substrate, and has a total haze value in a range of 0% to 5%. The number N | 04-07-2011 |
| 20110080645 | HARD-COATED ANTIGLARE FILM, POLARIZING PLATE AND IMAGE DISPLAY INCLUDING THE SAME, METHOD FOR PRODUCING THE SAME, AND METHOD FOR EVALUATING THE SAME - A hard-coated antiglare film that has superior antiglare properties, allow high definition to be provided even in the case of a low haze value, can prevent white blur in an oblique direction from occurring and, and can improve the depth of black in black display, as well as a polarizing plate, and the like. The hard-coated antiglare film includes a transparent plastic film substrate and a hard-coating antiglare layer containing fine particles, which is on at least one surface of the transparent plastic film substrate. The hard-coated antiglare film has a total haze value Ht in the range of 10% to 35%. The total haze value Ht and an internal haze value Hin satisfy a relationship of 0.5≦Hin/Ht≦0.9. The surface of the hard-coating antiglare layer has an uneven shape and an arithmetic average surface roughness Ra in the range of 0.1 to 0.3 μm. The hard-coated antiglare film includes: convexities that exceed a roughness mean line of a surface roughness profile; no convexities in which line segments of portions of the mean line that cross the convexities each have a length of 80 μm or longer, and convexities that exceed a standard line that is in parallel with the mean line and is located at a height of 0.1 μm; and at least 50 convexities in which line segments of portions of the standard line that cross the convexities each have a length of 20 μm or shorter in 4-mm long portion at an arbitrary location of the surface of the hard-coating antiglare layer. | 04-07-2011 |
| 20120107605 | TRANSPARENT CONDUCTIVE FILM, ELECTRONIC DEVICE, AND TOUCH PANEL - Provided is a transparent conductive film including a hard coat layer having sufficient hardness, a superior abrasion resistance, and a superior soil resistance; also, provided are an electronic device and a touch panel using the transparent conductive film. A transparent conductive film | 05-03-2012 |
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| 20100062363 | COMPOSITION FOR UPPER SURFACE ANTIREFLECTION FILM, AND METHOD FOR PATTERN FORMATION USING THE SAME - The present invention provides a composition for forming a top anti-reflection coating and also provides a pattern formation method employing that composition. The composition prevents pattern failures caused by light reflected in the resist layer in the exposure step, and it further avoids troubles caused by residues produced in the etching step. The composition contains a solvent and fine particles having a mean particle size of 1 to 100 nm. In the pattern formation method of the present invention, a top anti-reflection coating is formed from the composition. The composition and the method according to the present invention can be used to form a composite film composed of a resist layer and a top anti-reflection coating. | 03-11-2010 |
| 20100081087 | COMPOSITION FOR FORMATION OF ANTIREFLECTION FILM AND PATTERN FORMATION METHOD USING THE SAME - The present invention provides a composition for forming a top anti-reflection coating having such a low refractive index that it can be suitably used in pattern formation with an ArF excimer laser beam, and further the invention also provides a pattern formation method employing that composition. The top anti-reflection coating composition comprises a particular naphthalene compound, a polymer, and a solvent. The composition is used for forming a top anti-reflection coating provided on a photoresist layer. From the photoresist layer, a pattern can be formed by use of light in 160 to 260 nm. | 04-01-2010 |
| 20100286318 | COMPOSITION FOR FORMATION OF TOP ANTIREFLECTIVE FILM, AND PATTERN FORMATION METHOD USING THE COMPOSITION - Disclosed is a composition for forming a top antireflective film, which comprises at least one fluorine-containing compound and a quaternary ammonium compound represented by the formula (1) [wherein at least one of R | 11-11-2010 |
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| 20080238620 | RADIO-FREQUENCY TAG COMMUNICATION DEVICE - A radio-frequency tag communication device arranged to transmit a transmitted signal toward a radio-frequency tag and to receive a reply signal transmitted from the radio-frequency tag in response to the transmitted signal, for thereby effecting radio communication with the radio-frequency tag, the radio-frequency tag communication device including (a) a receiver portion including a receiver antenna device which has a plurality of receiver antenna elements for receiving the reply signal from the radio-frequency tag, (b) a reception-directivity control portion which controls the directivity of reception of the receiver portion device, by controlling the phase of a received signal which is received by each of the plurality of receiver antenna elements and which may include a leakage signal which is a part of the transmitted signal, (c) a modulated-component extracting portion which extracts a modulated component of the received signal which is modulated by the radio-frequency tag, and (d) a direction detecting portion which detects the direction in which the radio-frequency tag is located, on the basis of the modulated component extracted by the modulated-component extracting portion. | 10-02-2008 |
