Patent application number | Description | Published |
20090095712 | Flattening method and flattening apparatus - A flattening method, by utilizing the advantages of the CARE method and making up for the disadvantages, can perform removal processing of a surface of a workpiece at a sufficient processing rate and can provide a processed surface having enhanced flatness without leaving damage in the processed surface. A flattening method comprises at least two surface removal steps and at least two cleaning steps, the final surface removal step being a catalyst-referred etching step comprising immersing a workpiece in a processing solution containing at least one of hydrohalic acid, hydrogen peroxide water and ozone water, and bringing a surface of a catalyst platen into contact with or close proximity to a surface to be processed of the workpiece to process the surface, said catalyst platen having in a surface a catalyst selected from the group consisting of platinum, gold, a ceramic solid catalyst, a transition metal, glass, and an acidic or basic solid catalyst. | 04-16-2009 |
20100147463 | CATALYST-AIDED CHEMICAL PROCESSING METHOD AND APPARATUS - A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece. | 06-17-2010 |
20120001193 | Polishing method, polishing apparatus and GaN wafer - A polishing method can process and flatten, in a practical processing time and with high surface accuracy, a surface of a substrate of a Ga element-containing compound semiconductor. The polishing method includes: bringing a Ga element-containing compound semiconductor substrate ( | 01-05-2012 |
20120244649 | POLISHING METHOD, POLISHING APPARATUS AND POLISHING TOOL - A polishing method and a polishing apparatus particularly suitable for finishing a surface of a substrate of a compound semiconductor containing an element such as Ga or the like to a desired level of flatness, so that a surface of a substrate of a compound semiconductor containing an element of Ga can be flattened with high surface accuracy within a practical processing time. In the presence of water ( | 09-27-2012 |
20140231011 | FLATTENING METHOD AND FLATTENING APPARATUS - A flattening method, by utilizing the advantages of the CARE method and making up for the disadvantages, can perform removal processing of a surface of a workpiece at a sufficient processing rate and can provide a processed surface having enhanced flatness without leaving damage in the processed surface. A flattening method comprises at least two surface removal steps and at least two cleaning steps, the final surface removal step being a catalyst-referred etching step comprising immersing a workpiece in a processing solution containing at least one of hydrohalic acid, hydrogen peroxide water and ozone water, and bringing a surface of a catalyst platen into contact with or close proximity to a surface to be processed of the workpiece to process the surface, said catalyst platen having in a surface a catalyst selected from the group consisting of platinum, gold, a ceramic solid catalyst, a transition metal, glass, and an acidic or basic solid catalyst. | 08-21-2014 |
20150068680 | POLISHING METHOD, POLISHING APPARATUS AND POLISHING TOOL - A polishing method and a polishing apparatus finish a surface of a substrate of a compound semiconductor containing an element such as Ga or the like to a desired level of flatness, so that the surface can be flattened with high surface accuracy within a practical processing time. In the presence of water, such as weak acid water, water with air dissolved therein, or electrolytic ion water, the surface of the substrate made of a compound semiconductor containing either one of Ga, Al, and In and a surface of a polishing pad having an electrically conductive member in an area of the surface which is held in contact with the substrate) are relatively moved while being held in contact with each other, thereby polishing the surface of the substrate. | 03-12-2015 |
Patent application number | Description | Published |
20090040935 | Evaluation apparatus of hub unit and evaluating method of hub unit - In an evaluation apparatus of a hub unit, a signal processing unit outputs frequency analysis signals which indicate such a result obtained by that an output signal of an acceleration sensor fixed on a hub unit by a magnet is processed via an A/D converting unit and an envelope detecting unit, and thereafter, the processed sensor signal is analyzed for a frequency analysis by an FFT unit. Then, an evaluation output unit evaluates damage conditions of the hub unit based upon signal strengths of specific frequencies, and overall values, which are acquired from the frequency analysis signals, and then, outputs the evaluated damage condition to a display unit. | 02-12-2009 |
20090142013 | Bearing apparatus - A bearing apparatus includes two split outer ring halves disposed in close contact with each other and a plurality of rollers. A circumferential end of each of the split outer ring halves has a concave-and-convex shape including a first slope portion inclined with respect to a line extending along an axial direction of the split outer ring halves and a second slope portion inclined in an opposite direction to that of the first slope portion. Each of the rollers is provided with crowning so as to be shaped in barrel form, and an amount of crowning is set such that an apex of a projecting portion at the concave-and-convex shape of each of the split outer ring halves is located on an axially outer side of a rolling surface of the roller rolling on an inner peripheral surface of each of the split outer ring halves. | 06-04-2009 |
20090148087 | Rolling bearing and rolling bearing assembly - There is provided a rolling bearing including an inner ring having an inner ring raceway surface, an outer ring having an outer ring raceway surface and a shoulder portion formed on one axial side of the outer ring raceway surface, a plurality of rolling elements which roll between the inner ring raceway surface and the outer ring raceway surface, and a cage adapted to hold the plurality of rolling elements at predetermined intervals in a circumferential direction and having a guided surface which confronts the shoulder portion of the outer ring in such a manner as to be brought into sliding contact therewith. The rotation of the cage is guided through sliding contact of the guided surface of the cage with a guiding surface of the shoulder portion of the outer ring. A guiding space which is a radial space between the guiding surface of the shoulder portion of the outer ring and the guided surface of the cage is made to increase as approaching the rolling elements. | 06-11-2009 |
