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Kohda, JP
Hideo Kohda, Shizuoka JP
| Patent application number | Description | Published |
|---|---|---|
| 20090017349 | FUEL CELL SYSTEM AND TRANSPORTATION APPARATUS INCLUDING THE SAME - A fuel cell system includes a fuel cell which generates electric energy by an electro-chemical reaction, a water tank which stores water from the fuel cell, an intake pipe which has an inlet port for introducing moisture-containing exhaust gas from the fuel cell into the water tank and is connected with the water tank, an exhaust pipe which has an exhaust port for exhausting gas from the water tank and is connected with the water tank, and a partition member which is provided in the water tank at a position lower than the inlet port for partitioning an interior of the water tank into an upper space and the lower space. The fuel cell system is capable of collecting water from the fuel cell easily and efficiently without depending upon a large component or decreasing power generation efficiency. | 01-15-2009 |
Hirohumi Kohda, Osaka-Hu JP
| Patent application number | Description | Published |
|---|---|---|
| 20090153833 | ORIGINAL COVER CLOSER - An original cover closer of which the energy absorption capability can be freely adjusted by a damper is described. The development period for the original cover closer is therefore shortened. The original cover closer comprises: an attachment member to be mounted on the main body of a device; a support member pivotally connected to the attachment member and operable to support an original cover; a first and a second slider slidably installed in the support member; a compression coil spring interposed between the first and second sliders and operable to urge the original cover to open; and a fluid damper located in the compression coil spring. Particularly, the fluid damper comprises: a cylinder having a base end fixed to the first slider; a piston slidably installed in the cylinder; an abutment stem integrally provided on the piston and located in order that a tip portion of the abutment stem can come in contact with the second slider; a first fluid chamber formed on one side of the piston; a second fluid chamber formed on the other side of the piston; a viscous fluid with which the first fluid second fluid chambers are filled; a fluid conduit formed through the piston in order that the viscous fluid can move through the fluid conduit from the first fluid chamber to the second fluid chamber and vice versa; and a flow rate regulating needle valve formed in the fluid conduit and operable to adjust the speed of the viscous fluid passing through the fluid conduit when the piston slides in the cylinder. | 06-18-2009 |
| 20090154974 | ORIGINAL COVER CLOSER WITH QUICKLY ADJUSTABLE ENERGY ABSORPTION CAPABILITY - An original cover closer of which the energy absorption capability can be freely adjusted by a damper is described. The adjustment of the energy absorption capability can be easily and quickly made by the user or serviceman without a need for disassembling. The original cover closer comprises: an attachment member to be mounted on the main body of a device; a support member pivotally connected to the attachment member and operable to support an original cover; a first and a second slider slidably installed in the support member; a compression coil spring interposed between the first and second sliders and operable to urge the original cover to open; and a fluid damper located in the compression coil spring. Particularly, the fluid damper comprises: a cylinder having a base end fixed to the first slider; a piston slidably installed in the cylinder; an abutment stem integrally provided on the piston and located in order that a tip portion of the abutment stem can come in contact with the second slider; a first fluid chamber formed on one side of the piston; a second fluid chamber formed on the other side of the piston; a viscous fluid with which the first fluid second fluid chambers are filled; a fluid conduit formed through the cylinder in order that the viscous fluid can move through the fluid conduit from the first fluid chamber to the second fluid chamber and vice versa; and a flow rate regulating needle valve formed in the fluid conduit and operable to adjust the speed of the viscous fluid passing through the fluid conduit when the piston slides in the cylinder. | 06-18-2009 |
Hiroki Kohda, Hiratsuka-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080271666 | Method and Apparatus for Preparing Crystal - A method and an apparatus for producing crystals wherein crystal quality can be kept and a crystal composition is uniformed from a growth early stage to a growth last stage are provided. In an apparatus for producing crystals wherein the crystals | 11-06-2008 |
