Patent application number | Description | Published |
20080239783 | Semiconductor memory devices having strapping contacts - Semiconductor memory devices having strapping contacts with an increased pitch are provided. The semiconductor memory devices include cell regions and strapping regions between adjacent cell regions in a first direction on a semiconductor substrate. Active patterns extend in the first direction throughout the cell regions and strapping regions and are spaced apart from one another in a second direction intersecting the first direction. First interconnection lines extend in the first direction throughout the cell regions and the strapping regions and are spaced apart from one another in the second direction while overlapping with the active patterns. Second interconnection lines extend in the second direction to intersect the active patterns and the first interconnection lines in the cell regions. The second interconnection lines are spaced apart from one another in the first direction. Memory cells are positioned at intersection portions of the first and second interconnection lines in the cell regions. Strapping contacts are in the strapping regions and configured such that the active patterns contact with the first interconnection lines through the strapping contacts. | 10-02-2008 |
20080280390 | METHOD OF FABRICATING SEMICONDUCTOR MEMORY DEVICE HAVING SELF-ALIGNED ELECTRODE, RELATED DEVICE AND ELECTRONIC SYSTEM HAVING THE SAME - A method of fabricating a semiconductor memory device having a self-aligned electrode is provided. An interlayer insulating layer having a contact hole is formed on a substrate. A phase change pattern partially filling the contact hole is formed. A bit line which includes a bit extension self-aligned to the phase change pattern and crosses over the interlayer insulating layer is formed. The bit extension may extend in the contact hole on the phase change pattern. The bit extension contacts the phase change pattern. | 11-13-2008 |
20100227449 | METHOD OF FORMING MEMORY DEVICE - A variable resistance memory device, and a method of forming the same. The method may include forming a lower electrode on a substrate, stacking a first etch stop layer and a second etch stop layer on the substrate, forming an insulating layer on the second etch stop layer, forming a recessing region to expose the lower electrode by patterning the insulating layer and the first and second etch stop layer, forming a variable resistance material layer in the recess region, and forming an upper electrode on the variable resistance material layer. The first etch stop layer can have an etching selectivity with respect to the second etch stop layer. | 09-09-2010 |
20110207285 | Method Of Forming Pattern Structure And Method Of Fabricating Semiconductor Device Using The Same - A method of forming a pattern structure and a method of fabricating a semiconductor device using the pattern structure, are provided the method of forming the pattern structure includes forming a mask on an underlying layer formed on a lower layer. The underlying layer is etched using the mask as an etching mask, thereby forming patterns on the lower layer. The patterns define at least one opening. A sacrificial layer is formed in the opening and the mask is removed. The sacrificial layer in the opening is partially etched when the mask is removed. | 08-25-2011 |
20120225533 | VARIABLE RESISTANCE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - In a variable resistance memory device and a method of manufacturing the variable resistance memory device, the generation of a seam, or void, is avoided in the device that, if present, may otherwise reduce the reliability of the resulting device. | 09-06-2012 |
20120228574 | VARIABLE RESISTIVE MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME - A variable resistive memory device includes a substrate comprising a cell region and a peripheral region, a word line extending in a first direction formed on the substrate of the cell region, a switching element formed on the word line, a variable resistance layer formed on the word line, and at least one transistor comprising a gate stack, the gate stack formed on the substrate of the peripheral region, wherein the word line comprises a metal layer formed at a same level as the gate stack. | 09-13-2012 |
20130026439 | SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME - Provided are semiconductor devices and methods of fabricating the same. The device may include lower interconnection lines, upper interconnection lines crossing the lower interconnection lines, selection elements disposed at intersections, respectively, of the lower and upper interconnection lines, and memory elements interposed between the selection elements and the upper interconnection lines, respectively. Each of the selection elements may be realized using a semiconductor pattern having a first sidewall, in which a first lower width is smaller than a first upper width, and a second sidewall, in which a second lower width is greater than a second upper width, the first and second sidewalls crossing each other. | 01-31-2013 |
20130143382 | METHOD OF FORMING MEMORY DEVICE - A variable resistance memory device, and a method of forming the same. The method may include forming a lower electrode on a substrate, stacking a first etch stop layer and a second etch stop layer on the substrate, forming an insulating layer on the second etch stop layer, forming a recessing region to expose the lower electrode by patterning the insulating layer and the first and second etch stop layer, forming a variable resistance material layer in the recess region, and forming an upper electrode on the variable resistance material layer. The first etch stop layer can have an etching selectivity with respect to the second etch stop layer. | 06-06-2013 |
20130187119 | Semiconductor Memory Devices Having Strapping Contacts - Semiconductor memory devices having strapping contacts are provided, the devices include cell regions and strapping regions between adjacent cell regions in a first direction. Active patterns, extending in the first direction throughout the cell regions and strapping regions, are spaced apart from one another in a second direction intersecting the first direction. First interconnection lines, extending in the first direction throughout the cell regions and strapping regions, are spaced apart from one another in the second direction while overlapping with the active patterns. Second interconnection lines, extending in the second direction, intersect the active patterns and first interconnection lines in the cell regions. The second interconnection lines are spaced apart from one another in the first direction. Memory cells are positioned at intersection portions of the first and second interconnection lines in the cell regions. The active patterns contact the first interconnection lines through strapping contacts in the strapping regions. | 07-25-2013 |