20090154862 | Bearing apparatus - A bearing apparatus includes: two split outer ring halves which are mounted to the housing; a plurality of rolling elements which are provided so as to roll on the two split outer ring halves; and a cage which holds the rolling elements such that the rolling elements are disposed at substantially equal intervals in a circumferential direction of the cage and which is split at a position of the cage to form joint surfaces, an outside diameter of the cage being guided by inner circumferential surfaces of the split outer ring halves. An outside diametrical dimension in a normal direction to the joint surfaces is made larger than an outside diametrical dimension of the cage in a direction parallel to the joint surface, and vicinity of an outside diametrical position of the cage lying in the normal direction is made to be guided by the outer ring halves. | 06-18-2009 |
20090175569 | Bearing apparatus - A bearing apparatus includes: two split outer ring halves which includes outer ring raceway surfaces and are disposed within a supporting hole of the housing, respectively; and a plurality of rollers which are disposed on respective inner surfaces of the both split outer ring halves and supports a shaft. Each of the two split outer ring halves includes an oil hole penetrating the split outer ring half in a radial direction thereof and an oil groove formed on an outer diameter surface of the split outer ring half along a circumferential direction thereof to allow the oiling passage and the oil holes to communicate with each other. Each of the oil holes is disposed at a position located at an angle of within 45° from the joint surface of the split outer ring halves in an opposite direction to a rotating direction of the shaft. | 07-09-2009 |
20130326880 | METHOD OF MANUFACTURING BEARING RING OF ROLLING BEARING - A method of manufacturing a bearing ring of a rolling bearing includes a process of forming a bearing ring material in which a raceway groove is formed, a process of performing form rolling so as to form surface textures in axially opposite end portions of the raceway groove, a heat treatment process, a grinding process, and a super-finishing process. | 12-12-2013 |
20140056547 | ROLLING BEARING - A rolling bearing includes an inner ring, an outer rind and a plurality of rolling elements. Multiple dynamic pressure generating grooves are formed in at least one of an inner ring raceway surface and an outer ring raceway surface so as to be arranged at equal intervals in the circumferential direction. The number of the dynamic pressure generating grooves and the number of the rolling elements are set so as to establish a relationship expressed by A=[{n+(n+1)}/2]·Z, where A is the number of the dynamic pressure generating grooves, Z is the number of the rolling elements, and n is a natural number (1, 2, 3 . . . ) | 02-27-2014 |
20140079348 | ROLLING BEARING - A rolling bearing includes an inner ring, an outer ring, and a plurality of rolling elements. A large number of inside dimples in which a liquid lubricant is retained and a large number of outside dimples in which a solid lubricant is retained are formed in at least one of an inner ring raceway surface and an outer ring raceway surface. The inside dimples are formed in a contact region at which the raceway surface contact the rolling elements or in a section of each non-contact region, the section being close to the contact region. The outside dimples are formed outside a portion in which the inside dimples are formed. | 03-20-2014 |
20140079349 | ROLLING BEARING - A bearing includes an inner ring, an outer ring, and a plurality of rolling elements. In the bearing, each of an inner ring raceway surface and an outer ring raceway surface has a contact area that comes into contact with the rolling elements, and a non-contact area that is formed adjacent to an outer side of an end portion of the contact area and does not come into contact with the rolling elements. A lubricant retaining portion having a recessed portion and a large number of non-uniform projections and depressions is formed at the non-contact area of at least one of the inner ring raceway surface and the outer ring raceway surface. | 03-20-2014 |
20140153853 | BALL BEARING - A ball bearing includes: an outer ring; an inner ring having a ring-shaped member fitted portion that has a step portion that extends generally along a radial direction of the outer ring and an outer peripheral face portion; balls disposed between an inner periphery raceway groove of the outer ring and an outer periphery raceway groove of the inner ring; and a ring-shaped lubricant supply member that is fixed to the ring-shaped member fitted portion while being in contact with the step portion. | 06-05-2014 |
20140341492 | BALL BEARING - A cage holds a plurality of balls such that the balls are arranged at intervals in the circumferential direction. The cage is allowed to be in contact with an outer ring, and a portion of the outer ring, with which the cage is brought into contact, is only an inner periphery raceway groove. The cage is located so as to be apart from an inner ring. | 11-20-2014 |
20150063735 | ROLLING BEARING AND POWER TRANSMISSION DEVICE INCLUDING ROLLING BEARING - A rolling bearing includes an inner ring; an outer ring coaxially disposed around an outer peripheral surface of the inner ring with an annular space between the inner ring and the outer ring; a plurality of rolling elements rollably disposed in the annular space; a cage that retains the rolling elements; and a bubble generating mechanism that generates bubbles in liquid lubricant during bearing rotation, wherein the liquid lubricant flows through the annular space. | 03-05-2015 |