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| 20110081774 | METHODS FOR A GATE REPLACEMENT PROCESS - A method for fabricating a semiconductor device is disclosed. In one embodiment, the method may include providing a substrate; forming a gate structure including a first dummy gate over the substrate; removing the first dummy gate from the gate structure to form a trench; forming an interfacial layer, high-k dielectric layer, and capping layer to partially fill in the trench; forming a second dummy gate over the capping layer, wherein the second dummy gate fills the trench; and replacing the second dummy gate with a metal gate. In one embodiment, the method may include providing a substrate; forming an interfacial layer over the substrate; forming a high-k dielectric layer over the interfacial layer; forming an etch stop layer over the high-k dielectric layer; forming a capping layer including a low thermal budget silicon over the etch stop layer; forming a dummy gate layer over the capping layer; forming a gate structure; and performing a gate replacement process. | 04-07-2011 |
| 20110089484 | METHOD AND SYSTEM FOR METAL GATE FORMATION WITH WIDER METAL GATE FILL MARGIN - A method includes providing a semiconductor substrate having a gate trench and depositing a metal layer, using a physical vapor deposition (PVD) process, over the substrate to partially fill the trench. The metal layer includes a bottom portion and a sidewall portion that is thinner than the bottom portion. The method also includes forming a coating layer on the metal layer, etching back the coating layer such that a portion of the coating layer protects a portion of the metal layer within the trench, and removing the unprotected portion of the metal layer. A different aspect involves a semiconductor device that includes a gate that includes a trench having a top surface, and a metal layer formed over the trench, wherein the metal layer includes a sidewall portion and a bottom portion, and wherein the sidewall portion is thinner than the bottom portion. | 04-21-2011 |
| 20110143529 | METHOD OF FABRICATING HIGH-K/METAL GATE DEVICE - The present disclosure provides a method that includes providing a semiconductor substrate; forming a gate structure over the semiconductor substrate, first gate structure including a dummy dielectric and a dummy gate disposed over the dummy dielectric; removing the dummy gate and the dummy dielectric from the gate structure thereby forming a trench; forming a high-k dielectric layer partially filling the trench; forming a barrier layer over the high-k dielectric layer partially filling the trench; forming an capping layer over the barrier layer partially filling the trench; performing an annealing process; removing the capping layer; forming a metal layer over the barrier layer filling in a remainder of the trench; and performing a chemical mechanical polishing (CMP) to remove the various layers outside the trench. | 06-16-2011 |
| 20110147858 | METAL GATE STRUCTURE OF A FIELD EFFECT TRANSISTOR - The invention relates to integrated circuit fabrication, and more particularly to a Field Effect Transistor with a low resistance metal gate electrode. An exemplary structure for a gate electrode for a Field Effect Transistor comprises a lower portion formed of a first metal material having a recess and a first resistance; and an upper portion formed of a second metal material having a protrusion and a second resistance, wherein the protrusion extends into the recess, wherein the second resistance is lower than the first resistance. | 06-23-2011 |
| 20110151655 | METAL GATE FILL AND METHOD OF MAKING - The present disclosure provides various methods of fabricating a semiconductor device. A method of fabricating a semiconductor device includes providing a semiconductor substrate and forming a gate structure over the substrate. The gate structure includes a first spacer and a second spacer formed apart from the first spacer. The gate structure also includes a dummy gate formed between the first and second spacers. The method also includes removing a portion of the dummy gate from the gate structure thereby forming a partial trench. Additionally, the method includes removing a portion of the first spacer and a portion of the second spacer adjacent the partial trench thereby forming a widened portion of the partial trench. In addition, the method includes removing a remaining portion of the dummy gate from the gate structure thereby forming a full trench. A high k film and a metal gate are formed in the full trench. | 06-23-2011 |
| 20110159678 | METHOD TO FORM A SEMICONDUCTOR DEVICE HAVING GATE DIELECTRIC LAYERS OF VARYING THICKNESSES - A method for fabricating an integrated circuit device is disclosed. An exemplary method can include providing a substrate having a first region, a second region, and a third region; and forming a first gate structure in the first region, a second gate structure in the second region, and a third gate structure in the third region, wherein the first, second, and third gate structures include a gate dielectric layer, the gate dielectric layer being a first thickness in the first gate structure, a second thickness in the second gate structure, and a third thickness in the third gate structure. Forming the gate dielectric layer of the first, second, and third thicknesses can include forming an etching barrier layer over the gate dielectric layer in at least one of the first, second, or third regions while forming the first, second, and third gate structures, and/or prior to forming the gate dielectric layer in at least one of the first, second, or third regions, performing an implantation process on the at least one region. | 06-30-2011 |
