Patent application number | Description | Published |
20110262859 | UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD - An upper-layer film-forming composition includes (A) a resin that is soluble in an alkaline aqueous solution, and includes a fluorine atom, and (B) a solvent component that includes (B1) a solvent having a boiling point at 101.3 kPa of 150° C. or more and a static surface tension of 23.0 mN/m or less, the upper-layer film-forming composition being used to form an upper-layer film on a photoresist film. | 10-27-2011 |
20120021359 | UPPER LAYER-FORMING COMPOSITION AND RESIST PATTERNING METHOD - A liquid immersion lithography upper-layer film-forming composition includes (A) a polymer that includes a structural unit (I) shown by the following formula (1), and (S) a solvent. R | 01-26-2012 |
20120171613 | UPPER LAYER FILM-FORMING COMPOSITION AND METHOD OF FORMING PHOTORESIST PATTERN - An upper layer film-forming composition includes a resin and a solvent component. The resin is soluble in a developer. The solvent component includes first solvent which has a boiling point of 180 to 280° C. at 101.3 kPa and a vapor pressure of 0.001 to 0.1 kPa at 20° C. The upper layer film-forming composition is used to form an upper layer film on a photoresist film. | 07-05-2012 |
20130084524 | COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM AND METHOD FOR FORMING RESIST PATTERN - A composition for forming a liquid immersion upper layer film, includes a first polymer, a second polymer and a solvent. The first polymer includes a first structural unit having a group represented by a following formula (i). In the formula (i), n is an integer of 1 to 3, and R | 04-04-2013 |
20130217850 | COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, AND POLYMER - An immersion upper layer film-forming composition includes [A] a polymer component that includes a polymer (A1), and [B] a solvent, the polymer (A1) including a structural unit (I) that includes a group represented by the following formula (i). The structural unit (I) is preferably a structural unit (I-1) represented by the following formula (1). The polymer component [A] preferably further includes a structural unit (II-1) represented by the following formula (2), the structural unit (II-1) being included in the polymer (A1) or a polymer other than the polymer (A1). The polymer component [A] preferably further includes a structural unit (III) that includes a carboxyl group, the structural unit (III) being included in the polymer (A1) or a polymer other than the polymer (A1). | 08-22-2013 |
20140085494 | AMOUNT-OF-SHAKE SENSING APPARATUS, IMAGING APPARATUS, AND METHOD OF DETECTING THE AMOUNT OF SHAKE - The apparatus of the invention is characterized by executing first integration operation for time-integrating the first acceleration to calculate a first velocity, second integration operation for time-integrating the first velocity to calculate an amount of movement in the first axial direction, estimation operation for calculating an estimated first velocity in the first axial direction based on a first velocity change found by time integration of the first acceleration from a first timing at which the third angular velocity becomes zero to a second timing at which the third angular velocity again becomes zero, the second angular velocity at the first timing, and the second angular velocity at the second timing, and update operation for updating the first velocity calculated in the first integration operation to the estimated first velocity estimated in the estimation operation. | 03-27-2014 |
20140093826 | COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, RESIST PATTERN-FORMING METHOD, POLYMER, AND COMPOUND - A composition for forming a liquid immersion upper layer film includes a polymer component including a polymer having a structural unit represented by a formula (1); and a solvent. R | 04-03-2014 |
20140146191 | AMOUNT-OF-SHAKE SENSING APPARATUS, IMAGING APPARATUS, AND METHOD FOR DETECTING THE AMOUNT OF SHAKE - The apparatus of the invention is characterized by executing radius-of-rotation calculation operation for calculating a radius of rotation from a velocity change found by time integration of acceleration, and an angular velocity; velocity calculation operation in which during a given time from a start of exposure, velocity is calculated based on the angular velocity and the radius of rotation calculated before the start of exposure, and after a lapse of the given time, the acceleration is cumulatively added to the velocity detected during the given time to calculate the velocity, and amount-of-movement calculation operation for time-integrating the velocity calculated in the velocity calculation operation to calculate the amount of movement. | 05-29-2014 |
20140147794 | METHOD OF FORMING PHOTORESIST PATTERN - A method of forming a photoresist pattern includes providing a photoresist film on a substrate. An upper layer film is provided on the photoresist film using an upper layer film-forming composition. Radiation is applied to the upper layer film and the photoresist film through a mask having a given pattern via an immersion medium. The upper layer film and the photoresist film are developed using a developer to form a photoresist pattern. The upper layer film-forming composition includes a resin soluble in the developer and a solvent component. The solvent component includes a first solvent, a second solvent shown by a general formula (2), and a third solvent shown by a general formula (3). The first solvent is diethylene glycol monoethyl ether acetate, ethylene glycol monobutyl ether acetate, diethylene glycol diethyl ether, γ-butyrolactone, methyl propylene diglycol, methyl propylene triglycol or a mixture thereof. | 05-29-2014 |
20140248563 | COMPOSITION, RESIST PATTERN-FORMING METHOD, COMPOUND, METHOD FOR PRODUCTION OF COMPOUND, AND POLYMER - A composition includes a polymer component including a first polymer having a first structural unit represented by a following formula (1), and a solvent. In the formula (1), R | 09-04-2014 |