| 20080278291 | Radio-Frequency Tag Communication System - A radio-frequency tag communication system including (a) a radio-frequency tag, (b) a radio-frequency tag communication device configured to transmit a transmitted signal toward the radio-frequency tag, and to receive a reply signal transmitted from the radio-frequency tag in response to the transmitted signal, for thereby effecting radio communication with the radio-frequency tag, and (c) at least one reference tag disposed fixedly in an area of communication of the radio-frequency tag communication system and configured to transmit a reply signal in response to the transmitted signal, for thereby effecting radio communication with the radio-frequency tag communication device, and wherein the radio-frequency tag communication device includes a directivity control portion configured to control a directivity of communication with the radio-frequency tag, on the basis of a result of the radio communication of the radio-frequency tag communication device with the at least one reference tag. | 11-13-2008 |
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| 20100248140 | LITHOGRAPHIC PRINTING PLATE PRECURSOR AND PLATE MAKING METHOD THEREOF - A lithographic printing plate precursor includes an aluminum support subjected to a roughening treatment and an image-recording layer containing an infrared absorbing agent, a radical polymerization initiator, a radical polymerizable monomer, a compound having two or more mercapto group-containing groups per molecule and a polymer particle containing a polyalkylene oxide segment. | 09-30-2010 |
| 20110020757 | METHOD OF PREPARING LITHOGRAPHIC PRINTING PLATE - To provide a method of preparing a lithographic printing plate which is safe, exhibits excellent developing property and processing ability, and enables processing with one solution by processing after image exposure, a negative lithographic printing plate precursor having an image-recording layer containing (i) a sensitizing dye, (ii) a photopolymerization initiator, (iii) an addition polymerizable compound having an ethylenically unsaturated double bond, and (iv) a binder polymer on a hydrophilic support with an aqueous solution containing a carbonate ion, a hydrogen carbonate ion and a water-soluble polymer compound. | 01-27-2011 |
| 20110076618 | LITHOGRAPHIC PRINTING PLATE PRECURSOR AND PLATE MAKING METHOD THEREOF - A lithographic printing plate precursor includes an aluminum support subjected to a surface roughening treatment, and an image-recording layer, the image-recording layer contains an infrared absorbing agent, a radical polymerization initiator, a radical polymerizable compound and an inorganic particle which has, on a surface of the inorganic particle, an acrylic polymer as a graft chain and an unexposed area of the image-recording layer is capable of being removed with at least one of oily ink and dampening water. | 03-31-2011 |
| 20110146516 | METHOD OF PREPARING LITHOGRAPHIC PRINTING PLATE - According to a method of preparing a lithographic printing plate substantially comprising a step of imagewise exposing a negative lithographic printing plate precursor having an image-recording layer containing (i) a sensitizing dye, (ii) a photopolymerization initiator, (iii) an addition polymerizable compound having an ethylenically unsaturated double bond and (iv) a binder polymer on a support and a step of processing the exposed lithographic printing plate precursor with an aqueous solution containing a carbonate ion, a hydrogen carbonate ion and a surfactant, the processing property is improved, a printing plate free from the tackiness on the surface thereof can be provided, even when the printing plate is stored after the development until printing, deterioration of the printing durability does not occur, and it becomes possible to conduct one solution development with a weak alkaline processing solution. | 06-23-2011 |
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| 20090050925 | RESIN MOLDING, SURFACE MOUNTED LIGHT EMITTING APPARATUS AND METHODS FOR MANUFACTURING THE SAME - The present invention provides a surface mounted light emitting apparatus which has long service life and favorable property for mass production, and a molding used in the surface mounted light emitting apparatus. | 02-26-2009 |