| 20110171820 | METHOD OF FORMING A METAL GATE - The present disclosure provides a method of fabricating a semiconductor device. The method includes providing a substrate. A dummy gate is formed over the substrate. A dielectric material is formed around the dummy gate. The dummy gate is then removed to form an opening in the dielectric material. Thereafter, a work function metal layer is formed to partially fill the opening. The remainder of the opening is then filled with a conductive layer using one of a polysilicon substitute method and a spin coating method. | 07-14-2011 |
| 20110189847 | METHOD FOR METAL GATE N/P PATTERNING - A method for fabricating a integrated circuit is disclosed. An exemplary method includes providing a substrate; forming a hard mask layer over the substrate; forming a patterned photoresist layer over the hard mask layer, such that portions of the hard mask layer are exposed; performing a dry etching process to remove the exposed portions of the hard mask layer; removing the patterned photoresist layer using at least one of a nitrogen plasma ashing and a hydrogen plasma ashing; and performing a wet etching process to remove remaining portions of the hard mask layer. | 08-04-2011 |
| 20110193180 | METHOD AND APPARATUS OF FORMING A GATE - The present disclosure provides an apparatus that includes a semiconductor device. The semiconductor device includes a substrate. The semiconductor device also includes a first gate dielectric layer that is disposed over the substrate. The first gate dielectric layer includes a first material. The first gate dielectric layer has a first thickness that is less than a threshold thickness at which a portion of the first material of the first gate dielectric layer begins to crystallize. The semiconductor device also includes a second gate dielectric layer that is disposed over the first gate dielectric layer. The second gate dielectric layer includes a second material that is different from the first material. The second gate dielectric layer has a second thickness that is less than a threshold thickness at which a portion of the second material of the second gate dielectric layer begins to crystallize. | 08-11-2011 |
| 20110256682 | Multiple Deposition, Multiple Treatment Dielectric Layer For A Semiconductor Device - A method is provided for fabricating a semiconductor device. A semiconductor substrate is provided. A first high-k dielectric layer is formed on the semiconductor substrate. A first treatment is performed on the high-k dielectric layer. In an embodiment, the treatment includes a UV radiation in the presence of O | 10-20-2011 |
| 20110256731 | METHOD FOR FABRICATING A GATE DIELECTRIC LAYER - A method for fabricating the gate dielectric layer comprises forming a high-k dielectric layer over a substrate; forming an oxygen-containing layer on the high-k dielectric layer by an atomic layer deposition process; and performing an inert plasma treatment on the oxygen-containing layer. | 10-20-2011 |
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| 20110306196 | METHOD TO FORM A SEMICONDUCTOR DEVICE HAVING GATE DIELECTRIC LAYERS OF VARYING THICKNESS - A method for fabricating an integrated circuit device is disclosed which includes providing a substrate having first, second, and third regions; and forming first, second, and third gate structures in the first, second, and third regions, respectively. The first, second, and third gate structures include a gate dielectric layer, the gate dielectric layer being a first thickness in the first gate structure, a second thickness in the second gate structure, and a third thickness in the third gate structure. Forming the gate dielectric layer of the first, second, and third thicknesses can include forming an etching barrier layer over the gate dielectric layer in at least one of the first, second, or third regions while forming the first, second, and third gate structures, and/or prior to forming the gate dielectric layer in at least one of the first, second, or third regions, performing an implantation process on the at least one region. | 12-15-2011 |
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| 20100079749 | Inspection apparatus for biological sample - An inspection apparatus for a biological sample is herein disclosed, wherein a sample, entering a communicating space via a first opening, is sucked upward to a test area by capillarity and then sucked downward to a second opening by a siphonic action; then the sample becomes still as a result of the communicating tube principle. Hence, the present invention provides sufficient amount of biological sample for the test area and also simplifies the inspection process. | 04-01-2010 |
| 20100097696 | Sheet glass for microscopy and manufacturing method thereof - A sheet glass for microscopy includes a base plate and a metal pattern configured on the base plate. The structure of the sheet glass increases the throughput, reduces the cost and shortens the distance between grids and targets for keeping grids and targets within the depth of field of the microscope. A manufacturing method of sheet glass for microscopy is also disclosed. | 04-22-2010 |
| 20100118393 | Electronic device for biological microscopy - An electronic device for biological microscopy includes a display unit and a main body adapted to the display unit, wherein an auto-focus microscope, an inspection area, and a computer are housed within the main body. The inspection area includes a first side and a second side opposite to the first side. The microscope includes an object lens, an eye lens, and an extension lens configured between the object lens and the eye lens. The object lens is configured at the first side of the inspection area, and a lighting component is configured at the second side of the inspection area. A thermostat apparatus is configured on the inspection area. A camera electrically connected to the computer is configured on the eye lens and transmits the captured image to the computer for analysis with a pre-installed software. | 05-13-2010 |
