Patent application number | Description | Published |
20080270044 | Defect Review Apparatus and Method of Reviewing Defects - The present invention aims to provide a defect review apparatus capable of suppressing a reduction in throughput with a minimized deviation-amount measurement, and capable of optimizing an FOV of a monitoring image. To this end, the review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated. Thereby, the reduction in throughput is suppressed to the minimum level, and furthermore a FOV necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount. | 10-30-2008 |
20090202166 | SCANNING MICROSCOPE - A method which, while displacing the field-of-view, allows the image in a target area to be acquired without degradations such as out-of-focus of the image. Plural pieces of images are acquired before and after a target area while displacing the field-of-view. Next, these images are grouped into groups each of which includes several pieces of images, and integrated images on each group basis are created. Moreover, a relational expression is calculated which holds between image displacement quantity calculated by comparing the integrated images with each other and the number of the photographed pieces of images. Furthermore, image displacement quantities between the acquired plural pieces of images are calculated from this relational expression. Finally, these images are corrected by the amounts of these displacement quantities, then being integrated. This process allows reconfiguration of the image in the target area. | 08-13-2009 |
20100213371 | SCANNING ELECTRON MICROSCOPE - A technique executes autofocus adjustment stably even when a plurality of patterns or foreign matter capable of being imaged only by a specific detector are included independently. Such an image as a concavo-convex image having a weak contrast can be picked up. The technique can automatically focus such an image even when it is difficult to find a focus position in the image. A scanning electron microscope includes a plurality of detectors for detecting secondary signals from a specimen when irradiated with an electron beam, and a calculation unit for combining the signals obtained from the detectors. At least two of the detectors are provided to be symmetric with respect to the electron beam. The focus of the electron beam is adjusted based on the signals of the detectors or on a signal corresponding to a combination of the signals. | 08-26-2010 |
20110062328 | Defect Review Apparatus and Method of Reviewing Defects - The present invention aims to provide a defect review apparatus capable of suppressing a reduction in throughput with a minimized deviation-amount measurement, and capable of optimizing an FOV of a monitoring image. To this end, the review apparatus for reviewing a specimen by moving the specimen to pre-calculated coordinate includes: a function to measure a deviation amount between the pre-calculated coordinates and coordinates of an actual position of the specimen; a function to optimize a coordinate correcting expression to minimize the measured deviation amount; and a function to determine that the deviation amounts have converged. When the deviation amounts have converged, the measurement for the coordinate-correcting-expression optimization is terminated. Thereby, the reduction in throughput is suppressed to the minimum level, and furthermore a FOV necessary for the specimen to be within the field of view is set according to a convergence value of the calculated deviation amount. | 03-17-2011 |
20130265408 | CHARGED PARTICLE BEAM APPARATUS - For inspection of a pattern such as a semiconductor device, it is useful to selectively detect a defect on the specific pattern in order to estimate the cause of the occurrence of the defect. An object of the invention is to provide a charged particle beam apparatus capable of setting, on the basis of the shape of the pattern on a sample, a region to be inspected. The invention is characterized in that the contour of the pattern on the sample is extracted using a template image obtained on the basis of an image of the sample, the region to be inspected is set on the basis of the contour of the pattern, a defect candidate is detected by comparing the image to be inspected with a comparative image, and the sample is inspected using a positional relationship between the region to be inspected and the defect candidate included in the region to be inspected. | 10-10-2013 |
Patent application number | Description | Published |
20090183661 | COMBUSTION DEVICE - [Object] To provide a combustion device capable of suppressing poisoning and deterioration of a CO oxidation catalyst due to adhesion of S (sulfur) to the CO oxidation catalyst, which is provided in the combustion device such as a boiler for the purpose of reducing and removing the CO in the combustion gas. | 07-23-2009 |