| 20090134411 | Light Emitting Device and Backlight Unit Using the Same - An object of the present invention is to provide a light emitting device that shows high adhesion between a sealing member and a package member. A light emitting device | 05-28-2009 |
| 20100155739 | LIGHT-EMITTING DEVICE, METHOD FOR MANUFACTURING SAME, MOLDED BODY AND SEALING MEMBER - Disclosed is a light-emitting device comprising a light-emitting element ( | 06-24-2010 |
| 20100186999 | METHOD FOR PRODUCING CONDUCTIVE MATERIAL, CONDUCTIVE MATERIAL OBTAINED BY THE METHOD, ELECTRONIC DEVICE CONTAINING THE CONDUCTIVE MATERIAL, LIGHT-EMITTING DEVICE, AND METHOD FOR PRODUCING LIGHT-EMITTING DEVICE - An object of the present invention is to provide a method for producing a conductive material that allows a low electric resistance to be generated, and that is obtained by using an inexpensive and stable conductive material composition containing no adhesive. The conductive material can be provided by a producing method that includes the step of sintering a first conductive material composition that contains silver particles having an average particle diameter (median diameter) of 0.1 μm to 15 μm, and a metal oxide, so as to obtain a conductive material. The conductive material can be provided also by a method that includes the step of sintering a second conductive material composition that contains silver particles having an average particle diameter (median diameter) of 0.1 μm to 15 μm in an atmosphere of oxygen or ozone, or ambient atmosphere, at a temperature in a range of 150° C. to 320° C., so as to obtain a conductive material. | 07-29-2010 |
| 20110186340 | METHOD FOR PRODUCING CONDUCTIVE MATERIAL, CONDUCTIVE MATERIAL OBTAINED BY THE METHOD, ELECTRONIC DEVICE CONTAINING THE CONDUCTIVE MATERIAL, AND LIGHT-EMITTING DEVICE - The object of the present invention is to provide a method for producing a conductive material that has a low electric resistivity and that is obtained using an inexpensive and stable conductive material composition. A conductive material having a low electric resistivity can be obtained by a method including the step of heating a conductive material composition that contains at least one of a full-cured or semi-cured thermosetting resin and a thermoplastic resin, as well as silver particles. Such a conductive material is a conductive material that includes fused silver particles, and thermosetting resin fine particles that have an average particle diameter of 0.1 μm to 10 μm both inclusive and are dispersed in the fused silver particles. Further, in such a conductive material is a conductive material that includes fused silver particles, and a thermoplastic resin welded among the fused silver particles. | 08-04-2011 |
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| 20100187563 | SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR - An object of the invention is to provide a method for producing a conductive member having low electrical resistance, and the conductive member is obtained using a low-cost stable conductive material composition that does not contain an adhesive. A method for producing a semiconductor device in which silver or silver oxide provided on a surface of a base and silver or silver oxide provided on a surface of a semiconductor element are bonded, includes the steps of arranging a semiconductor element on a base such that silver or silver oxide provided on a surface of the semiconductor element is in contact with silver or silver oxide provided on a surface of the base, temporarily bonding the semiconductor element and the base by applying a pressure or an ultrasonic vibration to the semiconductor element or the base, and permanently bonding the semiconductor element and the base by applying heat having a temperature of 150 to 900° C. to the semiconductor device and the base. | 07-29-2010 |
| 20100190298 | SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR - An object of the invention is to provide a method for producing a conductive member having low electrical resistance, and the conductive member is obtained using a low-cost stable conductive material composition that does not contain an adhesive. A method for producing a semiconductor device in which silver or silver oxide provided on a surface of a base and silver or silver oxide provided on a surface of a semiconductor element are bonded, includes the steps of arranging a semiconductor element on a base such that silver or silver oxide provided on a surface of the semiconductor element is in contact with silver or silver oxide provided on a surface of the base, and bonding the semiconductor element and the base by applying heat having a temperature of 200 to 900° C. to the semiconductor device and the base. | 07-29-2010 |