Hiroshi Kohda, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20080279523 | Optical Fiber for Irradiation-Light Transfer and Light Irradiation Device Equipped with the Same - An object of this invention to transfer the light emitted from the light source and exit the light with a uniform distribution of light quantity, without incurring transfer loss and an increase of costs. | 11-13-2008 |
Hiroshi Kohda, Yokohama-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080267567 | Optical splicer, optical module, and method of producing optical splicer - An optical splicer | 10-30-2008 |
| 20110155709 | LASER PROCESSING APPARATUS AND PROCESSING METHOD EMPLOYED THEREIN - A laser processing apparatus | 06-30-2011 |
Katsuhiro Kohda, Aichi-Gun JP
| Patent application number | Description | Published |
|---|---|---|
| 20110104768 | METHOD FOR PRODUCTION OF POLYESTER COPOLYMER USING RECOMBINANT MICROORGANISM - The object of the present invention is to provide a method for efficiently producing a polyester copolymer consisting of 3HB and LA via microbial fermentation with the use of a sugar as a starting material. | 05-05-2011 |
Katsuhiro Kohda, Ashigarakami-Gun JP
| Patent application number | Description | Published |
|---|---|---|
| 20090032096 | PROCESS FOR PRODUCING THIN-FILM DEVICE, AND DEVICES PRODUCED BY THE PROCESS - In a process for producing a thin-film device having an inorganic film formed over a resin-based substrate, a thermal-buffer layer is formed over a substrate which contains a resin material as a main component, and a light-cutting layer is formed over the thermal-buffer layer, where the light-cutting layer prevents damage from short-wavelength light to the substrate by reducing the proportion of the short-wavelength light which reaches the substrate. Thereafter, a non-monocrystalline film which is to be annealed is formed over the light-cutting layer, where the non-monocrystalline film transmits the short-wavelength light to such a degree that the short-wavelength light can damage the substrate. Then, an inorganic film is formed by irradiating the non-monocrystalline film with the short-wavelength light so as to anneal the non-monocrystalline film. | 02-05-2009 |
| 20090035536 | PROCESS FOR PRODUCING THIN-FILM DEVICE, AND DEVICES PRODUCED BY THE PROCESS - In a process for producing a thin-film device, a thermal-buffer layer is formed over a substrate which contains a resin material as a main component, and a light-cutting layer is formed over at least a region of the substrate over which a non-monocrystalline film to be annealed is not to be formed, where the light-cutting layer prevents damage from short-wavelength light to the substrate by reducing a proportion of the short-wavelength light which reaches the substrate. Thereafter, the non-monocrystalline film which is to be annealed is formed in a pattern over the substrate having the thermal-buffer layer, and an inorganic film is formed by irradiating the non-monocrystalline film with the short-wavelength light so as to anneal the non-monocrystalline film. | 02-05-2009 |
| 20090152506 | PROCESS FOR PRODUCING ORIENTED INORGANIC CRYSTALLINE FILM, AND SEMICONDUCTOR DEVICE USING THE ORIENTED INORGANIC CRYSTALLINE FILM - In a process for producing an oriented inorganic crystalline film, a non-monocrystalline film containing inorganic crystalline particles is formed on a substrate by a liquid phase technique using a raw-material solution which contains a raw material and an organic solvent, where the inorganic crystalline particles have a layered crystal structure and are contained in the raw material. Then, the non-monocrystalline film is crystallized by heating the non-monocrystalline film to a temperature equal to or higher than the crystallization temperature of the non-monocrystalline film so that part of the inorganic crystalline particles act as crystal nuclei. | 06-18-2009 |
| 20090230309 | METHOD FOR MANUFACTURING A SOLID STATE RADIATION DETECTOR, AND RADIATION IMAGING SYSTEM - A method for manufacturing a solid state radiation detector having an active matrix layer, in which a great number of reading elements are arranged, and a radiation photoconductive layer that generates electric charges when irradiated by electromagnetic waves that bear image information, provided such that the electric charges are read out by the active matrix layer, is characterized by: the active matrix layer being formed directly on the radiation photoconductive layer. | 09-17-2009 |
| 20100240164 | RADIATION DETECTOR MANUFACTURING METHOD - A coating film is formed by applying, on a tentative support, a dispersion solution in which at least an inorganic semiconductor particle and a binder are dispersed. Then, a radiation photoconductive layer is formed by subjecting the coating film to thermal compression, and the radiation photoconductive layer is joined to an active matrix layer in which multiple switching elements are arranged. This allows the radiation photoconductive layer to generate a charge in response to radiation of an electromagnetic wave representing image information and to be arranged such that the charge is read out by the active matrix layer. | 09-23-2010 |
