Patent application number | Description | Published |
20160061101 | ENGINE SYSTEM INCLUDING TURBOCHARGER AND SUPERCHARGER - An engine system, that includes a turbocharger and a supercharger, forms a boost pressure in an intake with the turbocharger, complements an insufficient boost pressure with the supercharger and supplies an exhaust gas from an exhaust line to an intake line. | 03-03-2016 |
20160090950 | INTAKE AIR CONTROL APPARATUS OF ENGINE - An intake air control apparatus of an engine includes a housing having an intake air inflow passage for receiving external air, an exhaust gas inflow passage for receiving recirculated exhaust gas, and an intake air supply passage for supplying the external air from the intake air inflow passage or the exhaust gas from the exhaust gas inflow passage to the engine. A motor gear rotates together with an output shaft of the motor. A connection gear is engaged and rotates together with the motor gear. A recirculation gear is engaged and rotates together with the connection gear. A recirculation valve opens and closes the exhaust gas inflow passage since the recirculation valve rotates together with the recirculation gear. An intake air gear is engaged and rotates together with the connection gear. An intake air throttle valve opens and closes the intake air inflow passage. | 03-31-2016 |
20160090951 | INTAKE AIR CONTROL APPARATUS OF ENGINE - An intake air control apparatus of an engine includes an Intake manifold configured to guide intake air into a plurality of engine cylinders. A plurality of first intake air passages communicate with the cylinders. A plurality of second intake air passages are disposed in parallel with the first intake air passages and communicate with the cylinders. An Intake throttle shaft passes through the first intake air passages. An intake air throttle valve is disposed inside the first intake air passages, rotates with the Intake throttle shaft, and opens/closes the first intake air passage. A swirl throttle shaft passes though the second intake air passages. A swirl throttle valve is disposed inside the second intake air passages, rotates together with the swirl throttle shaft, and opens/closes the second intake air passages. An actuator rotates selectively the Intake throttle shaft and the swirl throttle shaft. A controller controls the actuator. | 03-31-2016 |
Patent application number | Description | Published |
20130145640 | APPARATUS AND METHODS FOR TREATING A SUBSTRATE - A substrate treatment apparatus is provided. The apparatus may include a process chamber configured to have an internal space, a substrate supporting member disposed in the process chamber to support a substrate, a first supplying port configured to supply a supercritical fluid to a region of the internal space located below the substrate, a second supplying port configured to supply a supercritical fluid to other region of the internal space located over the substrate, and an exhaust port configured to exhaust the supercritical fluid from the process chamber to an exterior region. | 06-13-2013 |
20130199051 | MANUFACTURING METHOD AND FLUID SUPPLY SYSTEM FOR TREATING SUBSTRATE - A method of manufacture and fluid supply system for treating a substrate is provided. The fluid supply system for treating a substrate may include a substrate dry part supplying a dry fluid to dry a rinse solution doped on a substrate; a dry fluid separation part retrieving a mixed fluid that the dry fluid and the rinse solution are mixed with each other during a dry process of the substrate from the substrate dry part and separating the dry fluid from the mixed fluid; and a dry fluid supply part resupplying the dry fluid separated from the dry fluid separation part to the substrate dry part. | 08-08-2013 |
20140262024 | SUBSTRATE TREATMENT SYSTEMS USING SUPERCRITICAL FLUID - Substrate treatment systems are provided. The substrate treatment systems may include a treating device configured to treat a substrate with a supercritical fluid, and a supplying device configured to supply the supercritical fluid to the treating device. The treating device may include a supercritical process zone in which the substrate is treated with the supercritical fluid, and a pre-supercritical process zone in which the supercritical fluid is expanded and then provided into the supercritical process zone to create a supercritical state in the supercritical process zone. | 09-18-2014 |
20140291421 | Substrate Treating Apparatus - Provided is a substrate treating apparatus including a housing; a plurality of opening-and-closing members configured to provide a driving force for opening and closing the housing; a fluid storing member supplying a fluid to the opening-and-closing members; and a fluid distribution unit connected to the fluid storing member via a supply conduit to distribute the fluid supplied from the fluid storing member to the opening-and-closing members. The fluid distribution unit includes a distribution conduit diverging from the supply conduit and connected to a corresponding one of the opening-and-closing members; and a fluid distribution member provided at a junction between the supply conduit and the distribution conduit. | 10-02-2014 |
20140360041 | SUBSTRATE TREATING APPARATUS - A substrate treating apparatus includes a fluid supply unit to supply a fluid to a chamber. The substrate is dried in the chamber using the fluid in a supercritical state. The fluid supply unit includes a storing tank to store the fluid and a conversion tank connected to the storing tank through a connection tube and to the chamber through a supply tube. The conversion tank includes a heater to heat the fluid. | 12-11-2014 |
20140373881 | SUBSTRATE TREATING APPARATUS - A substrate treating apparatus including a support member configured to support a substrate container configured to surround an upper portion of the support member, a nozzle member including at least one nozzle, which is configured to spray a treating solution onto the substrate disposed on the support member, and a treating solution supply unit connected to the nozzle and configured to supply the treating solution to the nozzle through a main tube may be provided. | 12-25-2014 |
20150303036 | SUBSTRATE TREATMENT APPARATUS INCLUDING SEALING MEMBER HAVING ATYPICAL SECTION - A substrate treatment apparatus includes a seal on at least one of upper or lower chambers of a process chamber. The seal hermetically closes the substrate treatment region, and may be at a location to prevent a gap from forming between the upper and lower chambers. The lower chamber includes an inner wall and an outer wall defining a groove including the seal. The inner wall has a top surface lower than that of the outer wall. The seal has an atypical cross-sectional shape with a recess facing the substrate treatment region. | 10-22-2015 |