| 20120153486 | SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR - An object of the invention is to provide a method for producing a conductive member having low electrical resistance, and the conductive member is obtained using a low-cost stable conductive material composition that does not contain an adhesive. In the semiconductor device, silver arranged on a semiconductor element and silver arranged on a base are bonded. No void is present or a small void, if any, is present at an interface between the semiconductor element and the silver arranged on the semiconductor element, no void is present or a small void, if any, is present at an interface between the base and the silver arranged on the base, and one or more silver abnormal growth grains and one or more voids are present in a bonded interface between the silver arranged on the semiconductor element and the silver arranged on the base. | 06-21-2012 |
| 20120228564 | REFLECTOR FOR LIGHT-EMITTING DEVICE, AND LIGHT-EMITTING DEVICE - The present invention relates to a reflector for a light-emitting device consisting of (A) an polyamide composition comprising a polyamide polymerized from (a) a dicarboxylic acid comprising at least 50 mol % of an alicyclic dicarboxylic acid and (b) a diamine comprising at least 50 mol % of a diamine with a branched main chain. | 09-13-2012 |
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| 20100046533 | ROUTER AND PACKET DISCARDING METHOD - A router controlling a route of packets. The router includes a counter counting an amount of received control packets on a user-identifier-by-user-identifier basis, the control packets being used for managing a network, a discard determining unit comparing a counter value of the counter with a threshold value, and a control packet discarding unit discarding a control packet including a user identifier for which the discard determining unit determines that the counter value exceeds the threshold value. | 02-25-2010 |
| 20100100672 | RELAY APPARATUS AND DATA CONTROL METHOD - When a data word is designated through a network search engine, a FIFO unit, and the like, a relay apparatus according to the invention searches for an associative memory address corresponding to the data word. Even when the associative memory address is internally converted to a contents memory address, the relay apparatus stores the contents memory address by causing it to correspond to a search result corresponding to the contents memory address as well as outputs the associative memory address together with the search result. | 04-22-2010 |
| 20100158030 | Routing Apparatus - A routing apparatus couples to another routing apparatus using a trunk formed by a plurality of channels, and has a plurality of input and output cards to input and output frames. Each input and output card includes a management table registering a transmitting source address, destination information, and a trunk attribute indicating whether a channel used for a transmission has a trunk structure, a learning request part searching the management table using a transmitting source address within a frame that is transmitted via the channel, and generating and supplying learning request information having information that is obtained by searching the management table to another input and output card, if the channel used for the transmission has the trunk structure, and a registering part registering learning request information supplied thereto in the management table. | 06-24-2010 |
| 20120008633 | BRIDGE APPARATUS AND COMMUNICATION METHOD - A bridge apparatus including a first line card and a second line card is provided. The first line card includes a first memory storing an association between a line card and a destination address, a first receiver receiving a frame from the second line card including a flag indicating whether a memory of the second line card stores the destination address of the frame, a determination circuit determining whether the first memory stores the destination address of the received frame, when the first flag added to the received frame indicates that the second memory does not store the destination address of the frame, and a first transmitter transmitting, when the determination circuit determines the first memory stores the destination address of the frame, address information associated with at least the destination address of the frame to the second line card, the destination address being stored by the first memory. | 01-12-2012 |
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| 20090087611 | STEEL SHEET OVERLAP STRUCTURE, METHOD FOR MANUFACTURING SAME, AND STEEL SHEET FOR STEEL SHEET OVERLAP STRUCTURE - A steel sheet overlap structure including a pair of joined steel sheets and an antirust layer which comprises an electrically conductive polymer, and which is provided between joining surfaces of the steel sheets. | 04-02-2009 |
