Patent application number | Description | Published |
20100081093 | EXPOSURE APPARATUS INSPECTION METHOD AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - A mask pattern includes a first pattern having a line-and-space pattern extending in a first direction, a second pattern formed as a line-and-space pattern having a larger period than the first pattern and extending in the first direction, a third pattern having a line-and-space pattern extending in a second direction, and a fourth pattern formed as a line-and-space pattern having a larger period than the third pattern and extending in the second direction. Illumination light is obliquely incident on the first pattern and the second pattern from a first oblique direction, illumination light is obliquely incident on the third pattern and the fourth pattern from a second oblique direction, and a relative distance from the first pattern to the second pattern transferred on to an image receptor and a relative distance from the third pattern to the fourth pattern transferred onto the image receptor are measured and an optical characteristic of an exposure apparatus is ascertained based on the relative distances. | 04-01-2010 |
20130222782 | SUBSTRATE HOLDING APPARATUS, PATTERN TRANSFER APPARATUS, AND PATTERN TRANSFER METHOD - According to one embodiment, a substrate holding apparatus includes a main unit and a plurality of first support units. The main unit has a major surface. The main unit has a plate configuration. The first support units are disposed on the major surface. Each of the first support units includes a suction-holding unit capable of holding a substrate by suction. The suction-holding unit is movable along a first direction perpendicular to the major surface and a second direction parallel to the major surface. | 08-29-2013 |
20140094015 | ALIGNMENT MEASUREMENT SYSTEM, OVERLAY MEASUREMENT SYSTEM, AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE - According to one embodiment, an alignment measurement system is configured to measure a position of a mark having the highest identifiability of a plurality of marks formed in a substrate. The plurality of marks are made of mutually different patterns. A device pattern is formed in the substrate using directed self-assembly after the plurality of marks is formed. | 04-03-2014 |
20140340660 | PATTERN FORMATION METHOD AND PATTERN FORMATION APPARATUS - According to one embodiment, a pattern formation method includes preparing a mold including a first pattern, preparing a substrate including a second pattern, coating a photosensitive resin onto the substrate, bringing the mold into contact with the photosensitive resin, determining whether or not the photosensitive resin is filled between the first pattern and the second pattern, performing an alignment of the first pattern and the second pattern according to a first reference in the case where the photosensitive resin is filled between the first pattern and the second pattern, and performing the alignment of the first pattern and the second pattern according to a second reference different from the first reference in the case where the photosensitive resin is not filled between the first pattern and the second pattern, curing the photosensitive resin, and releasing the mold from the photosensitive resin. | 11-20-2014 |
Patent application number | Description | Published |
20090207847 | RELAY DEVICE AND RELAY METHOD - A relay device includes response frame transmitting technique for transmitting a response frame with the result of the inquiry to the effect that the source address coincident with the destination address to be inquired has been registered in the learning table to the relay device from which the inquiry frame was transmitted in the case that the registration judging technique has judged that the source address coincident with the destination address to be inquired has been registered in the learning table, and frame relaying technique for relaying the received frame whose relay has been temporarily postponed via the receiving port for the response frame in the case that the response frame was received. | 08-20-2009 |
20090213734 | PACKET TRANSMISSION DEVICE - A packet transmission device including plural queues for storing packets to be transmitted is provided. The device includes a token storage section for storing queue information for identifying a queue and an accumulated token value in which token values assigned to the queue are accumulated so as to obtain correspondence therebetween and a capture section for identifying one or both of an unused queue and a queue in which the accumulated token value exceeds a given upper limit value and capturing the queue information thereof. The device includes a selection section for selecting the queue information of the unidentified queue on the basis of the queue information captured using the capture section and an addition section for adding the accumulated token value of the token storage section on the basis of the queue information selected using the selection section. | 08-27-2009 |
