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Kodera, Kawasaki-Shi
Akira Kodera, Kawasaki-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090095637 | Electrochemical polishing method and polishing method - The present invention provides an electrochemical polishing method capable of increasing a polishing speed while preventing excessive polishing, such as dishing or erosion. In the electrochemical polishing method, when a voltage applied to a conductive film formed on the surface of a substrate is increased at a contact surface pressure of 0 between the surface of the substrate and a polishing pad, a voltage at a first change point C that allows a current density to start to decrease after an increase is referred to as a minimum voltage. In addition, when the voltage is increased at a contact surface pressure having a finite value, a voltage at a second change point B that allows the current density to be maintained constant after the decrease is referred to as a maximum voltage. In this case, the surface of the conductive film is polished while maintaining the voltage to be not lower than the minimum voltage and not higher than the maximum voltage. Further, the present invention provides an electrochemical polishing method capable of rapidly removing a conductive film in regions other than a contact plug or wiring line forming region while preventing excessive polishing, such as dishing or erosion. In the electrochemical polishing method, in a step of increasing a voltage, when the voltage is increased at a contact surface pressure of 0, a voltage at a first change point C that allows a current density to start to decrease after an increase is referred to as a threshold voltage, and the voltage is increased such that a voltage in a region in which a barrier film is exposed is higher than the threshold voltage. | 04-16-2009 |
| 20090107851 | Electrolytic polishing method of substrate - An electrolytic polishing method of a substrate having a barrier film and an interconnect metal layer on a surface to be processed under the presence of an electrolytic solution, including a barrier film electrolytic polishing process which removes the barrier film by applying a voltage between a cathode and an anode, with the surface to be processed serving as the cathode, and causing relative motion between the surface to be processed and a polishing pad which faces and makes contact with the surface to be processed. | 04-30-2009 |
Tomohiro Kodera, Kawasaki-Shi JP
| Patent application number | Description | Published |
|---|---|---|
| 20090104659 | NOVEL ALDOLASE AND PRODUCTION PROCESS OF 4-HYDROXY-L-ISOLEUCINE - A novel aldolase is described. 4-hydroxy-3-methyl-2-keto-pentanoic acid, which is useful as an intermediate in the synthesis of 4-hydroxy-L-isoleucine, may be synthesized from acetaldehyde and α-ketobutyric acid using a novel aldolase, which is derived from the genus | 04-23-2009 |
| 20090203604 | SOOTHING AGENT AND FOOD FOR TREATING FATIGUE - It is an objective of the present invention to provide a soothing agent and a food for treating fatigue whereby: physical strength can be quickly restored from exhaustion (a state with lowered spontaneous motility), such as after exercise or exhausting labor or upon awakening in the early morning; physical strength decline can be prevented; and physical strength can be maintained. | 08-13-2009 |
| 20090275092 | METHOD FOR PRODUCING 4-HYDROXY-L-ISOLEUCINE - A highly active L-isoleucine dioxygenase from | 11-05-2009 |
| 20100323058 | METHOD FOR PRODUCING FISH PASTE PRODUCT, AND ENZYME PREPARATION FOR FISH PASTE PRODUCTS - In the process of producing a fish paste product, adding a defined amount of a transglutaminase and ascorbic acid or a related compound thereof are added to material surimi can suppress changes in the physical properties of nerimi during the process of producing a fish paste product and a fish paste product having a preferable firmness and elasticity can be obtained even in the case of reducing the amount of material surimi. | 12-23-2010 |
| 20110034397 | INTESTINAL IMMUNE SYSTEM STIMULATOR - Disclosed is an agent, γ-glutamylcysteine, which can effectively and safely stimulate the intestinal immune system. γ-Glutamylcysteine can be formulated in a pharmaceutical composition, a food, and/or a beverage, and used for the treatment or prevention of infectious diseases, diarrhea, polyps, tumors, enteritis or allergy. | 02-10-2011 |
| 20110070270 | IMMUNOSTIMULATING AGENT - An immunostimulating agent, which can stimulate immunity effectively, is described. The immunostimulating agent contains an active ingredient including a calcium receptor activator such as γ-Glu-X-Gly [wherein X represents an amino acid or a derivative thereof other than Cys], γ-Glu-Val-Y [wherein Y represents an amino acid or a derivative thereof], γ-Glu-Ala, γ-Glu-Gly, γ-Glu-Met, γ-Glu-Thr, γ-Glu-Val, γ-Glu-Orn, Asp-Gly, Cys-Gly, Cys-Met, Glu-Cys, Gly-Cys, Leu-Asp, γ-Glu-Met(O), γ-Glu-γ-Glu-Val, γ-Glu-Val-NH2, γ-Glu-Val-ol, γ-Glu-Ser, γ-Glu-Tau, γ-Glu-Cys(S-Me)(O), γ-Glu-Leu, γ-Glu-Ile, γ-Glu-t-Leu, γ-Glu-Cys(S-Me), a cation having a valency of 2 or more, protamine, polylysine, spermine, spermidine, putrescine, cinacalcet, a cinacalcet analogue compound, and a salt of any one of the aforementioned components. | 03-24-2011 |