| Patent application number | Description | Published |
|---|
| 20080258192 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - This disclosure concerns a semiconductor device comprising an insulating film provided on a semiconductor substrate; a lower contact formed in the insulating film; a ferroelectric capacitor including a first lower electrode provided on the lower contact and connected to the lower contact, a second lower electrode provided on the first lower electrode and made of SRO (Strontium Ruthenium Oxide), a ferroelectric film including crystals, and an upper electrode provided on the ferroelectric film, grain diameters of the crystals being set to 30 nm to 150 nm by forming the ferroelectric film on the second lower electrode; and a wiring connected to the upper electrode. | 10-23-2008 |
| 20080258193 | FERROELECTRIC MEMORY AND METHOD OF MANUFACTURING THE SAME - A ferroelectric memory that stores information by using a hysteresis characteristic of a ferroelectric, has a semiconductor substrate; a lower electrode formed above said semiconductor substrate; a ferroelectric film formed on said lower electrode; and an upper electrode formed on said ferroelectric film, wherein said upper electrode includes an AO | 10-23-2008 |
| 20090091876 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THEREOF - A semiconductor device has a semiconductor substrate, and a capacitor which is provided on the upper side of the semiconductor substrate and composed of a lower electrode, an upper electrode and a dielectric film, the dielectric film being placed in between the lower electrode and the upper electrode, the lower electrode including a noble metal film, and a plurality of conductive oxide films formed in an islands arrangement on the noble metal film. | 04-09-2009 |
| 20090127603 | SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF - A semiconductor memory device according to an embodiment comprises: a field-effect transistor formed on a substrate; an interlayer insulation film formed on the substrate on which the field-effect transistor is formed; and a ferroelectric capacitor including a lower electrode connected via a plug to one of source/drain regions of the field-effect transistor, and formed on the interlayer insulation film, a ferroelectric film having a perovskite crystal structure used as a basic structure, and an upper electrode, wherein a lattice matching region in which a lattice of the ferroelectric film is matched with a lattice of the lower electrode is formed in a range of a predetermined thickness of the ferroelectric film from the lower electrode. | 05-21-2009 |
| 20090267123 | SEMICONDUCTOR DEVICE - A semiconductor device includes: a semiconductor substrate; a plurality of transistors on the semiconductor substrate, each of the transistors has a source and drain region; an interlayer insulating film on the semiconductor substrate and the plurality of transistors; and at least three capacitors on the interlayer insulation film, each of them has a top electrode, a bottom electrode and an insulating film interposed therebetween; wherein the 1st and 2nd capacitors have an shared electrode, with the top electrodes of the 1st and 2nd capacitors, which has a 1st longer direction, the 2nd and 3rd capacitors have an shared electrode, with the bottom electrodes of the 2nd and 3rd capacitors, which has a 2nd longer direction different from the 1st direction. | 10-29-2009 |
| 20100330769 | Semiconductor device and method of manufacturing thereof - A semiconductor device has a semiconductor substrate, and a capacitor which is provided on the upper side of the semiconductor substrate and composed of a lower electrode, an upper electrode and a dielectric film, the dielectric film being placed in between the lower electrode and the upper electrode, the lower electrode including a noble metal film, and a plurality of conductive oxide films formed in an islands arrangement on the noble metal film. | 12-30-2010 |
| 20110140238 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF - According to an embodiment, there is provided a method for manufacturing a semiconductor device having a ferroelectric capacitor including a lower electrode, an upper electrode, and a dielectric film provided between the lower electrode and the upper electrode. The method includes firstly forming a conductive film on the lower electrode. Next, it includes forming an SRO film on the conductive film. Then, it includes performing a first thermal treatment crystallizing the SRO film. Then, it includes forming a first PZT film on the SRO film by the sputtering method and performing a second thermal treatment crystallizing the first PZT film. Then, it includes forming the second PZT film on the first PZT film by the CVD method. | 06-16-2011 |