20090245104 | APPARATUS AND METHOD FOR CONTROLLING BUFFERING OF AN ARRIVAL PACKET - An apparatus for controlling buffering of an arrival packet. The apparatus includes a packet buffer for temporarily storing each of one or more packets to be transmitted in association with an arrival time thereof, and a packet discard section for determining an arrival packet to be discarded or to be stored in the packet buffer, based on a discard condition defined by using a packet residence time that is calculated on the basis of one or more residence times of one or more packets staying in the packet buffer, wherein the arrival packet is defined as a packet that has newly arrived at the apparatus. | 10-01-2009 |
20100158011 | REPEATER AND REPEATING METHOD - A repeater stores retrieval situation of an address retrieved as an address identical with the transmission destination address of the reception frame in association with each address registered in the learning table, refers to, when the transmission source address of the received frame is registered in the learning table, the retrieval situation of the address stored in association with a port identical with the port that receives the frame from among retrieval situations, specifies an address to be overwritten by the transmission source address of the reception frame, overwrites and registers the transmission source address of the reception frame on the specified address, and updates, when the address identical with the transmission destination address of the received frame is retrieved from the learning table, the retrieval situation stored in association with the retrieved address. | 06-24-2010 |
20110058546 | Transmission Apparatus, Transmission Method and Non-Transitory Computer-Readable Recording Medium Thereof - A transmission apparatus for receiving frames from one transmission path, storing the frames in plural buffers, and transmitting the frames to another transmission path in which an estimated discard time determination part configured to determine an estimated discard time of the frames stored in the plural buffers, a transmission order determination part configured to determine a transmission order of the frames, an estimated transmission time calculation part configured to calculate an estimated transmission time of each of the frames based on the transmission order, and a discard control part configured to discard a target frame from the frames stored in the plural buffers based on the estimated transmission time and the estimated discard time in a case where the estimated discard time of the target frame is the same as or earlier than the estimated transmission time of the target frame, are provided. | 03-10-2011 |
Patent application number | Description | Published |
20090158123 | ERROR CORRECTION SCHEME FOR NON-VOLATILE MEMORY - Error correcting systems, methods, and devices for non-volatile memory are disclosed. In one embodiment, a non-volatile memory device comprises a data area for storing data, an error correcting code generation section for generating an error correcting code in response to receipt of a code generation command, and an error correcting code area for storing the error correcting code. The non-volatile memory device further comprises a detector circuit for detecting the generating of the error correcting code, and a read section for correcting the data stored in the data area based on the error correcting code upon the detecting of the generation of the error correcting code by the detector circuit, where the code generation command is forwarded by a memory controller when the data are is filled with the data beyond a threshold level | 06-18-2009 |
20120266047 | ERROR CORRECTION SCHEME FOR NON-VOLATILE MEMORY - Error correcting systems, methods, and devices for non-volatile memory are disclosed. In one embodiment, a non-volatile memory device comprises a data area for storing data, an error correcting code generation section for generating an error correcting code in response to receipt of a code generation command, and an error correcting code area for storing the error correcting code. The non-volatile memory device further comprises a detector circuit for detecting the generating of the error correcting code, and a read section for correcting the data stored in the data area based on the error correcting code upon the detecting of the generation of the error correcting code by the detector circuit, where the code generation command is forwarded by a memory controller when the data are is filled with the data beyond a threshold level | 10-18-2012 |
20130268823 | ERROR CORRECTION SCHEME FOR NON-VOLATILE MEMORY - Error correcting systems, methods, and devices for non-volatile memory are disclosed. In one embodiment, a non-volatile memory device comprises a data area for storing data, an error correcting code generation section for generating an error correcting code in response to receipt of a code generation command, and an error correcting code area for storing the error correcting code. The non-volatile memory device further comprises a detector circuit for detecting the generating of the error correcting code, and a read section for correcting the data stored in the data area based on the error correcting code upon the detecting of the generation of the error correcting code by the detector circuit, where the code generation command is forwarded by a memory controller when the data are is filled with the data beyond a threshold level | 10-10-2013 |