Patent application number | Description | Published |
20090008708 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - The characteristics of a semiconductor device including a trench-gate power MISFET are improved. The semiconductor device includes a substrate having an active region where the power MISFET is provided and an outer circumferential region which is located circumferentially outside the active region and where a breakdown resistant structure is provided, a pattern formed of a conductive film provided over the substrate in the outer circumferential region with an insulating film interposed therebetween, another pattern isolated from the pattern, and a gate electrode terminal electrically coupled to the gate electrodes of the power MISFET and provided in a layer over the conductive film. The conductive film of the pattern is electrically coupled to the gate electrode terminal, while the conductive film of another pattern is electrically decoupled from the gate electrode terminal. | 01-08-2009 |
20090179261 | SEMICONDUCTOR DEVICE AND A METHOD OF MANUFACTURING THE SAME - Provided is a manufacturing method of a semiconductor device wherein the generation of voids is prevented in aluminum-based electrodes or the like. The method is suitable for manufacturing a semiconductor device adapted for vehicles, which is required to have a high reliability. However, it is very difficult that power semiconductor devices such as power MOSFETs, in particular, trench gate type power MOS devices are formed without having any void since the thickness of aluminum-based electrodes thereof is as large as about 3500 to 5500 nm (2.5 μm or more). In the present invention, a method is provided wherein at the time of forming an aluminum-based electrode metal film positioned over a wafer and having a thickness of 2.5 μm or more over a highland/lowland-repeated region in a line and space form by sputtering, the temperature of the wafer is set to 400° C. or higher and lower than 500° C. | 07-16-2009 |
20100019314 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE - Generally, a power MOSFET mainly includes an active region occupying most of an internal region (a region where a gate electrode made of polysilicon or the like is integrated), and a surrounding gate contact region (where the gate electrode made of polysilicon or the like is derived outside a source metal covered region to make contact with a gate metal) (see FIG. | 01-28-2010 |
20100171174 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate trench | 07-08-2010 |
20110014761 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME - The characteristics of a semiconductor device including a trench-gate power MISFET are improved. The semiconductor device includes a substrate having an active region where the power MISFET is provided and an outer circumferential region which is located circumferentially outside the active region and where a breakdown resistant structure is provided, a pattern formed of a conductive film provided over the substrate in the outer circumferential region with an insulating film interposed therebetween, another pattern isolated from the pattern, and a gate electrode terminal electrically coupled to the gate electrodes of the power MISFET and provided in a layer over the conductive film. The conductive film of the pattern is electrically coupled to the gate electrode terminal, while the conductive film of another pattern is electrically decoupled from the gate electrode terminal. | 01-20-2011 |
20110068392 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate trench | 03-24-2011 |
20110177663 | SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE - Generally, a power MOSFET mainly includes an active region occupying most of an internal region (a region where a gate electrode made of polysilicon or the like is integrated), and a surrounding gate contact region (where the gate electrode made of polysilicon or the like is derived outside a source metal covered region to make contact with a gate metal) (see FIG. | 07-21-2011 |
20110233665 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate trench | 09-29-2011 |
20130187223 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate trench | 07-25-2013 |
20140145260 | SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME - A gate trench | 05-29-2014 |