Patent application number | Description | Published |
20110156514 | VACUUM ACTUATOR AND SUBSTRATE TRANSPORT ROBOT - A vacuum actuator includes a vacuum partition wall, the interior of which can be evacuated to a vacuum, a rotor supported by the vacuum partition wall to be free to rotate, a permanent magnet provided on the outer peripheral surface of the rotor, a coil opposed to the permanent magnet, and a stator provided with the coil. The stator and the vacuum partition wall are formed integrally with each other. | 06-30-2011 |
20120014770 | SUBSTRATE CONVEYANCE APPARATUS, ELECTRONIC DEVICE MANUFACTURING SYSTEM, AND ELECTRONIC DEVICE MANUFACTURING METHOD - A substrate conveyance apparatus includes a first driving shaft, an arm portion having one end connected to the first driving shaft, a substrate holding unit capable of holding a substrate, and a connecting portion that connects the other end of the arm portion and the substrate holding unit. The connecting portion includes a rotating support portion that supports the substrate holding unit rotatably with respect to the arm portion, and a moving unit that moves the substrate holding unit upward or downward with respect to the arm portion in the direction of the rotating shaft about which the substrate holding unit is rotated by the rotating support portion. | 01-19-2012 |
20130202398 | SUBSTRATE TRANSPORT APPARATUS, AND SYSTEM AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE - A substrate transport apparatus including a first substrate holder and a second substrate holder capable of respectively holding substrates includes a first drive arm which has first and second end portions, and is rotatable with rotation of a first drive shaft, a second drive arm which has a third end portion spaced apart from the first end portion by a first distance, and a fourth end portion spaced apart from the second end portion by a second distance, and is rotatable with rotation of a second drive shaft coaxial with the first drive shaft, two first driven arms coupled to the first substrate holder, and two second driven arms coupled to the second substrate holder. | 08-08-2013 |
20140291145 | VACUUM PROCESSING APPARATUS - A vacuum processing apparatus includes a substrate holder which can tilt relative to a target and includes a refrigerating machine which cools a substrate, hoses which transport a refrigerant between a compressor provided outside a vacuum vessel and a cooling device inside the substrate holder, and a housing unit which is provided outside the vacuum vessel and houses the hoses in a coiled state with a curvature radius that does not exceed a predetermined curvature radius. | 10-02-2014 |