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| 20080314763 | Method and device for regenerating ion exchanger, and electrolytic processing apparatus - A method and device for regenerating an ion exchanger can regenerate an ion exchanger easily and quickly, and can minimize a load upon cleaning of the regenerated ion exchanger and disposal of waste liquid. A method for regenerating a contaminated ion exchanger includes: providing a pair of a regeneration electrode and a counter electrode, a partition disposed between the electrodes, and an ion exchanger to be regenerated disposed between the counter electrode and the partition; and applying a voltage between the regeneration electrode and the counter electrode while supplying a liquid between the partition and the regeneration electrode and also supplying a liquid between the partition and the counter electrode. | 12-25-2008 |
| 20090078583 | Electrochemical mechanical polishing method and electrochemical mechanical polishing apparatus - A composite electrolytic processing method makes it possible to remove a conductive film without leaving it in an electrically-insulated state on an underlying barrier film, thereby exposing the barrier film. The electrochemical mechanical polishing method includes: applying a voltage between a first electrode connected to one pole of a power source and a second electrode, connected to the other pole of the power source, for feeding electricity to a conductive film of a polishing object; filling an electrolytic liquid into a space between the first electrode and the conductive film of the polishing object; and pressing and rubbing the conductive film against a polishing surface of a polishing pad to polish the conductive film in such a manner that a barrier film underlying the conductive film becomes gradually exposed from the center toward the periphery of the polishing object. | 03-26-2009 |
| 20090134036 | Electrolytic Processing Method and Electrolytic Processing Apparatus - An electrolytic processing method makes it possible to preferentially process a diffusion barrier layer while suppressing processing of an interconnect metal, thereby enabling omission of CMP or a lowering of processing pressure in CMP. The electrolytic processing method comprises: bringing a surface of a substrate (W) into contact with an electrolytic solution ( | 05-28-2009 |
| 20090142990 | METHOD FOR POLISHING A WORKPIECE - A polishing apparatus can supply a polishing liquid uniformly and efficiently to a surface to be polished of a workpiece. The polishing apparatus includes a polishing table having a polishing surface, and a top ring for holding a semiconductor wafer and pressing the semiconductor wafer against the polishing surface. The polishing apparatus also includes a polishing liquid supply port for supplying a polishing liquid to the polishing surface, and a moving mechanism for moving the polishing liquid supply port to distribute the polishing liquid uniformly over an entire surface of the workpiece due to relative movement of the workpiece and the polishing surface. | 06-04-2009 |
| 20090286332 | POLISHING METHOD - A method for polishing a substrate having a metal film thereon is described. The substrate has metal interconnects formed from part of the metal film. The polishing method includes performing a first polishing process of removing the metal film, after the first polishing process, performing a second polishing process of removing the barrier film, after the second polishing process, performing a third polishing process of polishing the insulating film, during the second polishing process and the third polishing process, monitoring a polishing state of the substrate with an eddy current sensor, and terminating the third polishing process when an output signal of the eddy current sensor reaches a predetermined threshold. | 11-19-2009 |
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| 20090137777 | Polyepoxy compound, method for producing same, thermosetting resin composition containing same, cured product of such composition, and method for removing such cured product - The present invention provides a specific polyepoxy compound having at least two olefin oxide groups and at least one tertiary ester group per molecule, a method for producing the compound, a thermosetting resin composition containing the compound, a cured product of the composition, and a method for removing the cured product. | 05-28-2009 |
| 20100230291 | CURABLE AQUEOUS COMPOSITION - The present invention provides an aqueous curable composition comprising (A) a compound comprising all or some primary amino groups and/or secondary amino groups optionally neutralized with a Brønsted acid, and (B) a crosslinking agent, the crosslinking agent being a compound having an (N-alkyl-N-(2-acylacyl)amino)alkyloxycarbonylamino group represented by General Formula (I) | 09-16-2010 |
| 20110160330 | SILSESQUIOXANE COMPOUND HAVING A POLYMERIZABLE FUNCTIONAL GROUP - An object of the present invention is to provide a silsesquioxane compound that is capable of producing a coating film with excellent heat resistance and scratch resistance, and that has excellent compatibility with general polymerizable unsaturated compounds as well as polymerizable unsaturated compounds with high polarity. | 06-30-2011 |