Katsunori Kohda, Nisshin-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090035811 | Artificial scaffolding material for protein retention and use of the same - The present invention provides an artificial scaffolding material for retaining proteins suitable for placing contiguously one species or two or more species of proteins such as enzymes. To this end, the artificial scaffolding material for retaining proteins is provided with a cell and scaffolding proteins heterologous to the cell and placed on the surface layer side of the cell at an extent that allows aggregation properties to be conferred to the cell, and provided with a plurality of non-covalently binding protein-binding domains arranged in tandem. | 02-05-2009 |
Katsunori Kohda, Nissin-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110212497 | METHOD FOR PRODUCTION OF POLYLACTATE USING RECOMBINANT MICROORGANISM - It is an object of the present invention to provide a method for efficiently producing a polylactate via microbial fermentation with the use of a sugar as a starting material. | 09-01-2011 |
Masafumi Kohda, Yamaguchi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110218265 | POLYIMIDE FOAM AND METHOD FOR PRODUCING SAME - Disclosed is a polyimide foam made of an aromatic polyimide composed of a tetracarboxylic acid component, which is composed of 0 to 90% by mole of a 3,3′,4,4′-biphenyltetracarboxylic acid component and 100 to 10% by mole of a 3,3′,4,4′-benzophenone tetracarboxylic acid component and/or a 2,3,3′,4′-biphenyltetracarboxylic acid component, and a diamine component, which is composed of 50 to 97% by mole of m-phenylenediamine and 50 to 3% by mole of 4,4′-methylenedianiline. The polyimide foam can be produced easily, has uniform and fine cells, and has the mechanical properties required for practical use as a foam, such as flexibility that prevents the foam from cracking easily even when deformed and excellent cushioning properties, as well as heat resistance that can resist use at high temperatures. | 09-08-2011 |
Masafumi Kohda, Ube-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090197068 | POLYIMIDE FILM, AND METHOD FOR PRODUCTION THEREOF - Disclosed is a polyimide film prepared from an aromatic tetracarboxylic acid component consisting essentially of 3,3′,4,4′-biphenyltetracarboxylic dianhydride and an aromatic diamine component consisting essentially of not less than 65 mol phenylenediamine % but less than 97 mol % of p-phenylenediamine and not less than 3 mol % but less than 35 mol % of 2,4-toluenediamine. | 08-06-2009 |
| 20090242250 | POLYIMIDE FILM, METHOD FOR PRODUCTION THEREOF, POLYIMIDE-METAL LAMINATED PRODUCT, AND CIRCUIT BOARD - Disclosed is a polyimide film produced by heating a self-supporting film of a polyimide precursor solution onto which a solution containing an aluminum chelate compound and, optionally, a nonionic surfactant and/or an aluminum alcoholate compound having at least one alkoxy group is applied to effect imidization. | 10-01-2009 |
Masafumi Kohda, Ichihara-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080292878 | POLYIMIDE FILM WITH IMPROVED ADHESION, PROCESS FOR ITS FABRICATION AND LAMINATED BODY - A laminated body obtained by forming a metal-deposited layer onto one or both adhesion-improved sides of a polyimide film with improved adhesion obtained by coating and spraying an organic polar solvent solution containing a polybenzimidazole onto one or both sides of a self-supporting film prepared by casting and drying a dope, which is an organic polar solvent solution of a polyimide precursor which may contain an imidization catalyst, onto a support and then heat treating the film to form a multilayer polyimide film of a base polyimide layer and one or two polybenzimidazole layers, by vapor deposition or sputtering, and then plating with metal to form a metal layer onto the metal-deposited layer. | 11-27-2008 |
Naoki Kohda, Kakogawa-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100270891 | SEALING MEMBER OF PIEZOELECTRIC RESONATOR DEVICE AND MANUFACTURING METHOD THEREFOR - A sealing member of a piezoelectric resonator device is configured to hermetically seal a driving electrode formed on a piezoelectric resonator plate. In the sealing member, a through hole is formed so that an electrode pattern formed on both major surfaces of the substrate is brought into conduction; and a conductive member fills in the through hole. The through hole has a smaller diameter at a portion thereof inside the substrate than at both end portions thereof at the major surfaces of the sealing member. Both end faces of the conductive member have a concave shape with respect to the major surfaces of the substrate of the sealing member. | 10-28-2010 |
Naoki Kohda, Hyogo JP
| Patent application number | Description | Published |
|---|---|---|
