Patent application number | Description | Published |
20100253743 | NOZZLE PLATE MANUFACTURING METHOD, NOZZLE PLATE, DROPLET DISCHARGE HEAD MANUFACTURING METHOD, DROPLET DISCHARGE HEAD, AND PRINTER - A method for manufacturing a nozzle plate includes: forming on a first surface of a silicon substrate a film to be a dry etching mask used to form a depression that becomes a first nozzle portion on a droplet discharge side of the silicon substrate, and dry etching the silicon substrate using the film to form the depression to be the first nozzle portion; sequentially forming a first liquid-resistant protective film having liquid resistance and etching resistance and a liquid repellent layer having liquid repellency over the whole of the first surface of the silicon substrate after removing the film used as the dry etching mask, the whole of the first surface including an inner wall of the depression; bonding a support substrate to the first surface of the silicon substrate, and reducing the silicon substrate to a desired thickness from a second surface side opposite from the support substrate; dry etching the silicon substrate from the second surface side until a bottom of the depression to be the first nozzle portion appears, so as to form a second nozzle portion disposed on a droplet supply side and in communication with the first nozzle portion, and to thereby form a nozzle hole from the first nozzle portion and the second nozzle portion; removing the first liquid-resistant protective film and the liquid repellent layer remaining at the bottom of the depression to be the first nozzle portion, and the liquid repellent layer remaining on an inner wall of the first nozzle portion; forming a second liquid-resistant protective film having liquid resistance over the whole of the second surface of the silicon substrate, the whole of the second surface including an inner wall of the nozzle hole; and detaching the support substrate from the silicon substrate. | 10-07-2010 |
20120181666 | SILICON DEVICE AND SILICON DEVICE MANUFACTURING METHOD - A silicon device has a flat panel shape which is a polygon in a plan view, and at least one corner of the polygon includes two sides adjacent to each other out of plural sides of the polygon and a corner curve portion connected to the two sides so as to connect the two sides. | 07-19-2012 |
20120187084 | SUBSTRATE PROCESSING METHOD - A processing method of a substrate which includes: a first bonding step which bonds a ring-shaped first support member to a first surface of the substrate along the outer periphery of the substrate; a first processing step which processes the substrate; and a first separating step which separates the first support member from the substrate by separation at the bonded position. | 07-26-2012 |
20120223615 | THROUGH HOLE FORMING METHOD, NOZZLE PLATE AND MEMS DEVICE - A through hole forming method includes forming a plurality of small holes in a first substrate surface of a substrate including the first substrate surface and a second substrate surface as a back surface of the first substrate surface, forming a thermally oxidized film by thermally oxidizing partition walls between the adjacent small holes and bottoms of the small holes, and removing the thermally oxidized film. | 09-06-2012 |
20120251783 | BASE SURFACE PROCESSING METHOD AND MEMS DEVICE - A base surface processing method includes forming a protective film on a base surface; thinning a part of a base by grinding a part of the base surface; and etching a ground surface ground by the thinning. | 10-04-2012 |
20120327161 | METHOD OF MAKING HOLE IN SUBSTRATE, SUBSTRATE, NOZZLE PLATE AND INK JET HEAD - A method of making a hole in a substrate having a first surface and a second surface opposing the first surface and on which the hole is formed, includes forming a first depression in which the first depression is formed at the first surface of the substrate; forming a film in which the film is formed at the first depression; forming a second depression in which the second depression is formed at a location opposing the first depression of the second surface; and forming a hole in which the film is removed, the first depression and the second depression communicate with each other and thereby the hole is formed, wherein the second depression includes a plurality of straight lines and arcs in a plan view. | 12-27-2012 |
20130162720 | NOZZLE PLATE MANUFACTURING METHOD, NOZZLE PLATE, DROPLET DISCHARGE HEAD MANUFACTURING METHOD, DROPLET DISCHARGE HEAD, AND PRINTER - A nozzle plate manufacturing method that offers excellent protection against discharge liquid and that enables a nozzle plate having high nozzle-hole accuracy to be manufactured with good yield. The invention also provides a nozzle plate, a droplet discharge head manufacturing method, and a droplet discharge head. | 06-27-2013 |
20150265906 | PORTABLE INFORMATION TERMINAL - A portable information terminal includes: a GPS receiver that receives a satellite signal, an pressure sensor that detects atmospheric pressure, and a control unit that computes a slope at every position within a measurement section based on satellite signal information from the GPS receiver, and atmospheric pressure information that is based on a result of the detection by the pressure sensor. Furthermore, temperature information that is based on a result of detection by the temperature sensor is generated at every position within the measurement section. | 09-24-2015 |
20150268113 | PHYSICAL QUANTITY SENSOR, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS AND MOVING OBJECT - A physical quantity sensor includes a plurality of diaphragm portions which are bent and deformed due to pressure reception, and a plurality of piezoresistive elements which are disposed in the diaphragm portions at different locations from each other and are electrically connected to each other in series. The plurality of piezoresistive elements constitute a bridge circuit. | 09-24-2015 |