| Patent application number | Description | Published |
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| 20080278699 | Method For Distortion Correction In A Microlithographic Projection Exposure Apparatus - For the correction of anamorphism in the case of a projection lens of an EUV projection exposure apparatus for wafers it is proposed to tilt the reticle bearing the pattern to be projected and preferably also the wafer by a small angle about an axis that is perpendicular to the axis A of the lens and perpendicular to the scan direction and that in each instance passes through the middle of the light field generated on the reticle or on the wafer. For the correction of a substantially antisymmetric quadratic distortion the reticle and/or the substrate is instead rotated about an axis of rotation that is disposed at least approximately parallel to an optical axis of the projection lens. | 11-13-2008 |
| 20080304033 | PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Another approach to decrease the resolution is to introduce an immersion liquid having high refractive index into the gap that remains between a final lens element on the image side of the projection objective and the photoresist or another photosensitive layer to be exposed. Projection objectives that are designed for immersion operation and are therefore also referred to as immersion objective may reach numerical apertures of more than 1, for example 1.3 or 1.4. The term “immersion liquid” shall, in the context of this application, relate also to what is commonly referred to as “solid immersion”. In the case of solid immersion, the immersion liquid is in fact a solid medium that, however, does not get in direct contact with the photoresist but is spaced apart from it by a distance that is only a fraction of the wavelength used. This ensures that the laws of geometrical optics do not apply such that no total reflection occurs. | 12-11-2008 |
| 20080309894 | MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS - A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid. | 12-18-2008 |
| 20100141912 | EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS - A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid. | 06-10-2010 |
| 20110228246 | PROJECTION OBJECTIVE FOR A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS - Another approach to decrease the resolution is to introduce an immersion liquid having high refractive index into the gap that remains between a final lens element on the image side of the projection objective and the photoresist or another photosensitive layer to be exposed. Projection objectives that are designed for immersion operation and are therefore also referred to as immersion objective may reach numerical apertures of more than 1, for example 1.3 or 1.4. The term “immersion liquid” shall, in the context of this application, relate also to what is commonly referred to as “solid immersion”. In the case of solid immersion, the immersion liquid is in fact a solid medium that, however, does not get in direct contact with the photoresist but is spaced apart from it by a distance that is only a fraction of the wavelength used. This ensures that the laws of geometrical optics do not apply such that no total reflection occurs. | 09-22-2011 |
| Patent application number | Description | Published |
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| 20090101621 | STOPPER FOR A CONTAINER - The stopper ( | 04-23-2009 |
| 20100219202 | DEVICE FOR SEPARATELY STORING A SUBSTANCE, PREFERABLY A MEDICAL OR PHARMACEUTICAL SUBSTANCE, AND A LIQUID AND MIXING THE SAME PRIOR TO THE DELIVERY THEREOF - The device for separately storing a substance, such as a medical or pharmaceutical active substance, and a liquid, and for mixing the same prior to use, comprising a first receptacle containing the liquid, a second receptacle that contains the substance and has a bottom to be opened so that the substance passes into the liquid, and comprising a means that can be advanced in order to apply a force to the bottom of the second receptacle such that the bottom is opened, is characterized in that the second receptacle is a blister pack which is mounted inside or on the first receptacle. The substance is thereby sealed within a housing that has a preferably flat bottom and a substantially cup-shaped or blister-shaped upper chamber wall. The flat bottom is torn open in order to release the substance, with the chamber wall being preferably turned upside down through the bottom. | 09-02-2010 |
| 20110079300 | ONE-WAY VALVE - The one-way valve for discharging a liquid out of a container, comprising an outer cap which is fastened to the container neck and comprises an exit channel for the liquid is characterized in that a valve body of elastic material is arranged between the container and the outer cap, that the valve body extends over the opening of the container neck and comprises a projection which projects into the exit channel of the outer cap and is arranged therein to be movable back and forth, that a space remains between the inner wall of the exit channel and the outer circumference of the projection, and that at least one cut severs the wall of the valve body, through which cut liquid passes into the space of the exit channel upon exertion of pressure on the container. | 04-07-2011 |
| 20120024905 | SINGLE-USE APPLICATOR - The single-use applicator used for discharging a filling substance and comprising a substance receiving chamber provided with an outlet is characterized in that the receiving chamber comprises an outwardly curved wall and an opposite wall which is provided with a surrounding web which engages into the cavity of the curved wall on the edge thereof, and that the curved wall is shaped such that it can be smoothly pressed onto the web and the interposed area of the opposite wall. | 02-02-2012 |
| Patent application number | Description | Published |
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| 20090039549 | METHOD AND DEVICE FOR PRODUCING A CONTAINER - The method comprises the following steps; a) the container opening is seated, b) at least one wall opening is created by drilling through or piercing the wall of the outer container using a drill, graver or needle, a pressurised medium being introduced into the gap between the outer container and the inner tube, once the wall of the outer container has been fully penetrated, c) the advance of the drill or needle is halted as soon as a predetermined first pressure threshold has been reached in the inner tube, d) the introduction of the pressurised medium into the gap between the outer container and the inner tube is halted as soon as a predetermined second pressure threshold has been reached in the inner tube, e) once the pressure in the gap between the outer container and the inner tube has been relieved, a pressurised medium is introduced into the inner tube through the container opening, in order to place the inner tube against the container wall again after it has been detached from the latter. The method allows the inner tube to be detached in a controlled manner with a high degree of uniformity from the outer container and to be placed against said outer container again without a significant inclusion of air. | 02-12-2009 |
| 20090274788 | DEVICE FOR PRODUCING A CONTAINER - The method comprises the following steps: a) the container opening is sealed, b) at least one wall opening is created by drilling through or piercing the wall of the outer container using a drill, graver or needle, a pressurized medium being introduced into the gap between the outer container and the inner tube, once the wall of the outer container has been fully penetrated, c) the advance of the drill or needle is halted as soon as a predetermined first pressure threshold has been reached in the inner tube, d) the introduction of the pressurized medium into the gap between the outer container and the inner tube is halted as soon as a predetermined second pressure threshold has been reached in the inner tube, e) once the pressure in the gap between the outer container and the inner tube has been relieved, a pressurized medium is introduced into the inner tube through the container opening, in order to place the inner tube against the container wall again after it has been detached from the latter. The method allows the inner tube to be detached in a controlled manner with a high degree of uniformity from the outer container and to be placed against said outer container again without a significant inclusion of air. | 11-05-2009 |
