Patent application number | Description | Published |
20080297046 | Electrode, electronic device and method for manufacturing the same - Disclosed is an electrode having a transparent electrode layer, an opaque electrode layer formed on the transparent electrode layer and catalyst formed on an open surface on the transparent electrode layer, which open surface is not covered by the opaque electrode layer. | 12-04-2008 |
20090020522 | Micro-heaters and methods for manufacturing the same - Example embodiments provide a micro-heater including, a substrate, at least one heating element unit provided on the substrate, the at least one heating element unit having a configuration to allow two or more heating element units to be repeatedly connected in series, and a support structure between the substrate and the at least one heating element unit to support the at least one heating element unit at a lower part of the at least one heating element unit. Example embodiments also provide a method for manufacturing a micro-heater including forming a sacrificial layer on a substrate and forming a heating element layer on the sacrificial layer, patterning the heating element layer to form at least one heating element unit, wherein the at least one heating element unit has a configuration to allow two or more heating element units to be repeatedly connected in series, etching the sacrificial layer to form a support structure to support the at least one heating element unit at a lower part of the at least one heating element unit. | 01-22-2009 |
20090020760 | Methods for forming materials using micro-heaters and electronic devices including such materials - Nano-sized materials and/or polysilicon are formed using heat generated from a micro-heater, the micro-heater may include a substrate, a heating element unit formed on the substrate, and a support structure formed between the substrate and the heating element unit. Two or more of the heating element units may be connected in series. | 01-22-2009 |
20090139974 | Micro-heaters, micro-heater arrays, methods for manufacturing the same and electronic devices using the same - Example embodiments provide micro-heaters including a heating section, a plurality of connecting sections, and a plurality of support structures. The heating section is on the substrate, separated from the substrate and extended in a longitudinal direction. The plurality of connecting sections are arranged at a distance from each other in the longitudinal direction of the heating section, and extended from two sides of the heating section in a perpendicular direction with respect to the longitudinal direction of the heating section. The plurality of support structures are formed between the substrate and the plurality of connecting sections, so as to support the heating section and the plurality of connecting sections from underneath the plurality of connecting sections. Therefore, since the heating section and the plurality of support structures are separated from each other by the plurality of connecting sections, temperature distribution on the heating section is not influenced by the shape of each one of the plurality of support structures. Consequently, temperature distribution on the heating section may be more uniform and power consumption of the micro-heater may decrease. | 06-04-2009 |
20090233240 | Method of fabricating Triode-Structure field-emission device - Example embodiments provide a method of fabricating a triode-structure field-emission device. A cathode, an insulating layer, and a gate metal layer may be sequentially formed on a substrate. A first resist pattern having a first opening and a second resist pattern having a second opening smaller than the first opening may be formed to be sequentially laminated on the gate metal layer. Then, the gate metal layer and the insulating layer may be etched using the first resist pattern to form a gate electrode and an insulating layer having a first hole and a second hole corresponding to the first opening. A catalyst layer may be formed on the cathode exposed through the first and second holes using the second resist pattern. After the first resist pattern, second resist pattern, and the catalyst layer on the second resist pattern are removed, an emitter may be formed on the catalyst layer in the second hole. | 09-17-2009 |
20090243040 | Micro-heater arrays and pn-junction devices having micro-heater arrays, and methods for fabricating the same - Example embodiments include micro-heater arrays including first and second micro-heaters disposed perpendicular to or parallel with each other on a substrate and methods of fabricating pn junctions between first and second heating portions using the heat generated from the first and second heating portions, respectively, when applying a voltage to the micro-heater array. Accordingly, when forming pn junctions using micro-heaters, a high-quality pn junction may be fabricated on a glass substrate over a large area. | 10-01-2009 |
20090250112 | Solar cell and method for manufacturing the same - Disclosed are a relatively high-efficiency solar cell and a method for fabricating the same using a micro-heater array. The solar cell may include first and second micro-heaters intersecting each other or being parallel to each other on a substrate, and a plurality of In | 10-08-2009 |