| 20110215678 | PIEZOELECTRIC RESONATOR DEVICE, MANUFACTURING METHOD FOR PIEZOELECTRIC... - A piezoelectric vibration device includes a piezoelectric vibration plate where an excitation electrode is formed, and an upper lid member and a lower lid member that hermetically seal the excitation electrode, the piezoelectric vibration plate having a region where the upper lid member is joined and a region where the lower lid member is joined, on front and back main surfaces, the upper lid member having a region on one main surface where the piezoelectric vibration plate is joined, and the lower lid member having a region on one main surface where the piezoelectric vibration plate is joined. At least one of a substrate of the joining region of the piezoelectric vibration plate, a substrate of the joining region of the upper lid member, and a substrate of the joining region of the lower lid member has a roughened surface. | 09-08-2011 |
Nobuyuki Kohda, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20090268173 | METHOD FOR MEASURING LIQUID IMMERSION LITHOGRAPHY SOLUBLE FRACTION IN ORGANIC FILM - A method for measuring a liquid immersion lithography soluble fraction in an organic film including a mounting step of mounting a droplet of a liquid immersion medium for liquid immersion lithography on a surface of an organic film formed on a substrate and a transfer step of transferring a component in the organic film into the droplet. | 10-29-2009 |
Shinichi Kohda, Kyoto-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20080258166 | Semiconductor Light Emitting Device and Method for Manufacturing the Same - There is provided a semiconductor light emitting semiconductor device including an n-side electrode which has a structure capable of stably suppressing the contact resistance between the n-side electrode and a nitride semiconductor layer. Further, there is provided a light emitting device and a manufacturing method wherein an ohmic contact between the n-side electrode and the nitride semiconductor layer can be obtained by a simple manufacturing process, and the n-side electrode has an Au layer on a top surface to facilitate wire bonding. Semiconductor layers ( | 10-23-2008 |
Takuya Kohda, Kanagawa JP
| Patent application number | Description | Published |
|---|---|---|
| 20100020668 | RECORDABLE OPTICAL RECORDING MEDIUM AND RECORDING METHOD THEREOF - Provided is a recordable optical recording medium that comprises a substrate, a recording layer, and a reflective layer, wherein the recording layer and the reflective layer are formed on the substrate, the recording layer is formed of an inorganic material, and information is recorded on the recordable optical recording medium by use of an irreversible change at the recording layer caused by irradiating blue laser light. | 01-28-2010 |
Tohru Kohda, Fukuoka JP
| Patent application number | Description | Published |
|---|---|---|
| 20100207796 | CONVERTER, CONVERSION METHOD, PROGRAM, AND RECORDING MEDIUM - Provided is a highly accurate converter and the like that makes up for the instability of circuit elements, by focusing on a relationship between the Markov chain and β conversion. A converter | 08-19-2010 |
| 20110193734 | SIGNAL CONVERTER, PARAMETER DECIDING DEVICE, PARAMETER DECIDING METHOD, PROGRAM, AND RECORDING MEDIUM - A signal converter and the like, which can more accurately and stably realize signal conversion between an analog signal and a digital signal are proposed. In a β-encoder, when a logic value generated by at least a quantizer | 08-11-2011 |
Tohru Kohda, Utsunomiya-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20100233377 | IMPRINT APPARATUS AND METHOD - An imprint apparatus which includes an imprint head configured to hold a mold, and performs an imprint process including dispensing of a resin to a shot region on a substrate and pressing of the mold and the dispensed resin with each other, comprises a controller configured to control an order of the imprint process for a plurality of selected shot regions on the substrate, and a first dispenser and a second dispenser configured to dispense the resin, wherein the first dispenser is arranged on a side of a first direction with respect to the imprint head, and the second dispenser is arranged on a side of a second direction opposite to the first direction with respect to the imprint head. | 09-16-2010 |
Tomoko Kohda, Sakai-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20110014211 | COMPOSITION FOR NEUTRALIZING BOTULINUS TOXIN TYPE-A, AND HUMAN ANTI-BOTULINUS TOXIN TYPE-A ANTIBODY - Provided herein is a means which is effective for botulism diseases and the prevention of the botulism diseases. Specifically provided is a plurality of human anti-botulinum toxin type-A antibodies having different epitopes from one another. Also specifically provided is a composition for neutralizing botulinum toxin type-A, which comprises a combination of two or more of the antibodies and which has a high neutralizing activity. | 01-20-2011 |
Tsutomu Kohda, Osaka JP
| Patent application number | Description | Published |
|---|---|---|
