| Patent application number | Description | Published |
|---|
| 20080218843 | MICROELECTROMECHANICAL DEVICE AND METHOD UTILIZING A POROUS SURFACE - A microelectromechanical device (MEMS) utilizing a porous electrode surface for reducing stiction is disclosed. In one embodiment, a microelectromechanical device is an interferometric modulator that includes a transparent electrode having a first surface; and a movable reflective electrode with a second surface facing the first surface. The movable reflective electrode is movable between a relaxed and actuated (collapsed) position. An aluminum layer is provided on either the first or second surface. The aluminum layer is then anodized to provide an aluminum oxide layer which has a porous surface. The porous surface, in the actuated position, decreases contact area between the electrodes, thus reducing stiction. | 09-11-2008 |
| 20090059345 | MEMS DEVICES WITH PROTECTIVE COATINGS - A microelectromechanical devices with protective coatings on one or more surfaces of the micromechanical device is disclosed. The micromechanical device includes a substrate. The micromechanical device further includes a mirror positioned over the substrate. The mirror can be at least partially reflective to incident light. The micromechanical device further includes an optical layer positioned over the substrate and spaced from the mirror. The optical layer can be at least partially transmissive to incident light. The micromechanical device can further include a protective coating. The optical layer and the mirror define a cavity and the protective coating overlies surfaces of the microelectromechanical device exposed to the cavity. | 03-05-2009 |
| 20090213451 | METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL - Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate. | 08-27-2009 |
| 20090273823 | METHOD OF MANUFACTURING MEMS DEVICES PROVIDING AIR GAP CONTROL - Methods and apparatus are provided for controlling a depth of a cavity between two layers of a light modulating device. A method of making a light modulating device includes providing a substrate, forming a sacrificial layer over at least a portion of the substrate, forming a reflective layer over at least a portion of the sacrificial layer, and forming one or more flexure controllers over the substrate, the flexure controllers configured so as to operably support the reflective layer and to form cavities, upon removal of the sacrificial layer, of a depth measurably different than the thickness of the sacrificial layer, wherein the depth is measured perpendicular to the substrate. | 11-05-2009 |
