Patent application number | Description | Published |
20100085561 | LASER SCATTERING DEFECT INSPECTION SYSTEM AND LASER SCATTERING DEFECT INSPECTION METHOD - A laser scattering defect inspection system includes: a stage unit that rotates a workpiece W and transports the workpiece W in one direction; a laser light source that emits a laser beam LB toward the workpiece W mounted on the stage unit; an optical deflector that scans the laser beam LB emitted from the laser light source on the workpiece W; an optical detector that detects the laser beam LB scattered from the surface of the workpiece W; a storage unit that stores defect inspection conditions for each inspection step of a manufacturing process of the workpiece W, where the conditions include the rotation speed and the moving speed of the workpiece W by the stage unit, the scan width on the workpiece W and the scan frequency by the optical deflector; and a control unit that reads the defect inspection conditions stored for each inspection step in the storage unit and controls the driving of the stage unit and the optical deflector under the conditions. | 04-08-2010 |
20110005143 | POLISHING OIL SLURRY FOR POLISHING HARD CRYSTAL SUBSTRATE - A hard crystal substrate such as a GaN substrate or a SiC substrate is polished by using polishing oil slurry having abrading particles of artificial diamond clusters dispersed in a dispersant. The artificial diamond clusters include approximately spherical agglomerate particles with average particle size D50 of 20 nm or more and 50 nm or less, having primary particles with particle diameters of 2 nm or more and 10 nm or less. A rough polishing process is carried out first such that an average surface roughness of 0.5 nm or more and 1 nm or less is obtained, followed by a finishing process such that the average surface roughness of said surface becomes 0.2 nm or less. | 01-13-2011 |
20110227786 | ABNORMAL VALUE DETECTION APPARATUS FOR SATELLITE POSITIONING SYSTEM, ABNORMAL VALUE DETECTION METHOD, AND ABNORMAL VALUE DETECTION PROGRAM - To detect an abnormal value in a satellite positioning system with high precision even when the observation environment changes or there is the time series correlation between data. An abnormal value index calculation unit | 09-22-2011 |
20120208439 | METHOD FOR POLISHING SEMICONDUCTOR WAFER - In a method for polishing a semiconductor wafer by rotating a work carrier and a table while pressing the semiconductor wafer retained by the work carrier against a polishing cloth mounted on the table, at a time when the table and the work carrier both having been at rest are rotated, each at a predetermined number of revolutions, in a condition that the polishing cloth and the semiconductor wafer are pressed against each other, to thereby start polishing, a table acceleration is maintained smaller than a work carrier acceleration. By such maintaining the table acceleration smaller than the work carrier acceleration, vibrations to be generated when the polishing is started can be prevented. In the method for polishing a semiconductor wafer according to the present invention, the diameter of the semiconductor wafer is preferably defined to be 30% or more of the diameter of the table. | 08-16-2012 |
20120331024 | INFORMATION PROCESSING DEVICE, METHOD OF PROCESSING INFORMATION AND STORAGE MEDIUM - An information processing device can obtain an accurate result of regression analysis even if a mean and a variance of a response variable depends on an explanatory variable taking continuous variable. | 12-27-2012 |
20130339278 | DATA DISCRIMINATION DEVICE, METHOD, AND PROGRAM - A data discrimination device is provided with: an estimating means that estimates the population structure of inputted learning data; a degree-of-fit calculating means that calculates the degree of fit, of each of the inputted addition candidate data, to the population of learning data, using results of the estimation by the estimating means; and a determining means for determining, on the basis of the calculated degree of fit, whether or not to add each of the addition candidate data to the learning data. | 12-19-2013 |
20140122393 | INFORMATION PROCESSING SYSTEM, NETWORK STRUCTURE LEARNING DEVICE, LINK STRENGTH PREDICTION DEVICE, LINK STRENGTH PREDICTION METHOD AND PROGRAM - An information processing system separately generates sample sequences from a posterior distribution of each random variable in a probability model representing the structure of a template network that serves as a template for a plurality of networks whose network structures are to be learned, and from a posterior distribution of each random variable in a probability model representing the structures of the plurality of networks, using learning data and hyperparameters relating to the plurality of networks. Next, the information processing system derives a predictive value of the strength of a link specified by an external variable based on the external variable and on the sample sequences. | 05-01-2014 |
20140244551 | INFORMATION SPREAD SCALE PREDICTION DEVICE, INFORMATION SPREAD SCALE PREDICTION METHOD, AND INFORMATION SPREAD SCALE PREDICTION PROGRAM - To provide an information spread scale prediction device capable of accurately predicting the number of future contributions for a specific topic in SNS and the like. The information spread scale prediction device includes: a learning text data input unit which acquires learning text data from a specific website; a node influence learning unit which calculates the influence for the number of statements by each group to which a node specifying a single specific user belongs for the topic from the number of statements by each classified topic, and stores it as learning data; a prediction text data input unit which acquires prediction text data from the specific website after storing the learning data; and a future contribution number prediction unit which predicts and outputs the number of contributions at a specific future time of the topic based on the number of statements of each topic and the learning data. | 08-28-2014 |