| 20080231215 | Undulator - An undulator comprises a first magnetic circuit ( | 09-25-2008 |
Yasuteru Kohda, Kanagawa-Ken JP
| Patent application number | Description | Published |
|---|---|---|
| 20110063150 | METHOD FOR DETECTING AND CORRECTING PHASE SHIFT BETWEEN I DATA CLOCK AND Q DATA CLOCK IN QUADRATURE MODULATOR OR QUADRATURE DEMODULATOR - A computer-implemented method, device, and program product for detecting a phase shift between an I data clock and a Q data clock in processing an I data signal or a Q data signal used in quadrature modulation or quadrature demodulation. The method includes: receiving an input of the I data clock and the Q data clock; performing exclusive-ORing (XORing) on the I data clock and the Q data clock; latching a result of the performance of XORing on a phase sampling clock which is asynchronous with the I data clock and the Q data clock; incrementing a first number; incrementing a second number; comparing the incremented first number and the incremented second number and determining, based on a phase determination criterion, a phase shift between the I data clock and the Q data clock; and detecting a phase shift between the I data clock and the Q data clock. | 03-17-2011 |
Yasuteru Kohda, Yamato JP
| Patent application number | Description | Published |
|---|---|---|
| 20090271553 | METHOD AND APPARATUS FOR OBTAINING TRACE INFORMATION OF MULTIPLE PROCESSORS ON AN SOC USING A SEGMENTED TRACE RING BUS TO ENABLE A FLEXIBLE TRACE OUTPUT CONFIGURATION - An integrated bus architecture for transmitting trace information from a plurality of processors included on an integrated chip having one or more peripheral I/O channels comprises a segmented bus having a plurality of segments arranged in a ring topology and configured to transmit trace information in a circular pathway from upstream segments to downstream segments, and one or more trace output circuits each connected to a respective segment and each including a switch configured to be dynamically toggled between enabled and disabled states. The plurality of segments includes a respective segment for each processor having a coupling unit connected to a trace port of the processor. The coupling unit is configured to receive trace information from the trace port, to receive trace information from the adjacent upstream segment, and to transmit items of trace information to the adjacent downstream segment. Each trace output circuit is configured to transmit trace information to a respective peripheral I/O channel when in the enabled state. Each trace output circuit is configured to transmit trace information to the adjacent downstream segment when in the disabled state. | 10-29-2009 |
Youji Kohda, Kawasaki JP
| Patent application number | Description | Published |
|---|---|---|
| 20080215840 | ELECTRONIC FILE SYSTEM, OPERATING DEVICE, APPROVAL DEVICE, AND COMPUTER PROGRAM - An electronic file system includes an operating device for receiving an input for performance of an operation on an electronic file and an approval device used for approving of the operation on the electronic file. The electronic file includes an operation file on which an operation is to be performed and a restriction file indicating a restriction condition (policy) for restricting an operation performable on the operation file and a request destination for approval of the restricted operation. The operating device includes determination means for determining whether the operation to be performed on the operation file is permitted in accordance with the restriction condition described in the restriction file and means for, when it is determined that the operation corresponds to the restriction condition, transmitting to the approval device described as the request destination in the restriction file an approval request for requesting approval of the operation. | 09-04-2008 |
| 20090002753 | ANALYSIS METHOD, ANALYSIS SYSTEM, ANALYSIS APPARATUS AND RECORDING MEDIUM - An analysis system for analyzing the usage pattern of a machine operating in accordance with control information transmitted from an information processing apparatus by using an analysis apparatus. The system includes the information processing apparatus and the analysis apparatus. The information processing apparatus includes a first transmitting part transmitting control information for controlling the machine to the analysis apparatus. The analysis apparatus includes a receiving part receiving the control information transmitted from the information processing apparatus, an output part outputting the received control information to the machine, a calculating part calculating a load value of the processing on the machine based on the received control information, a storage part storing a total value of the calculated load values of the machine, into a storage section, and a second transmitting part transmitting warning information to the information processing apparatus if the stored total value reaches the reference value. | 01-01-2009 |