20090289049 | Micro-heaters and methods of manufacturing the same - A micro-heater according to example embodiments may include a metal line formed on a substrate. A deforming portion may be integrally formed as part of the metal line. A support may be positioned between the metal line and the substrate. The support may secure the metal line to the substrate while spacing the metal line apart from the substrate. When the metal line is expanded or compressed by the heating or cooling that occurs during the operation of the micro-heater, the deforming portion of the metal line may deform so as to help absorb the resulting tensile stress. As a result, the amount of tensile stress experienced by the metal line may be decreased. Accordingly, the possibility of breakage of the metal line may be reduced or prevented. | 11-26-2009 |
20090304371 | MIcro-heaters, methods for manufacturing the same, and methods for forming patterns using the micro-heaters - Example embodiments relate to micro-heaters, micro-heater arrays, methods for manufacturing the micro-heater, and methods for forming a pattern using the micro-heater. A micro-heater according to example embodiments may include a metal pattern formed on a substrate. A support may be formed beneath the metal pattern, the support securing the metal pattern to the substrate while spacing the metal pattern apart from the substrate. A spacer may be formed on the substrate and adjacent to the metal pattern, a first distance from the substrate to the top surface of the spacer being greater than a second distance from the substrate to the top surface of the metal pattern. The distance between the micro-heater and a target substrate positioned above the metal pattern may be controlled by the spacer, thus allowing the formation of a relatively fine pattern on the target substrate. | 12-10-2009 |
20100187220 | Micro-heaters and methods for manufacturing the same - A micro-heater according to example embodiments may include a substrate, a metal pattern, and a passivation layer. The metal pattern may be spaced apart from the substrate. The passivation layer may be on the metal pattern and made of a solid solution including a material constituting the metal pattern. Alternatively, the passivation layer may be on the substrate and the metal pattern. A method for manufacturing a micro-heater according to example embodiments may include arranging a metal pattern so as to be spaced apart from a substrate. A first passivation layer may be formed on the substrate and the metal pattern. A voltage may be applied to the metal pattern to heat the metal pattern. As a result, a material constituting the metal pattern may diffuse into the first passivation layer to form a second passivation layer. | 07-29-2010 |
20100187662 | Method for forming silicon film, method for forming pn junction and pn junction formed using the same - A method for forming a silicon film may be performed using a microheater including a substrate and a metal pattern spaced apart from the substrate. The silicon film may be formed on the metal pattern by applying a voltage to the metal pattern of the microheater to heat the metal pattern and by exposing the microheater to a source gas containing silicon. The silicon film may be made of polycrystalline silicon. A method for forming a pn junction may be performed using a microheater including a substrate, a conductive layer on the substrate, and a metal pattern spaced apart from the substrate. The pn junction may be formed between the metal pattern and the conductive layer by applying a voltage to the metal pattern of the microheater to heat the metal pattern. The pn junction may be made of polycrystalline silicon. | 07-29-2010 |
20110236834 | Electrode, electronic device and method for manufacturing the same - Example embodiments relate to an electrode having a transparent electrode layer, an opaque electrode layer formed on the transparent electrode layer and catalyst formed on an open surface on the transparent electrode layer, which open surface is not covered by the opaque electrode layer. | 09-29-2011 |
20120103405 | SOLAR CELL - Disclosed are a relatively high-efficiency solar cell and a method for fabricating the same using a micro-heater array. The solar cell may include first and second micro-heaters intersecting each other or being parallel to each other on a substrate, and a plurality of In | 05-03-2012 |
20120108001 | METHOD FOR MANUFACTURING SOLAR CELL - Disclosed are a relatively high-efficiency solar cell and a method for fabricating the same using a micro-heater array. The solar cell may include first and second micro-heaters intersecting each other or being parallel to each other on a substrate, and a plurality of In | 05-03-2012 |
20120205650 | METHODS FOR FORMING MATERIALS USING MICRO-HEATERS AND ELECTRONIC DEVICES INCLUDING SUCH MATERIALS - Nano-sized materials and/or polysilicon are formed using heat generated from a micro-heater, the micro-heater may include a substrate, a heating element unit formed on the substrate, and a support structure formed between the substrate and the heating element unit. Two or more of the heating element units may be connected in series. | 08-16-2012 |