| 20110196059 | SILSESQUIOXANE COMPOUND HAVING POLYMERIZABLE FUNCTIONAL GROUP - To provide a composition comprising a silsesquioxane compound that is capable of producing a coating film with excellent heat resistance and scratch resistance, and that has excellent compatibility with general polymerizable unsaturated compounds as well as polymerizable unsaturated compounds with high polarity. | 08-11-2011 |
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| 20090055112 | Sensing apparatus - An object of the present invention is to provide a sensing instrument capable to detect a substance existing in a very small quantity, such as environmental pollutants, instantly with a high degree of precision. As a specific means for solving the problem, a frequency signal from a crystal oscillator is sampled using a frequency signal from a reference clock generating part, the sampling value is outputted in a digital signal, quadrature detection is conducted with the digital signal for a frequency signal corresponding to the output signal, the rotational vector rotating at a frequency corresponding to the difference between the frequency of the frequency signal and the frequency of a sinusoidal wave used for the quadrature detection is taken out, and the variation of the frequency is detected by detecting the velocity of the rotational vector based on the respective sampling values. In addition to that, the measurement range of the variation of frequency can be widened by multiplying the above-described rotational vector by the reversely rotational vector corresponding to the velocity of the rotational vector. | 02-26-2009 |
| 20100259425 | Digital signal processing device - There is provided a digital signal processing device capable of suppressing occurrence of an unnecessary frequency component (spurious) in performing a reduction processing of a bit number of a frequency signal made of a digital signal. A signal output section | 10-14-2010 |
| 20100321068 | Frequency Synthesizer - An object of the present invention provides a frequency synthesizer having a broad frequency entraining range which can finely set a frequency over a broad band by a novel principle. | 12-23-2010 |
| 20110074475 | Frequency synthesizer - There is provided a frequency synthesizer capable of improving phase noise. A sinusoidal signal with a frequency set by a frequency setting part is output as a digital signal from a set signal output part, and the digital signal is D/A-converted. A difference between a sinusoidal signal with a frequency corresponding to an output frequency of a voltage controlled oscillating part and a sinusoidal signal output from a D/A converting part is amplified by a differential amplifier, and an amplified signal is input via an A/D converting part to a means for extracting a phase difference between the aforesaid sinusoidal signals. A voltage corresponding to a signal being the result of integration of the phase difference is input as a control voltage to the voltage controlled oscillating part. Then, a gain of the differential amplifier is set larger than a maximum value of phase noise degradation of the A/D converting part, whereby the phase noise degradation of the A/D converting part is cancelled. | 03-31-2011 |
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| 20090167367 | Frequency Synthesizer - An object of the present invention provides a frequency synthesizer having a broad frequency entraining range which can finely set a frequency over a broad band by a novel principle. | 07-02-2009 |
| 20110001523 | FREQUENCY SYNTHESIZER - Provided is a frequency synthesizer capable of fine setting over a wide band and having a wide frequency pull-in range. A sine wave signal of an output frequency of a voltage controlled oscillating part is quadrature-detected, and in a PLL utilizing a vector rotating at a frequency (velocity) equal to a difference from a frequency of a frequency signal used for the detection, a frequency pull-in means integrates a first constant for increasing the output frequency as a pull-in voltage when a control voltage from the PLL to the voltage controlled oscillating part is larger than a prescribed set range, and integrates a second constant for decreasing the output frequency as the pull-in voltage when the control voltage is smaller than the set range. Then, an adding means adds the control voltage from the PLL and the pull-in voltage from the frequency pull-in means to output an addition result to the voltage controlled oscillating part. | 01-06-2011 |
| 20110169533 | FREQUENCY SYNTHESIZER - The provision of a technique capable of determining a state where PLL control does not operate normally instantly or in advance in a frequency synthesizer that frequency-divides, A/D converts, and quadranture-detects a frequency signal from a voltage controlled oscillating unit, and extracts a rotation vector rotating at a frequency difference between the frequency signal used for the detection and the A/D converted frequency signal, and integrates a difference between a frequency of the above rotation vector and a set frequency to set an integration result as a control voltage to the voltage controlled oscillating unit. | 07-14-2011 |