| 20090048809 | SENSOR EVALUATION SYSTEM, SENSOR EVALUATION METHOD, AND STORAGE MEDIUM RECORDING SENSOR EVALUATION PROGRAM - A sensor evaluation system communicating to a plurality of sensors and an analysis system providing analysis service using time series sensor data obtained from at least one of the plurality of sensors includes a time series data recorder recording a time series data showing changes with time of events having predetermined relations with the analysis service associating with the analysis system, a sensor relevance ratio calculator calculating sensor relevance ratios indicating relevance ratios of sensor data to the time series data by comparing changes with time of events indicated by the time series data and time series records of the sensor data used by the service execution part to provide analysis service in the same period, and a sensor importance calculator calculating sensor importance using the sensor relevance ratio calculated by the sensor relevance ratio calculator as a guide before recording the calculated sensor importance in a sensor importance recorder. | 02-19-2009 |
| 20090089023 | MODEL CREATION SUPPORT SYSTEM, MODEL CREATION SUPPORT METHOD, AND MODEL CREATION SUPPORT PROGRAM - A model creation support system includes a model managing part that acquires and accumulates an identifier of a model, data indicating a phenomenon, data indicating a regression equation, and evaluation data from an information processing apparatus that predicts or analyzes the phenomenon, using a model represented by the regression equation, a factor value extracting part that generates and records factor value data indicating the degree to which the factor contributes to the model from the accumulated data, and a model proposing part that refers to the factor value data based on a request for supporting model creation and model condition data received from the information processing apparatus, thereby generating and outputting support data containing a factor capable of contributing to the model to the information processing apparatus. Thus, information on factors of the model can be accumulated and utilized for enhancement of the fitting degree of the model. | 04-02-2009 |
| 20090248863 | ANALYSIS APPARATUS, ANALYSIS METHOD AND RECORDING MEDIUM FOR RECORDING ANALYSIS PROGRAM - An analysis apparatus includes a history analysis part analyzing the trend based on the access log and deriving the latent trait to an access destination, a principal components analysis part analyzing principal components of the frequency distribution of the access, a classification part classifying the correlation of the principal components into plural classes, an event recording part recording the events to induce to the access destination, a first generating part generating a latent trait principal component table; a second generating part generating a class construction ratio table stored the class as the result of classification,a third generating part generating an event classification table stored the class and the contents of the event, and an analysis result recording part recording the latent trait principal component table, the class construction ratio table and the event classification table, as an event feature model of the effect on the execution of the event. | 10-01-2009 |
| 20090276390 | Modeling support system, modeling support method, and modeling support program - A modeling support system is provided in which a model structure is extracted from stored models so as to improve a resulting prediction model using the extracted structure. In a modeling support system | 11-05-2009 |
Yuzo Kohda, Kyoto JP
| Patent application number | Description | Published |
|---|---|---|
| 20090084500 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS - There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film). | 04-02-2009 |
| 20090095420 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS - There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film). | 04-16-2009 |
| 20090114155 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS - There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film). | 05-07-2009 |
| 20090145555 | PROCESSING APPARATUS, EXHAUST PROCESSING PROCESS AND PLASMA PROCESSING PROCESS - There is disclosed an exhaust processing process of a processing apparatus for processing a substrate or a film, which comprises after the processing of the substrate or the film, introducing a non-reacted gas and/or a by-product into a trap means comprising a filament comprised of a high-melting metal material comprising as a main component at least one of tungsten, molybdenum and rhenium; and processing the non-reacted gas and/or the by-product inside the trap means. This makes it possible to prevent lowering in exhaust conductance, to lengthen the maintenance cycle of the processing apparatus, and to provide a high-quality product (processed substrate or film). | 06-11-2009 |