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Klaus Rinn, Heuchelheim DE
Klaus Rinn, Heuchelheim DE
| Patent application number | Description | Published |
|---|---|---|
| 20080201971 | METHOD FOR ELIMINATING SOURCES OF ERROR IN THE SYSTEM CORRECTION OF A COORDINATE MEASURING MACHINE - A method is disclosed for eliminating sources of error in the system correction of a coordinate measuring machine. Herein, a number j of reference structures | 08-28-2008 |
| 20080295348 | Method for improving the reproducibility of a coordinate measuring apparatus and its accuracy - A method for improving the reproducibility of a coordinate measuring machine and its accuracy is disclosed. Using at least one measuring field of a camera, a plurality of images of at least one structure on the substrate are recorded. The substrate is placed on a measuring stage traversable in the X coordinate direction and the Y coordinate direction, the position of which is determined during imaging using a displacement measuring system. The measuring field is displaced by the amount of the deviation determined. | 12-04-2008 |
| 20090002486 | Coordinate measuring machine and method for calibrating the coordinate measuring machine - A coordinate measuring machine is disclosed having an orientor automatically orienting a substrate associated therewith. A control and computing unit is further associated with the coordinate measuring machine, so that self-calibration may be performed on the basis of at least two different and automatically set orientations of the substrate. | 01-01-2009 |
| 20090024344 | Method for correcting an error of the imaging system of a coordinate measuring machine - A method for correcting an error of the imaging system of a coordinate measuring machine is disclosed. The position of at least two different edges of at least one structure on a substrate is measured. The substrate may be automatically rotated into another orientation. Then the position of the at least two different edges of the at least one structure is measured on the rotated substrate. Based on the measurement data, a systematic error of the imaging system is eliminated. | 01-22-2009 |
| 20090045318 | Method for reproducibly determining object characteristics - A method for reproducibly determining object characteristics is disclosed. Herein an object is imaged onto a detector by means of an imaging optics and detected thereon. A correction function k is applied to a brightness measuring result N originally detected by a detector in such a way, that a corrected brightness measuring result N′ is proportional to a brightness I impinging on the detector. | 02-19-2009 |
| 20090051932 | METHOD FOR DETERMINING THE POSITION OF A MEASUREMENT OBJECTIVE IN THE Z-COORDINATE DIRECTION OF AN OPTICAL MEASURING MACHINE HAVING MAXIMUM REPRODUCIBILITY OF MEASURED STRUCTURE WIDTHS - A method for determining the ideal focus position on different substrates is disclosed. A focus criterion is determined with which the best reproducibility may be achieved. An offset permits the user to set the optimal operating point of the coordinate measuring machine for a reproducible measurement of dimensions of structures on a substrate. | 02-26-2009 |
| 20090066955 | Device and method for determining an optical property of a mask - A coordinate measuring machine ( | 03-12-2009 |
| 20090073458 | MEANS AND METHOD FOR DETERMINING THE SPATIAL POSITION OF MOVING ELEMENTS OF A COORDINATE MEASURING MACHINE - A means and a method for determining the spatial position of at least one moving element ( | 03-19-2009 |
| 20100205815 | Method for Calibration of a Measuring Table of a Coordinate Measuring Machine - A method is disclosed which is suitable for the calibration of a measuring table ( | 08-19-2010 |
| 20100220339 | Method for Determining Positions of Structures on a Mask - A method for determining the positions of structures ( | 09-02-2010 |