20090325112 | CATALYST DEGRADATION PREVENTING APPARATUS AND LOW NOx COMBUSTION APPARATUS - Provided is a catalyst degradation preventing apparatus, which is for a catalyst device containing a catalyst component that comes into contact with gas to chemically change the gas, in which the catalyst device is provided with a poisoning substance removing device on a primary side thereof, for removing a poisoning substance which is contained in the gas and adsorbs to the catalyst component or forms a compound with the catalyst component. Further, the poisoning substance removing device and the catalyst device are provided with an interval placed therebetween and to be exchangeable with each other, or a carrier of a component that adsorbs to the poisoning substance of the poisoning substance removing device or forms a compound with the poisoning substance and a carrier of a catalyst component of the catalyst device are integrally formed so as to be exchangeable. According to the apparatus, the decrease in performance of the catalyst device can be prevented, and the effect of low pollution can be retained for a long period of time. | 12-31-2009 |
20100136493 | LOW NOx COMBUSTION APPARATUS - Prvided is a catalyst degradation preventing apparatus of a catalyst device containing a catalyst component that comes into contact with gas to chemically change the gas, including a burner for burning a fuel by combustible air to generate a gas containing nitrogen oxides by combustion, an endothermic device for absorbing heat from gas, a catalyst device having a catalyst component for decreasing nitrogen oxides contained in the gas after passing through the endothermic device, and a first poisoning substance removing device for removing a poisoning substance containing at least sulfur, which is contained in the fuel and adsorbs to a catalyst component or reacts with the catalyst component to form a compound. According to the apparatus, the decrease in performance of the catalyst device is prevented, and the effect of decreasing pollution can be retained over a long period of time. | 06-03-2010 |
Patent application number | Description | Published |
20130050221 | DATA PROCESSING DEVICE, DATA PROCESSING SYSTEM, AND DATA PROCESSING METHOD - A data processing device is provided that is able to identify data when data from both licensed and unlicensed devices coexist. The data processing device includes: an acquisition unit acquiring a plurality of pieces of a same category of bio-information about a same person, the bio-information measured with both a licensed first device and an unlicensed second device; a judgment unit that judges whether each acquired piece of bio-information acquired in the previous acquisition was measured by the first device or by the second device; and a display processing unit that displays with different display modes on a same screen, a first data group of a plurality of pieces of bio-information judged to have been measured with the first device, and a second data group of a plurality of pieces of bio-information judged to have been measured with the second device. | 02-28-2013 |
20130247117 | COMMUNICATION DEVICE - A mobile device includes a position sensing unit, a remote control information obtainment unit, and a storage unit. Position information obtained by the position sensing unit is stored in the storage unit in association with remote control information. The mobile device further includes a directional space obtainment unit and an apparatus specification unit. The mobile device recognizes a direction pointed by a user using the mobile device, and enables operation of a terminal apparatus existing in the pointing direction. | 09-19-2013 |
20150271669 | METHOD FOR CONFIGURING WIRELESS CONNECTION SETTINGS, WIRELESS COMMUNICATIONS APPARATUS, AND DISPLAY METHOD - Provided is a method for configuring wireless connection settings, a wireless communications apparatus, and a display method, the method being executed by the wireless communications apparatus and including: (a) receiving a first radio signal which includes second configuration information; (b) receiving authentication information for use in authenticating a first device from a second device, the authentication information being uniquely associated with the first device; (c) retaining the authentication information; (d) establishing the wireless connection with the first device, using the second configuration information; (e) transmitting a second radio signal which includes the authentication information, to the first device through the wireless connection established; (f) receiving a third radio signal which includes response information to the authentication information; and (g) transmitting the first configuration information to the first device if the response information indicates that the first device has been successfully authenticated. | 09-24-2015 |
20150310736 | COMMUNICATION DEVICE - A mobile device includes a position sensing unit, a remote control information obtainment unit, and a storage unit. Position information obtained by the position sensing unit is stored in the storage unit in association with remote control information. The mobile device further includes a directional space obtainment unit and an apparatus specification unit. The mobile device recognizes a direction pointed by a user using the mobile device, and enables operation of a terminal apparatus existing in the pointing direction. | 10-29-2015 |