20140327789 | SHAKING AMOUNT DETECTING APPARATUS, IMAGE PICKUP APPARATUS, AND SHAKING AMOUNT DETECTING METHOD - A shaking amount detecting apparatus includes an angular velocity sensor that detects yaw, pitch, and roll-angular-velocities, an acceleration sensor that detects X and Y-accelerations in X and Y-axis directions, radius calculating sections that respectively calculate a yaw-radius and an XZ-roll-radius on the basis of a yaw-angular-velocity, a roll-angular-velocity, and an X-acceleration at different times, a velocity calculating section that multiplies the yaw-angular-velocity with the yaw-radius to calculate a first component of an X-velocity, a velocity calculating section that multiplies the roll-angular-velocity with the XZ-roll-radius to calculate a second component of the X-velocity, an adding section that adds up the first component of the X-velocity and the second component of the X-velocity to acquire the X-velocity, and an integrating section that integrates the X-velocity with respect to a time period to thereby calculate a movement amount in the X-axis direction. | 11-06-2014 |
20140377707 | COMPOSITION FOR FORMING LIQUID IMMERSION UPPER LAYER FILM, RESIST PATTERN-FORMING METHOD, POLYMER, AND COMPOUND - A composition for forming a liquid immersion upper layer film includes a polymer component including a polymer having a structural unit represented by a formula (1); and a solvent. R | 12-25-2014 |
Patent application number | Description | Published |
20110267167 | COIL-TYPE ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD - A coil-type electronic component has a coil inside or on the surface of its base material and is characterized in that: the base material is constituted by a group of grains of a soft magnetic alloy containing iron, silicon and other element that oxidizes more easily than iron; the surface of each soft magnetic alloy grain has an oxide layer formed on its surface as a result of oxidization of the grain; this oxide layer contains the other element that oxidizes more easily than iron by a quantity larger than that in the soft magnetic alloy grain; and grains are bonded with one another via this oxide layer. | 11-03-2011 |
20120038449 | COIL-TYPE ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD - A coil-type electronic component has a coil inside or on an outer surface of its base material and is characterized in that: the base material is constituted by a group of grains of a soft magnetic alloy containing iron, silicon and other element that oxidizes more easily than iron; the surface of each soft magnetic alloy grain has an oxide layer formed on its surface as a result of oxidization of the grain; the oxide layer contains the other element that oxidizes more easily than iron by a quantity larger than that in the soft magnetic alloy grain; and grains are bonded with one another via the oxide layer. | 02-16-2012 |
20120119871 | COIL-TYPE ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD - A coil-type electronic component has a coil inside or on the surface of its base material and is characterized in that: the base material is constituted by a group of grains of a soft magnetic alloy containing iron, silicon and other element that oxidizes more easily than iron; the surface of each soft magnetic alloy grain has an oxide layer formed on its surface as a result of oxidization of the grain; this oxide layer contains the other element that oxidizes more easily than iron by a quantity larger than that in the soft magnetic alloy grain; and grains are bonded with one another via this oxide layer. | 05-17-2012 |
20120188040 | COIL COMPONENT - As an embodiment, a pair of first conductive films | 07-26-2012 |
20130176098 | MAGNETIC MATERIAL AND COIL COMPONENT USING THE SAME - A magnetic material constituted by a grain compact | 07-11-2013 |
20150083960 | MAGNETIC BODY AND ELECTRONIC COMPONENT USING THE SAME - A magnetic body constituted by magnetic grains bonded together via oxide film, which magnetic grains contain a Fe—Si-M soft magnetic alloy (where M is a metal element more easily oxidized than Fe) that contains sulfur atoms (S). The magnetic body preferably contains 0.004 to 0.012 percent by weight of S, 1.5 to 7.5 percent by weight of Si, and 2 to 8 percent by weight of metal M. | 03-26-2015 |
Patent application number | Description | Published |
20130120097 | COIL-TYPE ELECTRONIC COMPONENT - A coil-type electronic component having a coil inside or on the surface of a base material, characterized in that the base material of the coil-type electronic component is constituted by a group of soft magnetic alloy grains whose main ingredients are iron, silicate and chromium, and that an oxide layer is formed on the surface of each soft magnetic alloy grain, where the oxide layer is produced as a result of oxidization of the grain and has more chromium than the alloy grain, and this oxide layer has a two-layer structure constituted by an inner layer whose main ingredient is chromium oxide and an outer layer whose main ingredient is iron-chromium oxide, and the outer layers of soft magnetic alloy grains are inter-bonded. | 05-16-2013 |
20130154784 | COIL-TYPE ELECTRONIC COMPONENT - A coil-type electronic component having a coil inside or on the surface of a base material is characterized in that the base material of the coil-type electronic component is constituted by a group of soft magnetic alloy grains inter-bonded via oxide layers, multiple crystal grains are present in each soft magnetic alloy grain, and the oxide layers preferably have a two-layer structure whose outer layer is thicker than the inner layer. | 06-20-2013 |
20130200970 | COIL-TYPE ELECTRONIC COMPONENT AND PROCESS FOR PRODUCING SAME - A coil-type electronic component has a coil inside or on the surface of its base material wherein the base material in the coil-type electronic component is constituted by a group of grains of a soft magnetic alloy containing iron, silicon and other element that oxidizes more easily than iron; the surface of each soft magnetic alloy grain has an oxide layer formed on its surface as a result of oxidization of the grain; this oxide layer contains the other element that oxidizes more easily than iron by a quantity larger than that in the soft magnetic alloy grain; and grains are bonded with one another via this oxide layer. The coil-type electronic component can be produced at low cost and combines high magnetic permeability with high saturation magnetic flux density. | 08-08-2013 |