| 20090286928 | CARBON NANOTUBE GRAFTED WITH LOW-MOLECULAR WEIGHT POLYANILINE AND DISPERSION THEREOF - Chemically modified carbon nanotubes composed of carbon nanotubes (such as multiwall carbon nanotubes) having carboxyl groups on the surface thereof and polymeric aniline (such as 3- to 300-meric aniline) bonding thereto through the amide linkage. The chemically modified carbon nanotubes exhibit good affinity with organic solvents and readily disperse into organic solvents. | 11-19-2009 |
| 20100203343 | ANTIRUST TREATED METAL - In an antirust treated metal base material in accordance with the present invention, a coating film containing insulating polyaniline in a highly oxidized state (PE state) is formed on the surface of a metal base material. A method for antirust treatment of the surface of a metal base material includes a process of forming a coating film containing insulating polyaniline in a highly oxidized state (PE state) on the metal base material surface. According to the present invention, an antirust treated metal base material, in which the coating film of an insulating polyaniline system containing no dopants exhibits strong corrosion inhibition effect, and a method of antirust treatment for the metal base material are provided. | 08-12-2010 |
| 20110012065 | POLYANILINE, METHOD FOR MANUFACTURING SAME, AND POLYANILINE-CONTAINING SOLUTION AND COATING MATERIAL - A method for manufacturing a polyaniline by preparing an aniline mixed solution in which an antirust additive and at least one of aniline and aniline derivatives are mixed and polymerizing at least one of the aniline and the aniline derivatives by adding a polymerization initiator to the aniline mixed solution, polyaniline obtained by the method, a polyaniline-containing solution, and a coating material containing the polyaniline. | 01-20-2011 |
| 20120059120 | Carbon Nanotube Grafted with Low-Molecular Weight Polyaniline and Dispersion Thereof - Chemically modified carbon nanotubes composed of carbon nanotubes (such as multiwall carbon nanotubes) having carboxyl groups on the surface thereof and polymeric aniline (such as 3- to 300-meric aniline) bonding thereto through the amide linkage. The chemically modified carbon nanotubes exhibit good affinity with organic solvents and readily disperse into organic solvents. | 03-08-2012 |
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| 20080235717 | MOTOR WITH A CHUCKING DEVICE AND DISK DRIVE APPARATUS EQUIPPED WITH THE SAME - In a motor including a chucking device for detachably holding a disk, the chucking device has a center case to which a central opening of the disk is inserted. The center case has a cylindrical portion coaxial with the center axis, a cover portion for covering an axial upper side of the cylindrical portion of the center case and a base portion fixed to the shaft-fixed portion of the rotor holder; resilient members received within the center case; and claw members remaining in contact with the respective resilient members, the claw members being movable radially to hold the disk in place. The center case is spaced apart from the rotor holder except for the base portion contacting with the shaft-fixed portion of the rotor holder. | 09-25-2008 |
| 20080235718 | MOTOR WITH A CHUCKING DEVICE AND DISK DRIVE APPARATUS EQUIPPED WITH THE SAME - In a motor including a chucking device for detachably holding a disk, the chucking device has a center case to which a central opening of the disk is inserted; resilient members received within the center case; and claw members for holding the disk in place. Each of the claw members has a tip end portion, a disk holding surface positioned axially below the tip end portion for holding the disk in place, and a recessed sliding portion formed substantially at a circumferential center region of the disk holding surface, the sliding portion serving to guide movement of the claw member. Rest portions are formed in the center case in a facing relationship with the respective sliding portions, the rest portions serving to support the respective sliding portions by contacting therewith. Each of the rest portions has an upwardly convex curved surface with which the corresponding sliding portion makes contact. | 09-25-2008 |
| 20080235720 | MOTOR WITH A CHUCKING DEVICE AND DISK DRIVE APPARATUS EQUIPPED WITH THE SAME - In a motor including a chucking device for detachably holding a disk, the chucking device has a center case to which a central opening of the disk is inserted; resilient members received within the center case; and claw members for holding the disk in place. Each of the claw members has a claw portion having a disk holding surface for holding the disk in place and a pair of wing portions extending radially inwardly from the claw portion. Further, each of the wing portions has a spherical contact surface contacting with a underlying part arranged axially below the wing portions. | 09-25-2008 |
