| Patent application number | Description | Published |
|---|
| 20080239017 | LIQUID EJECTING HEAD AND METHOD FOR MANUFACTURING THE SAME - A liquid ejecting head includes a flow channel substrate having a pressure generating chamber communicating with a nozzle aperture through which liquid is ejected, and a piezoelectric element disposed on one surface of the flow channel substrate. The piezoelectric element includes a common electrode, a piezoelectric layer, and an individual electrode. The piezoelectric layer is made of lead zirconate titanate having a rhombohedral or monoclinic crystal structure preferentially oriented in the (100) plane. The saturated polarization Pm and the residual polarization Pr of the piezoelectric layer satisfy the relationship 33%≦2Pr/2Pm≦46%. | 10-02-2008 |
| 20090262169 | METHOD OF MANUFACTURING LIQUID JET HEAD, METHOD OF MANFUACTURING PIEZOELECTRIC ELEMENT AND LIQUID JET APPARATUS - A method of manufacturing a piezoelectric element includes a piezoelectric layer forming step of sequentially and repeatedly performing a heat treatment step of applying a piezoelectric material containing lead to a lower electrode film at a relative humidity in the range of 30% to 50% Rh and then performing a heat treatment to form a piezoelectric precursor film and a crystallization step of firing the piezoelectric precursor film to form a piezoelectric film on the lower electrode film, thereby forming a piezoelectric layer. | 10-22-2009 |
| 20090273651 | LIQUID JET HEAD AND A PIEZOELECTRIC ELEMENT - A liquid jet head has a channel-forming substrate composed of a crystal substrate having a pressure-generating chamber linked to a nozzle opening as well as a piezoelectric element composed of a lower electrode, a piezoelectric layer, and an upper electrode and formed on the channel-forming substrate so that the pressure in the pressure-generating chamber can be changed, with the piezoelectric layer having a thickness equal to or smaller than 5 μm, made of a perovskite-type crystal, and formed so that the interval between the X-ray diffraction peak position derived from the (220) plane of the channel-forming substrate and the X-ray diffraction peak position derived from the (111) plane of the piezoelectric layer falls within the range 2θ=9.059±0.1°. | 11-05-2009 |
| 20090273652 | LIQUID JET HEAD AND A PIEZOELECTRIC ELEMENT - A liquid jet head includes a passage-forming substrate composed of a crystal substrate provided with pressure-generating chambers communicating with nozzle orifices and piezoelectric elements disposed on the passage-forming substrate and each composed of a lower electrode, a piezoelectric material layer, and an upper electrode to cause a change of pressure in the pressure-generating chamber. The piezoelectric material layer has a thickness of 5 μm or less and is made of a perovskite-type crystal and is configured such that the distance between an X-ray diffraction peak position derived from the (220) plane of the passage-forming substrate and an X-ray diffraction peak position derived from the (110) plane of the piezoelectric material layer is within a range of 2θ=16.262±0.1 degrees. | 11-05-2009 |
| 20090273654 | LIQUID JET HEAD AND AN ACTUATOR APPARATUS - A liquid jet head includes a flow passage forming substrate formed of a crystal substrate provided with a pressure generating chamber communicating with nozzle openings, and a piezoelectric element including a lower electrode, a piezoelectric layer, and an upper electrode, which are provided on the flow passage forming substrate to change pressure in the pressure generating chamber. The piezoelectric layer has a thickness of 5 μm or less and is formed of perovskite type crystals, and the distance between a diffraction peak position A of an X-ray derived from a surface ( | 11-05-2009 |
| 20100157000 | LIQUID EJECTION HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejection head includes: a pressure generating chamber communicating with a nozzle hole; a vibrating film placed on one side of the pressure generating chamber; and a pressure generating element including a piezoelectric layer formed between a first and a second electrodes placed on the vibrating film. The pressure generating element generates displacement when voltage is applied across the first and the second electrodes to make pressure in the pressure generating chamber change, while a neutral plane of stress made by the displacement is so configured as to exist in the first electrode, and a layer on the pressure generating chamber side relative to the first electrode includes a laminar film or an amorphous film. | 06-24-2010 |
| 20100245487 | Liquid Ejecting Head, Liquid Ejecting Apparatus, and Actuator - A liquid ejecting head is equipped with a piezoelectric element. The piezoelectric element has a piezoelectric layer containing titanium (Ti) and, zirconium (Zr) and first and second electrodes provided on both faces of the piezoelectric layer. The composition ratio of Ti and Zr in the piezoelectric layer Ti/(Zr+Ti) is in the range of 0.50 to 0.60 both inclusive. The piezoelectric layer contains rhombohedral crystals at least in a portion thereof covering the first electrode. | 09-30-2010 |
| 20100253750 | LIQUID-EJECTING HEAD, LIQUID-EJECTING APPARATUS, AND ACTUATOR - A liquid-ejecting head includes a flow-passage-forming substrate that includes a pressure-generating chamber, the pressure-generating chamber being in communication with a nozzle through which droplets are ejected, and a piezoelectric element disposed on the flow-passage-forming substrate, the piezoelectric element altering the internal pressure of the pressure-generating chamber. The piezoelectric element includes a piezoelectric layer containing titanium (Ti) and zirconium (Zr), a first electrode, and a second electrode. The first electrode and the second electrode are disposed on the opposite sides of the piezoelectric layer,. The component ratio Ti/(Zr+Ti) of the piezoelectric layer is 0.40 or more but less than 0.50. At least a portion of the piezoelectric layer formed on the first electrode contains tetragonal crystals formed by phase transition under stress caused by an underlying layer. | 10-07-2010 |
| 20100259574 | LIQUID EJECTING HEAD, LIQUID EJECTING APPARATUS, AND ACTUATOR - A liquid ejecting head includes a flow path forming substrate in which pressure generation chambers are formed. The pressure generation chambers communicate with nozzles that eject liquid droplets. Piezoelectric elements are positioned on the flow path forming substrate to generate pressure changes in the pressure generation chambers. Each piezoelectric element includes a piezoelectric body layer, a first electrode on one side of the piezoelectric body layer, and a second electrode on the opposite side of the piezoelectric body layer. The piezoelectric element is driven in a condition that the relationship between minimum voltage V | 10-14-2010 |