| 20090241140 | MOTOR WITH A CHUCKING DEVICE AND DISK DRIVE APPARATUS EQUIPPED WITH THE SAME - In a motor including a chucking device for detachably holding a disk, the chucking device has a center case to which a central opening of the disk is inserted; resilient members received within the center case; and claw members for holding the disk in place. Each of the claw members has a tip end portion, a disk holding surface positioned axially below the tip end portion for holding the disk in place, and a recessed sliding portion formed substantially at a circumferential center region of the disk holding surface, the sliding portion serving to guide movement of the claw member. Rest portions are formed in the center case to face the respective sliding portions, the rest portions serving to support the respective sliding portions by contacting therewith. The sliding portions are designed to make contact with the respective rest portions when the disk is mounted to the chucking device. | 09-24-2009 |
| 20110023057 | BRUSHLESS MOTOR, AND DISK DRIVE EQUIPPED WITH THE SAME - In a brushless motor for use in a disk drive, a rotor is mounted onto a tube portion of a housing. A retaining claw is formed at an upper end of the tube portion. A turntable has a central concave portion which accommodates an upper portion of the tube portion of the housing. A retaining member is provided radially outside the central concave portion, and includes a plurality of retaining pieces extending to the inside of the central concave portion. When the rotor is mounted onto the housing, the retaining pieces come into contact with the retaining claw and then move upward. When the rotor moves upward relative to the housing, the retaining pieces come into contact with the retaining claw, thereby restricting upward movement of the rotor. Upward movement of the retaining pieces is restricted by contact between the retaining member and the turntable. | 01-27-2011 |
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| 20090148704 | VAPOR-PHASE PROCESS APPARATUS, VAPOR-PHASE PROCESS METHOD, AND SUBSTRATE - A vapor-phase process apparatus and a vapor-phase process method capable of satisfactorily maintaining quality of processes even when different types of processes are performed are obtained. A vapor-phase process apparatus includes a process chamber, gas supply ports serving as a plurality of gas introduction portions, and a gas supply portion (a gas supply member, a pipe, a flow rate control device, a pipe, and a buffer chamber). The process chamber allows flow of a reaction gas therein. The plurality of gas supply ports are formed in a wall surface (upper wall) of the process chamber along a direction of flow of the reaction gas. The gas supply portion can supply a gas into the process chamber at a different flow rate from each of one gas supply port and another gas supply port different from that one gas supply port among the plurality of gas supply ports. | 06-11-2009 |
| 20120003142 | VAPOR-PHASE PROCESS APPARATUS, VAPOR-PHASE PROCESS METHOD, AND SUBSTRATE - A vapor-phase process apparatus and a vapor-phase process method capable of satisfactorily maintaining quality of processes even when different types of processes are performed are obtained. A vapor-phase process apparatus includes a process chamber, gas supply ports serving as a plurality of gas introduction portions, and a gas supply portion (a gas supply member, a pipe, a flow rate control device, a pipe, and a buffer chamber). The process chamber allows flow of a reaction gas therein. The plurality of gas supply ports are formed in a wall surface (upper wall) of the process chamber along a direction of flow of the reaction gas. The gas supply portion can supply a gas into the process chamber at a different flow rate from each of one gas supply port and another gas supply port different from that one gas supply port among the plurality of gas supply ports. | 01-05-2012 |
| 20120024227 | VAPOR-PHASE PROCESS APPARATUS, VAPOR-PHASE PROCESS METHOD, AND SUBSTRATE - A vapor-phase process apparatus and a vapor-phase process method capable of satisfactorily maintaining quality of processes even when different types of processes are performed are obtained. A vapor-phase process apparatus includes a process chamber, gas supply ports serving as a plurality of gas introduction portions, and a gas supply portion (a gas supply member, a pipe, a flow rate control device, a pipe, and a buffer chamber). The process chamber allows flow of a reaction gas therein. The plurality of gas supply ports are formed in a wall surface (upper wall) of the process chamber along a direction of flow of the reaction gas. The gas supply portion can supply a gas into the process chamber at a different flow rate from each of one gas supply port and another gas supply port different from that one gas supply port among the plurality of gas supply ports. | 02-02-2012 |
